CN101510732B - Control method for electron beam punching machine acceleration high-voltage power supply and power supply device - Google Patents
Control method for electron beam punching machine acceleration high-voltage power supply and power supply device Download PDFInfo
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- CN101510732B CN101510732B CN2009101139650A CN200910113965A CN101510732B CN 101510732 B CN101510732 B CN 101510732B CN 2009101139650 A CN2009101139650 A CN 2009101139650A CN 200910113965 A CN200910113965 A CN 200910113965A CN 101510732 B CN101510732 B CN 101510732B
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Abstract
The invention discloses a control method of an accelerating high-voltage power for an electron-beam punching machine and a power device thereof. The power is supplied by three-phase commercial electricity and adopts the current conversion mode of AC-DC-AC-DC, wherein, the middle inverter link of DC-AC is high-frequency inversion and the pulse-width modulation voltage regulation function can be realized in the inversion process; a dual closed-loop control mode is adopted to realize the stable regulation of the output high-voltage; an inverter consists of at least two inverter bridges, the phase difference of the output wave of each inverter bridge is distributed symmetrically, and the output wave has the same width. The power device comprises: a power network filter, an input rectifier filter circuit, the inverter, a high-frequency and high-voltage transformer, a high-voltage rectifier filter circuit, a high-voltage discharge choke circuit, a high-voltage sampling circuit, an electronic beam sampling resistor, an inverter input current detection circuit, a dual-loop control unit, an inverter drive circuit, a fault discrimination circuit and the like. The control method and the power device are characterized by the control system with high regulation speed, strong immunity, small accelerating high-voltage power ripple, high efficiency and small size and the like.
Description
Technical field
The present invention relates to electronic beam drilling equipment, be specially control method and supply unit that electron beam punching machine quickens high voltage source.
Background technology
The electron beam that the electronic beam drilling process is based on high-energy-density bombards workpiece, makes its local melting and gasification.The gas capillary that is produced is easy to be penetrated by electron beam, electron beam removes to bombard the material of one deck down again by surface of the work, the material that this volatile gasification will have been melted is discharged around the capillary that forms, thereby processes the precision of tolerance for ± 5% average pore size.(spark machined EDM, electrochemistry processing ECM) compares with other technology, can move freely independently between electronic beam drilling process workpiece and the electron beam, and this makes the punching frequency be higher than other technology far away.Electron beam inertia is very little, not wearing and tearing, and can operate with the same speed of electronic control system.Electron beam can accurately be released in its energy below the metal surface, and this makes electron beam become the desirable means of metal material punching.And electron beam punching machine is a kind of high-tech product that combines multiple technologies such as physical vacuum, electronic technology, electron optics, high voltage technique, computer and control technology.
Electron beam punching machine quickens the critical component that high voltage source is a decision electron beam punching machine service behaviour, and acceleration high voltage source ripple is more little, response speed is high more, and the electron beam punching machine performance is high more.The acceleration high voltage source of electron beam punching machine has the intermediate frequency generator of employing group supply power mode at present, and employing AC → DC → DC → AC → DC current transformation mode is also arranged, and control mode adopts single closed-loop control.The shortcoming that exists is that control system inertia is big, and governing speed is slower.
Summary of the invention
Technical problem to be solved by this invention provides control method and the supply unit that a kind of electron beam punching machine quickens high voltage source, has characteristics such as the control system governing speed is fast, antijamming capability strong, output acceleration high voltage source ripple is little, efficient is higher, volume is little.
Basic design of the present invention is that electron beam punching machine quickens the two closed loop controlling structures of high voltage source employing, and interior ring is an electric current loop, and outer shroud is a Voltage loop.Quicken high voltage source and powered by the three-phase mains, adopt AC → DC → AC → DC current transformation mode, middle DC → AC high-frequency inversion link is regulated inverter output voltage in the mode of pulse-width modulation.
To achieve these goals, the designed electron beam punching machine of the present invention quickens the control method of high voltage source, described power supply adopts industrial frequency AC input → lower pressure rectifier filtering → high-frequency inversion and pulse-width modulation pressure regulation → high-frequency isolation transformer to boost → the current transformation mode of high-voltage rectifying filtering, carries out pulse-width modulation adjusting inverter output voltage in high-frequency inversion.Voltage loop with the high-pressure sampling signal as negative-feedback signal, electric current loop with the input current of inverter sampled signal as negative-feedback signal, after connecting, the adjuster tandem of the adjuster of Voltage loop and electric current loop goes to control the pulsewidth of inversion waveform, carry out automatic Regulation, make electron beam punching machine quicken the high voltage source output voltage values and keep stable.
