CN203025154U - Acoustic surface wave gas sensor based on ZCTC piezo-electric crystal - Google Patents
Acoustic surface wave gas sensor based on ZCTC piezo-electric crystal Download PDFInfo
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- CN203025154U CN203025154U CN 201320000054 CN201320000054U CN203025154U CN 203025154 U CN203025154 U CN 203025154U CN 201320000054 CN201320000054 CN 201320000054 CN 201320000054 U CN201320000054 U CN 201320000054U CN 203025154 U CN203025154 U CN 203025154U
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Abstract
The utility model discloses an acoustic surface wave gas sensor based on a ZCTC piezo-electric crystal. The acoustic surface wave gas sensor comprises a piezoelectric substrate, an input interdigital transducer, an output interdigital transducer, a sensitive film and a sound absorption electrode, and is characterized in that the piezoelectric substrate is a ZCTC piezo-electric crystal; according to the input interdigital transducer, the output interdigital transducer, and the sound absorption electrode, AL films on the piezoelectric substrate, and then the AL films are made into an interdigital transducer IDT electrode and the sound absorption electrode, the interdigital logarithm is 26 pairs, the width of the interdigital electrode is 0.4 mu m, the interdigital gap is 0.4 mu m, the thickness is 40 nm, and the thickness of the sound absorption electrode is 50 nm. The acoustic surface wave gas sensor provided by the utility model has the characteristics of high precision, high resolution ratio, high sensitivity, high temperature stability and high electromechanical coupling factor.
Description
Technical field
The utility model relates to sensor technical field, specifically a kind of sonic surface wave gas sensors based on the ZCTC piezoelectric crystal.
Background technology
The principle of work of sonic surface wave gas sensors is the absorption of gas to be measured to be caused the variation of surface acoustic wave sensor speed by the sensitive thin film on passage between input interdigital transducer and output interdigital transducer, thereby the variation of output and incoming frequency occurs, cause the drift of surface acoustic wave oscillation frequency, to realize the detection to gas to be measured.Sonic surface wave gas sensors was developed the seventies in last century, because sonic surface wave gas sensors has the characteristics such as volume is little, lightweight, precision is high, resolution is high, antijamming capability is strong, and manufacture craft is simple, and cost is low, is the important supplement of gas sensor.Under existing process conditions, the raising of interdigital transducer performance is the key point that improves the sonic surface wave gas sensors performance.
Along with surface acoustic wave gas sensor technology application and scope development and expansion, traditional piezoelectric as: quartz, lithium niobate, lithium tantalate etc. can not satisfy the demands far away.In recent years, LGS, niobic acid gallium lanthanum, tantalic acid gallium lanthanum, the isostructural crystal of phosphoric acid gallium are as a kind of New piezoelectric crystal material of function admirable, has higher electromechanical coupling factor, lower acoustic surface wave propagation speed, the zero-lag temperature coefficient, fusing point is high, is applicable to the inferior fine quality of hot environment, has caused both at home and abroad to pay close attention to widely.Document 2010 the 29th the 2nd phase of volume silicate circular (structure of ZCTC piezoelectric crystal and acoustic surface wave propagation characteristic research) points out that the ZCTC crystal compares with quartz crystal, ZCTC crystal electromechanical coupling factor is larger, can be used as the piezoelectric of SAW (Surface Acoustic Wave) device.
Summary of the invention
The weak point that the utility model exists for fear of prior art, a kind of sonic surface wave gas sensors based on the ZCTC piezoelectric crystal is provided, this sonic surface wave gas sensors can realize that precision is high, resolution is high, highly sensitive, temperature stability is high, electromechanical coupling factor is high demand.
For solving the problems of the technologies described above, technical scheme that the utility model adopts is as follows:
A kind of sonic surface wave gas sensors based on the ZCTC piezoelectric crystal, comprise piezoelectric substrate, input interdigital transducer, output interdigital transducer, sensitive thin film, sound absorption electrode, it is characterized in that, described piezoelectric substrate is the ZCTC piezoelectric crystal, described input interdigital transducer, output interdigital transducer, sound absorption electrode are preparation AL films on piezoelectric substrate, then the AL film is made interdigital transducer IDT electrode and sound absorption electrode; Wherein interdigital logarithm is 26 pairs, interdigital electrode width 0.4 μ m, and interdigital spacing 0.4 μ m, thickness 40nm, the sound absorption thickness of electrode is 50nm.
