CN203021646U - Dumbbell-style flexible material magnetron sputtering film-coating device - Google Patents
Dumbbell-style flexible material magnetron sputtering film-coating device Download PDFInfo
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- CN203021646U CN203021646U CN 201320041554 CN201320041554U CN203021646U CN 203021646 U CN203021646 U CN 203021646U CN 201320041554 CN201320041554 CN 201320041554 CN 201320041554 U CN201320041554 U CN 201320041554U CN 203021646 U CN203021646 U CN 203021646U
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Abstract
The utility model discloses a dumbbell-style flexible material magnetron sputtering film-coating device which comprises a winding vacuum chamber, an unwinding vacuum chamber and a film-coating vacuum tunnel, wherein the film-coating vacuum tunnel is vertically arranged, the upper end of the film-coating vacuum tunnel is communicated with the winding vacuum chamber, and the lower end of the film-coating vacuum tunnel is communicated with the unwinding vacuum chamber; and at least one side face of the film-coating vacuum tunnel is provided with a transverse cathode layout area. According to the utility model, a vertically arranged film-coating vacuum tunnel is adopted, and the side face of the film-coating vacuum tunnel is provided with a transversely arranged cathode, so that workpieces can be subjected to double-sided film coating and multi-cathode film coating, and the problem that in a horizontal film-coating mode, dust on cathodes falls off is solved.
Description
Technical field
The utility model relates to a kind of magnetic-controlled sputtering coating equipment, particularly a kind of dumbbell type flexible materials magnetic-controlled sputtering coating equipment.
Technical background
High molecular film material, flexible foam and flexible metal film material are the common flexible parent metals of vacuum plating, are used in a large number the fields such as foam electrode, flexible demonstration, flexible touch screen, flexible circuit board, decoration, electromagnetic shielding and anti-electrostatic.The plated film of these flexible materialss is of a great variety, and for example metal refining Ni conducting film on organic foam, make settled layer form many cavitys foam Ni metal; There is again on textiles, nonwoven cloth material depositing metallic films form the metal flexible coiled material and is used as electromagnetic shielding and antistatic material; Also have on polyester (PET) coated ITO (Indium Tin Oxide) transparent conductive film at transparent flexible, flexible polypropylene (BOPP), flexible polyester (PET) film on metal refining conducting film and polyimide film the flexible parent metal plated films such as metal refining conducting film.
In recent years, due to the fast development of coating technique, in flexible plated film field, multiple coating films equipment has appearred also.Application number provides a kind of winding film coating machine for 200810045199.4 utility model patent, comprise at least one vacuum film coating chamber, be placed in plated film vacuum chamber outer coiled material mechanism and rolling-up mechanism, the vacuum tunnel that it is characterized in that at least one band access way between plated film vacuum chamber and releasing coil mechanism and rolling-up mechanism, vacuum tunnel is made of the vacuum lock that narrow slit damp channel and vacuum suction chamber form.But there is the common fault of horizontal plated film in the mode of this structure, has no idea to solve the problem that the negative electrode dust drops, and it is best that quality product can't reach.Number of patent application provides a kind of flexible materials pros two sides to carry out continuously the Multi-function rolling film-coating machine of spraying plating for 03273145.0 utility model patent, it is the vacuum cavity of " arched door " structure of a kind of being, be provided with the rolling chamber in the bottom of casing and unreel the chamber, the arch box house is divided into three separate vacuum film coating chambers and connects in the unwinding and rewinding chambers.Although this vacuum design scheme has solved the problem of mode depositing multiple materials of many cathode sputterings and the problem of double-sided coating, still do not solve the negative electrode dust problem that drops, not still best flexible plated film mode.Application number is that 200610022288.8 utility model patent has proposed a kind of magnetic-control sputtering coiling film coating machine, it is characterized in that at least one plated film vacuum chamber, the vacuum plating cavity being arranged, be positioned at the cooling roller of vacuum plating cavity, arranged around is by at least 3 group negative electrodes and the true vacuum-pumping system of pressing vacuum pump and pipeline to form of height centered by cooling roller.The Vacuum System Design of this utility model has solved the plated film problem of multiple different atmosphere rete, yet, in any case or the design of horizontal plated film, still do not solve the problem that the negative electrode dust drops.
