CN203076164U - Multi-functional rotary table of spin coater for semiconductor - Google Patents
Multi-functional rotary table of spin coater for semiconductor Download PDFInfo
- Publication number
- CN203076164U CN203076164U CN 201220738863 CN201220738863U CN203076164U CN 203076164 U CN203076164 U CN 203076164U CN 201220738863 CN201220738863 CN 201220738863 CN 201220738863 U CN201220738863 U CN 201220738863U CN 203076164 U CN203076164 U CN 203076164U
- Authority
- CN
- China
- Prior art keywords
- turning handle
- spin coating
- groove
- rotary table
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 41
- 238000004528 spin coating Methods 0.000 claims description 28
- 230000000740 bleeding effect Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 abstract description 10
- 239000003292 glue Substances 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000000274 adsorptive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
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Abstract
The utility model provides a multi-functional rotary table of a spin coater for a semiconductor. The multi-functional rotary table comprises a turning handle and a disk surface, wherein the turning handle and the disk surface are fixedly connected into one body, an air-exhausting round hole is formed at the center position of the turning handle, a groove is formed in the upper surface of the rotary table, multiple air-suction grooves are formed in the groove, and at least one air-suction groove intersects with the other air-suction grooves through the center of the turning handle. According to the multi-functional rotary table, a semiconductor substrate is tightly attached to the rotary table without air leakage, the phenomenon that since the center position of the semiconductor substrate is not arranged at the rotating center when the semiconductor substrate rotates, the semiconductor substrate is thrown out and broken can be avoided, and the safety of instruments and operating personnel is ensured; the multi-functional rotary table has small size and long service life, is convenient to pick and place the substrate and hardly causes glue stacking.
Description
Technical field
The utility model patent relates to a kind of multifunction rotary disc, especially is the multifunction rotary disc of a kind of semiconductor with the spin coating instrument.
Background technology
In the semiconductor fabrication process, sometimes need dopant or mask material evenly are coated on the surface of semiconductor chip, generally be that semiconductor chip directly is positioned on the common rotating disk at present, rotating disk is provided with groove and bleeds, to allow semiconductor chip be adsorbed on the rotating disk.But the shortcoming of making is like this: substrate center and center of turntable do not overlap, and smash thereby cause in the rotation process semiconductor chip to be thrown out of; Other raceway groove of bleeding is too many, and card is leaked gas easily, causes the tight semiconductor chip of suction; In addition, semiconductor chip picks and places inconvenience on spin coating instrument rotating disk, the semiconductor chip of easily crumbing; And can cause heap glue.Therefore be badly in need of a kind ofly substrate is firmly adsorbed and picking and placeing substrate spin coating instrument rotating disk easily.
The utility model content
The technical problems to be solved in the utility model is to provide a kind of multifunction rotary disc that makes substrate firmly be adsorbed on the semiconductor usefulness spin coating instrument on the spin coating instrument rotating disk.
For overcoming the above problems, the utility model has adopted following technical approach:
A kind of semiconductor multifunction rotary disc of spin coating instrument, comprise turning handle and card, described turning handle is fixedlyed connected with card and is integral, described turning handle center is provided with the circular hole of bleeding, described disk upper surface is provided with groove, described groove is provided with the air-breathing groove of multiple tracks, and have at least one crossing by turning handle center and all the other air-breathing grooves.
Described air-breathing groove has 10 ~ 30 roads, is respectively circle, ellipse or strip.
An opening is respectively arranged to the card edge in the position, four angles in rectangular recess district, A/F is 0.5-1.5cm, helps binder removal, also helps picking and placeing simultaneously semiconductor chip.
Turning handle and card axis overlap, and adopt interference to connect, to guarantee the stable rotation synchronously of turning handle and card.
Have on the turning handle two about in axisymmetric U type groove, be located by connecting by screw and spin coating instrument motor shaft, realize the stable rotation of rotating disk.
Compared with prior art, the beneficial effects of the utility model are: the gyroscope that the utility model provides can firmly be adsorbed in semiconductor chip on the rotating disk with multifunction rotary disc, air tight, rotating semiconductor chip can not break into pieces owing to its center is not thrown out of at pivot, improve operating efficiency, and guaranteed instrument and staff's safety; And respectively there is an opening to card edge to be convenient to pick and place substrate in the position, four angles of groove, helps binder removal simultaneously.
Description of drawings
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail:
The semiconductor that Fig. 1 provides for the utility model front view of the multifunction rotary disc of spin coating instrument.
Fig. 2 is the cutaway view that semiconductor shown in Figure 1 is used the multifunction rotary disc of spin coating instrument.
The specific embodiment
As shown in Figure 1 and Figure 2, a kind of semiconductor multifunction rotary disc of spin coating instrument, comprise turning handle 1, card 2, described turning handle 1 and card 2 are connected and fixed by interference and link together, the axis of the axis of turning handle 1 and card 2 coincides, described turning handle 1 center is provided with the circular hole 22 of bleeding, upper surface at rotating disk is provided with rectangular recess 25, in the described groove, the air-breathing groove 21 of the concentric ellipse of 10 ~ 30 roads and card is arranged, and be provided with by ellipse air-breathing groove 21 centers and the air-breathing groove 24 of strip that intersects with the air-breathing groove of ellipse 21; In addition, an opening 23 is respectively arranged to the card edge in the position, four angles of rectangular recess 25, A/F helps binder removal between 0.5cm-1.5cm, also helps picking and placeing simultaneously semiconductor chip.
