CN102586863A - Cutting mould and cutting method for recycling single-lobe block body of graphite crucible - Google Patents
Cutting mould and cutting method for recycling single-lobe block body of graphite crucible Download PDFInfo
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- CN102586863A CN102586863A CN2012100593120A CN201210059312A CN102586863A CN 102586863 A CN102586863 A CN 102586863A CN 2012100593120 A CN2012100593120 A CN 2012100593120A CN 201210059312 A CN201210059312 A CN 201210059312A CN 102586863 A CN102586863 A CN 102586863A
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Abstract
The invention discloses a cutting mould for recycling a single-lobe block body of a graphite crucible. An inner mould and an outer mould are fixedly arranged at a base plate and are suspended at the center of a circle, and the inner mould is provided with a plurality of fine-tuning pin fastening crucible block bodies. The invention further discloses a method for recycling the single-lobe block body of the graphite crucible by utilizing the device. The method comprises the following steps of: rotating two connection sections of waste single-lobe block bodies of the graphite crucible due to R part corrosion thinning in monocrystalline silicon production process towards the inner wall around the center of the circle by 10-30 DEG, cutting off vertical sections with thinned R parts in a parallel direction of the section, and re-splicing to obtain a set of graphite crucible of 360 DEG, thus the recycling of the graphite crucible is realized. According to the cutting mould and the method disclosed by the invention, the recycling of the thinned single-lobe block body of the graphite crucible needing to be scrapped is realized.
Description
Technical field
The invention belongs to vertical pulling method produce single crystal silicon technology field, relate to the cutting die of a kind of plumbago crucible single-lobe block regenerated using, the invention still further relates to and utilize this cutting die to carry out the method for plumbago crucible single-lobe block regenerated using.
Background technology
The growth method of silicon single crystal is representative with Czochralski method (vertical pulling method) mainly.Form plumbago crucible that Czochralski method mono-crystal furnace thermal field major parts has the single-lobe block to be combined into, thermally-insulated body, well heater, heat shielding, heat-preservation cylinder, crucible holder, insulation cover etc.
Single-lobe block in the following text is meant that the employed circumference radian that splices of can realizing of existing many lobes plumbago crucible is the single-lobe block of 120 ° or 90 ° or other angles.It is the quartz crucible that supports and protect the splendid attire polycrystalline silicon raw material that plumbago crucible mainly acts on; Its shape generally includes the sidewall of approximate circle cylinder body shape and the bottom of radially cutting sth. askew of suitable angle; Generally form by branch blocks such as 2-6 lobes; Many lobes block couples together at interface forms the complete crucible of a cover, and the bend of many lobes block inwall junction is called the R position.
In czochralski process, temperature is higher than 1400 ℃ in the single crystal growing furnace, and (composition is SiO to quartz crucible
2) at high temperature soften, reacting with polycrystalline silicon raw material generates SiO gas thus.SiO gas continues and the plumbago crucible reaction, generates carbon monoxide, silit etc., thereby causes the corrosion to the single-lobe block.Quartz crucible and single-lobe block contact part generation oxidizing reaction, its reaction equation is following:
SiO
2+Si＝2SiO，SiO+2C＝SiC+CO，SiO
2+C＝SiO+CO。
The seam crossing of each lobe block has section simultaneously, and mixed gas and SiO that above-mentioned reaction produces pass from section, because SiO can react with graphite; Make the serious attenuate in R position of single-lobe block seam crossing; When R position thickness during,, just need plumbago crucible be replaced for preventing leakage silicon less than 1 centimetre; Work-ing life is short, has strengthened production cost.
At present about solving the existing correlation technique report of single-lobe block R position corrosive problem.Such as the patent No. 201020653402.9, publication number CN201901726U, open day 2011.07.20 discloses the life-span that a kind of method that on single-lobe block seam, covers graphite paper prolongs plumbago crucible.The patent No. 201110148718.1, publication number CN102168301A, open day 2011.08.31; A kind of equadag coating that is mixed by Graphite Powder 99 and ethanol is disclosed; Be evenly coated in graphite crucible block seam crossing R position, alleviate the corrosion at R position, prolong the work-ing life of plumbago crucible.Patent No. 201010583556.X, publication number CN102094235A, open day 2011.06.15; The mode that a kind of single-lobe block seam crossing is beaten venting hole is disclosed; The silicon monoxide that produces, CO gas etc. are got rid of from pore, reduced corrosion, increase plumbago crucible work-ing life the R position.