The utility model content
In order to solve the problems of the technologies described above, the utility model provides a kind of dumbbell type flexible materials magnetic-controlled sputtering coating equipment, realized the in the vertical direction lateral arrangement negative electrode of flexible plated film, can carry out double-sided coating and many negative electrodes plated film to workpiece, and solve the problem that negative electrode dust that horizontal plated film mode exists drops.
The technical solution adopted in the utility model is: comprise by the rolling vacuum cavity, unreel vacuum cavity and plated film vacuum tunnel; Described plated film vacuum tunnel vertically arranges, and the upper end of plated film vacuum tunnel is communicated with the rolling vacuum cavity, the lower end of plated film vacuum tunnel with unreel vacuum cavity and be communicated with; Described plated film vacuum tunnel, at least one side are provided with horizontal negative electrode and arrange the district.
In above-mentioned dumbbell type flexible materials magnetic-controlled sputtering coating equipment, described rolling vacuum cavity comprises cylindrical vacuum cavity and chamber door; Vacuum cavity is connected at the flange port place by large valve and fine pumping pump group.
In above-mentioned dumbbell type flexible materials magnetic-controlled sputtering coating equipment, the described vacuum cavity that unreels comprises the second cylindrical vacuum cavity, the second chamber door and chamber door roller, and chamber door roller is located at the bottom of the second chamber door.
In above-mentioned dumbbell type flexible materials magnetic-controlled sputtering coating equipment, described rolling vacuum cavity and unreel to be provided with between vacuum cavity and be attached thereto logical bypass pipe.
In above-mentioned dumbbell type flexible materials magnetic-controlled sputtering coating equipment, be equipped with horizontal negative electrode on described plated film vacuum tunnel two sides and arrange the district.
In above-mentioned dumbbell type flexible materials magnetic-controlled sputtering coating equipment, fine pumping pump group is with the molecular pump air-bleed system of forepump system or diffusion pump air-bleed system.
The beneficial effects of the utility model are: the plated film vacuum tunnel that the utility model has adopted vertical direction to arrange, laterally arrange negative electrode on the side of plated film vacuum tunnel, can carry out double-sided coating and many negative electrodes plated film to workpiece, and solve the problem that negative electrode dust that horizontal plated film mode exists drops.
Description of drawings
Fig. 1 is front view of the present utility model.
Fig. 2 is left view of the present utility model.
Embodiment
Below in conjunction with accompanying drawing, the utility model is further described.
As shown in Figure 1, 2, the utility model comprises by rolling vacuum cavity 1, unreels the vacuum system of the dumbbell type that vacuum cavity 7 and plated film vacuum tunnel 4 form; Described plated film vacuum tunnel 4 is vertically to arrange, and the upper end of plated film vacuum tunnel 4 is communicated with rolling vacuum cavity 1, the lower end of plated film vacuum tunnel 4 with unreel vacuum cavity 7 and be communicated with; Be respectively equipped with horizontal negative electrode on the two sides of described plated film vacuum tunnel 4 and arrange horizontal negative electrode layout district, district 5 and second 6.
Described rolling vacuum cavity 1 is comprised of cylindrical vacuum cavity 1, chamber door 3 and viewing window 2; Rolling vacuum cavity 1 is connected at flange port 14 places by large valve 11 and fine pumping pump group 13.Be provided with wrap-up in described rolling vacuum cavity 1; Described fine pumping pump group 13 is molecular pump air-bleed system or the diffusion pump air-bleed systems with forepump system.
The described vacuum cavity 7 that unreels is comprised of the second cylindrical vacuum cavity 7, the second chamber door 9, the second viewing window 8 and chamber door roller 10; Chamber door roller 10 is arranged on the bottom of the second chamber door 9.Described unreeling in vacuum cavity 7 is provided with unwinding device.
Described rolling vacuum cavity 1 and unreeling also is provided with the bypass pipe 12 that is communicated with it between vacuum cavity 7.
During use, the horizontal negative electrode of described plated film vacuum tunnel 4 both sides arranges that the horizontal negative electrode in district 5 and second arranges when there is the negative electrode layout at a place in district 6, can carry out coating single side to workpiece; The horizontal negative electrode of described plated film vacuum tunnel 4 both sides is arranged when horizontal negative electrode layout district, district 5 and second 6 all has negative electrode to arrange, can be carried out double-sided coating to workpiece.
