CN203044417U - Probe card cleaning device - Google Patents
Probe card cleaning device Download PDFInfo
- Publication number
- CN203044417U CN203044417U CN 201220610658 CN201220610658U CN203044417U CN 203044417 U CN203044417 U CN 203044417U CN 201220610658 CN201220610658 CN 201220610658 CN 201220610658 U CN201220610658 U CN 201220610658U CN 203044417 U CN203044417 U CN 203044417U
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- China
- Prior art keywords
- probe card
- cleaning device
- container
- probe
- suction pipe
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model provides a probe card cleaning device, which is used for cleaning the probe point of a probe card. The probe card cleaning device comprises a container of which one side is provided with an opening, and two support parts which are arranged at the two ends of the opening of the container respectively and are used for installing the probe card; the container is used for accommodating a cleaning liquid; and an ultrasonic generator is arranged at a position, which is over against the position of the probe point, on the inner side wall of the container. According to the probe card cleaning device, the container for accommodating the cleaning liquid is arranged, meanwhile, the support parts are arranged in the opening of the container for fixing the probe card, the ultrasonic generator is arranged in the container, and the probe card is cleaned through the cleaning liquid in the container, so that the risk of manual operation and damages to the probe point are avoided; and the utility model provides a device which can be used for automatically cleaning the probe card.
Description
Technical field
The utility model relates to a kind of field of semiconductor processing, relates in particular to a kind of cleaning device of probe card
Background technology
Probe card is a kind of test interface, mainly naked core is tested, and connects test machine and chip by it, thereby the transmission signal is finished the test to chip parameter.
The probe card main purpose be with the probe on the probe card directly with chip on weld pad or projection directly contact, draw the chip signal, cooperate peripheral test instrument and software control to reach the purpose of automatic measurement again.Probe card is applied in IC as yet before the encapsulation, does the function test at the naked brilliant probe that uses, and filters out defective products, the encapsulation engineering after carrying out again.Therefore, it is during IC makes manufacturing cost to be influenced one of sizable critical processes.
Probe card is through repeatedly using the result of use that is influenced probe card by often polluting, so be necessary it is carried out cleaning treatment.Cleaning to probe card mainly is to rely on manually to finish in the prior art, utilize the aqueous isopropanol (IPA solution) of 100% purity to handle, but artificial treatment might cause aqueous isopropanol to spill harm people eye in the eyes that enter the people, simultaneously, because the size too little (less than 5 microns) of probe pinpoint also is easy to cause it to be damaged in artificial process of cleaning.
The utility model content
The technical problems to be solved in the utility model provides a kind of device that can clean automatically probe card.
In order to solve this technical problem, the utility model provides a kind of probe card cleaning device, comprise the container of an one-sided opening and be located at two support portions that described probe card be used for to be installed at described vessel port two ends respectively, described container is used for holding cleaning fluid, and the position over against described probe pinpoint on the described container inside wall is provided with supersonic generator.
Described probe card cleaning device also comprises the baffle of being located at described vessel port place, and described baffle center is provided with the circular holes of passing for described probe pinpoint.
Described supersonic generator quantity is 2, and two described supersonic generators are oppositely arranged.
The probe card cleaning device that the utility model provides also comprises a cleaning fluid recovery system, the probe card cleaning device that is used for the utility model is provided carries out the recovery of described cleaning fluid, comprise U-shaped suction pipe and returnable bottle, described U-shaped suction pipe comprises the body that both sides interconnect, the opening of described returnable bottle faces the opening part of described U-shaped suction pipe one side pipe body, and also be provided with a Liquid absorption ball on the homonymy body, the opening of the opposite side body of described U-shaped suction pipe is for being positioned in the described cleaning fluid.
Also be provided with a valve on the described U-shaped suction pipe, described valve is positioned at the below of described Liquid absorption ball.
The opening part of described returnable bottle also is provided with a screen pack.