[0006]The utility model design feature also is:
Described piezoelectric substrate is the ZCTC piezoelectric crystal, i.e. ZnCd (SCN)
4, belonging to tetragonal crystal system, its cell parameter is a=1.1135nm, b=1.1135nm, c=0.4376nm, density p=2510kg/m
3
Described sound absorption electrode is positioned at the two ends of gas sensor.
Compared with the prior art, the utility model beneficial effect is embodied in:
The ZCTC crystal is compared with quartz crystal, and the crystal electromechanical coupling factor is larger.
The sensitive thin film good stability can improve selectivity and the sensitivity of detection.
The sound absorption electrode is positioned at the two ends of sonic surface wave gas sensors, plays the effect that absorbs sound wave
Description of drawings
The sonic surface wave gas sensors structural representation that Fig. 1 the utility model relates to.
Number in the figure: 1 piezoelectric substrate, 2 input interdigital transducers, 3 output interdigital transducers, 4 sensitive thin films, 5 sound absorption electrodes.
Embodiment
The utility model is described further by embodiment below in conjunction with accompanying drawing.
As shown in the figure, what piezoelectric substrate 1 of the present utility model adopted is the ZCTC piezoelectric crystal, i.e. ZnCd (SCN)
4, belonging to tetragonal crystal system, its cell parameter is a=1.1135nm, b=1.1135nm, c=0.4376nm, density p=2510kg/m
3Adopt electron-beam vapor deposition method to deposit the AL film that a layer thickness is 100nm on piezoelectric substrate 1, roughness is made electrode and the sound absorption electrode 5 of input interdigital transducer 2, output interdigital transducer 3 less than 4nm through etching technics; Interdigital electrode width 0.4 μ m, interdigital spacing 0.4 μ m, thickness 40nm; Sound absorption electrode 5 thickness are 50nm; Adopt preparation sensitive thin film 4 at piezoelectric substrate 1, to improve selectivity and the sensitivity that detects.
Claims (3)
1. sonic surface wave gas sensors based on the ZCTC piezoelectric crystal, comprise piezoelectric substrate, input interdigital transducer, output interdigital transducer, sensitive thin film, sound absorption electrode, it is characterized in that, described piezoelectric substrate is the ZCTC piezoelectric crystal, described input interdigital transducer, output interdigital transducer, sound absorption electrode are preparation AL films on piezoelectric substrate, then the AL film is made interdigital transducer IDT electrode and sound absorption electrode; Wherein interdigital logarithm is 26 pairs, interdigital electrode width 0.4 μ m, and interdigital spacing 0.4 μ m, thickness 40nm, the sound absorption thickness of electrode is 50nm.
2. a kind of sonic surface wave gas sensors based on the ZCTC piezoelectric crystal according to claim 1, is characterized in that, described piezoelectric substrate is the ZCTC piezoelectric crystal, i.e. ZnCd (SCN)
4, belonging to tetragonal crystal system, its cell parameter is a=1.1135nm, b=1.1135nm, c=0.4376nm, density p=2510 kg/m
3
3. a kind of sonic surface wave gas sensors based on the ZCTC piezoelectric crystal according to claim 1, is characterized in that, described sound absorption electrode is positioned at the two ends of gas sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320000054 CN203025154U (en) | 2013-01-03 | 2013-01-03 | Acoustic surface wave gas sensor based on ZCTC piezo-electric crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320000054 CN203025154U (en) | 2013-01-03 | 2013-01-03 | Acoustic surface wave gas sensor based on ZCTC piezo-electric crystal |
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| Publication Number | Publication Date |
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| CN203025154U true CN203025154U (en) | 2013-06-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201320000054 Expired - Fee Related CN203025154U (en) | 2013-01-03 | 2013-01-03 | Acoustic surface wave gas sensor based on ZCTC piezo-electric crystal |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106442717A (en) * | 2016-10-25 | 2017-02-22 | 中国工程物理研究院激光聚变研究中心 | Surface acoustic wave transducer for detecting volatile organic pollutants |
| CN106885843A (en) * | 2017-02-07 | 2017-06-23 | 上海理工大学 | It is used to differentiate the gasoline identifier and its instrument and method of octane number in fuel feeding quality management |
-
2013
- 2013-01-03 CN CN 201320000054 patent/CN203025154U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106442717A (en) * | 2016-10-25 | 2017-02-22 | 中国工程物理研究院激光聚变研究中心 | Surface acoustic wave transducer for detecting volatile organic pollutants |
| CN106885843A (en) * | 2017-02-07 | 2017-06-23 | 上海理工大学 | It is used to differentiate the gasoline identifier and its instrument and method of octane number in fuel feeding quality management |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130626 Termination date: 20140103 |