CN203055911U - Array substrate and X-ray flat plate detector - Google Patents
Array substrate and X-ray flat plate detector Download PDFInfo
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- CN203055911U CN203055911U CN 201320044606 CN201320044606U CN203055911U CN 203055911 U CN203055911 U CN 203055911U CN 201320044606 CN201320044606 CN 201320044606 CN 201320044606 U CN201320044606 U CN 201320044606U CN 203055911 U CN203055911 U CN 203055911U
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- base palte
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- 239000000758 substrate Substances 0.000 title claims abstract description 40
- 239000004020 conductor Substances 0.000 claims abstract description 48
- 239000004065 semiconductor Substances 0.000 claims abstract description 41
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 38
- 238000002161 passivation Methods 0.000 claims description 25
- 238000009413 insulation Methods 0.000 claims description 23
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 19
- 229910052733 gallium Inorganic materials 0.000 claims description 19
- 229910052738 indium Inorganic materials 0.000 claims description 19
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 19
- 239000011787 zinc oxide Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 8
- 230000004888 barrier function Effects 0.000 claims description 3
- 239000010409 thin film Substances 0.000 abstract description 24
- 238000005516 engineering process Methods 0.000 abstract description 23
- 239000010408 film Substances 0.000 description 37
- 239000000203 mixture Substances 0.000 description 20
- 238000000151 deposition Methods 0.000 description 15
- 230000008021 deposition Effects 0.000 description 15
- 229910021417 amorphous silicon Inorganic materials 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 239000002800 charge carrier Substances 0.000 description 11
- 230000000694 effects Effects 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 7
- 230000002950 deficient Effects 0.000 description 5
- 239000003595 mist Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- -1 N2 or SiH2Cl4 Chemical compound 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 238000002207 thermal evaporation Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
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- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201320044606 CN203055911U (en) | 2013-01-25 | 2013-01-25 | Array substrate and X-ray flat plate detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201320044606 CN203055911U (en) | 2013-01-25 | 2013-01-25 | Array substrate and X-ray flat plate detector |
Publications (1)
Publication Number | Publication Date |
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CN203055911U true CN203055911U (en) | 2013-07-10 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN 201320044606 Expired - Lifetime CN203055911U (en) | 2013-01-25 | 2013-01-25 | Array substrate and X-ray flat plate detector |
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CN (1) | CN203055911U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103137641A (en) * | 2013-01-25 | 2013-06-05 | 北京京东方光电科技有限公司 | Array substrate and manufacturing method thereof and X ray flat plate detector |
CN110660816A (en) * | 2018-06-29 | 2020-01-07 | 京东方科技集团股份有限公司 | a flat panel detector |
CN114520239A (en) * | 2020-11-20 | 2022-05-20 | 京东方科技集团股份有限公司 | X-ray flat panel detector, manufacturing method thereof, detection device and imaging system |
-
2013
- 2013-01-25 CN CN 201320044606 patent/CN203055911U/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103137641A (en) * | 2013-01-25 | 2013-06-05 | 北京京东方光电科技有限公司 | Array substrate and manufacturing method thereof and X ray flat plate detector |
CN110660816A (en) * | 2018-06-29 | 2020-01-07 | 京东方科技集团股份有限公司 | a flat panel detector |
US11404469B2 (en) | 2018-06-29 | 2022-08-02 | Beijing Boe Optoelectronics Technology Co., Ltd. | Flat panel detector and manufacturing method thereof |
CN114520239A (en) * | 2020-11-20 | 2022-05-20 | 京东方科技集团股份有限公司 | X-ray flat panel detector, manufacturing method thereof, detection device and imaging system |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150709 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150709 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20150709 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE TECHNOLOGY GROUP Co.,Ltd. Patentee after: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 100176 Beijing city Daxing District economic and Technological Development Zone of Beijing Road No. 8 Patentee before: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |
|
CX01 | Expiry of patent term |
Granted publication date: 20130710 |
|
CX01 | Expiry of patent term |