CN203007470U - Furnace bottom protection plate of single crystal furnace - Google Patents
Furnace bottom protection plate of single crystal furnace Download PDFInfo
- Publication number
- CN203007470U CN203007470U CN 201220730066 CN201220730066U CN203007470U CN 203007470 U CN203007470 U CN 203007470U CN 201220730066 CN201220730066 CN 201220730066 CN 201220730066 U CN201220730066 U CN 201220730066U CN 203007470 U CN203007470 U CN 203007470U
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- Prior art keywords
- protection plate
- bottom protection
- furnace bottom
- furnace
- exhaust
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Abstract
The utility model discloses a furnace bottom protection plate of a single crystal furnace. The furnace bottom protection plate of the single crystal furnace comprises a furnace bottom protection plate body and exhaust protecting covers, wherein a plurality of mounting holes are arranged on the furnace bottom protection plate body; and exhaust vents are detachably arranged on the exhaust protecting covers in the mounting holes. In the furnace bottom protection plate disclosed by the utility model, the exhaust vents are arranged on the exhaust protecting covers capable of being dismantled from the furnace bottom protection plate body; the exhaust protecting covers can be dismantled after a lot of impurities are attached around the exhaust vents; and a new exhaust furnace cover is replaced. The sizes of the exhaust protecting covers are much smaller than that of the existing furnace bottom protection plate, so that the price is correspondingly reduced; and the purpose of reducing the equipment maintenance cost of the single crystal furnace is achieved.
Description
Technical field
The utility model relates to the single crystal growing furnace technical field, more particularly, relates to a kind of furnace bottom protection plate of single crystal growing furnace.
Background technology
Single crystal growing furnace is a kind of in rare gas element (argon gas is main) environment, with the fusing of the polycrystalline materials such as polysilicon, uses the equipment of Grown by CZ Method dislocation-free silicon single crystal with graphite heater.Inner at single crystal growing furnace, a furnace bottom protection plate of being made by graphite material is placed on bottommost, and the top of stainless steel furnace bottom is in order to support heating system, graphite device and heat-insulation system etc.
When single crystal growing furnace normally moves, can produce a lot of impurity, these accumulation of impurities are at the venting hole place of furnace bottom protection plate, and impurity is hard, are difficult to clean out.Along with the increase of producing heat, impurity is more poly-more at the venting hole place, makes the exhaust aperture reduce gradually, even venting hole is blocked, and affect the normal operation of single crystal growing furnace, can cause pulling out monocrystalline in the time of seriously, and whole stove starting material are all scrapped.Simultaneously, because furnace bottom protection plate price is approximately each 8000-10000 unit, if change continually the furnace bottom protection plate, can cause the increase of maintenance of equipment expense.
By the above, how a kind of furnace bottom protection plate of single crystal growing furnace is provided, to reduce the maintenance of equipment expense of single crystal growing furnace, become the technical problem that those skilled in the art need solution badly.
The utility model content
In view of this, the utility model provides a kind of furnace bottom protection plate of single crystal growing furnace, reduces the purpose of the maintenance of equipment expense of single crystal growing furnace with realization.
For achieving the above object, the utility model provides following technical scheme:
A kind of furnace bottom protection plate of single crystal growing furnace comprises:
Be provided with the furnace bottom protection plate body of a plurality of open holess; With
Be provided with the exhaust protecting cover of venting hole, the exhaust protecting cover is removably disposed in open holes.
Preferably, in above-mentioned furnace bottom protection plate, open holes is shoulder hole.
Preferably, in above-mentioned furnace bottom protection plate, has the cascaded surface that matches with shoulder hole on the periphery of exhaust protecting cover.
Preferably, in above-mentioned furnace bottom protection plate, the diameter of open holes is 90mm.
The utility model provides a kind of furnace bottom protection plate of single crystal growing furnace, comprises furnace bottom protection plate body and exhaust protecting cover, wherein, is provided with a plurality of open holess on furnace bottom protection plate body; Be removably mounted on the exhaust protecting cover in open holes and be provided with venting hole.
In furnace bottom protection plate provided by the utility model, venting hole is arranged on the exhaust protecting cover that can disassemble from furnace bottom protection plate body.Adhered to a large amount of impurity around venting hole after, the exhaust protecting cover can be pulled down, change new exhaust protecting cover.
Can find out, when the exhaust protecting cover that more renews, due to the size of its size much smaller than existing furnace bottom protection plate, its price also descends accordingly, has realized reducing the purpose of the maintenance of equipment expense of single crystal growing furnace.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or description of the Prior Art, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The assembling schematic diagram of the furnace bottom protection plate that Fig. 1 provides for the utility model embodiment.
