CN203091963U - Inversion accelerating power supply device of electron beam cladding equipment - Google Patents

Inversion accelerating power supply device of electron beam cladding equipment Download PDF

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CN203091963U
CN203091963U CN 201320068490 CN201320068490U CN203091963U CN 203091963 U CN203091963 U CN 203091963U CN 201320068490 CN201320068490 CN 201320068490 CN 201320068490 U CN201320068490 U CN 201320068490U CN 203091963 U CN203091963 U CN 203091963U
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inverter
output
input
voltage
electron beam
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黄小东
韦寿祺
陆思恒
郭华艳
王伟
蒋思远
陆苇
黄海
黄地送
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Guilin Shida Electrical And Mechanical Technology Engineering Co Ltd
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Guilin Shida Electrical And Mechanical Technology Engineering Co Ltd
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Abstract

The utility model discloses an inversion accelerating power supply device of electron beam cladding equipment. According to the inversion accelerating power supply device of the electron beam cladding equipment, a three-phase intermediate-frequency inverter bridge, a intermediate-frequency step-up transformer and a three-phase high-voltage rectifier bridge serve as a basic unit, high-voltage rectifier bridge outputs of a plurality of basic units are connected in series and/or in parallel to form a rectifying device of an accelerating power supply of the electron beam cladding equipment, phase sequences of inverter bridges of the basic units are distributed in a symmetrical mode, the pulsation frequency of the output voltage of the rectifying device of the accelerating power supply is 6n times as large as the inverse frequency (n is the number of the basic units), and a voltage adjusting controlling mode is an intermediate-frequency inversion process and achievement of pulse width modulation (PWM). The working frequency of an inversion power tube is reduced, so that the switching loss is reduced. According to the inversion accelerating power supply device of the electron beam cladding equipment, the voltage adjusting controlling mode including intermediate-frequency inversion and the pulse width modulation is applied, and therefore the inversion accelerating power supply device of the electron beam cladding equipment has the advantages that the switching loss of an inversion switching tube is small, the pulsation frequency of a high-voltage rectifying wave is rather higher than the inverse frequency.

Description

The deposited equipment inversion of electron beam accelerating power source device
Technical field
The utility model relates to the deposited apparatus field of electron beam, is specifically related to the deposited equipment inversion of a kind of electron beam accelerating power source device.
Background technology
Accelerating power source is one of critical component of electron beam process equipment, and the static state of the technical indicator of accelerating power source requires output voltage precision height, and ripple is little, and the dynamic requirements governing speed is fast.According to technical requirement, under the different times technical conditions, adopt different technical tactics, as power frequency auto-transformer machinery Regulation Control mode, power frequency IGCT phase-shift control mode, intermediate frequency generator group Regulation Control mode, different technical tactics, the technical merit that is reached also has nothing in common with each other.
Along with the development of semiconductor devices, accelerating power source adopts inversion pulsewidth modulation (PWM) Regulation Control mode more at present.In order to reduce the ripple quantity of output voltage, adopt the high-frequency inversion mode, as " based on the development of the high-voltage inverted power control system of electron beam welding of DSP " that in October, 2012, " electric welding machine " magazine the 42nd volume the 10th periodical was stepped on, what adopted is exactly the inversion PWM adjusting of 20kHz, the mode of 10 grades of capacitance voltage-multiplyings.This mode, the electric capacity consumption is too many, because the capacity of single high-voltage capacitance is less, and volume is bigger, the cost of whole power supply and volume are all bigger.In addition, this mode needs special high-power high-frequency switch pipe because operating frequency is higher, and the switching loss of inverter power tube is bigger, adopts single H bridge inverter circuit for powerful accelerating power source, and it is bigger that device solves difficulty.Another kind of inverting is to adopt medium frequency inverter, the high-frequency pulsed width modulation voltage regulating mode, as the patent No. is the Chinese utility model patent disclosed " electron-beam welder quickens the control method and the supply unit of high voltage source " of ZL200810302949.1, the characteristics of this mode, the electric capacity consumption is less, adopt general cold rolled silicon steel iron core, can realize that the high-voltage rectifying voltage waveform is the dither ripple, but still exist the power tube operating frequency higher, switching loss is bigger, and transformer medium-high frequency current weight is bigger, can increase iron loss, is unfavorable for that accelerating power source develops to high-power direction.