In such scheme, quickening the concrete grammar that high voltage source output voltage automatic stabilisation regulates is that given signal of high pressure and high-pressure sampling signal that the given signal generator of high pressure produces are relatively obtained the high voltage difference signal, and the high voltage difference signal is sent into high pressure regulator and carried out the given signal of output inverter input current after ratio-integral operation; Given signal of input current of inverter and input current of inverter sampled signal relatively obtain the input current of inverter deviation signal, the input current of inverter deviation signal is sent into current regulator and is carried out output one control signal after ratio-integral operation, sends into the duty ratio that the inverter driving circuit unit removes to regulate the inverter output voltage ripple with the control signal of current regulator output.
Described inverter is made of two inverter bridge at least.This programme also comprises the control of high-frequency inversion waveform, and it is wide that its concrete grammar pulse-width modulation (PWM) ripple that to be the inverter driving circuit unit produce according to the control signal of current regulator output is controlled the rectangular voltage ripple of each inverter bridge output; The inverter driving circuit unit also generates the rational drive pulse signal of each power switch pipe in the inverter, and the phase place of controlling the rectangular voltage ripple of each inverter bridge output is symmetrical distribution.The drive signal of the last half-bridge power tube of every brachium pontis is a square wave, the drive signal of following half-bridge power tube be anti-phase back of the square wave driving signal of last half-bridge power tube and inversion pulse-width modulation (PWM) ripple carry out " with " waveform that obtains of logical operation.
The control method that electron beam punching machine of the present invention quickens high voltage source also includes error protection control; promptly each switching power tube working state signal of the high-pressure sampling signal in the accelerating power source control procedure, electronic beam current sampled signal, input current of inverter sampled signal and inverter is carried out fault distinguishing; above-mentioned arbitrary fault produces; block the output of high pressure regulator and current regulator immediately; block the driving pulse of inverter simultaneously, and realize quickening the multiple protective and the chain control of complete machine logic of high voltage source by the electron beam punching machine Master Control Unit.
The electron beam punching machine designed according to said method quickens high-voltage power apparatus, comprises line filter, input rectifying filter circuit unit, inverter, high frequency high voltage transformer, high-voltage rectifying filter circuit unit, electrion choke circuit unit, high-pressure sampling circuit unit, electronic beam current sample resistance, input current of inverter testing circuit unit, inverter driving circuit unit and two closed-loop controls unit; The input and the three phase network of line filter join, and the interchange input side of rectifier bridge in the input rectifying filter circuit unit is sent in its output; The straight uncontrollable direct current of input rectifying filter circuit unit output is sent into the direct-flow input end of each inverter bridge of inverter; Inverter comprises at least two inverter bridge compositions, and the adjustable high frequency square wave ac of pulsewidth of each inverter bridge output is sent into the elementary winding of the high frequency high voltage transformer identical with the inverter bridge number of phases; The high-frequency high-voltage of each high frequency high voltage transformer secondary winding output is sent into the interchange input side of the high-voltage rectifying filter circuit unit mesohigh rectifier bridge identical with the high frequency high voltage transformer number of phases; A plurality of high-voltage rectifying bridge outputs serial or parallel connection output again after high-voltage capacitance filtering, the high-pressure side of high-voltage rectifying filter circuit unit output is connected to electrion choke circuit unit, low-pressure end joins through electronic beam current sample resistance and the earth, and the anode of electron gun also joins with the earth; The output of electrion choke circuit unit is connected to the negative electrode of electron gun; The high-pressure sampling circuit unit is connected between electrion choke circuit unit output and the earth, and the high-pressure sampling signal of output is sent into two closed-loop control unit; Input current of inverter testing circuit unit detects inverter direct current input current value in real time, and its output signal is sent into two closed-loop control unit as the input current of inverter sampled signal; Two closed-loop controls unit produces the input that control signal is sent into the inverter driving circuit unit; The drive waveforms that the inverter driving circuit unit produces is through isolating the control utmost point that is connected to each power switch pipe in the inverter after amplifying respectively, and the collector electrode of each power switch pipe has signal back inverter driving circuit unit to be used for the pilot switch plumber to make situation.
In the such scheme, described pair of closed-loop control unit comprises the given signal generator of high pressure, Voltage loop comparator, high pressure regulator, electric current loop comparator and current regulator; The output of the given signal generator of high pressure is set after digital-to-analogue conversion produces or produced by analog circuit by computer or Programmable Logic Controller numeral, and the output signal of the given signal generator of high pressure is sent into the Voltage loop comparator as the given signal of high pressure; The Voltage loop comparator receives the high-pressure sampling signal of high-pressure sampling circuit unit output simultaneously, and the high voltage difference signal that the given signal of high pressure and high-pressure sampling signal relatively obtain is sent into high pressure regulator; High pressure regulator is the proportional-integral controller structure, the high voltage difference signal that receives is carried out ratio-integral operation after the given signal of output inverter input current to the electric current loop comparator; The electric current loop comparator receives the input current of inverter sampled signal of input current of inverter testing circuit unit output simultaneously, the given signal of input current of inverter and input current of inverter sampled signal is relatively obtained the input current of inverter deviation signal send into current regulator; Current regulator is the proportional-integral controller structure, and the input current of inverter deviation signal that receives is carried out outputing control signals to the duty ratio that the inverter driving circuit unit removes to regulate the inverter output voltage ripple after ratio-integral operation.
