CN102586863B - Cutting mould and cutting method for recycling single-lobe block body of graphite crucible - Google Patents
Cutting mould and cutting method for recycling single-lobe block body of graphite crucible Download PDFInfo
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- CN102586863B CN102586863B CN201210059312.0A CN201210059312A CN102586863B CN 102586863 B CN102586863 B CN 102586863B CN 201210059312 A CN201210059312 A CN 201210059312A CN 102586863 B CN102586863 B CN 102586863B
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Abstract
The invention discloses a cutting mould for recycling a single-lobe block body of a graphite crucible. An inner mould and an outer mould are fixedly arranged at a base plate and are suspended at the center of a circle, and the inner mould is provided with a plurality of fine-tuning pin fastening crucible block bodies. The invention further discloses a method for recycling the single-lobe block body of the graphite crucible by utilizing the device. The method comprises the following steps of: rotating two connection sections of waste single-lobe block bodies of the graphite crucible due to R part corrosion thinning in monocrystalline silicon production process towards the inner wall around the center of the circle by 10-30 DEG, cutting off vertical sections with thinned R parts in a parallel direction of the section, and re-splicing to obtain a set of graphite crucible of 360 DEG, thus the recycling of the graphite crucible is realized. According to the cutting mould and the method disclosed by the invention, the recycling of the thinned single-lobe block body of the graphite crucible needing to be scrapped is realized.
Description
Technical field
The invention belongs to vertical pulling method produce single crystal silicon technology field, relate to the cutting die of a kind of graphite crucible single-lobe block regeneration, the invention still further relates to the method utilizing this cutting die to carry out the regeneration of graphite crucible single-lobe block.
Background technology
The growing method of monocrystalline silicon mainly with Czochralski method (vertical pulling method) for representative.Graphite crucible, insulator, heater, heat shielding, heat-preservation cylinder, crucible holder, insulation cover etc. that composition Czochralski method mono-crystal furnace thermal field critical piece has single-lobe block to be combined into.
Single-lobe block in following text refers to that the circumference arc that can realize splicing that existing many lobes graphite crucible uses is the single-lobe block of 120 ° or 90 ° or other angles.Graphite crucible Main Function is the silica crucible supporting and protect splendid attire polycrystalline silicon raw material; the bottom that the radial direction of sidewall and suitable angle that its shape generally includes approximate circle cylinder body shape is cut sth. askew; generally be made up of point blocks such as 2-6 lobes; many lobes block interface couple together composition complete set crucible, the bend of many lobes block inwall junction is called R part.
In czochralski process, monocrystalline in-furnace temperature is higher than 1400 DEG C, and (composition is SiO to silica crucible
2) at high temperature soften, reacting with polycrystalline silicon raw material generates SiO gas thus.SiO gas continues to react with graphite crucible, generates carbon monoxide, carborundum etc., thus causes the corrosion to single-lobe block.Silica crucible and single-lobe contact of blocks part generation oxidation reaction, its reaction equation is as follows:
SiO
2+Si＝2SiO，SiO+2C＝SiC+CO，SiO
2+C＝SiO+CO。
The seam crossing of each lobe block has section simultaneously, the mist that above-mentioned reaction produces and SiO pass from section, because SiO can react with graphite, make the R part of single-lobe block seam crossing seriously thinning, when R part thickness is less than 1 centimetre, for preventing Lou silicon, just need graphite crucible to replace, service life is short, increases production cost.
Correlation technique report is had at present about the problem solving the corrosion of single-lobe block R part.The such as patent No. 201020653402.9, publication number CN201901726U, publication date 2011.07.20, disclose the life-span that a kind of method covering graphite paper in single-lobe block seam extends graphite crucible.The patent No. 201110148718.1, publication number CN102168301A, publication date 2011.08.31, disclose a kind of equadag coating mixed by graphite powder and ethanol, be evenly coated in graphite crucible block seam crossing R part, alleviate the corrosion of R part, extend the service life of graphite crucible.Patent No. 201010583556.X, publication number CN102094235A, publication date 2011.06.15, disclose the mode that a kind of single-lobe block seam crossing beats steam vent, the silicon monoxide, CO gas etc. that produce are got rid of from pore, reduces the corrosion to R part, increase graphite crucible service life.