In the contemporary inversion transformation technique,, two kinds of different research directions are arranged for the harmonic content in the less output AC voltage.A kind of is two level research directions, promptly utilizes the PWM control mode, by improving the method for switching frequency, makes the output voltage waveforms sineization; Another kind of direction is many level research direction, i.e. utilization increase main circuit level number reduces the harmonic wave in the output voltage, and makes the power tube of inverter be operated in the lower frequency state, to reduce switching loss and electromagnetic interference (EMI).Deposited equipment of electron beam and electron-beam welder belong to electron beam process equipment together, accelerating power source has a lot of similarities, but the power of the deposited equipment of electron beam is generally bigger, in the inversion accelerating power source of the deposited equipment of electron beam, the method that can use for reference second kind of research direction of inversion transformation technique reduces reverse frequency, is convenient to realize the high power contravariant accelerating power source.
The utility model content
Technical problem to be solved in the utility model provides the deposited equipment inversion of a kind of electron beam accelerating power source device, it adopts medium frequency inverter and pulsewidth modulation voltage regulating mode, switching loss with inverse switch pipe is little, and the ripple frequency of high-voltage rectifying ripple is far above the characteristics of reverse frequency.
Basic design of the present utility model is to be elementary cell with three-phase medium frequency inverter bridge+intermediate frequency step-up transformer+three-phase high-voltage rectifier bridge, by the output of several elementary cell high-voltage rectifying bridges by series connection and/or compose in parallel the fairing of the deposited equipment accelerating power source of electron beam, the phase sequence of the inverter bridge of several elementary cells is symmetrical distribution, the ripple frequency of the output voltage of accelerating power source fairing is 6n times (n is a number of elementary entitles) of reverse frequency, the Regulation Control mode is held concurrently for the medium frequency inverter process and is realized pulsewidth modulation (PWM), and the operating frequency that reduces inverter power tube can reduce switching loss.Adopt industrial frequency AC input → lower pressure rectifier filtering → medium frequency inverter pulsewidth modulation pressure regulation → intermediate-frequency transformer of holding concurrently to boost → technology path that high-voltage rectifying filtering is exported, it is AC → DC → AC → DC current transformation pattern, go to control the dutycycle of pulsewidth modulation by the negative-feedback signal of output voltage, carry out automatic Regulation, make high accelerating power source output voltage keep stable.
For addressing the above problem, the utility model is realized by following scheme:
The deposited equipment inversion of a kind of electron beam accelerating power source device comprises line filter, input rectifying filter unit, inverter, high-tension transformer, high-voltage rectifying wave filter, electrion choke circuit, high-pressure sampling circuit, electronic beam current sample resistance, high pressure regulator and the inverse changing driving circuit of connection.The input of line filter links to each other with the three-phase mains, and the output of line filter connects the input of inverter through the input rectifying filter unit.The output of inverter connects the first side winding of high-tension transformer, and the secondary side winding of high-tension transformer links to each other with the input of high-voltage rectifying wave filter.The high-pressure side of high-voltage rectifying wave filter links to each other with the negative electrode of electron gun through the electrion choke circuit, and the low-pressure end of high-voltage rectifying wave filter joins with the anode of the earth and electron gun behind the electronic beam current sample resistance.The high-pressure sampling circuit is connected between electrion choke circuit output and the earth.The high-pressure sampling circuit connects the input of high pressure regulator, and the output of high pressure regulator is connected to the input of inverse changing driving circuit.Inverse changing driving circuit and inverter interconnect.
In the such scheme, described inverter comprises that three phase inverter bridge, the high-tension transformer more than 2 or 2 comprises that three-phase transformer, high-voltage rectifying wave filter more than 2 or 2 comprise the rectifier bridge more than 2 or 2.1 three phase inverter bridge, 1 three-phase transformer and 1 rectifier bridge are formed an elementary cell.Each input of organizing the three phase inverter bridge of elementary cell all is connected in the output of input rectifying filter unit.The output of the three phase inverter bridge of every group of elementary cell connects the first side winding of the three-phase transformer of elementary cell on the same group, and the secondary side winding of the three-phase transformer of elementary cell connects the input side of the rectifier bridge of elementary cell on the same group on the same group.Each outlet side of organizing elementary cell is series connection mutually and/or is connected in parallel back output.
