CN202968749U - Graphite pot for single crystal furnace - Google Patents
Graphite pot for single crystal furnace Download PDFInfo
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- CN202968749U CN202968749U CN 201220719967 CN201220719967U CN202968749U CN 202968749 U CN202968749 U CN 202968749U CN 201220719967 CN201220719967 CN 201220719967 CN 201220719967 U CN201220719967 U CN 201220719967U CN 202968749 U CN202968749 U CN 202968749U
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- groove
- crucible
- single crystal
- pot
- graphite
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Abstract
The utility model provides a graphite pot for a single crystal furnace. The graphite pot comprises a plurality of pot blocks and connecting components, wherein the plurality of pot blocks can be spliced into a complete graphite pot; first concave grooves and second concave grooves are formed in the plurality of pot blocks; the connecting components are arranged in the first concave grooves and the second concave grooves in order to connect any two adjacent pot blocks, wherein the first concave grooves and the second concave grooves are matched with each other in the pot blocks. According to the graphite pot for the single crystal furnace, the concave grooves are arranged on the graphite pot, the connecting components are arranged in the concave grooves and can be used for integrally connecting the plurality of pot blocks, so that the pot blocks can be prevented from inclining which is caused by clearances between the pot blocks and a pot support, the risk that the fire is generated between the graphite pot and a heater is avoided, and as a result, the probability of damage of components is reduced, the single crystal furnace can be operated normally, the components are not needed to be replaced, and the production cost is saved accordingly.
Description
Technical field
The utility model relates to the single crystal growing furnace technical field, more particularly, relates to a kind of single crystal growing furnace graphite crucible.
Background technology
Single crystal growing furnace is the major equipment that adopts vertical pulling method manufacture order crystal silicon, in the thermal field of the inside of single crystal growing furnace, is contained in quartz crucible for the production of the polycrystalline silicon raw material of silicon single crystal, and quartz crucible is placed in graphite crucible 01, and graphite crucible 01 is placed in crucible holder 02, as shown in Figure 1.Wherein, the graphite crucible is spliced by three lobe crucible pieces.
Single crystal growing furnace is in the process of manufacture order crystal silicon, can produce silicon steam in thermal field, and in the hot environment of thermal field, silicon steam can with thermal field in graphite crucible 01 and crucible holder 02 chemical reaction occurs and produce impurity on its surface, therefore, after each production is completed, all need graphite crucible 01 and crucible holder 02 are polished and removed its surperficial impurity.graphite crucible 01 and crucible holder 02 are in the process of life-time service, through polishing repeatedly, cause graphite crucible 01 to deform with the contact surface that crucible holder 02 coordinates, make between its contact surface that originally coordinates contact and produce the gap, and the gap is increasing along with the increase of polishing number of times, as shown in Figure 2, again because graphite crucible 01 is to be spliced by three lobe crucible pieces, so increasing gap can cause the crucible piece under the effect of self gravitation to the direction run-off the straight away from other crucible pieces, the top that makes the crucible piece reduces with the distance of the well heater that is arranged on graphite crucible 01 outside, and then the risk of generation sparking between generation graphite crucible 01 and well heater, in case the sparking accident occurs between graphite crucible 01 and well heater, can cause well heater and graphite crucible 01 to damage, even cause single crystal growing furnace normally to move.For Accident prevention occurs, just need to change graphite crucible 01 or crucible holder 02, and each graphite crucible 01 is 2.9 ten thousand yuan, each crucible holder 02 is 0.68 ten thousand yuan, changes the production cost that parts can increase single crystal growing furnace greatly.
In sum, how reducing the replacing of parts to reduce production costs, is present those skilled in the art's problem demanding prompt solution.
The utility model content
In view of this, the utility model provides a kind of single crystal growing furnace graphite crucible, and it has avoided the run-off the straight of crucible piece, so avoided and well heater between the sparking accident occurs, guaranteed the normal operation of single crystal growing furnace, also need not to change parts, saved production cost.
In order to achieve the above object, the utility model provides following technical scheme:
A kind of single crystal growing furnace graphite crucible, it comprises:
Many lobes crucible piece of complete graphite crucible be can be spliced into, the first groove and the second groove are provided with on the described crucible piece of many lobes;
Be arranged on described the first groove of cooperatively interacting on different described crucible pieces and the web member of being connected in groove with the two described crucible pieces of lobe that connect arbitrary neighborhood.