Above-mentioned existing method is all corrosion that mode by preventing in advance alleviates graphite crucible, extend pot life, but result of use is limited, can not recycle the thinning graphite crucible scrapped.
Summary of the invention
The invention discloses the cutting die of a kind of graphite crucible single-lobe block regeneration, solve in prior art and directly scrap whole single-lobe block after the corrosion of graphite crucible single-lobe block R part, make graphite crucible single-lobe block short for service life, the problem that production cost is larger.
The invention also discloses the method utilizing this cutting die to carry out the regeneration of graphite crucible single-lobe block.
The technical solution used in the present invention is, the cutting die of a kind of graphite crucible single-lobe block regeneration, and base plate is fixedly installed internal mold and external mold, and described external mold overlaps with the internal mold center of circle, internal mold is provided with multiple fine setting pin fastener crucible block.
Another technical scheme that the present invention adopts is, the method of a kind of graphite crucible single-lobe block regeneration, sections are connected by two of the graphite crucible single-lobe block scrapped because of R part corrosion thinning in monocrystalline silicon production process, 10 ° ~ 30 ° angles are rotated along the center of circle to inwall, from section flat line direction by vertical section excision thinning for R part, again the graphite crucible at a set of 360 ° of angles of split composition, realizes the regeneration of graphite crucible.
The invention has the beneficial effects as follows, by the single-lobe block of graphite crucible being corroded the vertical section excision of thinning R part, make the seam crossing thickness between single-lobe block thickening, continue to play the effect supporting silica crucible, single-lobe block stove in service life 10 ~ 20 can be extended.The inventive method is simple to operate, and it is convenient, with low cost to implement; Do not limit by single-lobe block structure, be applicable to any graphite crucible single-lobe block with the combination of similar circle configurations; Do not limit by thermal field size, be applicable to the cutting of any size thermal field graphite crucible single-lobe block.The inventive method cutting die structure used is simple, easy to operate.
Accompanying drawing explanation
Fig. 1 is the schematic diagram that the single-lobe block handstand state of the inventive method carries out cutting;
Fig. 2 is single-lobe block cutting mould schematic diagram of the present invention;
Fig. 3 is the single-lobe block excision R part schematic diagram of the inventive method to 3 lobe crucibles;
Fig. 4 is that the inventive method will be spliced into the combination schematic diagram of 4 lobe crucibles after the single-lobe block of 3 lobe crucibles excision R part;
Fig. 5 is that the inventive method will be spliced into the combination schematic diagram of 6 lobe crucibles after the single-lobe block of 4 lobe crucibles excision R part.
In figure, 1.R position, 2. excises position, 3. cutting tool, 4. vertical section, 5. angle block gauge, 6. angle gap slot, 7. external mold, 8. internal mold, 9. finely tunes pin, 10. base plate, 11. single-lobe block A, 12. single-lobe block B, 13. single-lobe block D, R1. side excision angle, R2. opposite side excision angle.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail.
The present invention is a kind of method being mainly used in the regeneration of vertical pulling method manufacture order crystal silicon graphite crucible single-lobe block, sections are connected by two of the graphite crucible single-lobe block scrapped because of R part corrosion thinning in monocrystalline silicon production process, 10 ° ~ 30 ° angles are rotated along the center of circle to inwall, from section flat line direction by vertical section excision thinning for R part, again the graphite crucible at a set of 360 ° of angles of split composition, realizes the regeneration of graphite crucible.
The graphite crucible single-lobe block of said method namely by scrapping because R part is thinning in monocrystalline silicon production process, along single-lobe block connect section to the inside vertical direction cut away two and connect the thinning part of section side R part, two connect section side and excise 30 ° of angles altogether, make each single-lobe block circumference residue radian after excising be reduced to 90 ° of angles or 60 ° of angles, split forms the complete graphite crucible of a set of circle configurations again.