In the such scheme,, need carry out parallel connection by paralleing reactor when the outlet side of 2 rectifier bridges is when being connected in parallel.
As improvement, described high pressure regulator is the proportional-integral controller structure.The output of high pressure regulator is connected to the input of inverse changing driving circuit via a signal synthesizer at this moment.Another input of above-mentioned high pressure regulator links to each other with the given signal output part of high pressure of central control unit, and another input of signal synthesizer links to each other with the given signal output part of line of central control unit.
As further improvement, this accelerating power source device also further comprises the inverter power supply voltage detector component.At this moment, 2 measuring junctions of inverter power supply voltage detector component are attempted by on the output of input rectifying filter unit, and inverter power supply voltage detector component output is connected on another input of signal synthesizer.
In the such scheme, described electrion choke circuit is made of inductance and high-voltage diode parallel connection.
In addition, the output of the given signal output part of electronic beam current of the sampled signal output of electronic beam current sample resistance, central control unit and fault distinguishing circuit also is connected to the input of electronic beam current adjuster in the deposited equipment of electron beam respectively.
Compared with prior art, the technical solution of the utility model is after exchanging intermediate link realization medium frequency inverter and pulsewidth modulation pressure regulation, realize transmission, the conversion of magnitude of voltage and the insulation of high pressure of energy by high-tension transformer, many group three-phase high-voltage rectification series connection and/or in parallel, the ripple frequency of total commutating voltage ripple is far above reverse frequency, use just can be satisfied the ripple requirement of accelerating power source output voltage than the high-voltage filtering capacitor of low capacity, and the inverse switch pipe works in intermediate frequency (1000H zIn), switching loss is much smaller than high-frequency inversion and high-frequency pulsed width modulation duty.
Description of drawings
Fig. 1 is the structural representation of a kind of embodiment of the deposited equipment inversion of the utility model electron beam accelerating power source device; Number in the figure is: 1-line filter, 2-input rectifying filter unit, 3-voltage transmitter, the 4-current transducer, 5-inverter, 6-high-tension transformer, 7-high-voltage rectifying wave filter, 8-electrion choke circuit, 9-high-pressure sampling circuit, 10-electronic beam current sample resistance, 11-fault distinguishing circuit, 12-central control unit, 13-high pressure regulator, the 14-signal synthesizer, the 15-inverse changing driving circuit.
Fig. 2 is the basic cell structure schematic diagram.Number in the figure is: the mutually upper left brachium pontis switching power tube of 5-1-U, 5-2-U phase lower-left brachium pontis switching power tube, the mutually upper left brachium pontis fly-wheel diode of 5-3-U, 5-4-U phase lower-left brachium pontis fly-wheel diode, 5-5-U phase brachium pontis buffer circuit, 5-6-V phase bridge arm circuit, 5-7-W phase bridge arm circuit, 5-8-inverter detection module, 6-1-high-tension transformer first side winding, 6-2-high-tension transformer secondary side winding, 7-1-high-voltage rectifying bridge, 7-2-high-voltage filtering capacitor.
Fig. 3 is each switching power tube drive signal waveform figure (dutycycle 50%) of inverter among Fig. 1.
Fig. 4 is the structural representation of the another kind of embodiment of the deposited equipment inversion of the utility model electron beam accelerating power source device.Number in the figure is: 1-line filter, 2-input rectifying filter unit, 3-voltage transmitter, the 4-current transducer, 5-inverter, 6-high-tension transformer, 7-high-voltage rectifying wave filter, 7-3-paralleing reactor, 8-electrion choke circuit, 9-high-pressure sampling circuit, 10-electronic beam current sample resistance, 11-fault distinguishing circuit, the 12-central control unit, the 13-high pressure regulator, 14-signal synthesizer, 15-inverse changing driving circuit.
The specific embodiment
The deposited equipment inversion of the electron beam of present embodiment accelerating power source device, as shown in Figure 1, mainly constitute by line filter 1, input rectifying filter unit 2, voltage transmitter 3, current transducer 4, inverter 5, high-tension transformer 6, high-voltage rectifying wave filter 7, electrion choke circuit 8, high-pressure sampling circuit 9, electronic beam current sample resistance 10, fault distinguishing circuit 11, central control unit 12, high pressure regulator 13, signal synthesizer 14 and inverse changing driving circuit 15.
