CN202979277U - Iron-casing capacitance silicon microphone with correctable sensitivity - Google Patents
Iron-casing capacitance silicon microphone with correctable sensitivity Download PDFInfo
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- CN202979277U CN202979277U CN 201220753752 CN201220753752U CN202979277U CN 202979277 U CN202979277 U CN 202979277U CN 201220753752 CN201220753752 CN 201220753752 CN 201220753752 U CN201220753752 U CN 201220753752U CN 202979277 U CN202979277 U CN 202979277U
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Abstract
The utility model relates to an iron-casing capacitance silicon microphone with correctable sensitivity, and aims to provided an iron-casing capacitance silicon microphone with correctable sensitivity having the advantages of simple structure, convenient manufacturing, excellent performance and low cost. The iron-casing capacitance silicon microphone comprises a metallic iron casing, a PCB, an MEMS wafer, an amplifier wafer and two capacitors, wherein the metallic iron casing is packaged on the PCB to form an accommodating cavity, the MEMS wafer, the amplifier wafer and the two capacitors are packaged in the accommodating cavity and are mounted on the inner surface of the PCB. The iron-casing capacitance silicon microphone is characterized in that corresponding circuit structures are arranged on the surface of the PCB, the MEMS wafer and the amplifier wafer are communicated with the circuit structures on the PCB through metal wires, and the amplifier wafer is a programmable amplifier wafer. If the sensitivity test cannot reach the range of a target value, the MEMS wafer enters a calibration mode, and the sensitivity is calibrated to the target value by changing the function of an IC gain value through programming of the amplifier wafer.
Description
Technical field
The utility model relates to microphone, relates in particular to the correctable shell-type capacitive silicon of sensitivity microphone.
Background technology
The power supply that common silicon microphone uses and audio frequency output node are all to guide to the pcb board surface of silicon microphone in silicon microphone by metal wire.After the silicon microphone assembling was completed, sensitivity test just can not used in target zone, causes the raising of cost.
The utility model content
The purpose of this utility model is to provide a kind of simple in structure, easily manufactured, function admirable, the correctable shell-type capacitive silicon of sensitivity microphone that cost is low.
in order to reach above-mentioned requirements, the technical solution of the utility model is: it includes a metal iron-clad, pcb board, the MEMS wafer, the amplifier wafer, two electric capacity, metal iron-clad of encapsulation on pcb board, form an accommodating cavity, be packaged with the MEMS wafer in accommodating cavity, amplifier wafer and two electric capacity, and be mounted on the inner surface of pcb board, it is characterized in that being placed with corresponding circuit structure on the surface of pcb board, the MEMS wafer, the amplifier wafer is to be communicated with circuit structure on pcb board by metal wire, described amplifier wafer is the programmable amplifier wafer, in the time of in sensitivity test does not reach target range, make the MEMS wafer enter correction mode, thereby the programming by the amplifier wafer changes the function of IC yield value makes sensitivity correction arrive desired value.
Described metal iron-clad inner surface is connected with quoit.
The correctable shell-type capacitive silicon of sensitivity microphone according to the such scheme manufacturing, its advantage is that this silicon microphone adopts metal iron-clad of encapsulation on pcb board, form an accommodating cavity, include a MEMS wafer, an amplifier wafer and two electric capacity in accommodating cavity, and be mounted on the inner surface of pcb board, be placed with corresponding circuit structure on the surface of pcb board, MEMS wafer, amplifier wafer are communicated with the pcb board circuit structure by metal wire.Make to connect reliably, production and processing and easy to use, the metal iron-clad can make whole silicon microphone not be subjected to the interference of external electromagnetic signal.Especially control the height of sensitivity with the amplifier in silicon microphone, reach controlled range :+5dB～-2dB, can improve like this 5% qualified products.Therefore, this structure have connect reliable, PROCESS FOR TREATMENT is simple, makes and easy to use, the advantage that performance is good has improved rate of finished products.
Description of drawings
Fig. 1 is the front view after the correctable shell-type capacitive silicon of sensitivity microphone broken section;
Fig. 2 is the rearview of Fig. 1.
Wherein: 1, metal iron-clad; 2, pcb board; 3, accommodating cavity; 4, MEMS wafer; 5, amplifier wafer; 6, electric capacity; 7, metal wire; 8, metal guide through hole; 9, quoit; 10, product pad.