The operation principle of the inventive method is: by the seam crossing R part 1 (being corrosion-prone position herein) by single-lobe block two ends, section vertical direction two side excision certain angles are to the inside connected along single-lobe block, excision position 2 thinning for seam crossing R part is excised, again according to the crucible of composition circumference 360 ° of angle split composition structural integrities, the re-using of scrapping single-lobe block is realized.
The present invention realizes said method can configure following a set of cutting die, comprises base plate 10, internal mold 8, external mold 7, angle block gauge 5, fine setting pin 9.The concrete structure of this cutting die is, base plate 10 is fixedly installed internal mold 8 and external mold 7, and external mold 7 internal diameter is identical with single-lobe block A11 outside dimension to be repaired, the external diameter design 1 ~ 2mm less of single-lobe block 12 internal diameter of internal mold 8; Internal mold 8 is provided with multiple fine setting pin 9, on external mold 7 or internal mold 8, circumferentially angle, 30 °, interval, one end is processed with an angle gap slot 6, is inserted with an angle block gauge 5 in angle gap slot 6.
During cutting die assembling of the present invention, because of single-lobe block at high temperature Long-Time Service, apparent size can deform, and inner surface and silica crucible react thinning, and outer surface is attached with one deck carborundum, external mold 7 internal diameter is identical with single-lobe block outside dimension, height 150-250mm, internal mold 8 is highly 100-250mm, its external diameter design 1 ~ 2mm less of single-lobe block internal diameter, to adapt to the distortion of single-lobe block, facilitate the interlayer of single-lobe block between external mold 7 and internal mold 8 freely to rotate simultaneously.Be fixed on base plate 10 by mould inner mould 8 and external mold 7, internal mold 8 overlaps with external mold 7 center of circle, is then arranged on cutting off machine with screw by the base plate 10 after assembling.External mold 7 or external mold 8 are carved with angle index, adjust the angle of excision with this.
According to circular manner after external mold 7 and internal mold 8 combine, angle, 30 °, interval processes an angle gap slot 6, determines single-lobe block excision angle with this angle gap slot 6.
When using cutting die of the present invention to carry out work, stood upside down by single-lobe block and be inserted in internal mold 8 with in the interlayer of external mold 7, angle block gauge 5 is inserted in angle gap slot 6, and the size design of angle block gauge 5 should match with angle gap slot 6 size.A side abutment angle block gauge 5 of the single single-lobe block of crucible, with the fastening single-lobe block of fine setting pin 9, is attached on external mold 7 by fastening for single-lobe block, and the R part 2 of corrosion thinning, from single-lobe block another side feed cutting, is excised by cutter.
Cutting process cutting speed is the key factor ensureing to cut into power.Because single-lobe block different parts thickness is different with angle, the stressed difference of each particle.Therefore cutting speed needs to adjust with cutting single-lobe block different parts.Single-lobe block stands upside down and is fixed on mould, and cutter is parallel with single-lobe block, rotates 10 ° ~ 15 ° angle feed cuttings, the bottom feed that cutter is cut sth. askew from single-lobe block radial direction from the vertical section 4 of single-lobe block along the center of circle to inwall.Now, thicker bottom single-lobe block, minimally processed vegetables is that 20 ~ 30mm/min is advisable.During close to R part, because R part is the thinnest, stress is maximum, is also to determine that cutting is successfully crucial.Therefore 10 ~ 20mm place before being cut to close to R part, is reduced to 10 ± 5mm/min by cutting speed.When cutting another side of single-lobe block, cutter is from the back feed of crucible block, and minimally processed vegetables is 10 ± 5mm/min, and after cutter cuts through R portion 10 ~ 20mm, cutting speed is promoted to 20 ~ 30mm/min and is advisable.
Embodiment 1
The graphite crucible structure of three lobes is transformed into the graphite crucible structure of pintongs, realizes regeneration.