Described inverter (3) is made of A, two H types of B inverter bridge, and the rectangular voltage ripple that inverter driving circuit unit (15) control A, the output of B two inverter bridge according to the pulse width modulated wave of the control signal generation of current regulator (14) output is wide; The rational drive pulse signal of each power switch pipe in the output inverter (3) is gone back in inverter driving circuit unit (14), 90 ° of the phase phasic differences of the rectangular voltage ripple of control A, the output of B two inverter bridge, and waveform is symmetrical distribution.
In the such scheme, described electron beam punching machine quickens high-voltage power apparatus and also includes the fault distinguishing circuit unit, this fault distinguishing circuit unit is accepted the signal from high-pressure sampling circuit unit, electron beam sample resistance, input current of inverter testing circuit unit and inverter driving circuit unit, the high voltage source running status is monitored in real time, it is effective that fault distinguishing circuit unit output signal appears when unusual in above-mentioned arbitrary signal, this output signal is divided four tunnel outputs, and one the tunnel sends into the output that high pressure regulator is used to block voltage regulator; One the tunnel sends into the output that current regulator is used to block current regulator; One the tunnel sends into the inverter driving circuit unit is used to block the inverter driving pulse; Multiple protective and the chain control of complete machine logic that the electron beam punching machine Master Control Unit is used to quicken high voltage source is sent on last road.
Described inverter is made up of two inverter bridge at least, and each bridge arm circuit respectively comprises two switching power tubes, two fly-wheel diodes and a buffer circuit in the inverter bridge; After connecting with following brachium pontis switching power tube, each switching power tube and a fly-wheel diode inverse parallel, last brachium pontis switching power tube be connected to the output of input rectifying filter circuit unit in parallel with the brachium pontis buffer circuit.
Electron beam punching machine main power source of the present invention, promptly electron beam quickens high voltage source directly by powering after the rectification of three-phase mains, and inverter becomes high-frequency alternating current to dc inverter, rectification output high voltage direct current after boosting by high frequency high voltage transformer; Accelerating power source adopts double circle controling mode, and inverter is realized the high-frequency pulsed width modulation pressure regulation simultaneously in the inversion process.The iron core of contravariant transformer adopts the high-frequency iron core material to make, and compares with power frequency or intermediate frequency transformer, and the sectional area of high frequency transformer is little, and umber of turn is few, and volume and power consumption are all little.The ripple frequency of the total rectifier output voltage ripple of high pressure is 2n times (n equals the inverter bridge number) of high-frequency inversion frequency, and the total commutating voltage ripple of high pressure has not had zero crossing in pulse width modulation duty greater than (being guaranteed by the high frequency high voltage transformer design parameter) at 50% o'clock.The ripple frequency height of the total commutating voltage ripple of high pressure like this, and the pulsation amplitude is low, selects for use less high-voltage filtering capacitor value just can filter alternating component, satisfies the ripple coefficient index request.It is little that the little one side of high-voltage filtering capacitor value is quickened the high-voltage power supply control system inertia time constant, help improving the governing speed of control system, it is little to quicken the high voltage source energy storage on the other hand, the electromagnetic impact that electrion produces is naturally little, helps improving acceleration high voltage power supply reliability of operation.The accelerating power source of two closed-loop controls is than single closed-loop control, and current inner loop plays more timely anti-interference to the fluctuation of line voltage, in the maximum of dynamic process current inner loop restriction input current of inverter, plays protective effect automatically fast.
Maximum characteristics of the present invention are to adopt heterogeneous high-frequency inversion and high-frequency pulsed width modulation voltage regulating mode, and accelerating voltage adopts the technical scheme of two closed-loop controls, and electron beam punching machine high pressure accelerating power source control system governing speed is fast, antijamming capability is strong; High pressure accelerating power source output voltage ripple coefficient is little, the efficient height; The volume of high-tension transformer is little.
Description of drawings
Fig. 1 quickens high-voltage power apparatus embodiment 1 structural representation for electron beam punching machine of the present invention;
Number in the figure is: 1, line filter; 2, input rectifying filter circuit unit; 3, inverter; 4, high frequency high voltage transformer; 5, high-voltage rectifying filter circuit unit; 6, electrion choke circuit unit; 7, high-pressure sampling circuit unit; 8, electronic beam current sample resistance; 9, the given signal generator of high pressure; 10, Voltage loop comparator; 11, high pressure regulator; 12, input current of inverter testing circuit unit; 13, electric current loop comparator; 14, current regulator; 15, inverter driving circuit unit; 16, fault distinguishing circuit unit.