Above-mentioned existing method all is the corrosion that alleviate plumbago crucible through the mode of preventing in advance, prolong pot life, but result of use is limited, can not recycle the plumbago crucible that attenuate is scrapped.
Summary of the invention
The invention discloses the cutting die of a kind of plumbago crucible single-lobe block regenerated using; Solved in the prior art and directly scrapped whole single-lobe block after the corrosion of plumbago crucible single-lobe block R position; Make plumbago crucible single-lobe block short work-ing life, the problem that production cost is bigger.
The invention also discloses and utilize this cutting die to carry out the method for plumbago crucible single-lobe block regenerated using.
The technical scheme that the present invention adopts is, the cutting die of a kind of plumbago crucible single-lobe block regenerated using is set with internal mold and external mold on base plate, and said external mold overlaps with the internal mold center of circle, and a plurality of fine settings fastening crucible block of pinning is installed on the internal mold.
Another technical scheme that the present invention adopts is; The method of a kind of plumbago crucible single-lobe block regenerated using; Two with the plumbago crucible single-lobe block of scrapping because of R position corrosion thinning in the monocrystalline silicon production process connect section,, the vertical section cut of R position attenuate are removed from the section parallel direction to 10 °～30 ° angles of inwall rotation along the center of circle; Again the plumbago crucible at 360 ° of angles of a cover is formed in amalgamation, realizes the regenerated using of plumbago crucible.
The invention has the beneficial effects as follows; The vertical section cut in R position that corrodes attenuation through the single-lobe block with plumbago crucible is removed; Make and continue seam crossing thickness thickening between the single-lobe block to play the effect of supporting quartz crucible, can prolong single-lobe block stove in work-ing lifes 10～20.The inventive method is simple to operate, and it is convenient, with low cost to implement; Not limited by the single-lobe block structure, be applicable to any plumbago crucible single-lobe block with similar circle configurations combination; Do not receive the thermal field limitation of size, be applicable to the cutting of virtually any size thermal field plumbago crucible single-lobe block.The used cutting die of the inventive method is simple in structure, easy to operate.
Description of drawings
Fig. 1 is the synoptic diagram that the single-lobe block handstand state of the inventive method cuts;
Fig. 2 is a single-lobe block cutting die synoptic diagram of the present invention;
Fig. 3 is the single-lobe block excision R position synoptic diagram of the inventive method to 3 lobe crucibles;
Fig. 4 is the combination synoptic diagram that is spliced into 4 lobe crucibles behind the single-lobe block excision R position of the inventive method with 3 lobe crucibles;
Fig. 5 is the combination synoptic diagram that is spliced into 6 lobe crucibles behind the single-lobe block excision R position of the inventive method with 4 lobe crucibles.
Among the figure, 1.R position, 2. excision position, 3. cutting tool, 4. vertically section, 5. angle block gauge; 6. angle gap slot, 7. external mold, 8. internal mold, 9. fine setting pin, 10. base plate; 11. single-lobe block A, 12. single-lobe block B, 13. single-lobe block D, R1. one side excision angle, R2. opposite side excision angle.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is elaborated.
The present invention is a kind of method that is mainly used in vertical pulling method manufacture order crystal silicon with the regenerated using of plumbago crucible single-lobe block; Two with the plumbago crucible single-lobe block of scrapping because of R position corrosion thinning in the monocrystalline silicon production process connect section; Rotate 10 °～30 ° angles along the center of circle to inwall; From the section parallel direction the vertical section cut of R position attenuate is removed, the plumbago crucible at 360 ° of angles of a cover is formed in amalgamation again, realizes the regenerated using of plumbago crucible.
Aforesaid method is promptly through with the plumbago crucible single-lobe block of scrapping because of R position attenuate in the monocrystalline silicon production process; Along the single-lobe block connect section to the inside vertical direction cut away two parts that connect section side R position attenuates; Two connect the section side and excise 30 ° of angles altogether; Make each the single-lobe block circumference residue radian after the excision be reduced to 90 ° of angles or 60 ° of angles, the complete plumbago crucible of a cover circle configurations is formed in amalgamation again.
The principle of work of the inventive method is: through the seam crossing R position 1 (being corrosion-prone position here) with single-lobe block two ends; Connect section two side excisions of vertical direction to the inside certain angle along the single-lobe block; Excision position 2 excisions with seam crossing R position attenuation; Again form the crucible of structural integrity according to forming the amalgamation of 360 ° of angles of circumference, realize the utilization again of scrapping the single-lobe block.
