CN104404465A - Vacuum magnetron sputtering coating magnetic suspension transmission device and application method - Google Patents
Vacuum magnetron sputtering coating magnetic suspension transmission device and application method Download PDFInfo
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- CN104404465A CN104404465A CN201410736254.XA CN201410736254A CN104404465A CN 104404465 A CN104404465 A CN 104404465A CN 201410736254 A CN201410736254 A CN 201410736254A CN 104404465 A CN104404465 A CN 104404465A
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- shaped magnet
- pole
- magnetic
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- magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
Abstract
The invention discloses a vacuum magnetron sputtering coating magnetic suspension transmission device and an application method. The device consists of a trolley body, upper insulating blocks, a first magnetic solid boot, an inverted U-shaped magnet sheath, strong magnetic poles N, lower insulating seats, a transmission guide rod, transmission wheels of a transmission system, a T-shaped magnet sheath, strong magnetic poles S, a second magnetic solid boot and screws. The device is simple in structure, reasonable in design, convenient to operate, low in manufacturing cost and remarkable in running effect, improves the working efficiency and the quality of a product, and is applied to continuous substrate flow of vacuum magnetron sputtering coating equipment; the running stability, acceleration and deceleration performance and insulation performance of a trolley in a vacuum chamber are improved, the production quality of the product is remarkably improved, the production yield and the qualified rate are increased, an optimization process is remarkably improved, the failure rate of equipment is effectively lowered, and high-end equipment technological reformation in the vacuum magnetron sputtering coating equipment is achieved.
Description
Technical field
The present invention relates to technical field of magnetic transmission, especially a kind of vacuum magnetron sputtering coating film magnetic suspension driving gear and application method.
Background technology
At present, in vacuum magnetron sputtering coating film equipment, the substrate frame dolly transmission of loading glass requires that steadily, acceleration and deceleration are good, and and have good insulation between vacuum cavity.In domestic or import equipment, the employing that early stage equipment is commonplace be geartransmission, dolly is directly and guide rail contact.In buffer chamber, the distance between guide wheel and guide rail, verticality, parallelism, transmission accuracy are difficult to adjustment, and directly contact forms friction and causes rack-and-pinion, guide rail and dolly movable pulley and all easily wear and tear.Dolly stationarity in operational process is very poor, and progression is firmly contacted with tooth bar by gear, do not have damping, easily shake during operation, vibrations.When track generation deflection, dolly easily derails in addition, causes dolly to break the equipment unit of other inside cavity, causes more serious consequence.Dolly is directly connected with cavity in target sputtering zone, does not form insulation isolation, causes target in sputter procedure, easily to beat arc, jump target, affects the stability of equipment.Cause production conforming product rate low, quality product is poor.
In view of the foregoing, the structure of existing vacuum magnetron sputtering coating film transmission mechanism needs to improve.
Summary of the invention
The object of the invention is to overcome deficiency of the prior art, a kind of vacuum magnetron sputtering coating film magnetic suspension driving gear and application method are provided, structure is simple, reasonable in design, easy to operate, low cost of manufacture, operating performance is remarkable, improve working efficiency, improve quality product, be applicable to vacuum magnetron sputtering coating film equipment continuous substrate sheet stream, improve dolly traveling comfort energy in vacuum chamber, acceleration and deceleration performance, insulating property, significantly improve the quality of producing product, improve production output, qualification rate, obvious improvement is had to Optimization Technology, effectively reduce the failure rate of equipment, the technological improvement of high-end devices is belonged in vacuum magnetic control film coating equipment.
The present invention to achieve these goals, adopt following technical scheme: a kind of vacuum magnetron sputtering coating film magnetic suspension driving gear and application method, be by: car body, upper collets, magnetic boots, inverted U-shaped magnet sheath, strong magnetic N pole, lower bench insulator, transmission tail rod, transmission system power wheel, T-shaped magnet sheath, strong magnetic S pole, No. two magnetic boots, screws are formed; At least five upper collets are set above car body, below arranges at least five lower bench insulators, between the top of upper collets and inverted U-shaped magnet sheath, magnetic boots are set, strong magnetic N pole is set in inverted U-shaped magnet sheath, below lower bench insulator, transmission tail rod is set, correspondingly with transmission system power wheel below transmission tail rod arranges; T-shaped magnet sheath is set above inverted U-shaped magnet sheath, reserved the action of a magnetic field space between T-shaped magnet sheath and inverted U-shaped magnet sheath, strong magnetic S pole is set in T-shaped magnet sheath, No. two magnetic boots are set above T-shaped magnet sheath, T-shaped magnet sheath is fixed by screws on No. two magnetic boots, and No. two magnetic boots are arranged on vacuum chamber top.
The section of described upper collets is H-shaped, and the upper and lower of upper collets forms upper draw-in groove and lower bayonet slot respectively, and lower bayonet slot is corresponding with above car body to be arranged, and upper draw-in groove is corresponding with the below of magnetic boots to be arranged.
In described T-shaped magnet sheath, magnet cavity is set, strong magnetic S pole is set in magnet cavity; Arrange magnet cavity in inverted U-shaped magnet sheath, arrange strong magnetic N pole in magnet cavity, the strong magnetic N pole in inverted U-shaped magnet sheath is corresponding with the top of magnetic boots to be arranged.
The top of described lower bench insulator arranges draw-in groove, and below arranges arc groove, and upper draw-in groove is corresponding with below car body to be arranged, and arc groove is corresponding with transmission tail rod to be arranged.
Described T-shaped magnet sheath and inverted U-shaped magnet sheath are positioned on same vertical line.
Strong magnetic S pole in described T-shaped magnet sheath is perpendicular to No. two magnetic boots.
Described strong magnetic N pole adopts the samarium cobalt magnet of 3200-4500 Gauss, and strong magnetic S pole adopts the samarium cobalt magnet of 3800-5000 Gauss.
The upper collets of car body upper and lower and lower bench insulator make car body and vacuum chamber insulate to reach to insulate with cathode and anode, strong magnetic N pole in strong magnetic S pole in T-shaped magnet sheath and inverted U-shaped magnet sheath produces mutual magnetism, car body is made upwards to be in suspended state, simultaneously, after the magnet stupid school power of strong magnetic S pole and strong magnetic N pole offsets, strong magnetic S pole and strong magnetic N pole is made to avoid together with suction, transmission tail rod and transmission system power wheel friction contact, frictional force is the suction that the gravity of car body deducts upwards, and car body is along with the rotation smooth running forward of transmission system power wheel.
Startup optimization ito film continuity vacuum magnetron sputtering coating film equipment, vacuumizes in continuity vacuum magnetron sputtering coating film canyon, makes background vacuum be 5 × 10-4Pa-6.8 × 10-4Pa, passes into the oxygen O2 of sputter gas argon Ar and composition as a supplement; Under the condition of vacuum, at least one piece of rectangle target is loaded at the ito thin film installing zone of car body, adopt the ceramic target that the powder be made up of 3-10%SnO2 and 90%-97%In2O3 sinters through heat, static pressure, control vacuum chamber wall body temperature control heating device and vacuum chamber temperature control door are to target homogeneous heating, regulate substrate substrate preheating temperature, justifying evenly reaches 50 DEG C-200 DEG C, prepares and deposit ito thin film on clean glass substrate;
Run plated film carriage device, strong magnetic N pole in strong magnetic S pole in T-shaped magnet sheath and inverted U-shaped magnet sheath produces the magnetic force attracted each other, plated film carriage device is at the uniform velocity advanced with the speed of 0.5-1m/min, upper collets and lower bench insulator make the positive and negative electrode of car body and vacuum chamber insulate, ito thin film in guarantee ito thin film installing zone is by the interference of the positive and negative electrode of vacuum chamber, simultaneously, magnetically controlled DC sputtering is carried out to glass substrate, sputtering power is 4KW-5KW, during sputtering, operating pressure is 0.4-0.6Pa, be 120-160Sccm by the Flow-rate adjustment of the argon Ar passed into, the Flow-rate adjustment of oxygen O2 is 3-7Sccm, and control vacuum chamber wall body temperature control heating device and vacuum chamber temperature control door and evenly fully 1-3 minute is heated for target, regulate substrate underlayer temperature, justifying evenly reaches 200 DEG C-350 DEG C,
The ito thin film prepared on a glass substrate, thickness is 30nm, then carries out plated film annealing; Making resistivity is 2 × 10
-4 Ω/cm, transmitance are the finished product of the ito film of more than 90%, packaging warehouse-in.
The invention has the beneficial effects as follows: structure of the present invention is simple, reasonable in design, easy to operate, low cost of manufacture, operating performance is remarkable, improve working efficiency, improve quality product, be applicable to vacuum magnetron sputtering coating film equipment continuous substrate sheet stream, improve dolly traveling comfort energy in vacuum chamber, acceleration and deceleration performance, insulating property, significantly improve the quality of producing product, improve production output, qualification rate, obvious improvement is had to Optimization Technology, effectively reduce the failure rate of equipment, the technological improvement of high-end devices is belonged in vacuum magnetic control film coating equipment.