Fig. 2 is an inverter structure schematic diagram among Fig. 1;
Number in the figure is: 3-1, A organize upper left brachium pontis switching power tube; 3-2, A group lower-left brachium pontis switching power tube; 3-3, A organize upper left brachium pontis fly-wheel diode; 3-4, A group lower-left brachium pontis fly-wheel diode; 3-5, A organize left brachium pontis buffer circuit; The elementary winding of 3-6, A group high frequency high voltage transformer; 3-7, A organize right bridge arm circuit; 3-8, B group inverter bridge circuit.
Fig. 3 is each switching power tube drive signal waveform figure of inverter among Fig. 2;
Fig. 4 is the structural representation of the another kind of embodiment of electron beam punching machine acceleration high-voltage power apparatus of the present invention, and the implication of number in the figure is identical with Fig. 1.
Embodiment
Electron beam punching machine of the present invention quickens the control method of high voltage source, its power supply is powered by the three-phase mains, adopt AC → DC → AC → DC current transformation mode, promptly power supply adopt industrial frequency AC input → lower pressure rectifier filtering → high-frequency inversion and pulse-width modulation pressure regulation → high frequency transformer boost → the current transformation mode of high-voltage rectifying filtering exports.It is middle that DC → AC inversion link is a high-frequency inversion, realizes the high-frequency pulsed width modulation voltage regulation function simultaneously in the inversion process; Realize the transmission of electric energy, the conversion and the High-Voltage Insulation of magnitude of voltage by high frequency high voltage transformer; Quickening high voltage source adopts double circle controling mode to realize the stable regulation of output high pressure.
The outer shroud of above-mentioned double circle controling mode is a Voltage loop, and interior ring is an electric current loop.Be about to given signal of high pressure and high-pressure sampling signal and relatively obtain the high voltage difference signal, the high voltage difference signal is sent into high pressure regulator and is carried out the given signal of output inverter input current after ratio-integral operation; Given signal of input current of inverter and input current of inverter sampled signal relatively obtain the input current of inverter deviation signal, the input current of inverter deviation signal is sent into current regulator and is carried out output one control signal after ratio-integral operation, the duty ratio of removing to regulate the inverter output voltage waveform with the control signal of current regulator output.
The present invention also includes inverter inversion Waveform Control, described inverter is made of A, two H types of B inverter bridge, and the rectangular voltage ripple that A, the output of B two inverter bridge are controlled according to pulse-width modulation (PWM) ripple of the control signal generation of current regulator output in the inverter driving circuit unit is wide; The inverter driving circuit unit is the rational drive pulse signal of each power switch pipe in the output inverter also, and 90 ° of the phase phasic differences of the rectangular voltage ripple of control A, the output of B two inverter bridge realize that the voltage waveform of two inverter bridge output is symmetrical distribution.The drive signal of the last half-bridge power tube of every brachium pontis is a square wave in the inverter, the drive signal of following half-bridge power tube be anti-phase back of the square wave driving signal of last half-bridge power tube and inversion pulse-width modulation (PWM) ripple carry out " with " waveform that obtains of logical operation.
In order to protect to quickening high voltage source; the present invention also includes error protection control; promptly to quickening the high-pressure sampling signal in the high voltage source running; the electronic beam current sampled signal; the inverter bridge brachium pontis that input current of inverter sampled signal and inverter driving circuit unit produce switching power tube shoot through signal up and down carries out fault distinguishing; above-mentioned arbitrary fault produces; output signal is blocked the driving pulse of inverter immediately; block the output of high pressure regulator and current regulator simultaneously, and realize quickening the multiple protective and the chain control of complete machine logic of high voltage source by the electron beam punching machine Master Control Unit.
The electron beam punching machine designed according to above-mentioned control method quickens high-voltage power apparatus such as Fig. 1 or shown in Figure 4.This power supply is mainly by line filter 1, input rectifying filter circuit unit 2, inverter 3, high frequency high voltage transformer 4, high-voltage rectifying filter circuit unit 5, electrion choke circuit unit 6, high-pressure sampling circuit unit 7, electronic beam current sample resistance 8, the given signal generator 9 of high pressure, Voltage loop comparator 10, high pressure regulator 11, input current of inverter testing circuit unit 12, electric current loop comparator 13, current regulator 14, inverter driving circuit unit 15 and fault distinguishing circuit unit 16 constitute.
Line filter 1 is used to cut off the route of transmission of electromagnetic interference (EMI).The electrical network of the input of line filter 1 and three-phase 380V joins, and the interchange input side of rectifier bridge in the input rectifying filter circuit unit 2 is sent in its output.