The present invention can dispose a following cover cutting die for realizing aforesaid method, comprises base plate 10, internal mold 8, external mold 7, angle block gauge 5, fine setting pin 9.The concrete structure of this cutting die is, on base plate 10, is set with internal mold 8 and external mold 7, and external mold 7 internal diameters are identical with single-lobe block A11 outside dimension to be repaired, and the external diameter of internal mold 8 designs than the little 1～2mm of single-lobe block 12 internal diameters; A plurality of fine setting pins 9 are installed on the internal mold 8, and external mold 7 or internal mold 8 upper edge circumference one end are processed with an angle gap slot 6 in 30 ° of angles at interval, in angle gap slot 6, are inserted with an angle block gauge 5.
During cutting die of the present invention assembling, because of single-lobe block life-time service at high temperature, apparent size can deform; Internal surface and quartz crucible reaction attenuation, outside surface is attached with one deck silit, and external mold 7 internal diameters are identical with single-lobe block outside dimension; Height 150-250mm, internal mold 8 highly is 100-250mm, its external diameter design is than the little 1～2mm of single-lobe block internal diameter; To adapt to the distortion of single-lobe block, make things convenient for the interlayer of single-lobe block between external mold 7 and internal mold 8 freely to rotate simultaneously.Mould inner mould 8 and external mold 7 are fixed on the base plate 10, and internal mold 8 overlaps with external mold 7 centers of circle, and the base plate 10 usefulness screws after will assembling then are installed on the cutting off machine.Be carved with angle index on external mold 7 or the external mold 8, adjust the angle of excision with this.
When using cutting die of the present invention to carry out work, the handstand of single-lobe block is inserted in the interlayer of internal mold 8 and external mold 7, angle block gauge 5 is inserted in the angle gap slot 6, and the size design of angle block gauge 5 should be complementary with angle gap slot 6 sizes.A side of the single single-lobe block of crucible is near angle block gauge 5, with fine setting pin 9 fastening single-lobe blocks, is attached on the external mold 7 the single-lobe block is fastening, and cutter is from single-lobe block the other side feed cutting, with R position 2 excisions of corrosion thinning.
The cutting process cutting speed in feet per minute is the key factor that guarantees to cut into power.Because of single-lobe block different sites thickness different with angle, the stressed difference of each particle.Therefore cutting speed in feet per minute need be adjusted with cutting single-lobe block different sites.The single-lobe block stands upside down and to be fixed on the mould, and cutter is parallel with the single-lobe block, cuts to 10 °～15 ° angle feeds of inwall rotation along the center of circle from the vertical section 4 of single-lobe block, and cutter is from bottom feed that the single-lobe block is radially cut sth. askew.At this moment, single-lobe block bottom is thicker, and cutting speed in feet per minute is adjusted into 20～30mm/min and is advisable.During near the R position, the thinnest because of the R position, stress is maximum, also is the successful key of decision cutting.Therefore being cut to, cutting speed in feet per minute is reduced to 10 ± 5mm/min near 10～20mm place before the R position.When cutting another side of single-lobe block, cutter is from the back feed of crucible block, and cutting speed in feet per minute is adjusted into 10 ± 5mm/min, and after cutter was cut the 10～20mm of R portion, it was that 20～30mm/min is advisable that cutting speed in feet per minute promotes.
The plumbago crucible structure of modification of three lobes is become the plumbago crucible structure of pintongs, realize regenerated using.
