CN202957977U - 一种微机电传声器芯片 - Google Patents
一种微机电传声器芯片 Download PDFInfo
- Publication number
- CN202957977U CN202957977U CN 201220603941 CN201220603941U CN202957977U CN 202957977 U CN202957977 U CN 202957977U CN 201220603941 CN201220603941 CN 201220603941 CN 201220603941 U CN201220603941 U CN 201220603941U CN 202957977 U CN202957977 U CN 202957977U
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- Prior art keywords
- layer
- microphone chip
- vibrating diaphragm
- conductive layer
- insulating barrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000002184 metal Substances 0.000 claims abstract description 29
- 230000004888 barrier function Effects 0.000 claims description 62
- 239000000758 substrate Substances 0.000 claims description 17
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 10
- 229920005591 polysilicon Polymers 0.000 claims description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 239000002131 composite material Substances 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 230000008901 benefit Effects 0.000 abstract description 2
- 230000000903 blocking effect Effects 0.000 abstract 3
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Images
Landscapes
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Pressure Sensors (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201220603941 CN202957977U (zh) | 2012-11-15 | 2012-11-15 | 一种微机电传声器芯片 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201220603941 CN202957977U (zh) | 2012-11-15 | 2012-11-15 | 一种微机电传声器芯片 |
Publications (1)
Publication Number | Publication Date |
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CN202957977U true CN202957977U (zh) | 2013-05-29 |
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Application Number | Title | Priority Date | Filing Date |
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CN 201220603941 Expired - Lifetime CN202957977U (zh) | 2012-11-15 | 2012-11-15 | 一种微机电传声器芯片 |
Country Status (1)
Country | Link |
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CN (1) | CN202957977U (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015196468A1 (en) * | 2014-06-27 | 2015-12-30 | Goertek Inc. | Silicon microphone with suspended diaphragm and system with the same |
CN107040857A (zh) * | 2016-02-04 | 2017-08-11 | 北京卓锐微技术有限公司 | Mems结构及其制造方法 |
CN113347541A (zh) * | 2021-07-07 | 2021-09-03 | 瑞声声学科技(深圳)有限公司 | 麦克风及其制造方法 |
-
2012
- 2012-11-15 CN CN 201220603941 patent/CN202957977U/zh not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015196468A1 (en) * | 2014-06-27 | 2015-12-30 | Goertek Inc. | Silicon microphone with suspended diaphragm and system with the same |
CN105359553A (zh) * | 2014-06-27 | 2016-02-24 | 歌尔声学股份有限公司 | 具有悬挂式振膜的硅麦克风和具有该硅麦克风的系统 |
US10158951B2 (en) | 2014-06-27 | 2018-12-18 | Goertek Inc. | Silicon microphone with suspended diaphragm and system with the same |
CN107040857A (zh) * | 2016-02-04 | 2017-08-11 | 北京卓锐微技术有限公司 | Mems结构及其制造方法 |
CN113347541A (zh) * | 2021-07-07 | 2021-09-03 | 瑞声声学科技(深圳)有限公司 | 麦克风及其制造方法 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20200615 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
|
TR01 | Transfer of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20130529 |
|
CX01 | Expiry of patent term |