The input of line filter 1 and three-phase four-wire system electrical network join, and the interchange side of input rectifying filter unit 2 is sent in its output, is used to cut off the electromagnetic interference (EMI) route of transmission.
Input rectifying filter unit 2 is used for three-phase alternating current is transformed into straight uncontrollable positive and negative direct current, and the zero line of positive and negative galvanic mid point and electrical network joins, and the straight positive and negative direct current of its output is sent into the positive-negative input end of inverter 5 each inverter bridge.
Voltage transmitter 3 is that the inverter power supply voltage detector component is used to detect the positive and negative galvanic amplitude of input rectifying filter unit 2 outputs, its output voltage signal U sProportional with the inverter bridge input voltage, its input is attempted by between the input rectifying wave filter 2 output both positive and negative polarities, and output is sent into an input of signal synthesizer 14.
Current transducer 4 is the summation that the inverter power supply current measuring element is used to detect input rectifying filter unit 2 output reversals, its output voltage signal U IsProportional with the inverter operating current.The input of current transducer 4 is serially connected between the input of input rectifying filter unit 2 outputs and inverter 5, and output is sent into the input of fault distinguishing circuit 11.
Inverter 5 is made up of the three phase inverter bridge more than 2 or 2, is used for dc inverter is become medium frequency alternating current, is used for the pulsewidth modulation pressure regulation simultaneously.The medium frequency alternating current after the pulsewidth modulation of each three phase inverter bridge output is sent into the first side winding of corresponding high-tension transformer 6.
High-tension transformer 6 comprises the three-phase transformer more than 2 or 2, and its number is identical with the number of inverter bridge, and the iron core of each transformer adopts the cold rolled silicon steel sheet material, is used to realize the transmission of electric weight, the conversion and the High-Voltage Insulation of magnitude of voltage.The intermediate frequency high-tension electricity of each Circuit Fault on Secondary Transformer winding output is sent into the interchange input side of corresponding rectifier bridge.
High-voltage rectifying wave filter 7 comprises the rectifier bridge more than 2 or 2, and its number also number with inverter bridge is identical.High-voltage rectifying wave filter 7 is transformed into straight high voltage direct current with the high pressure medium frequency alternating current.The output of each rectifier bridge is series connection and/or output in parallel again after high-voltage capacitance filtering, and this output high-pressure side is connected to electrion choke circuit 8, the output low-pressure end behind electronic beam current sample resistance 10 and the anode of the earth and electron gun join.
1 inverter adds 1 high-tension transformer and adds elementary cell of 1 high-voltage rectifying bridge composition.The structure of elementary cell as shown in Figure 2.Each inverter is made up of a three phase inverter bridge and inverter detection module 5-8, and each brachium pontis of three phase inverter bridge is made up of 2 switching power tubes (as the mutually upper left brachium pontis switching power tube of U 5-1 and U lower-left brachium pontis switching power tube 5-2 mutually), 2 fast diodes (as the mutually upper left brachium pontis fly-wheel diode of U 5-3 and U lower-left brachium pontis fly-wheel diode 5-4 mutually) and buffer circuit (as U phase brachium pontis buffer circuit 5-5).Three phase inverter bridge works in the 180o inverting, and inverter detection module 5-8 is used to detect the whether short circuit and whether transshipping of each switching power tube, and its output is connected to an input of fault decision circuitry 11.The first side winding 6-1 of each three-phase transformer is the star connection of band center line, and the zero line of center line and electrical network joins, and each three-phase transformer secondary side winding 6-2 is star or delta connection.Each rectifier bridge 7-1 is made up of 6 high-voltage diodes.
Electrion choke circuit 8 is used to suppress the climbing speed of electrion electric current, slows down the electromagnetic impact intensity of discharge generation, and its output is connected to the negative electrode of electron gun.In the utility model, described electrion choke circuit 8 is made of inductance and high-voltage diode parallel connection.
High-pressure sampling circuit 9 is connected between electrion choke circuit 8 outputs and the earth, is used to measure the accelerating potential value, and output is proportional to the voltage signal U of accelerating potential a, the signal of its output is sent into high pressure regulator 13 simultaneously as negative-feedback signal with send into the foundation that fault distinguishing circuit 11 is used to judge high pressure overvoltage and electrion.