The utility model is by arranging a container of placing cleaning fluid, in vessel port place the support portion is set simultaneously and realizes fixing probe card, in described container, supersonic generator is set, cleaning fluid in the cooperation container is realized the cleaning to probe card, thereby avoided manual danger and to the damage of probe pinpoint, a kind of device that can clean automatically probe card is provided.
Description of drawings
Fig. 1 is the cross-sectional view of probe card;
The side structure schematic diagram of the probe card cleaning device that Fig. 2 provides for the utility model one embodiment;
The structural representation during use of the probe card cleaning device that Fig. 3 provides for the utility model one embodiment;
The structural representation of the cleaning fluid recovery system that Fig. 4 provides for the utility model one embodiment;
Among the figure, 100-aqueous isopropanol; 101-probe card; 102-probe pinpoint; 103-circular hole; 201-container; 202-support portion; 203-baffle; 204-supersonic generator; 205-circular holes; 301-U-shaped suction pipe; 302-Liquid absorption ball; 303-valve; 304-returnable bottle; 305-screen pack.
The specific embodiment
The probe card cleaning device that the utility model is provided below with reference to Fig. 1 to Fig. 4 and be described in detail for the cleaning fluid recovery system of its use can think that those skilled in the art can make amendment to it and polishes according to known general knowledge in the scope of spirit of the present utility model and content.
Please refer to Fig. 2 and Fig. 3 and in conjunction with Fig. 1, present embodiment provides a kind of probe card cleaning device, comprise the container 201 of an one-sided opening and be located at two support portions 202 that described probe card be used for to be installed at described container 201 opening two ends respectively, the position of described support portion 202 and size all are complementary with the circular hole 103 at the edge of described probe card, position in order to fixing described probe card, described container 201 is used for holding cleaning fluid (in the present embodiment, be aqueous isopropanol 100), the position over against described probe pinpoint 102 on described container 201 madial walls is provided with supersonic generator 204.
Present embodiment is by arranging a container 201 of placing aqueous isopropanol 100, at container 201 opening parts support portion 202 is set simultaneously and realizes fixing probe card 101, in described container 201, supersonic generator 204 is set, the cleaning that cooperates the aqueous isopropanol 100 in the container to realize probe card
Described probe card cleaning device also comprises the baffle 203 of being located at described container 201 opening parts, and described baffle 203 centers are provided with the circular holes 205 of passing for described probe pinpoint 102.The effect of baffle 203 is that the circuit board of the lower surface of protection probe card 101 when cleaning can not be subjected to the pollution of aqueous isopropanol 100.
Described supersonic generator 204 quantity are 2, and two described supersonic generators 204 are oppositely arranged.Be conducive to the even cleaning to described probe card 101.In the present embodiment, the intensity that described supersonic generator 204 adopts is 2 watts every square centimeter, and can know by experiment if adopt 5 watts every square centimeter and can damage probe pinpoint 102.
The probe card cleaning device that present embodiment provides also comprises a cleaning fluid recovery system, be used for described cleaning fluid (present embodiment, be aqueous isopropanol 100) recovery, comprise U-shaped suction pipe 301 and returnable bottle 304, described U-shaped suction pipe 301 comprises the body that both sides interconnect, the opening of described returnable bottle 304 faces the opening part of described U-shaped suction pipe 301 1 side pipe bodies, and also be provided with a Liquid absorption ball 302 on the homonymy body, the opening of the opposite side body of described U-shaped suction pipe 301 is for being positioned in the described cleaning fluid (being aqueous isopropanol 100 in the present embodiment).Extruding Liquid absorption ball 302 can discharge the air in suction pipe and the Liquid absorption ball 302, thereby aqueous isopropanol 100 is sucked in the U-shaped suction pipe 301, and then inflow returnable bottle 304 carries out the recovery of aqueous isopropanol 100.
Also be provided with a valve 303 on the described U-shaped suction pipe 301, described valve 303 is positioned at the below of described Liquid absorption ball 302.The opening part of described returnable bottle 304 also is provided with a screen pack 305.In order to the aqueous isopropanol of retrieving 100 is carried out filtering screening.