The circumference arc of the single-lobe block A11 each to be repaired of three lobe crucibles is 120 °.Mould inner mould 8 and external mold 7 are fixed on base plate 10, the base plate 10 after assembling is arranged on cutting off machine with screw.Single-lobe block A11 is stood upside down and is inserted in internal mold 8 with in the interlayer of external mold 7, angle block gauge 5 is inserted in angle gap slot 6, a side abutment angle block gauge 5 of single-lobe block, with the fastening crucible of fine setting pin 9, be attached on external mold 7 by fastening for single-lobe block A11, cutting tool 3 is along the vertical section 4 of single-lobe block A11 to inner surface of crucible anglec of rotation R1 (10 ~ 15 ° of angles) place's feed, along the cutting of single-lobe block A11 vertical direction, until position 2 (side dash area) complete resection will be excised.By single-lobe block A11 along horizontal circle circumferential direction half-twist angle, readjust angle block gauge 5 angle, make another side abutment angle block gauge 5 of single-lobe block A11, with the fastening crucible of fine setting pin 9, be attached on external mold 7 by fastening for single-lobe block A11, then cutting tool is along another vertical section 4 of single-lobe block A11 to center of circle internal rotation angle degree R2 (10 ~ 15 ° of angles) place's feed, along the cutting of single-lobe block A11 vertical direction, all cut until position 2 (opposite side dash area) will be excised.Whole cutting process ensures that excision angle R1 amounts to 30 ° of angles (shown in Fig. 3) with excision angle R2 angle sum.So far, single-lobe block A11 circumference arc is reduced to 90 ° of angles, becomes the single-lobe block B12 repaired.Get the pintongs finished product single-lobe block B12 split assembling of well cutting, form a set of pintongs crucible structure (shown in Fig. 4) with full circumferences structure, continue to drop into thermal field of single crystal furnace and use, realize regeneration.
Embodiment 2
The graphite crucible structure of pintongs is transformed into the graphite crucible structure of six lobes, realizes regeneration.
The single-lobe block C circumference arc each to be repaired of pintongs single-lobe block is 90 ° of angles.Mould inner mould 8 and external mold 7 are fixed on base plate 10, the base plate 10 after assembling is arranged on cutting off machine with screw.Single-lobe block C is stood upside down and is inserted in internal mold 8 with in the interlayer of external mold 7, angle block gauge 5 is inserted in angle gap slot 6, a side abutment angle block gauge 5 of single-lobe block C, with the fastening crucible of fine setting pin 9, be attached on external mold 7 by fastening for single-lobe block C, cutting tool 3, along the vertical section 4 of single-lobe block C to inner surface of crucible anglec of rotation R1 (10 ~ 15 ° of angles) place's feed, cuts, until will excise position 2 (side dash area) complete resection along single-lobe block C vertical direction.Single-lobe block C is rotated hexagonal angle along horizontal circle circumferential direction, readjust angle block gauge 5 angle, another side abutment angle block gauge 5 of single-lobe block C, with the fastening crucible of fine setting pin 9, be attached on external mold 7 by fastening for single-lobe block C, then cutting tool is along another vertical section 4 of single-lobe block C to center of circle internal rotation angle degree R2 (10 ~ 15 ° of angles) place's feed, along the cutting of single-lobe block C vertical direction, all cuts until will excise position 2 (opposite side dash area).Whole cutting process ensures that excision angle R1 amounts to 30 ° of angles with excision angle R2 angle sum.So far, single-lobe block C circumference arc to be repaired becomes 60 ° of angles, becomes the single-lobe block D13 repaired.Get six lobe finished product single-lobe block D13 split assemblings of well cutting, form a set of six lobe crucible structures (as shown in Figure 5) with full circumferences structure, continue to drop into thermal field of single crystal furnace and use, realize regeneration.
The inventive method and device well solve each single-lobe block crooked position R part of graphite crucible because of air-flow corrosion thinning, the effect supporting silica crucible cannot be played, the problem of directly scrapping, 30 ° of angles are excised altogether by connecting section part vertical direction two sides along single-lobe block, after R part edge deletion, the single-lobe block seam crossing R part obtained is thickening, after split is assembled into the crucible of complete set, continue to drop into thermal field of single crystal furnace to use, play the effect supporting silica crucible, realize regeneration.The inventive method and device do not limit by any size thermal field graphite crucible, are common to the graphite crucible with circle configurations or similar circle configurations.