Electronic beam current sample resistance 10 is serially connected with between the low-pressure end and the earth of accelerating power source output loop, is used for detected electrons line value, and this resistance two ends output is proportional to the voltage signal U of electronic beam current size eThe signal of its output is sent into electronic beam current adjuster that fault distinguishing circuit 11 is used to judge the foundation of electron beam overcurrent and sends into the deposited equipment central control unit 12 of electron beam respectively as the electronic beam current negative-feedback signal.
The output signal U that fault distinguishing circuit 11 is accepted from high-pressure sampling circuit 9, electronic beam current sample resistance 10 and current transducer 4 a, U eAnd U Is, fault distinguishing circuit 11 is accepted from inverter detection module 5-8 the accelerating power source running status to be monitored in real time simultaneously, unusual time output fault-signal U occurs ErThe first via is sent into the output that high pressure regulator 13 is used to block high pressure regulator; the second the tunnel sends into the output that inverse changing driving circuit 15 is used to block drive circuit; Third Road is sent into the output that the electronic beam current adjuster is used to block the electronic beam current adjuster; the 4th sends into the deposited equipment central control unit 12 of electron beam, be used to realize accelerating power source multiple protective, with the interlock protection of other parts and fault prompting.Fault distinguishing circuit 11 is used to judge higher limit that whether accelerating potential surmount the higher limit of setting, electronic beam current and whether surmount setting, whether produce the electrion phenomenon and whether inverter 5 arbitrary power switch pipes are unusual, whether the current supply circuit electric current surmounts the higher limit of setting, and the generation of any one event all output signal is U ErBe high level.
Central control unit 12 is born numeral by computer or Programmable Logic Controller (PLC) and is set through digital-to-analogue conversion (DAC) generation high pressure setting signal U a *Send into high pressure regulator 13, be used to produce the setting waveform of accelerating potential, comprise the setting of lifting slope and operating voltage.
High pressure regulator 13 is ratio-integration (PI) controller structure, is used for the precision control of accelerating potential, and guarantees accelerating power source stable operation.During operate as normal, receive the high pressure setting signal U of central control unit 12 outputs a *Feedback signal U with 9 outputs of high-pressure sampling circuit a, it exports U cSend into signal synthesizer 14; When fault distinguishing circuit 11 had signal output, the output of high pressure regulator 13 was blocked.
Signal synthesizer 14 is also accepted the output signal U of voltage transmitter 3 sSet through digital-to-analogue conversion (DAC) generation electronic beam current setting signal U with central control unit 12 numerals e *The output signal U of high pressure regulator 13 c, voltage transmitter 3 output signal U sWith the given signal U of electronic beam current e *Output signal is connected to inverse changing driving circuit 15 after the linear superposition, regulates the dutycycle of pulsewidth modulation output wave.
Inverse changing driving circuit 15 is used for producing the rational driving pulse of inverter 5 each power switch pipe.The drive waveforms of its generation is connected to the control utmost point of each power switch pipe in the inverter 5 respectively after isolating amplification.When fault distinguishing circuit 11 had signal output, the output of inverse changing driving circuit 15 was blocked.
The control method of the deposited equipment inversion of electron beam accelerating power source comprises the stable regulation control of exporting high pressure, and inverter 5 drives control and error protection control.
The control of the stable regulation of described output high pressure: the deposited equipment inversion of electron beam accelerating power source adopts industrial frequency AC input → lower pressure rectifier filtering → medium frequency inverter pulsewidth modulation pressure regulation → intermediate-frequency transformer of holding concurrently to boost → current transformation mode that high-voltage rectifying filtering is exported, promptly by AC → DC → AC → DC current transformation mode, realize the transmission of energy, the conversion and the High-Voltage Insulation of magnitude of voltage by intermediate-frequency transformer, exchanging the input that intermediate link adopts pulse modulation technology adjusting accelerating power source.High pressure regulator 13 is according to the dutycycle of the pulsewidth modulation output wave that high pressure setting signal and feedback signal compare, ratio-integral operation output signal removes to regulate inverter 5, the final stable regulation that realizes the output high pressure.
In addition, the control of the stable regulation of described output high pressure also comprises the dynamic anti-interference adjusting of power network fluctuation and load variations, line voltage sampled signal U sWith the given signal U of electronic beam current e *Output signal U as feed-forward signal and high pressure regulator 13 cComprehensive back output signal goes to regulate the dutycycle of the pulsewidth modulation output wave of inverter 5, suppresses the dynamic fluctuation of the power network fluctuation fluctuation of load causing accelerating power source voltage.