The circumference radian of the single-lobe block A11 that each of three lobe crucibles is to be repaired is 120 °.Mould inner mould 8 and external mold 7 are fixed on the base plate 10, the base plate 10 usefulness screws after the assembling are installed on the cutting off machine.Single-lobe block A11 handstand is inserted in the interlayer of internal mold 8 and external mold 7; Angle block gauge 5 is inserted in the angle gap slot 6, and a side of single-lobe block is near angle block gauge 5, with fine setting pin 9 fastening crucibles; Be attached on the external mold 7 single-lobe block A11 is fastening; Cutting tool 3 is located feed along the vertical section 4 of single-lobe block A11 to inner surface of crucible angle of rotation R1 (10～15 ° of angles), along the cutting of single-lobe block A11 vertical direction, until excising position 2 (a side dash area) complete resection.With horizontal circumferential direction half-twist angle, single-lobe block A11 edge; Readjust angle block gauge 5 angles, make another side of single-lobe block A11, with fine setting pin 9 fastening crucibles near angle block gauge 5; Be attached on the external mold 7 single-lobe block A11 is fastening; Cutting tool is located feed along another vertical section 4 of single-lobe block A11 to center of circle internal rotation angle R2 (10～15 ° of angles) then, along the cutting of single-lobe block A11 vertical direction, all cuts until excising position 2 (opposite side dash area).Whole cutting process guarantees that excision angle R1 and excision angle R2 angle sum amount to 30 ° of angles (shown in Figure 3).So far, single-lobe block A11 circumference radian is reduced to 90 ° of angles, becomes the single-lobe block B12 that repairs.Get the pintongs finished product single-lobe block B12 amalgamation assembling of well cutting, form the pintongs crucible structure (shown in Figure 4) that a cover has the full circumferences structure, continue to drop into thermal field of single crystal furnace and use, realize regenerated using.
The plumbago crucible structure of modification of pintongs is become the plumbago crucible structure of six lobes, realize regenerated using.
Each of pintongs single-lobe block single-lobe block C circumference radian to be repaired is 90 ° of angles.Mould inner mould 8 and external mold 7 are fixed on the base plate 10, the base plate 10 usefulness screws after the assembling are installed on the cutting off machine.Single-lobe block C handstand is inserted in the interlayer of internal mold 8 and external mold 7; Angle block gauge 5 is inserted in the angle gap slot 6, and the side of single-lobe block C is near angle block gauge 5, with fine setting pin 9 fastening crucibles; Be attached on the external mold 7 single-lobe block C is fastening; Cutting tool 3 is located feed along the vertical section 4 of single-lobe block C to inner surface of crucible angle of rotation R1 (10～15 ° of angles), along the cutting of single-lobe block C vertical direction, until excising position 2 (a side dash area) complete resection.Single-lobe block C is rotated hexagonal angle along horizontal circumferential direction; Readjust angle block gauge 5 angles, another side of single-lobe block C is near angle block gauge 5, with fine setting pin 9 fastening crucibles; Be attached on the external mold 7 single-lobe block C is fastening; Cutting tool is located feed along another vertical section 4 of single-lobe block C to center of circle internal rotation angle R2 (10～15 ° of angles) then, along the cutting of single-lobe block C vertical direction, all cuts until excising position 2 (opposite side dash area).Whole cutting process guarantees that excision angle R1 and excision angle R2 angle sum amount to 30 ° of angles.So far, single-lobe block C circumference radian to be repaired becomes 60 ° of angles, becomes the single-lobe block D13 that repairs.Get the six lobe finished product single-lobe block D13 amalgamations assembling of well cutting, form the six lobe crucible structures (as shown in Figure 5) that a cover has the full circumferences structure, continue to drop into thermal field of single crystal furnace and use, realize regenerated using.
Each single-lobe block crooked position R position that the inventive method and device have well solved plumbago crucible is because of the air-flow corrosion thinning; Can't play the effect of supporting quartz crucible, the problem of directly scrapping is excised 30 ° of angles altogether through connecting two sides of section part vertical direction along the single-lobe block; After the excision of edge, R position; After the single-lobe block seam crossing R position thickening that obtains, amalgamation are assembled into the complete crucible of a cover, continue to drop into thermal field of single crystal furnace and use; Play the effect of supporting quartz crucible, realize regenerated using.The inventive method and device are not limited with plumbago crucible by the virtually any size thermal field, are common to the plumbago crucible with circle configurations or similar circle configurations.
Claims (6)
1. the cutting die of plumbago crucible single-lobe block regenerated using is characterized in that: on base plate (10), be set with internal mold (8) and external mold (7), said external mold (7) overlaps with internal mold (8) center of circle, and a plurality of fine settings pin (9) are installed on the internal mold (8).
2. according to the cutting die of claims 1 described plumbago crucible single-lobe block regenerated using; It is characterized in that: after the combination of described external mold (7) and internal mold (8) along the circumferential direction; 30 ° of angles, every interval are provided with an angle gap slot (6), in angle gap slot (6), are inserted with an angle block gauge (5).
3. according to the cutting die of claims 1 described plumbago crucible single-lobe block regenerated using, it is characterized in that: be carved with angle index on described external mold (7) or the internal mold (8).