Input rectifying filter circuit unit 2 is used for three-phase alternating current is transformed into straight uncontrollable direct current.The straight direct current of input rectifying filter circuit unit 2 outputs is sent into the direct-flow input end of 3 liang of inverter bridge of inverter.
High frequency high voltage transformer 4 is used to realize the transmission of electric energy, the conversion and the High-Voltage Insulation of magnitude of voltage.High frequency high voltage transformer 4 comprises two single-phase transformers, and the iron core of transformer adopts the high frequency permeability magnetic material to make, and the high-frequency high-voltage of each transformer secondary output output is sent into the interchange input side of one group of single-phase high voltage rectifier bridge in the high-voltage rectifying filter circuit unit 5.
High-voltage rectifying filter circuit unit 5 is transformed into straight high voltage direct current with the high-frequency and high-voltage alternating current.Two high-voltage rectifying bridge output total outputs of series connection again after high-voltage capacitance filtering in the high-voltage rectifying filter circuit unit 5, or press as shown in Figure 4 two high-voltage rectifying bridge output total outputs in parallel again after high-voltage capacitance filtering.Total output high-pressure side is connected to electrion choke circuit unit 6, and low-pressure end joins through electronic beam current sample resistance 8 and the earth, and the anode of electron gun also joins with the earth.
The output of electrion choke circuit unit 6 is connected to the negative electrode of electron gun, is used to suppress the climbing speed of electrion electric current, slows down the electromagnetic impact intensity that electrion produces.
High-pressure sampling circuit unit 7 is used to measure the accelerating voltage value, the high-pressure sampling signal U of output
aBe proportional to the magnitude of voltage that quickens high voltage source output.High-pressure sampling circuit unit 7 is connected between electrion choke circuit unit 6 outputs and the earth, the high-pressure sampling signal U of output
aOne the tunnel sends into the negative feedback input of Voltage loop comparator 10 as the negative-feedback signal of outer voltage regulating system, and the foundation that fault distinguishing circuit unit 16 is used to judge high pressure overvoltage and electron gun electrion is sent on another road.
Electronic beam current sample resistance 8 is used for the Measurement of Electron Beam flow valuve, output I
bBe proportional to the size of electronic beam current.Electronic beam current sample resistance 8 is serially connected with between the low-pressure end and the earth of high-voltage rectifying filter circuit unit 5 output loops, the electronic beam current sampled signal I of output
bOne the tunnel sends into the foundation that fault distinguishing circuit unit 16 is used to judge the electronic beam current overcurrent, and the electronic beam current regulating system is sent into as the electronic beam current negative-feedback signal in another road.
The given signal generator 9 of high pressure is used to produce the setting waveform of accelerating voltage, comprises the setting of lifting slope and operating voltage.The output signal U of the given signal generator 9 of high pressure
a *Set after digital-to-analogue conversion (DAC) produces or produced U by analog circuit by computer or Programmable Logic Controller (PLC) numeral
a *Send into the given input of Voltage loop comparator 10 as the given signal of high pressure of outer voltage regulating system.
The given signal U of high pressure that Voltage loop comparator 10 is accepted from the given signal generator 9 of high pressure
a *High-pressure sampling signal U with high-pressure sampling circuit unit 7
a, and both are compared output high voltage difference signal delta U after the computing
a, i.e. Δ U
a=U
a *-U
a, send into high pressure regulator 11.
Input current of inverter testing circuit unit 12 is used to measure inverter 3 direct current input current value, and its output is proportional to the inversion input current signal I of inverter 3 direct current input current value
dSignal I
dOne the tunnel sends into the negative feedback input of electric current loop comparator 13 as the negative-feedback signal of current inner loop regulating system, and the foundation that fault distinguishing circuit unit 16 is used to judge inverter 3 input current overcurrents is sent on another road.
The output signal I that electric current loop comparator 13 is accepted from high pressure regulator 11
d *Input current of inverter sampled signal I with input current of inverter testing circuit unit 12
d, and both are compared output inverter input current deviation signal Δ I after the computing
d, i.e. Δ I
d=I
d *-I
d, send into current regulator 14.
The control signal U that inverter driving circuit unit 15 is accepted from current regulator 14
c, produce drive signal waveform as shown in Figure 3.Drive signal waveform is connected to the control utmost point of each corresponding power switch pipe in the inverter 3 respectively after isolating amplification, the collector electrode of each power switch pipe has signal back inverter driving circuit unit 15 to be used for the pilot switch plumber to make situation, arbitrary switching tube working condition occurs unusual, and inverter driving circuit unit 15 will be exported a signal and send into fault distinguishing circuit unit 16.Inverter driving circuit unit 15 is used for producing the rational driving pulse of inverter 3 each power switch pipe, and detects the operating state of each pipe in real time.