Claims (3)
1. the cutting die of graphite crucible single-lobe block regeneration, it is characterized in that: on base plate (10), be fixedly installed internal mold (8) and external mold (7), described external mold (7) overlaps with internal mold (8) center of circle, internal mold (8) is provided with multiple fine setting pin (9); After described external mold (7) and internal mold (8) combine along the circumferential direction, be provided with an angle gap slot (6) at interval of 30 ° of angles, in angle gap slot (6), be inserted with an angle block gauge (5); Described external mold (7) or internal mold (8) are carved with angle index; Described external mold (7) internal diameter is identical with the external diameter of the single-lobe block A (11) of graphite crucible, the external diameter 1 ~ 2mm less of single-lobe block A (11) internal diameter of described internal mold (8).
2. the cutting method of graphite crucible single-lobe block regeneration, utilize the cutting die of the graphite crucible single-lobe block regeneration described in claim 1, it is characterized in that: connect sections by two of the graphite crucible single-lobe block scrapped because of R part corrosion thinning in monocrystalline silicon production process, 10 ° ~ 30 ° angles are rotated along the center of circle to inwall, from section flat line direction by vertical section excision thinning for R part, again the graphite crucible at a set of 360 ° of angles of split composition, realizes the regeneration of graphite crucible.
3. the cutting method of graphite crucible single-lobe block according to claim 2 regeneration, it is characterized in that: graphite crucible single-lobe block stands upside down and is fixed on cutting die, cutter is parallel with single-lobe block, 10 ° ~ 15 ° angle feed cuttings are rotated to inwall from the vertical section of single-lobe block (4) along the center of circle, the bottom feed that cutter is cut sth. askew from single-lobe block radial direction, now, thicker bottom single-lobe block, minimally processed vegetables is 20 ~ 30mm/min;
Before being cut to close to R part, 10 ~ 20mm place, is reduced to 10 ± 5mm/min by cutting speed;
When cutting another side of single-lobe block, cutter is from the back feed of crucible block, and minimally processed vegetables is 10 ± 5mm/min;
After cutter cuts through R portion 10 ~ 20mm, cutting speed is promoted to 20 ~ 30mm/min.
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| CN201210059312.0A CN102586863B (en) | 2012-03-08 | 2012-03-08 | Cutting mould and cutting method for recycling single-lobe block body of graphite crucible |
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| CN201210059312.0A CN102586863B (en) | 2012-03-08 | 2012-03-08 | Cutting mould and cutting method for recycling single-lobe block body of graphite crucible |
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| CN103481382A (en) * | 2013-08-09 | 2014-01-01 | 北京交通大学 | Novel tool used for cutting graphite crucible |
| CN109605585B (en) * | 2018-12-28 | 2023-06-13 | 嘉善佳腾自润滑材料厂 | Cutting method for cutting self-lubricating graphite column by using high-speed cutter |
| CN114670344B (en) * | 2022-03-25 | 2023-10-31 | 中国人民大学 | Nondestructive cleavage device and method for high-orientation pyrolytic graphite monocrystal |
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Address after: The new town in the county the Ningxia Hui Autonomous Region city centre 755100 unity Road Co-patentee after: Yinchuan LONGi Silicon Material Co.,Ltd. Patentee after: Ningxia LONGi Silicon Material Co.,Ltd. Co-patentee after: Longji green energy Polytron Technologies Inc Co-patentee after: Wuxi LONGi Silicon Materials Corp. Address before: The new town in the county the Ningxia Hui Autonomous Region city centre 755100 unity Road Co-patentee before: Yinchuan LONGi Silicon Material Co.,Ltd. Patentee before: Ningxia LONGi Silicon Material Co.,Ltd. Co-patentee before: Xi'an Longji-Silicon Co., LTD. Co-patentee before: Wuxi LONGi Silicon Materials Corp. |
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Granted publication date: 20150318 Termination date: 20200308 |
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