In addition, described inverter 5 drives the phase sequence control that control also comprises each medium frequency inverter bridge, and the inversion phase sequence of each inverter bridge and pulse width modulated wave phase sequence are controlled by same clock CL, and the medium frequency inverter phase sequence is symmetrical distribution between each inverter bridge, as shown in Figure 3.
The error protection control of this control method comprises the following steps: the voltage signal U on the fault distinguishing circuit 11 detected electrons line sample resistances 10 eIf surpass the higher limit of setting and be judged to the electronic beam current over current fault; Fault distinguishing circuit 11 detects the output voltage signal U of high-pressure sampling circuit 9 aIf, surpass the higher limit of setting and be judged to accelerating potential overvoltage fault, if being judged to accelerating power source, the negative kick variation of generation produces the electrion fault; Inverter detection module 5-8 detects the temperature signal of each power switch pipe, and arbitrary power switch pipe temperature surpasses the higher limit of setting and is judged to inverter 5 overload fault; Inverter detection module 5-8 detects the tube voltage drop after being driven of each power switch pipe, and arbitrary detected value surpasses the higher limit of setting and is judged to inverter 5 short troubles; Fault distinguishing circuit 11 detects the output signal of inverter 5 direct current supply current sampling circuits, is judged to the supply current over current fault if surpass the higher limit of setting.Generation fault distinguishing circuit 11 output signal U of above-mentioned arbitrary fault ErAll become high level, and block the output of high pressure regulator 13 and inverse changing driving circuit 15 immediately.If produce the electrion fault, block the output of high pressure regulator 13, inverse changing driving circuit 15 and electronic beam current adjuster, central control unit 12 is with output signal U simultaneously a *And U e *Zero setting automatically terminates blockade behind the 1-3 millisecond, and the realization high pressure is restarted automatically; Surpass set point number at setting-up time section inner high voltage discharge fault frequency and then be judged to " permanent fault ", manually restart high pressure with the same mains supply power supply and the setting signal of cutting off of measure of handling other fault type, pending fault again after getting rid of this moment.
Embodiment to present embodiment describes below: the deposited equipment inversion of electron beam accelerating power source is directly by powering after the rectification of three-phase mains, and inverter 5 becomes medium frequency alternating current to dc inverter, by the intermediate-frequency transformer back rectification output high voltage direct current that boosts; Accelerating power source adopts output voltage negative-feedback control mode, and inverter 5 is realized the pulsewidth modulation pressure regulation simultaneously in the inversion process.The dutycycle of dynamic process pulsewidth modulation also is subjected to line voltage sampled signal U s *With the given signal U of electronic beam current e *Control.Inverter 5 is made up of two three-phase inverter bridge circuits, and the reverse frequency of each inverter bridge is identical, and the frequency of pulsewidth modulation and dutycycle are also identical, and the phase difference of medium frequency inverter waveform is symmetrical distribution between two inverter bridge.Inverter 5 adds a high-tension transformer 6 and adds a high-voltage rectifier 7 and form an inversion power supply elementary cell, the output of two unit through series connection and/the total output in the back that is connected in parallel is as the accelerating power source of electron beam.The iron core of intermediate-frequency transformer can adopt the thick cold-reduced silicon sheet commonly used of 0.2mm~0.35mm to build up like this, whole intermediate-frequency transformer manufacturing process is simple, and the galvanic ripple frequency of high-voltage rectifying output is 12 times of the medium frequency inverter frequency, total rectified wave pulse width modulation duty greater than
Figure BDA00002825150800071
The time (guaranteeing) no zero crossing by the intermediate-frequency transformer design parameter, select for use less high-voltage filtering capacitor value just can filter alternating component, satisfy the ripple factor index request, help improving the control system governing speed on the one hand, energy storage is little on the other hand, the impact that electrion produces is naturally little, helps improving the power-supply system operational reliability.The inverter power tube operating frequency is lower, and switching loss is little.