Preferably, above-mentioned single crystal growing furnace is with in the graphite crucible, and described the first groove and described the second groove are arc groove.
Preferably, above-mentioned single crystal growing furnace is with in the graphite crucible, and described the first groove and described the second groove are near the top of described crucible piece.
Preferably, above-mentioned single crystal growing furnace is with in the graphite crucible, and the cross-sectional shape of described the first groove and described the second groove is L shaped.
Preferably, above-mentioned single crystal growing furnace is with in the graphite crucible, and described the first groove and described the second groove all are opened on the outer side wall of described crucible piece.
Preferably, above-mentioned single crystal growing furnace is with in the graphite crucible, and described web member is molybdenum filament.
The single crystal growing furnace that the utility model provides is with in the graphite crucible, be provided with the first groove and the second groove on every lobe crucible piece, the second groove fit on the first groove and adjacent crucible piece wherein, the first groove fit on the second groove crucible piece adjacent with another, web member are arranged in the larger groove that the first groove and the second groove fit form so that two adjacent crucible pieces are connected as one.The single crystal growing furnace that the utility model provides graphite crucible, groove is set thereon, and web member is set in groove, so that many lobes crucible piece is connected as one, avoided the crucible piece because depositing in the gap run-off the straight with crucible, avoided occuring between graphite crucible and well heater the risk of sparking, reduced the damage probability of parts, guarantee the normal operation of single crystal growing furnace, also need not to change parts, saved production cost.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or description of the Prior Art, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The graphite crucible that Fig. 1 provides for prior art and the sectional view that coordinates of crucible holder;
The graphite crucible that Fig. 2 provides for prior art and crucible holder produce structural representation behind the gap through polishing;
The sectional structure chart of the graphite crucible of the single crystal growing furnace that Fig. 3 provides for the utility model embodiment;
The vertical view of the graphite crucible of the single crystal growing furnace that Fig. 4 provides for the utility model embodiment.
In above Fig. 1-Fig. 4:
Graphite crucible 01, crucible holder 02;
Crucible piece 1, the first groove 2, the second groove 3.
Embodiment
In order further to understand the utility model, below in conjunction with embodiment, the utility model preferred implementation is described, but should be appreciated that these describe just in order to further illustrate feature and advantage of the present utility model, rather than to the restriction of the utility model claim.
The utility model provides a kind of single crystal growing furnace graphite crucible, and it has avoided the run-off the straight of crucible piece, so avoided and well heater between the sparking accident occurs, guaranteed the normal operation of single crystal growing furnace, also need not to change parts, saved production cost.
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
As shown in Figure 3 and Figure 4, the single crystal growing furnace that the utility model embodiment provides graphite crucible, it comprises:
Many lobes crucible piece 1 of complete graphite crucible be can be spliced into, the first groove 2 and the second groove 3 are provided with on many lobes crucible piece 1;
Be arranged on the first groove 2 of cooperatively interacting on different crucible pieces 1 and the web member (not shown in FIG.) of being connected in groove 3 with the two lobe crucible pieces 1 that connect arbitrary neighborhood.
The single crystal growing furnace that the present embodiment provides is with in the graphite crucible, be provided with the first groove 2 and the second groove 3 on every lobe crucible piece 1, wherein the first groove 2 coordinates with the second groove 3 on adjacent crucible piece 1, the first groove 2 on the second groove 3 crucible piece 1 adjacent with another coordinates, and web member is arranged on the first groove 2 and the second groove 3 coordinates in the larger groove that forms so that two adjacent crucible pieces 1 are connected as one.The single crystal growing furnace that the utility model provides graphite crucible, groove is set thereon, and web member is set in groove, so that many lobes crucible piece 1 is connected as one, avoided crucible piece 1 because depositing in the gap run-off the straight with crucible, avoided occuring between graphite crucible and well heater the risk of sparking, reduced the damage probability of parts, guarantee the normal operation of single crystal growing furnace, also need not to change parts, saved production cost.