Claims (8)
1. a dumbbell type flexible materials magnetic-controlled sputtering coating equipment, is characterized in that: comprise by the rolling vacuum cavity, unreel vacuum cavity and plated film vacuum tunnel; Described plated film vacuum tunnel vertically arranges, and the upper end of plated film vacuum tunnel is communicated with the rolling vacuum cavity, the lower end of plated film vacuum tunnel with unreel vacuum cavity and be communicated with; Described plated film vacuum tunnel, at least one side are provided with horizontal negative electrode and arrange the district.
2. dumbbell type flexible materials magnetic-controlled sputtering coating equipment as claimed in claim 1, it is characterized in that: described rolling vacuum cavity comprises cylindrical vacuum cavity and chamber door; Vacuum cavity is connected at the flange port place by large valve and fine pumping pump group.
3. dumbbell type flexible materials magnetic-controlled sputtering coating equipment as claimed in claim 1 is characterized in that: the described vacuum cavity that unreels comprises that the second cylindrical vacuum cavity, the second chamber door and chamber door roller form, and chamber door roller is arranged on the bottom of the second chamber door.
4. dumbbell type flexible materials magnetic-controlled sputtering coating equipment as claimed in claim 1 is characterized in that: described rolling vacuum cavity and unreel to be provided with between vacuum cavity and be attached thereto logical bypass pipe.
5. dumbbell type flexible materials magnetic-controlled sputtering coating equipment as claimed in claim 1 is characterized in that: be equipped with horizontal negative electrode on described plated film vacuum tunnel two sides and arrange the district.
6. dumbbell type flexible materials magnetic-controlled sputtering coating equipment as claimed in claim 2, it is characterized in that: fine pumping pump group is with the molecular pump air-bleed system of forepump system or diffusion pump air-bleed system.
7. dumbbell type flexible materials magnetic-controlled sputtering coating equipment as claimed in claim 2, is characterized in that: also be provided with viewing window on described rolling vacuum cavity.
8. dumbbell type flexible materials magnetic-controlled sputtering coating equipment as claimed in claim 3, it is characterized in that: described unreeling also is provided with the second viewing window on vacuum cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320041554 CN203021646U (en) | 2013-01-25 | 2013-01-25 | Dumbbell-style flexible material magnetron sputtering film-coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320041554 CN203021646U (en) | 2013-01-25 | 2013-01-25 | Dumbbell-style flexible material magnetron sputtering film-coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203021646U true CN203021646U (en) | 2013-06-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320041554 Expired - Lifetime CN203021646U (en) | 2013-01-25 | 2013-01-25 | Dumbbell-style flexible material magnetron sputtering film-coating device |
Country Status (1)
| Country | Link |
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| CN (1) | CN203021646U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103500851B (en) * | 2013-09-26 | 2015-09-30 | 东莞市德瑞精密设备有限公司 | Lithium battery process equipment and vacuum tunnel cavity thereof |
| CN106670053A (en) * | 2016-12-21 | 2017-05-17 | 南通新江海动力电子有限公司 | Vacuum glue-pouring machine |
| CN107841723A (en) * | 2017-10-30 | 2018-03-27 | 深圳市西陆光电技术有限公司 | One kind is without glue flexible double copper-clad plate processing DC sputtering device |
| CN110629185A (en) * | 2019-09-11 | 2019-12-31 | 佛山市佛欣真空技术有限公司 | Continuous vacuum coating machine of steel plate |
-
2013
- 2013-01-25 CN CN 201320041554 patent/CN203021646U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103500851B (en) * | 2013-09-26 | 2015-09-30 | 东莞市德瑞精密设备有限公司 | Lithium battery process equipment and vacuum tunnel cavity thereof |
| CN106670053A (en) * | 2016-12-21 | 2017-05-17 | 南通新江海动力电子有限公司 | Vacuum glue-pouring machine |
| CN107841723A (en) * | 2017-10-30 | 2018-03-27 | 深圳市西陆光电技术有限公司 | One kind is without glue flexible double copper-clad plate processing DC sputtering device |
| CN110629185A (en) * | 2019-09-11 | 2019-12-31 | 佛山市佛欣真空技术有限公司 | Continuous vacuum coating machine of steel plate |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130626 |