Present embodiment is being to implement under the prerequisite with technical solutions of the utility model, provided the implementation method of two groups of inverter bridge, the output that is in series behind two groups of high-voltage rectifyings among its Fig. 1, among Fig. 4 behind two groups of high-voltage rectifyings by paralleing reactor 7-3 output in parallel, the remainder function is identical with Fig. 1.But protection of the present utility model is not limited to above-mentioned two groups of inverter bridge embodiment, as long as the inversion accelerating power source of the deposited equipment of electron beam realizes that in interchange intermediate link medium frequency inverter and impulse modulation pressure regulation promptly belong to protection domain of the present utility model.

Claims (6)

1. the deposited equipment inversion of electron beam accelerating power source device is characterized in that: the line filter (1), input rectifying filter unit (2), inverter (5), high-tension transformer (6), high-voltage rectifying wave filter (7), electrion choke circuit (8), high-pressure sampling circuit (9), electronic beam current sample resistance (10), high pressure regulator (13) and the inverse changing driving circuit (15) that comprise connection; The input of line filter (1) links to each other with the three-phase mains, and the output of line filter (1) connects the input of inverter (5) through input rectifying filter unit (2); The output of inverter (5) connects the first side winding of high-tension transformer (6), and the secondary side winding of high-tension transformer (6) links to each other with the input of high-voltage rectifying wave filter (7); The high-pressure side of high-voltage rectifying wave filter (7) links to each other with the negative electrode of electron gun through electrion choke circuit (8), and the low-pressure end of high-voltage rectifying wave filter (7) joins with the anode of the earth and electron gun behind electronic beam current sample resistance (10); High-pressure sampling circuit (9) is connected between electrion choke circuit (8) output and the earth; High-pressure sampling circuit (9) connects the input of high pressure regulator (13), and the output of high pressure regulator (13) is connected to the input of inverse changing driving circuit (15); Inverse changing driving circuit (15) interconnects with inverter (5).
2. the deposited equipment inversion of electron beam according to claim 1 accelerating power source device is characterized in that: described inverter (5) comprises that three phase inverter bridge, the high-tension transformer (6) more than 2 or 2 comprises that three-phase transformer, high-voltage rectifying wave filter (7) more than 2 or 2 comprise the rectifier bridge more than 2 or 2; 1 three phase inverter bridge, 1 three-phase transformer and 1 rectifier bridge are formed an elementary cell; Each input of organizing the three phase inverter bridge of elementary cell all is connected in the output of input rectifying filter unit (2); The output of the three phase inverter bridge of every group of elementary cell connects the first side winding of the three-phase transformer of elementary cell on the same group, and the secondary side winding of the three-phase transformer of elementary cell connects the input side of the rectifier bridge of elementary cell on the same group on the same group; Each outlet side of organizing elementary cell is series connection mutually and/or is connected in parallel back output.
3. the deposited equipment inversion of electron beam according to claim 2 accelerating power source device is characterized in that: when the outlet side of 2 rectifier bridges is when being connected in parallel, need carry out parallel connection by paralleing reactor (16).
4. according to any deposited equipment inversion of described electron beam accelerating power source device in the claim 1~3, it is characterized in that: described high pressure regulator (13) is the proportional-integral controller structure; The output of high pressure regulator this moment (13) is connected to the input of inverse changing driving circuit (15) via a signal synthesizer (14); Another input of above-mentioned high pressure regulator (13) links to each other with the given signal output part of high pressure of central control unit, and another input of signal synthesizer (14) links to each other with the given signal output part of line of central control unit.
5. the deposited equipment inversion of electron beam according to claim 4 accelerating power source device is characterized in that: also further comprise inverter power supply voltage detector component (3); At this moment, 2 measuring junctions of inverter power supply voltage detector component (3) are attempted by on the output of input rectifying filter unit (2), and inverter power supply voltage detector component (3) output is connected on another input of signal synthesizer (14).
6. the deposited equipment inversion of electron beam according to claim 5 accelerating power source device, it is characterized in that: described electrion choke circuit (8) is made of inductance and high-voltage diode parallel connection.
CN 201320068490 2013-02-06 2013-02-06 Inversion accelerating power supply device of electron beam cladding equipment Expired - Fee Related CN203091963U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103084724A (en) * 2013-02-06 2013-05-08 桂林狮达机电技术工程有限公司 Contravariant accelerating power supply device of electron beam depositing equipment and control method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103084724A (en) * 2013-02-06 2013-05-08 桂林狮达机电技术工程有限公司 Contravariant accelerating power supply device of electron beam depositing equipment and control method thereof

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