In Fig. 1:
Furnace bottom protection plate body 1, exhaust protecting cover 2, open holes 10, venting hole 20.
Embodiment
The utility model embodiment discloses a kind of furnace bottom protection plate of single crystal growing furnace, reduces the purpose of the maintenance of equipment expense of single crystal growing furnace with realization.
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
Please refer to Fig. 1, the furnace bottom protection plate that the present embodiment provides comprises furnace bottom protection plate body 1 and exhaust protecting cover 2.
The shape of furnace bottom protection plate body 1 is identical with existing furnace bottom protection plate with size, and difference is, original venting hole is enlarged, as open holes 10.
Exhaust protecting cover 2 is removably disposed in open holes 10, is provided with venting hole 20 on exhaust protecting cover 2.
In the furnace bottom protection plate that the present embodiment provides, venting hole 20 is arranged on exhaust protecting cover 2, and exhaust protecting cover 2 can disassemble from furnace bottom protection plate body 1.After having adhered to a large amount of impurity around venting hole 20, exhaust protecting cover 2 can be pulled down, change new exhaust protecting cover 2.
Can find out, when the exhaust protecting cover 2 that more renews, due to the size of its size much smaller than existing furnace bottom protection plate, its price also descends accordingly, has realized reducing the purpose of the maintenance of equipment expense of single crystal growing furnace.
It will be appreciated by persons skilled in the art that in the furnace bottom protection plate that above-described embodiment provides, furnace bottom protection plate body 1 and exhaust protecting cover 2 are graphite material.Can react with above-mentioned impurity by configuration, and simultaneously not with the acid solution of exhaust protecting cover 2 reactions, the exhaust protecting cover 2 that is attached with impurity of changing is placed into carries out corrosion reaction in acid solution, thereby the impurity on exhaust protecting cover 2 is cleaned out, and then exhaust protecting cover 2 can be reused, further reduce the equipment maintenance cost of single crystal growing furnace.
In order to be convenient to the maintenance personnel in the process of assembling furnace bottom protection plate, exhaust protecting cover 2 is positioned, in the furnace bottom protection plate that above-described embodiment provides, open holes 10 is shoulder hole.Can find out, as long as exhaust protecting cover 2 can enter into open holes 10, illustrate that namely both relative positions are correct, provide auxiliary for the maintenance personnel installs exhaust protecting cover 2.
Further, in order to make exhaust protecting cover 2 structure after being installed on furnace bottom protection plate body 1 more stable, be provided with the cascaded surface that matches with open holes 10 on the periphery of exhaust protecting cover 2.
Can find out, open holes 10 is shoulder hole, and has the cascaded surface that coordinates with this shoulder hole on exhaust protecting cover 2, is provided with three mating surfaces between furnace bottom protection plate body 1 and exhaust protecting cover 2, thereby makes both syndetons more stable.
Concrete, the diameter of open holes 10 is 90mm in the furnace bottom protection plate that above-described embodiment provides.
In this specification sheets, each embodiment adopts the mode of going forward one by one to describe, and what each embodiment stressed is and the difference of other embodiment that between each embodiment, identical similar part is mutually referring to getting final product.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be apparent concerning those skilled in the art, and General Principle as defined herein can be in the situation that do not break away from spirit or scope of the present utility model, realization in other embodiments.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (4)
1. the furnace bottom protection plate of a single crystal growing furnace, is characterized in that, comprising:
Be provided with the furnace bottom protection plate body of a plurality of open holess; With
Be provided with the exhaust protecting cover of venting hole, described exhaust protecting cover is removably disposed in described open holes.
2. furnace bottom protection plate according to claim 1, is characterized in that, described open holes is shoulder hole.
3. furnace bottom protection plate according to claim 2, is characterized in that, has the cascaded surface that matches with described open holes on the periphery of described exhaust protecting cover.
4. the furnace bottom protection plate described according to claim 1-3 any one, is characterized in that, the diameter of described open holes is 90mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220730066 CN203007470U (en) | 2012-12-25 | 2012-12-25 | Furnace bottom protection plate of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220730066 CN203007470U (en) | 2012-12-25 | 2012-12-25 | Furnace bottom protection plate of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203007470U true CN203007470U (en) | 2013-06-19 |
Family
ID=48599082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220730066 Expired - Fee Related CN203007470U (en) | 2012-12-25 | 2012-12-25 | Furnace bottom protection plate of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203007470U (en) |
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2012
- 2012-12-25 CN CN 201220730066 patent/CN203007470U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130619 Termination date: 20151225 |
|
| EXPY | Termination of patent right or utility model |