4. according to the cutting die of claim 2 or 3 described plumbago crucible single-lobe block regenerated usings; It is characterized in that: described external mold (7) internal diameter is identical with the external diameter of the single-lobe block A (11) of plumbago crucible, and the external diameter of described internal mold (8) is than the little 1～2mm of single-lobe block A (11) internal diameter.
5. cutting method of utilizing above-mentioned cutting die to realize the regenerated using of plumbago crucible single-lobe block; It is characterized in that: two with the plumbago crucible single-lobe block of scrapping because of R position corrosion thinning in the monocrystalline silicon production process connect section; Rotate 10 °～30 ° angles along the center of circle to inwall; From the section parallel direction the vertical section cut of R position attenuate is removed, the plumbago crucible at 360 ° of angles of a cover is formed in amalgamation again, realizes the regenerated using of plumbago crucible.
6. the cutting method of plumbago crucible single-lobe block according to claim 5 regenerated using; It is characterized in that: plumbago crucible single-lobe block stands upside down and is fixed on the cutting die, and cutter is parallel with the single-lobe block, cuts to 10 °～15 ° angle feeds of inwall rotation along the center of circle from the vertical section of single-lobe block (4); Cutter is from bottom feed that the single-lobe block is radially cut sth. askew; At this moment, single-lobe block bottom is thicker, and cutting speed in feet per minute is adjusted into 20～30mm/min:
Being cut near 10～20mm place before the R position, cutting speed in feet per minute is reduced to 10 ± 5mm/min,
When cutting another side of single-lobe block, cutter is from the back feed of crucible block, and cutting speed in feet per minute is adjusted into 10 ± 5mm/min,
After cutter was cut the 10～20mm of R portion, it was 20～30mm/min that cutting speed in feet per minute promotes.
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| CN201210059312.0A CN102586863B (en) | 2012-03-08 | 2012-03-08 | Cutting mould and cutting method for recycling single-lobe block body of graphite crucible |
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|---|---|---|---|
| CN201210059312.0A CN102586863B (en) | 2012-03-08 | 2012-03-08 | Cutting mould and cutting method for recycling single-lobe block body of graphite crucible |
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| CN102586863B CN102586863B (en) | 2015-03-18 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103481382A (en) * | 2013-08-09 | 2014-01-01 | 北京交通大学 | Novel tool used for cutting graphite crucible |
| CN109605585A (en) * | 2018-12-28 | 2019-04-12 | 嘉善佳腾自润滑材料厂 | A kind of high-speed cutter and cutting method cutting self-lubricating graphite column |
| CN114670344A (en) * | 2022-03-25 | 2022-06-28 | 中国人民大学 | Nondestructive cleavage device and method for high-orientation pyrolytic graphite single crystal |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103481382A (en) * | 2013-08-09 | 2014-01-01 | 北京交通大学 | Novel tool used for cutting graphite crucible |
| CN109605585A (en) * | 2018-12-28 | 2019-04-12 | 嘉善佳腾自润滑材料厂 | A kind of high-speed cutter and cutting method cutting self-lubricating graphite column |
| CN109605585B (en) * | 2018-12-28 | 2023-06-13 | 嘉善佳腾自润滑材料厂 | Cutting method for cutting self-lubricating graphite column by using high-speed cutter |
| CN114670344A (en) * | 2022-03-25 | 2022-06-28 | 中国人民大学 | Nondestructive cleavage device and method for high-orientation pyrolytic graphite single crystal |
| CN114670344B (en) * | 2022-03-25 | 2023-10-31 | 中国人民大学 | Nondestructive cleavage device and method for high-orientation pyrolytic graphite monocrystal |
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|---|---|
| CN102586863B (en) | 2015-03-18 |
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Address after: The new town in the county the Ningxia Hui Autonomous Region city centre 755100 unity Road Co-patentee after: Yinchuan LONGi Silicon Material Co.,Ltd. Patentee after: Ningxia LONGi Silicon Material Co.,Ltd. Co-patentee after: Longji green energy Polytron Technologies Inc Co-patentee after: Wuxi LONGi Silicon Materials Corp. Address before: The new town in the county the Ningxia Hui Autonomous Region city centre 755100 unity Road Co-patentee before: Yinchuan LONGi Silicon Material Co.,Ltd. Patentee before: Ningxia LONGi Silicon Material Co.,Ltd. Co-patentee before: Xi'an Longji-Silicon Co., LTD. Co-patentee before: Wuxi LONGi Silicon Materials Corp. |
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