In order further to optimize technique scheme, the single crystal growing furnace that the present embodiment provides is with in the graphite crucible, and the first groove 2 and the second groove 3 are arc groove, as Fig. 3 and Fig. 4.The first groove 2 of arc and the second groove 3 complete processings are comparatively simple, and better appearance, the more important thing is and be arranged on the first groove 2 of arc and the second groove 3 when interior when web member, the barrier force that web member imposes on crucible piece 1 can relatively be evenly distributed in each position of arc groove, can not produce concentrated reactive force, avoid confronting crisp crucible piece 1 injury, not only improved the connection effect, and farthest reduced the impact in work-ing life of graphite crucible.
Preferably, the first groove 2 and the second groove 3 are near the top of crucible piece 1.The first groove 2 and the second groove 3 are arranged on the edge of crucible piece 1, produce the gap because of inclination between its crucible piece 1 that not only can farthest avoid being stitched together, quartz crucible and the raw silicon of also having avoided simultaneously the first groove 2 and 3 pairs of the second grooves to be contained in the graphite crucible impact as far as possible, have further avoided the impact that normal production is produced because of texture improvement.
Concrete, the cross-sectional shape of the first groove 2 and the second groove 3 is L shaped, as shown in Figure 4.All be set to the cross-sectional shape of the first groove 2 and the second groove 3 L shaped, make its inside have rib, web member can be stopped the location by cell wall when interior being installed on the first groove 2 and the second groove 3, web member can be more firm be installed in the first groove 2 and the second groove 3, reduce the risk of web member accidental, made the connection effect obtain further assurance.
As shown in Figure 4, the first groove 2 and the second groove 3 all are opened on the outer side wall of crucible piece 1.Offer the first groove 2 and be connected groove 3 so that crucible piece 1 is connected on outer side wall, having avoided the first groove 2 and the second groove 3 to be opened on inner side-wall impacts quartz crucible and the raw silicon that is contained in the graphite crucible, make production process to complete smoothly, further the mature technology scheme.
In the present embodiment, web member is molybdenum filament.In the solar module production process, molybdenum filament is the means of production of using in monocrystalline silicon production operation other operations in addition, uses molybdenum filament as web member in the monocrystalline silicon production process, can draw materials nearby, and reused the resources of production, reduced production cost.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be apparent concerning those skilled in the art, and General Principle as defined herein can be in the situation that do not break away from spirit or scope of the present utility model, realization in other embodiments.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (6)
1. a single crystal growing furnace graphite crucible, is characterized in that, comprising:
Many lobes crucible piece (1) of complete graphite crucible be can be spliced into, the first groove (2) and the second groove (3) are provided with on the described crucible pieces of many lobes (1);
Be arranged on described the first groove (2) of cooperatively interacting on different described crucible pieces (1) and the web member of being connected in groove (3) with the two described crucible pieces of lobe (1) that connect arbitrary neighborhood.
2. single crystal growing furnace according to claim 1 graphite crucible, is characterized in that, described the first groove (2) and described the second groove (3) are arc groove.
3. single crystal growing furnace according to claim 1 graphite crucible, is characterized in that, described the first groove (2) and described the second groove (3) are near the top of described crucible piece (1).
4. single crystal growing furnace according to claim 1 graphite crucible, is characterized in that, the cross-sectional shape of described the first groove (2) and described the second groove (3) is L shaped.
5. single crystal growing furnace according to claim 1 graphite crucible, is characterized in that, described the first groove (2) and described the second groove (3) all are opened on the outer side wall of described crucible piece (1).
6. the described single crystal growing furnace of any one graphite crucible according to claim 1-5, is characterized in that, described web member is molybdenum filament.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201220719967 CN202968749U (en) | 2012-12-24 | 2012-12-24 | Graphite pot for single crystal furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201220719967 CN202968749U (en) | 2012-12-24 | 2012-12-24 | Graphite pot for single crystal furnace |
Publications (1)
Publication Number | Publication Date |
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CN202968749U true CN202968749U (en) | 2013-06-05 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN 201220719967 Expired - Fee Related CN202968749U (en) | 2012-12-24 | 2012-12-24 | Graphite pot for single crystal furnace |
Country Status (1)
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CN (1) | CN202968749U (en) |
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2012
- 2012-12-24 CN CN 201220719967 patent/CN202968749U/en not_active Expired - Fee Related
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Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130605 Termination date: 20151224 |
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EXPY | Termination of patent right or utility model |