The signal that fault distinguishing circuit unit 16 is accepted from high-pressure sampling circuit unit 7, electronic beam current sample resistance 8, input current of inverter testing circuit unit 12 and inverter driving circuit unit 15, the high voltage source running status is monitored in real time, fault distinguishing circuit unit 16 output signal U when unusual occurred
ErBecome effectively.This output signal U
ErDivide four tunnel outputs, U
ErThe first via send into the output that high pressure regulator 11 is used to block high pressure regulator 11, U
ErThe second the tunnel send into the output that current regulator 14 is used to block current regulator 14, U
ErThird Road send into the output that inverter driving circuit unit 15 is used to block inverter 3 driving pulses, U
ErThe four the tunnel send into multiple protective and the chain control of complete machine logic that electron beam punching machine master control device is used to realize quickening high voltage source.
The concrete course of work of above-mentioned fault distinguishing circuit unit 16 is: the electronic beam current signal I on the fault distinguishing circuit unit 16 detected electrons line sample resistances 8
bIf surpass the higher limit of setting and be judged to the electronic beam current over current fault; Fault distinguishing circuit unit 16 detects the output signal U of high-pressure sampling circuit unit 7
aIf surpass the higher limit of setting and be judged to accelerating voltage overvoltage fault; Fault distinguishing circuit unit 16 detects the output signal U of high-pressure sampling circuit unit 7
aIf produce negative kick variation and be judged to electron gun generation electrion fault; Fault distinguishing circuit unit 16 detects the output signal I of input current of inverter testing circuit unit 12
dIf surpass the higher limit of setting and be judged to inverter 3 input current over current faults; Inverter driving circuit unit 15 detects the tube voltage drop after 1～2 microsecond of being driven of inverters 3 each power switch pipe, and arbitrary detected value surpasses the higher limit inverter driving circuit unit of setting 15 and sends a signal U to fault distinguishing circuit unit 16
q, fault distinguishing circuit unit 16 detects inverter driving circuit unit 15 feedback signal U
qBe judged to inverter 3 short troubles.Generation fault distinguishing circuit unit 16 output signal U of above-mentioned arbitrary fault
ErAll become effectively, and the output of blocking high pressure regulator 11, current regulator 14 and inverter driving circuit unit 15 driving pulses immediately.U
ErIn the time of effectively, electron beam punching machine master control device utilizes signal U
ErRealize quickening the multiple protective and the chain control of complete machine logic of high voltage source.
Present embodiment electron beam punching machine main power source (electron beam acceleration high voltage source) is directly by powering after the rectification of three-phase mains, and inverter 3 becomes high-frequency alternating current to dc inverter, by the high frequency high voltage transformer 4 back rectification output high voltage direct current that boosts; Accelerating power source adopts double circle controling mode, and inverter 3 is realized the high-frequency pulsed width modulation pressure regulation simultaneously in the inversion process.Inverter 3 is made up of two H type bridge inverter main circuits, and the high-frequency inversion frequency of each inverter bridge is identical, and the duty ratio of high-frequency pulsed width modulation ripple is also identical, and the phase difference of two inverter bridge output voltage waveforms is 90 °, and output voltage waveforms is symmetrical distribution.One group of inverter bridge adds a high frequency high voltage transformer and adds the inversion power supply unit group that a high-voltage rectifying bridge is formed high voltage source, and the output of two unit groups is through total accelerating power source of exporting as electron beam behind the serial or parallel connection.The iron core of contravariant transformer adopts the high-frequency iron core material to make, and compares with power frequency or intermediate frequency transformer, and the sectional area of high frequency transformer is little, and umber of turn is few, and volume and power consumption are all little.The galvanic ripple frequency of high-voltage rectifying output is 4 times (100kHz) of high-frequency inversion frequency (25kHz), and total rectified wave has not had zero crossing in pulse width modulation duty greater than (being guaranteed by the high frequency high voltage transformer design parameter) at 50% o'clock.The ripple frequency height of the total rectified wave of high pressure like this, and the pulsation amplitude is low, selects for use less high-voltage filtering capacitor value just can filter alternating component, satisfies the ripple coefficient index request.It is little that the little one side of high-voltage filtering capacitor value is quickened the high-voltage power supply control system inertia time constant, help improving the governing speed of control system, it is little to quicken the high voltage source energy storage on the other hand, the electromagnetic impact that electrion produces is naturally little, helps improving acceleration high voltage power supply reliability of operation.The accelerating power source of two closed-loop controls is than single closed-loop control, and current inner loop plays more timely anti-interference to the fluctuation of line voltage, and the maximum at dynamic process current inner loop restriction inverter 3 input currents plays protective effect automatically fast.
The foregoing description is to implement under the prerequisite with the technical solution of the present invention, has provided the implementation method of two inverter bridge.But protection of the present invention is not limited to above-mentioned two inverter bridge embodiment; as long as electron beam punching machine quickens high-voltage power apparatus and adopts heterogeneous high-frequency inversion and high-frequency pulsed width modulation voltage regulating mode, accelerating voltage adopts the technical scheme of two closed-loop controls promptly to belong within protection scope of the present invention.
Claims (6)
1. electron beam punching machine quickens the control method of high voltage source, it is characterized in that: described power supply adopt industrial frequency AC input → lower pressure rectifier filtering → high-frequency inversion and pulse-width modulation pressure regulation → high frequency transformer boost → the current transformation mode of high-voltage rectifying filtering exports, adopt double circle controling mode to realize the adjusting of output high pressure automatic stabilisation, the outer shroud of wherein said double circle controling mode is a Voltage loop, and interior ring is an electric current loop; Given signal of high pressure and high-pressure sampling signal are relatively obtained the high voltage difference signal, and the high voltage difference signal is sent into high pressure regulator and is carried out the given signal of output inverter input current after ratio-integral operation; Given signal of input current of inverter and input current of inverter sampled signal relatively obtain the input current of inverter deviation signal, the input current of inverter deviation signal is sent into current regulator and is carried out output one control signal after ratio-integral operation, sends into the duty ratio that the inverter driving circuit unit removes to regulate the inverter output voltage ripple with the control signal of current regulator output.
2. electron beam punching machine according to claim 1 quickens the control method of high voltage source, it is characterized in that: also comprise the control of high-frequency inversion waveform, the rectangular voltage ripple that each inverter bridge output is controlled according to the pulse width modulated wave of the control signal generation of current regulator output in the inverter driving circuit unit is wide; The inverter driving circuit unit also generates the drive pulse signal of each power switch pipe in the inverter, controls the inversion phase sequence of each inverter bridge, realizes that the phase place of the voltage waveform of each inverter bridge output is symmetrical distribution.
3. electron beam punching machine according to claim 1 quickens the control method of high voltage source; it is characterized in that: also comprise error protection control; promptly to quickening the high-pressure sampling signal in the high voltage source running; the electronic beam current sampled signal; the inverter bridge brachium pontis that input current of inverter sampled signal and inverter driving circuit unit produce switching power tube shoot through signal up and down carries out fault distinguishing; above-mentioned arbitrary fault produces; output signal is blocked the driving pulse of inverter immediately; the output of high pressure regulator and current regulator, and pass through multiple protective and the chain control of complete machine logic that the electron beam punching machine Master Control Unit realizes quickening high voltage source.
4. electron beam punching machine quickens high-voltage power apparatus, it is characterized in that: comprise line filter (1), input rectifying filter circuit unit (2), inverter (3), high frequency high voltage transformer (4), high-voltage rectifying filter circuit unit (5), electrion choke circuit unit (6), high-pressure sampling circuit unit (7), electronic beam current sample resistance (8), input current of inverter testing circuit unit (12), inverter driving circuit unit (15) and two closed-loop control unit; The input and the three phase network of line filter (1) join, and the interchange input side of rectifier bridge in the input rectifying filter circuit unit (2) is sent in its output; The straight uncontrollable direct current of input rectifying filter circuit unit (2) output is sent into the direct-flow input end of each inverter bridge of inverter (3); Inverter (3) comprises at least 2 inverter bridge compositions, and the adjustable high frequency square wave ac of pulsewidth of each inverter bridge output is sent into the elementary winding of the high frequency high voltage transformer (4) identical with the inverter bridge number of phases; The high-frequency high-voltage of each high frequency high voltage transformer (4) secondary winding output is sent into the interchange input side of high-voltage rectifying filter circuit unit (5) the mesohigh rectifier bridge identical with high frequency high voltage transformer (4) number of phases; A plurality of high-voltage rectifying bridge outputs serial or parallel connection output again after high-voltage capacitance filtering, the high-pressure side of high-voltage rectifying filter circuit unit (5) output is connected to electrion choke circuit unit (6), low-pressure end joins through electronic beam current sample resistance (8) and the earth, and the anode of electron gun also joins with the earth; The output of electrion choke circuit unit (6) is connected to the negative electrode of electron gun; High-pressure sampling circuit unit (7) is connected between electrion choke circuit unit (6) output and the earth, the two closed-loop control unit of the high-pressure sampling signal of output input; Input current of inverter testing circuit unit (12) detects inverter (3) direct current input current value in real time, and its output signal is imported two closed-loop control unit as the input current of inverter sampled signal; Two closed-loop controls unit produces the input that control signal is sent into inverter driving circuit unit (15); The drive waveforms that inverter driving circuit unit (15) produces is through isolating the control utmost point that is connected to each power switch pipe in the inverter after amplifying respectively, and the collector electrode of each power switch pipe has signal back inverter driving circuit unit (15) to be used for the pilot switch plumber to make situation; Wherein said pair of closed-loop control unit comprises the given signal generator of high pressure (9), Voltage loop comparator (10), high pressure regulator (11), electric current loop comparator (13) and current regulator (14); The output signal of the given signal generator of high pressure (9) is set after digital-to-analogue conversion produces or produced by analog circuit by computer or Programmable Logic Controller numeral, and the output signal of the given signal generator of high pressure (9) is sent into Voltage loop comparator (10) as the given signal of high pressure; Voltage loop comparator (10) receives the high-pressure sampling signal of high-pressure sampling circuit unit (7) output simultaneously, and the high voltage difference signal that the given signal of high pressure and high-pressure sampling signal relatively obtain is sent into high pressure regulator (11); High pressure regulator (11) is the proportional-integral controller structure, and the high voltage difference signal that receives is carried out the given signal of output inverter input current after ratio-integral operation, and the given signal of input current of inverter is sent into electric current loop comparator (13); Electric current loop comparator (13) receives the input current of inverter sampled signal of input current of inverter testing circuit unit (12) output simultaneously, given signal of input current of inverter and input current of inverter sampled signal are relatively obtained the input current of inverter deviation signal, and the input current of inverter deviation signal is sent into current regulator (14); Current regulator (14) is the proportional-integral controller structure, and the input current of inverter deviation signal that receives is carried out outputing control signals to after ratio-integral operation the duty ratio that the input of inverter driving circuit unit (15) removes to regulate inverter (3) output voltage ripple.