When the cleaning fluid recovery system of using present embodiment to provide, please refer to Fig. 4, the opening of the left side body of U-shaped suction pipe 301 is inserted in the aqueous isopropanols by circular holes 205 as shown in Figure 2, extruding Liquid absorption ball 302 sucks aqueous isopropanol 100 in the U-shaped suction pipe 301, thereby aqueous isopropanol 100 is sucked in the U-shaped suction pipe 301, and then inflow returnable bottle 304 carries out the recovery of aqueous isopropanol 100.
The cleaning fluid recovery system that adopts present embodiment to provide can effectively be avoided aqueous isopropanol 100 and extraneous contacting, and has both protected operating personnel, has saved the consumption of process materials again.
Claims (6)
1. probe card cleaning device, be used for the probe pinpoint of probe card is cleaned, it is characterized in that: comprise the container of an one-sided opening and be located at two support portions that described probe card be used for to be installed at described vessel port two ends respectively, described container is used for holding cleaning fluid, and the position over against described probe pinpoint on the described container inside wall is provided with supersonic generator.
2. probe card cleaning device as claimed in claim 1 is characterized in that: also comprise the baffle of being located at described vessel port place, described baffle center is provided with the circular holes of passing for described probe pinpoint.
3. probe card cleaning device as claimed in claim 1, it is characterized in that: described supersonic generator quantity is 2, two described supersonic generators are oppositely arranged.
4. probe card cleaning device as claimed in claim 1, it is characterized in that: also comprise a cleaning fluid recovery system, described cleaning fluid recovery system comprises U-shaped suction pipe and returnable bottle, described U-shaped suction pipe comprises the body that both sides interconnect, the opening of described returnable bottle faces the opening part of described U-shaped suction pipe one side pipe body, and also be provided with a Liquid absorption ball on the homonymy body, the opening of the opposite side body of described U-shaped suction pipe is for being positioned in the described cleaning fluid.
5. probe card cleaning device as claimed in claim 4, it is characterized in that: also be provided with a valve on the described U-shaped suction pipe, described valve is positioned at the below of described Liquid absorption ball.
6. probe card cleaning device as claimed in claim 4, it is characterized in that: the opening part of described returnable bottle also is provided with a screen pack.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220610658 CN203044417U (en) | 2012-11-16 | 2012-11-16 | Probe card cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220610658 CN203044417U (en) | 2012-11-16 | 2012-11-16 | Probe card cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203044417U true CN203044417U (en) | 2013-07-10 |
Family
ID=48727415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220610658 Expired - Fee Related CN203044417U (en) | 2012-11-16 | 2012-11-16 | Probe card cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203044417U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105170548A (en) * | 2015-08-28 | 2015-12-23 | 东莞市普华精密机械有限公司 | Cleaning equipment and cleaning method for test probe |
| CN108321098A (en) * | 2017-01-18 | 2018-07-24 | 中芯长电半导体（江阴）有限公司 | Cleaning solution, cleaning device and the method for a kind of probe tip for wafer test |
| CN108325931A (en) * | 2017-12-22 | 2018-07-27 | 合肥国轩高科动力能源有限公司 | Ultrasonic cleaning machine for probe of formation cabinet |
-
2012
- 2012-11-16 CN CN 201220610658 patent/CN203044417U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105170548A (en) * | 2015-08-28 | 2015-12-23 | 东莞市普华精密机械有限公司 | Cleaning equipment and cleaning method for test probe |
| CN108321098A (en) * | 2017-01-18 | 2018-07-24 | 中芯长电半导体（江阴）有限公司 | Cleaning solution, cleaning device and the method for a kind of probe tip for wafer test |
| CN108325931A (en) * | 2017-12-22 | 2018-07-27 | 合肥国轩高科动力能源有限公司 | Ultrasonic cleaning machine for probe of formation cabinet |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130710 Termination date: 20181116 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |