CN202913053U - Magnetic positioning system with substrate frames - Google Patents
Magnetic positioning system with substrate frames Download PDFInfo
- Publication number
- CN202913053U CN202913053U CN 201220096402 CN201220096402U CN202913053U CN 202913053 U CN202913053 U CN 202913053U CN 201220096402 CN201220096402 CN 201220096402 CN 201220096402 U CN201220096402 U CN 201220096402U CN 202913053 U CN202913053 U CN 202913053U
- Authority
- CN
- China
- Prior art keywords
- magnet
- substrate
- substrate frame
- positioning system
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 67
- 230000007246 mechanism Effects 0.000 claims abstract description 19
- 230000005540 biological transmission Effects 0.000 claims abstract description 17
- 238000005477 sputtering target Methods 0.000 claims abstract description 13
- 238000005339 levitation Methods 0.000 claims description 12
- 229910001220 stainless steel Inorganic materials 0.000 claims description 5
- 239000010935 stainless steel Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 239000012634 fragment Substances 0.000 abstract description 2
- 238000012423 maintenance Methods 0.000 abstract description 2
- 239000000725 suspension Substances 0.000 abstract 3
- 239000011521 glass Substances 0.000 description 3
- 230000003993 interaction Effects 0.000 description 2
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 description 1
- 230000036760 body temperature Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910001172 neodymium magnet Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011214 refractory ceramic Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Abstract
The utility model relates to a magnetic positioning system with substrate frames, which comprises a vacuum box body, a transmission mechanism, magnetic suspension positioning mechanisms, a center heater, two sputtering targets and a plurality of groups of substrate frames, wherein the transmission mechanism, the magnetic suspension positioning mechanisms, the center heater, the two sputtering targets and the groups of substrate frames are positioned inside the box body; the center heater of the magnetic positioning system is mounted in the middle of the vacuum box body; the groups of substrate frames are mounted on a transmission track between the center heater and the two sputtering targets, and the bottoms of the groups of substrate frames are mounted on the transmission mechanism; and the magnetic suspension positioning mechanisms are mounted at the tops of the groups of substrate frames. The magnetic positioning system has the beneficial effects that as the positioning purpose is achieved through mutual attraction of magnetic fields, the substrate frames are in non-mechanical contact with the positioning system in the running process; no friction is generated, pollution is avoided, the service life is long, and too much maintenance is not required; and through the mounting of the system, the running stability of the substrate frames is improved, no fragment falling phenomenon exists, and the yield and the quality of products are greatly improved.
Description
Technical field
The utility model relates to field of vacuum coating, especially the transmission locating structure of substrate frame, specifically a kind of magnetic positioning system for substrate frames in the glass evacuated plated film industry of ITO.
Background technology
At present; traditional substrate frame is as main take rack gear; as shown in Figure 1, the substrate frame top is unsettled, when substrate frame loading glass moves in vacuum chamber; because the top is without the impact of locating and being subjected to furnace body temperature; whole system in operational process, occurs rocking and swiping, causes the damaged of glass substrate and drop, so that can not normally be moved; must shut down process, quality and the Systems balanth of product brought many impacts.
Summary of the invention
The purpose of this utility model is in the vacuum plating, and traditional substrate frame adopts the existing problem of rack gear, proposes a kind of magnetic positioning system for substrate frames.This system utilizes the magnet principle that there is a natural attraction between the sexes, the interaction by magnetic field up and down so that substrate frame can move by the track of its regulation.
The technical solution of the utility model is:
A kind of magnetic positioning system for substrate frames, the transmission rig that it comprises vacuum chamber and is positioned at box house, the magnetic levitation locating mechanism, central heater, two sputtering targets and many group substrate frame, described central heater is installed in the middle part of vacuum chamber, two sputtering targets are installed in respectively on the two side of vacuum chamber, many group substrate frame are installed on the transmission track between central heater and two sputtering targets, each bottom of organizing substrate frame is installed on the transmission rig, each is organized the top of substrate frame the magnetic levitation locating mechanism is installed, described magnetic levitation locating mechanism comprises many groups magnet of paired setting, according to the running orbit of substrate frame at the top of vacuum chamber by same polarity a plurality of magnet of arranging, at the top of corresponding substrate frame according to the opposite polarity a plurality of magnet of arranging of aforementioned magnet.
Many group substrate frame of the present utility model are stainless steel stent.
Transmission rig of the present utility model comprises the U-shaped friction drive wheel of many groups, and each is organized and clamps respectively two substrate frame on the U-shaped friction drive wheel.
Magnetic levitation locating mechanism of the present utility model comprises many groups magnet of paired setting, and the gap of magnet that is installed in magnet and the top that is installed in vacuum chamber on the substrate frame is 3-7mm.
The magnet that is installed on the substrate frame of the present utility model all adopts 50 * 20 * 10 rectangular magnet series combination growth bar magnet with the magnet that is installed in the top of vacuum chamber.
The magnet that is installed in the top of vacuum chamber of the present utility model is by the N down of S up, be installed in magnet on the substrate frame and be up S down N arrange.
The beneficial effects of the utility model:
The utility model is owing to reach the purpose of location by attracting each other of magnetic field, substrate frame contacts with the station-keeping system machinery-free in operational process, without friction, do not produce pollution, long service life does not need too much maintenance, installation by this system, the substrate frame operation stability is improved, and no longer includes fragment and falls the sheet phenomenon, and the yield and quality of product all is improved largely.
Description of drawings
Fig. 1 is traditional substrate frame location of the present utility model and the synoptic diagram of drive mechanism.
Fig. 2 is structural representation of the present utility model.
Among the figure: 1, vacuum chamber; 2, U-shaped friction drive wheel; 3, magnetic levitation locating mechanism;
4, central heater; 5, sputtering target; 6, substrate frame; 7, rack gear.
Embodiment
Below in conjunction with drawings and Examples the utility model is further described.
As shown in Figure 1, a kind of magnetic positioning system for substrate frames, it comprises vacuum chamber 1 and the transmission rig that is positioned at box house, magnetic levitation locating mechanism 3, central heater 4, two sputtering targets 5 and many group substrate frame 6, described central heater 4 is installed in the middle part of vacuum chamber 1, two sputtering targets 5 are installed in respectively on the two side of vacuum chamber 1, many group substrate frame 6 are installed on the transmission track between central heater 4 and two sputtering targets 5, each bottom of organizing substrate frame 6 is installed on the transmission rig, each is organized the top of substrate frame 6 magnetic levitation locating mechanism 3 is installed, described magnetic levitation locating mechanism 3 comprises many groups magnet of paired setting, according to the running orbit of substrate frame 6 at the top of vacuum chamber 1 by same polarity a plurality of magnet of arranging, at the top of corresponding substrate frame 6 according to the opposite polarity a plurality of magnet of arranging of aforementioned magnet.The described magnet that is installed on the substrate frame 6 all adopts 50 * 20 * 10 rectangular magnet series combination growth bar magnet with the magnet that is installed in the top of vacuum chamber 1.As shown in Figure 1, the magnet that is installed in the top of vacuum chamber 1 is by the N down of S up, be installed in magnet on the substrate frame 6 and be up S down N arrange, the gap that is installed in magnet and the magnet at the top that is installed in vacuum chamber 1 on the substrate frame 6 is 3-7mm.
Many group substrate frame 6 of the present utility model are stainless steel stent.
Transmission rig of the present utility model comprises the U-shaped friction drive wheel 2 of many groups, and each is organized and clamps respectively two substrate frame 6 on the U-shaped friction drive wheel 2.
This system utilizes the magnet principle that there is a natural attraction between the sexes, the interaction by magnetic field up and down so that substrate frame can move by the track of its regulation.Upper magnet is arranged in the stainless steel stent by same polarity, and be fixed on the vacuum chamber top according to the substrate frame running orbit, bottom magnet is arranged in the stainless steel stent by opposite polarity, be fixed on the substrate frame top with refractory ceramics as supporting seat, station-keeping system is selected high temperature resistant magnetic material neodymium iron boron N35AH, and upper lower magnet gap is adjusted in the scope of 5mm ± 2.
The utility model does not relate to partly all, and the prior art that maybe can adopt same as the prior art is realized.
Claims (6)
1. magnetic positioning system for substrate frames, it is characterized in that it comprises vacuum chamber (1) and the transmission rig that is positioned at box house, magnetic levitation locating mechanism (3), central heater (4), two sputtering targets (5) and many group substrate frame (6), described central heater (4) is installed in the middle part of vacuum chamber (1), two sputtering targets (5) are installed in respectively on the two side of vacuum chamber (1), many group substrate frame (6) are installed on the transmission track between central heater (4) and two sputtering targets (5), each bottom of organizing substrate frame (6) is installed on the transmission rig, each is organized the top of substrate frame (6) magnetic levitation locating mechanism (3) is installed, described magnetic levitation locating mechanism (3) comprises many groups magnet of paired setting, according to the running orbit of substrate frame (6) at the top of vacuum chamber (1) by same polarity a plurality of magnet of arranging, at the top of corresponding substrate frame (6) according to the opposite polarity a plurality of magnet of arranging of aforementioned magnet.
2. magnetic positioning system for substrate frames according to claim 1 is characterized in that described many group substrate frame (6) are stainless steel stent.
3. magnetic positioning system for substrate frames according to claim 1 is characterized in that described transmission rig comprises many group U-shaped friction drive wheels (2), and each is organized and clamps respectively two substrate frame (6) on the U-shaped friction drive wheel (2).
4. magnetic positioning system for substrate frames according to claim 1, it is characterized in that described magnetic levitation locating mechanism (3) comprises many groups magnet of paired setting, the gap of magnet that is installed in magnet and the top that is installed in vacuum chamber (1) on the substrate frame (6) is 3-7mm.
5. magnetic positioning system for substrate frames according to claim 1 is characterized in that the described magnet that is installed on the substrate frame (6) all adopts 50 * 20 * 10 rectangular magnet series combination growth bar magnet with the magnet that is installed in the top of vacuum chamber (1).
6. magnetic positioning system for substrate frames according to claim 1 is characterized in that the described magnet that is installed in the top of vacuum chamber (1) is by the N down of S up, be installed in magnet on the substrate frame (6) and be up S down N arrange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220096402 CN202913053U (en) | 2012-03-14 | 2012-03-14 | Magnetic positioning system with substrate frames |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220096402 CN202913053U (en) | 2012-03-14 | 2012-03-14 | Magnetic positioning system with substrate frames |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202913053U true CN202913053U (en) | 2013-05-01 |
Family
ID=48161381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220096402 Expired - Lifetime CN202913053U (en) | 2012-03-14 | 2012-03-14 | Magnetic positioning system with substrate frames |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202913053U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104404473A (en) * | 2014-11-29 | 2015-03-11 | 洛阳康耀电子有限公司 | Vacuum magnetron sputtering coating magnetic suspension ITO film loading running device and application method |
| CN104404465A (en) * | 2014-11-29 | 2015-03-11 | 洛阳康耀电子有限公司 | Vacuum magnetron sputtering coating magnetic suspension transmission device and application method |
| CN107488834A (en) * | 2017-08-15 | 2017-12-19 | 武汉华星光电半导体显示技术有限公司 | A kind of conveyer and vacuum sputtering equipment |
-
2012
- 2012-03-14 CN CN 201220096402 patent/CN202913053U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104404473A (en) * | 2014-11-29 | 2015-03-11 | 洛阳康耀电子有限公司 | Vacuum magnetron sputtering coating magnetic suspension ITO film loading running device and application method |
| CN104404465A (en) * | 2014-11-29 | 2015-03-11 | 洛阳康耀电子有限公司 | Vacuum magnetron sputtering coating magnetic suspension transmission device and application method |
| CN107488834A (en) * | 2017-08-15 | 2017-12-19 | 武汉华星光电半导体显示技术有限公司 | A kind of conveyer and vacuum sputtering equipment |
| CN107488834B (en) * | 2017-08-15 | 2019-08-02 | 武汉华星光电半导体显示技术有限公司 | A kind of transmission device and vacuum sputtering equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Magnetic positioning system for substrate frames Effective date of registration: 20161107 Granted publication date: 20130501 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd new sub branch Pledgor: Wuxi Kangli Electronic Co., Ltd. Registration number: 2016990000950 |
|
| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20191029 Granted publication date: 20130501 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd new sub branch Pledgor: Wuxi Kangli Electronic Co., Ltd. Registration number: 2016990000950 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Magnetic positioning system for substrate frames Effective date of registration: 20191029 Granted publication date: 20130501 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd new sub branch Pledgor: Wuxi Kangli Electronic Co., Ltd. Registration number: Y2019990000425 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20210521 Granted publication date: 20130501 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd. new sub branch Pledgor: WUXI KANGLI ELECTRONIC Co.,Ltd. Registration number: Y2019990000425 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Magnetic positioning system of substrate holder Effective date of registration: 20210521 Granted publication date: 20130501 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd. new sub branch Pledgor: WUXI KANGLI ELECTRONIC Co.,Ltd. Registration number: Y2021990000453 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130501 |
|
| CX01 | Expiry of patent term |