CN202305579U

CN202305579U - Probe station capable of automatically cleaning probe card

Info

Publication number: CN202305579U
Application number: CN201120397653XU
Authority: CN
Inventors: 陈婷
Original assignee: Shanghai Hua Hong NEC Electronics Co Ltd
Current assignee: Shanghai Huahong Grace Semiconductor Manufacturing Corp
Priority date: 2011-10-18
Filing date: 2011-10-18
Publication date: 2012-07-04
Anticipated expiration: 2021-10-18

Abstract

The utility model discloses a probe station capable of automatically cleaning a probe card. The probe station comprises a bracket, wherein a probe cleaning piece is placed at the top end of the bracket; one or more suction holes are arranged at the top end of the bracket and in an area except the probe cleaning piece, are connected with an air suction valve through a pipeline and are finally connected to a container. The probe station has the advantages that attachments on a probe are cleaned by utilizing the principle of a dust collector, the times when an operator takes down the probe card from the probe station and manually cleans the probe are reduced, and the probability of the occurrence of poor contact problems caused by the attachment of own wearers of an oxidation film and the probe card can be lowered.

Description

Automatically clear up the probe station of probe

Technical field

The utility model relates to the probe station in a kind of SIC (semiconductor integrated circuit) field.

Background technology

Tester, probe station, probe are testing apparatuss commonly used in the semicon industry.As shown in Figure 1, when the chip to be measured 3 on the silicon chip is tested, at first probe 2 need be installed on probe station 4.Through probe 2, tester 1 contacts with chip 3 to be measured, and gives chip to be measured 3 in addition various electrical parameters and test vector.The quality of probe 2 and chip 3 contact conditions to be measured directly affects the correctness of test result.

Have many probes 21 on the probe 2, in order to reach excellent contact property with chip 3 to be measured, at first probe 21 contacts with contact point 31 on the chip 3, shown in the dotted line among Fig. 2.The certain distance of probe 21 slips is scratched the oxide film on contact point 31 surfaces and is contacted fully with following metal then, shown in the solid line among Fig. 2.When a probe use often after, the wearers of the oxide film that scratches on the contact point 31 and probe 2 itself all might attach on probe 21 and cause loose contact, more serious possibly cause

probe

21 and 21 short circuits of probe.

Along with the continuous development of semiconductor technology, the size of scale of mass production silicon chip develops into 12 cun from 6 cun, 8 cun, and simultaneously because live width such as dwindles at factor, chip number contained on every piece of silicon chip is also more and more.Chip-count increases the increase that directly causes test duration and cost on the increase of die size and the every piece of silicon chip.In order to reduce cost, improve testing efficiency, the most frequently used method increases with surveying number exactly, reduces the test number of steps.Just mean the increase of number of probes on every probe with the increase of surveying number.Number of probes M is with proportional with surveying number N on the probe.Needing number of probes like each chip is K, then M=K*N.And the loose contact of any exploration card on the probe all possibly cause the unusual of chip final testing result.Therefore, number of probes is many more, and it is also high more that the unusual probability of test takes place.

See also Fig. 3, a carriage 41 is arranged in the probe station 4 specially, the top of this carriage 41 is placed with faller gill 42 clearly.In the chip testing process, clear faller gill 42 relies on vacuum suction to be fixed on this carriage 41.At present, in order to reduce or prevent the generation of contact problems, after probe reached certain pricking times, probe station 4 was used probe on 42 pairs of probe 2 of faller gill clearly and is carried out clearly pin and handle, and detailed process is similar to sand paper the syringe needle of probe is polished.This clear pin process need not probe 2 is pulled down from probe station 4, and carriage 41 can be automatically moved to probe 2 belows, according to the parameter of setting probe 2 is cleared up.But this method can not be removed the attachment on the probe fully.In order more effectively to remove foreign material, operating personnel must take off probe from probe station, and clear up probe with speciality tools such as brushes.So both wastes of manpower possibly cause probe, probe station in unloading process, to damage again.

The utility model content

The utility model technical matters to be solved provides a kind ofly can clear up the probe station of probe automatically, adopts cleaning sheet cleaning probe further than existing probe station.

For solving the problems of the technologies described above; The probe station that the utility model is cleared up probe automatically comprises a carriage; Be placed with faller gill clearly on the top of this carriage; Top and the zone beyond clear faller gill at this carriage are provided with one or more suctions hole, and these suction holes are connected with inlet valve through pipeline, and finally are connected to container.

Preferably, said container is at the other end of said pipeline.

The utility model utilizes the principle of suction cleaner that the attachment on the probe is cleared up; Reduced operating personnel the number of times of probe is taken off and manually cleared up to probe from probe station, and the wearer that can reduce owing to oxide film and probe itself adheres to the loose contact problem odds that causes.

Description of drawings

Fig. 1 is the schematic perspective view of existing probe station;

Fig. 2 is a probe and the synoptic diagram that contacts of contact point;

Fig. 3 is the vertical view of existing probe station;

Fig. 4 is the vertical view of the utility model probe station;

Fig. 5 is the schematic perspective view of the utility model probe station.

Description of reference numerals among the figure:

1 is tester; 2 is probe; 21 is probe; 3 is chip to be measured; 31 is contact point; 4 is probe station; 41 is carriage; 42 is clear faller gill; 43 is pore; 44 is pipeline; 45 is container.

Embodiment

See also Fig. 4, the described probe station 4 of the utility model comprises a carriage 41, is placed with faller gill 42 clearly on the top of this carriage 41, is provided with one or more suctions hole 43 in the top and the zone beyond clear faller gill 42 of this carriage 41.

See also Fig. 5, these suction holes 43 are connected with inlet valve (not shown) through one or more pipeline 44, and finally are connected to container 45.Container 45 can be one or more, for example can be positioned at the other end of every pipeline 44.

When the moment that need carry out pin processing clearly or other any needs to probe 2, the clear faller gill 42 of carriage 41 above being placed on it moves to the below of probe 2.When moving, open inlet valve, carriage 41 tops 43 beginnings of suction hole air-breathing, when through probe 2 belows, utilize the principle of suction cleaner that the attachment on the probe is sucked and inhale in the hole 43, and be accommodated in the container 45 of pipeline 44 other ends.

Accomplish when clear pin operation, in the process of carriage 41 repositions, inhale hole 43 and pass through probe once more, open inlet valve once more, these suction holes 43 begin air-breathing once more, and the attachment on the probe is exhausted further.

Though the present invention can reduce operating personnel the number of times of probe is taken off and manually cleared up to probe from probe station, can not avoid the loose contact problem of probe fully.In case of necessity, still need probe be taken off and manually cleaning from probe station.

More than be merely the preferred embodiment of the utility model, and be not used in qualification the utility model.For a person skilled in the art, the utility model can have various changes and variation.All within the spirit and principle of the utility model, any modification of being done, be equal to replacement, improvement etc., all should be included within the protection domain of the utility model.

Claims

1. a probe station of clearing up probe automatically comprises a carriage, is placed with faller gill clearly on the top of this carriage; It is characterized in that; Top and the zone beyond clear faller gill at this carriage are provided with one or more suctions hole, and these suction holes are connected with inlet valve through pipeline, and finally are connected to container.

2. the probe station of automatic cleaning probe according to claim 1 is characterized in that, said container is at the other end of said pipeline.