Have two U type grooves about the axis symmetry in turning handle 1 side, spin coating instrument motor shaft is located by connecting by screw and U type groove, can realize the stable rotation of rotating disk.
When external aspiration pump was worked, substrate was adsorbed on the groove 25, the driven by motor rotating disk rotation of spin coating instrument, thus spin coating liquid evenly is coated on the semiconductor chip.Can choose suitable adsorptive pressure 5000-50000Pa(0.05-0.5Ba according to the requirement of semiconductor chip and spin coating liquid).
Semiconductor that the utility model provides can be realized the surface-coated of the semiconductor chip of circle, rectangle and other shapes and size with the multifunction rotary disc of spin coating instrument.
The course of work is as follows:
The indoor rotating disk that this interference is connected in cleaning, pack in the machine shaft of spin coating instrument, semiconductor chip is placed in the rectangular recess 25 on card 2 surfaces, start the switch of bleeding, open rotary switch, adjust rotary speed, semiconductor chip is attracted on the rectangular recess 25, drips spin coating liquid on semiconductor chip, high speed rotation along with rotating disk, spin coating liquid is coated on the semiconductor chip uniformly, and unnecessary spin coating liquid throws away from 4 openings 23 on the card 2, avoids piling up.
Claims (8)
1. a semiconductor is with the multifunction rotary disc of spin coating instrument, comprise turning handle and card, described turning handle is fixedlyed connected with card and is integral, it is characterized in that: described turning handle center is provided with the circular hole of bleeding, described disk upper surface is provided with groove, described groove is provided with the air-breathing groove of multiple tracks, and have at least one crossing by turning handle center and all the other air-breathing grooves.
2. a kind of semiconductor according to claim 1 multifunction rotary disc of spin coating instrument, it is characterized in that: respectively there is an opening position, four angles of described groove to the card edge.
3. a kind of semiconductor according to claim 2 multifunction rotary disc of spin coating instrument, it is characterized in that: A/F is 0.5-1.5cm.
4. a kind of semiconductor according to claim 1 multifunction rotary disc of spin coating instrument is characterized in that: turning handle adopts interference to be connected with card.
5. a kind of semiconductor according to claim 1 is characterized in that: turning handle and the coincidence of card axis with the multifunction rotary disc of spin coating instrument.
6. a kind of semiconductor according to claim 1 multifunction rotary disc of spin coating instrument, it is characterized in that: described air-breathing groove has 10 ~ 30 roads.
7. a kind of semiconductor according to claim 6 multifunction rotary disc of spin coating instrument is characterized in that: described air-breathing groove is ellipse, circle or strip.
8. a kind of semiconductor according to claim 1 is characterized in that with the multifunction rotary disc of spin coating instrument: have on the described turning handle two about in axisymmetric U type groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220738863 CN203076164U (en) | 2012-12-27 | 2012-12-27 | Multi-functional rotary table of spin coater for semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220738863 CN203076164U (en) | 2012-12-27 | 2012-12-27 | Multi-functional rotary table of spin coater for semiconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203076164U true CN203076164U (en) | 2013-07-24 |
Family
ID=48822047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220738863 Expired - Lifetime CN203076164U (en) | 2012-12-27 | 2012-12-27 | Multi-functional rotary table of spin coater for semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203076164U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104259048A (en) * | 2014-08-13 | 2015-01-07 | 汕尾市栢林电子封装材料有限公司 | Method for coating soldering flux and coating device of soldering flux |
| CN106111465A (en) * | 2016-07-29 | 2016-11-16 | 芜湖市振华戎科智能科技有限公司 | A kind of CD-enciphering production line spin coating device |
| CN110052370A (en) * | 2019-05-15 | 2019-07-26 | 苏州美图半导体技术有限公司 | Sol evenning machine vacuum spin coating device |
-
2012
- 2012-12-27 CN CN 201220738863 patent/CN203076164U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104259048A (en) * | 2014-08-13 | 2015-01-07 | 汕尾市栢林电子封装材料有限公司 | Method for coating soldering flux and coating device of soldering flux |
| CN106111465A (en) * | 2016-07-29 | 2016-11-16 | 芜湖市振华戎科智能科技有限公司 | A kind of CD-enciphering production line spin coating device |
| CN106111465B (en) * | 2016-07-29 | 2018-10-23 | 芜湖市振华戎科智能科技有限公司 | A kind of encrypted disc production line spin coating device |
| CN110052370A (en) * | 2019-05-15 | 2019-07-26 | 苏州美图半导体技术有限公司 | Sol evenning machine vacuum spin coating device |
| CN110052370B (en) * | 2019-05-15 | 2024-04-02 | 苏州美图半导体技术有限公司 | Vacuum glue homogenizing device of glue homogenizing machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130724 |
|
| CX01 | Expiry of patent term |