CN203084151U - Power turnoff technology-based ping-pong testing machine - Google Patents
Power turnoff technology-based ping-pong testing machine Download PDFInfo
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- CN203084151U CN203084151U CN 201320049688 CN201320049688U CN203084151U CN 203084151 U CN203084151 U CN 203084151U CN 201320049688 CN201320049688 CN 201320049688 CN 201320049688 U CN201320049688 U CN 201320049688U CN 203084151 U CN203084151 U CN 203084151U
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- measuring head
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Abstract
Disclosed in the utility model is a power turnoff technology-based ping-pong testing machine that comprises a plurality of testing heads as well as power source control modules electrically connected with the testing heads. The advantages of the ping-pong testing machine are as follows: a defect that the testing efficiency and the accuracy are influenced by the operation of cutting of lots of signals during the alternating testing switching process of the existing testing machine based on the ping-pong test principle; and the testing efficiency is fast and the accuracy is high.
Description
Technical field
The utility model relates to a kind of testing apparatus that is used for wafer and other finished products, and specifically a kind of table tennis test machine based on the power remove technology belongs to the semiconductor testing apparatus field.
Background technology
Test machine is a kind of specialized equipment that is used for wafer and other finished product tests (hereinafter to be referred as product to be measured), can realize the measurement of various electrical quantitys, and it has a plurality of interfaces that are connected with probe station.Probe station is mainly finished probe and product to be measured reliably contacts, the fixedly step pitch of product to be measured moves, and probe station and functions such as the signal of test machine is connected.Measuring head is a kind of test conversion device on the test machine, can give different test cells with the signal allocation of test machine, to improve the efficient of test.
Traditional test machine has only a measuring head, cooperates with probe station when testing, can only be to single product test to be measured, and the each displacement of product promptly to be measured also contacts with probe and can only test a chip, and testing efficiency is lower.
In order to improve testing efficiency, a kind of test machine based on the table tennis test philosophy has appearred, two measuring heads are equipped with as the DTS-1000 of JUNOTester company,, can connect two probe stations and realize the table tennis test, as shown in Figure 1.Test machine 100 comprises first measuring head 110 and second measuring head 120, connects first probe station 210 and second probe station 220 respectively.Behind the product to be measured of first measuring head, 110 tests, first probe station, 210 carryings, obtain test result; The products displacement to be measured of 210 pairs of second probe stations and with process that probe contact in, another product to be measured of second measuring head, 120 tests, second probe station, 220 carryings, and obtain test result, thereby raising testing efficiency.
Above-mentionedly merely be: after first measuring head is finished test based on the defective of the test machine of table tennis test philosophy, for fear of the work zone of second measuring head being come signal disturb and error, need all to cut off signal from first measuring head, this need consume certain hour on the one hand, cause testing efficiency to descend, also be prone to the signal cut error on the other hand, influence test accuracy.
The utility model content
In order to address the above problem, the utility model has designed a kind of table tennis test machine based on the power remove technology, this test machine has overcome that existing test machine based on the table tennis test philosophy need to cut off a large amount of signals in the alternately testing handoff procedure and the defective that influences testing efficiency and accuracy, and testing efficiency fast and the accuracy height.
The technical solution of the utility model is:
A kind of table tennis test machine based on the power remove technology comprises a plurality of measuring heads, and the energy supply control module that is electrically connected with described measuring head.
Preferably, described a plurality of measuring head is two.
After a measuring head is finished test therein, product to be measured displacement and with process that probe contacts in, the energy supply control module that is electrically connected with this measuring head is under the control of main frame, turn-off the power supply of this measuring head, thereby cut off all signals, and begin new test by another measuring head, this has significantly improved the efficient that test signal is switched on the one hand, also improved the accuracy that signal switches, thereby the efficient and the accuracy of test machine test are provided.
Advantage of the present utility model is: this test machine has overcome that existing test machine based on the table tennis test philosophy need to cut off a large amount of signals in the alternately testing handoff procedure and the defective that influences testing efficiency and accuracy, and testing efficiency fast and the accuracy height.
The utility model is described in further detail below in conjunction with drawings and Examples.
Description of drawings
Fig. 1 is based on the structural representation of test machine of table tennis test philosophy in the prior art;
Fig. 2 is the structural representation of the utility model based on the table tennis test machine of power remove technology.
Embodiment
Below preferred embodiment of the present utility model is described, should be appreciated that preferred embodiment described herein only is used for description and interpretation the utility model, and be not used in qualification the utility model.
Embodiment 1
As shown in Figure 2, a kind of table tennis test machine 100 based on the power remove technology with two measuring heads comprises first measuring head 110 and second measuring head 120, connects first probe station 210 and second probe station 220 respectively; Wherein, first measuring head 110 and second measuring head 120 also are electrically connected with first energy supply control module 310, second source control module 320 respectively.
Behind the product to be measured of first measuring head, 110 tests, first probe station, 210 carryings, obtain test result, and by first energy supply control module, 310 power cutoffs; The products displacement to be measured of 210 pairs of first probe stations and with process that probe contacts in, another product to be measured of second measuring head, 120 tests, second probe station, 220 carryings, and obtain test result, and by second source control module 320 power cutoffs, again by first measuring head, 110 another products to be measured of test.
It should be noted that at last: the above only is preferred embodiment of the present utility model, be not limited to the utility model, although the utility model is had been described in detail with reference to previous embodiment, for a person skilled in the art, it still can be made amendment to the technical scheme that aforementioned each embodiment put down in writing, and perhaps part technical characterictic wherein is equal to replacement.All within spirit of the present utility model and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (2)
1. table tennis test machine based on the power remove technology, it is characterized in that: described test machine comprises a plurality of measuring heads, and the energy supply control module that is electrically connected with described measuring head.
2. test machine according to claim 1 is characterized in that: described a plurality of measuring heads are two.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320049688 CN203084151U (en) | 2013-01-30 | 2013-01-30 | Power turnoff technology-based ping-pong testing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320049688 CN203084151U (en) | 2013-01-30 | 2013-01-30 | Power turnoff technology-based ping-pong testing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203084151U true CN203084151U (en) | 2013-07-24 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320049688 Expired - Fee Related CN203084151U (en) | 2013-01-30 | 2013-01-30 | Power turnoff technology-based ping-pong testing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203084151U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109727882A (en) * | 2018-10-24 | 2019-05-07 | 深圳赛意法微电子有限公司 | The concurrent testing equipment of semiconductor power device |
| CN113569521A (en) * | 2021-09-26 | 2021-10-29 | 芯原微电子(南京)有限公司 | Connection relation determining method and device, electronic equipment and readable storage medium |
-
2013
- 2013-01-30 CN CN 201320049688 patent/CN203084151U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109727882A (en) * | 2018-10-24 | 2019-05-07 | 深圳赛意法微电子有限公司 | The concurrent testing equipment of semiconductor power device |
| CN113569521A (en) * | 2021-09-26 | 2021-10-29 | 芯原微电子(南京)有限公司 | Connection relation determining method and device, electronic equipment and readable storage medium |
| CN113569521B (en) * | 2021-09-26 | 2021-12-28 | 芯原微电子(南京)有限公司 | Connection relation determining method and device, electronic equipment and readable storage medium |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130724 Termination date: 20150130 |
|
| EXPY | Termination of patent right or utility model |