5. electron beam punching machine according to claim 4 quickens high-voltage power apparatus, it is characterized in that: described inverter (3) is made of A, two H types of B inverter bridge, and the rectangular voltage ripple that inverter driving circuit unit (15) control A, the output of B two inverter bridge according to the pulse width modulated wave of the control signal generation of current regulator (14) output is wide; Inverter driving circuit unit (14) also generates the drive pulse signal of each power switch pipe in the inverter (3), and 90 ° of the phase phasic differences of the rectangular voltage ripple of control A, the output of B two inverter bridge realize that the voltage waveform of two inverter bridge output is symmetrical distribution.
6. electron beam punching machine according to claim 4 quickens high-voltage power apparatus, it is characterized in that: the described fault distinguishing circuit unit (16) that also comprises, this fault distinguishing circuit unit (16) is accepted from high-pressure sampling circuit unit (7), electron beam sample resistance (8), the signal of input current of inverter testing circuit unit (12) and inverter driving circuit unit (15), the high voltage source running status is monitored in real time, it is effective that fault distinguishing circuit unit (16) output signal appears when unusual in above-mentioned arbitrary signal, this output signal is divided four tunnel outputs, and one the tunnel sends into the output that high pressure regulator (11) is used to block high pressure regulator (11); One the tunnel sends into the output that current regulator (14) is used to block current regulator (14); One the tunnel sends into inverter driving circuit unit (15) is used to block the inverter driving pulse; Multiple protective and the chain control of complete machine logic that the electron beam punching machine Master Control Unit is used to quicken high voltage source is sent on last road.
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| CN2009101139650A CN101510732B (en) | 2009-04-03 | 2009-04-03 | Control method for electron beam punching machine acceleration high-voltage power supply and power supply device |
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| CN2009101139650A CN101510732B (en) | 2009-04-03 | 2009-04-03 | Control method for electron beam punching machine acceleration high-voltage power supply and power supply device |
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| CN103235626B (en) * | 2013-02-06 | 2014-12-31 | 桂林狮达机电技术工程有限公司 | Accelerator power supply device of rapid prototyping manufacturing equipment for electron beams and control method of accelerator power supply device |
| CN103448096B (en) * | 2013-08-27 | 2015-06-17 | 北京科电微波电子有限公司 | High-voltage electron beam ventilation leather micropore processing system |
| CN104852609A (en) * | 2015-05-18 | 2015-08-19 | 苏州市申浦电源设备厂 | Industrial resistance furnace temperature control power adjustment device |
| CN108512406B (en) * | 2018-03-07 | 2020-07-07 | 中国船舶重工集团公司第七二三研究所 | Anti-sparking protection circuit of traveling wave tube high-voltage power supply |
| CN113258808B (en) * | 2021-05-07 | 2022-12-20 | 三峡大学 | High power density vehicle AC power supply |
| CN114157166B (en) * | 2021-12-06 | 2023-06-09 | 成都信息工程大学 | Circuit for improving field intensity of diffraction optical waveguide exposure electron beam |
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Address after: No. 5-1 Pioneer Industrial Park, Kungming West Road, Guilin City, Guangxi Zhuang Autonomous Region, 541004 Patentee after: Guilin Shida Technology Co., Ltd. Address before: No. 5-1 Pioneer Industrial Park, Kungming West Road, Guilin City, Guangxi Zhuang Autonomous Region, 541004 Patentee before: Guilin Shida Electrical and Mechanical Technology Engineering Co., Ltd. |