Embodiment
The utility model will be further described below in conjunction with the drawings and specific embodiments.
Fig. 1, Fig. 2 are the structural representations of the correctable shell-type capacitive silicon of sensitivity microphone.as seen from the figure, it has metal iron-clad 1, pcb board 2, form an accommodating cavity 3, include MEMS wafer 4 in accommodating cavity 3, amplifier wafer 5 and two electric capacity 6, and be mounted on the inner surface of pcb board 2, with metal wire 7 and corresponding MEMS wafer 4, amplifier wafer 5 is communicated with on pcb board 2, all be placed with corresponding circuit structure on pcb board 2 surfaces externally and internallies and connected by metal guide through hole 8, the inner surface of metal iron-clad 1 is connected with quoit 9, strengthened the shielding interference effect of external electromagnetic signal, strengthen the anti-High-frequency Interference ability of product, improved the adaptability of product to environmental change.
Outer surface at pcb board 2 is provided with product pad 10, and it is respectively the power supply of MEMS wafer 4, amplifier wafer 5 and the tie point of audio frequency output.Come test products whether qualified by product pad 10, as defective in product sensitivity height can passing through to amplifier wafer 5 input specific cryptosystems to output, and coordinate voltage to switch, automated programming is passed through in amplifier wafer 5 inside, change the function of IC yield value, make sensitivity correction arrive desired value, reach the qualified of product, finally can make the qualification rate of product improve 5%.
Claims (2)
1. the correctable shell-type capacitive silicon of sensitivity microphone, it includes a metal iron-clad, pcb board, the MEMS wafer, the amplifier wafer, two electric capacity, metal iron-clad of encapsulation on pcb board, form an accommodating cavity, be packaged with the MEMS wafer in accommodating cavity, amplifier wafer and two electric capacity, and be mounted on the inner surface of pcb board, it is characterized in that being placed with corresponding circuit structure on the surface of pcb board, the MEMS wafer, the amplifier wafer is to be communicated with circuit structure on pcb board by metal wire, described amplifier wafer is the programmable amplifier wafer, in the time of in sensitivity test does not reach target range, make the MEMS wafer enter correction mode, thereby the programming by the amplifier wafer changes the function of IC yield value makes sensitivity correction arrive desired value.
2. the correctable shell-type capacitive silicon of sensitivity according to claim 1 microphone, is characterized in that described metal iron-clad inner surface is connected with quoit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220753752 CN202979277U (en) | 2012-12-19 | 2012-12-19 | Iron-casing capacitance silicon microphone with correctable sensitivity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220753752 CN202979277U (en) | 2012-12-19 | 2012-12-19 | Iron-casing capacitance silicon microphone with correctable sensitivity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202979277U true CN202979277U (en) | 2013-06-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220753752 Expired - Fee Related CN202979277U (en) | 2012-12-19 | 2012-12-19 | Iron-casing capacitance silicon microphone with correctable sensitivity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202979277U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110595612A (en) * | 2019-09-19 | 2019-12-20 | 三峡大学 | Method and system for automatically calibrating sensitivity of microphone of noise acquisition device of power equipment |
| CN115855237A (en) * | 2023-01-03 | 2023-03-28 | 杭州爱华仪器有限公司 | Microphone fault automatic identification system based on sound level meter |
-
2012
- 2012-12-19 CN CN 201220753752 patent/CN202979277U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110595612A (en) * | 2019-09-19 | 2019-12-20 | 三峡大学 | Method and system for automatically calibrating sensitivity of microphone of noise acquisition device of power equipment |
| CN115855237A (en) * | 2023-01-03 | 2023-03-28 | 杭州爱华仪器有限公司 | Microphone fault automatic identification system based on sound level meter |
| CN115855237B (en) * | 2023-01-03 | 2023-06-27 | 杭州爱华仪器有限公司 | Microphone fault automatic identification system based on sound level meter |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP03 | Change of name, title or address |
Address after: 314100 No. 36 Dongsheng Road, Jiashan County, Zhejiang Province Patentee after: BUS ONLINE CO., LTD. Address before: 314100 No. 36 Dongsheng Road, Jiashan Economic Development Zone, Zhejiang Patentee before: Zhejiang New Jialian Electronics Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130605 Termination date: 20151219 |
|
| EXPY | Termination of patent right or utility model |