Emphasis of the present invention improves the magnetic pole of the magnetic steering of dolly upper end, homopolar-repulsion mode is improved to heteropole attracting, and common magnet is replaced by the samarium cobalt magnet of 3200-5000 Gauss, by the stupid school power of dolly weight and magnet through accurate calculation, the weight of strict control dolly, makes dolly allow dolly transmission tail rod and transmission system power wheel keep suitable frictional force in operation, acceleration and deceleration process.Extremely attracted the strong magnetic N pole of dolly upper end by the strong magnetic S being fixed on vacuum chamber top, ensure that dolly can not be in operation very long arc and vibrations, can not power wheel be departed from.Travelling speed and more stable operating performance faster can be reached, the strong magnetic S pole of vacuum chamber upper end is arranged on straight line and same level line, the transmission regulative mode of below is through improving, left and right and upper and lower tolerance all control within+0.3mm, dolly can be allowed quicker in operational process, steadily, reduce the collision with inside cavity, friction, the strong magnetic N pole of dolly upper end is avoided to contact with vacuum cavity completely, dolly and vacuum chamber is made to insulate thus reach and the moon, anodized insulation, meet and produce and technique needs, extend the work-ing life of transmission system power wheel.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the invention will be further described:
Fig. 1 is, general assembly structural representation;
Fig. 2 is, side-looking structural representation;
In Fig. 1,2: car body 1, upper collets 2, magnetic boots 3, inverted U-shaped magnet sheath 4, strong magnetic N pole 5, lower bench insulator 6, transmission tail rod 7, transmission system power wheel 8, T-shaped magnet sheath 9, by force No. 10, two, magnetic S pole magnetic boots 11, screw 12.
Embodiment
Below in conjunction with embodiment and embodiment, the present invention is described in further detail:
Embodiment 1
At least five upper collets 2 are set above car body 1, below arranges at least five lower bench insulators 6, between the top of upper collets 2 and inverted U-shaped magnet sheath 4, magnetic boots 3 are set, strong magnetic N pole 5 is set in inverted U-shaped magnet sheath 4, below lower bench insulator 6, transmission tail rod 7 is set, correspondingly with transmission system power wheel 8 below transmission tail rod 7 arranges; T-shaped magnet sheath 9 is set above inverted U-shaped magnet sheath 4, reserved the action of a magnetic field space between T-shaped magnet sheath 9 and inverted U-shaped magnet sheath 4, strong magnetic S pole 10 is set in T-shaped magnet sheath 9, No. two magnetic boots 11 are set above T-shaped magnet sheath 9, T-shaped magnet sheath 9 is fixed on No. two magnetic boots 11 by screw 12, and No. two magnetic boots 11 are arranged on vacuum chamber top 13.
Embodiment 2
The section of described upper collets 2 is H-shaped, and the upper and lower of upper collets 2 forms upper draw-in groove and lower bayonet slot respectively, and lower bayonet slot is corresponding with above car body 1 to be arranged, and upper draw-in groove is corresponding with the below of magnetic boots 3 to be arranged.
Embodiment 3
In described T-shaped magnet sheath 9, magnet cavity is set, strong magnetic S pole 10 is set in magnet cavity; Arrange magnet cavity in inverted U-shaped magnet sheath 4, arrange strong magnetic N pole 5 in magnet cavity, the strong magnetic N pole 5 in inverted U-shaped magnet sheath 4 is corresponding with the top of magnetic boots 3 to be arranged.
Embodiment 4
The top of described lower bench insulator 6 arranges draw-in groove, and below arranges arc groove, and upper draw-in groove is corresponding with below car body 1 to be arranged, and arc groove is corresponding with transmission tail rod 7 to be arranged.
Embodiment 5
Described T-shaped magnet sheath 9 is positioned on same vertical line with inverted U-shaped magnet sheath 4.
Embodiment 6
Strong magnetic S pole 10 in described T-shaped magnet sheath 9 is perpendicular to No. two magnetic boots 11.
Embodiment 7
Described strong magnetic N pole 5 adopts the samarium cobalt magnet of 3200-4500 Gauss, and strong magnetic S pole 10 adopts the samarium cobalt magnet of 3800-5000 Gauss.
Embodiment 8
The upper collets 2 of car body 1 upper and lower and lower bench insulator 6 make car body 1 and vacuum chamber insulate to reach and the moon, anodized insulation, strong magnetic S pole 10 in T-shaped magnet sheath 9 produces mutual magnetism with the strong magnetic N pole 5 in inverted U-shaped magnet sheath 4, car body 1 is made upwards to be in suspended state, simultaneously, after the magnet stupid school power of strong magnetic S pole 10 and strong magnetic N pole 5 offsets, strong magnetic S pole 10 and strong magnetic N pole 5 is made to avoid together with suction, transmission tail rod 7 and transmission system power wheel 8 friction contact, frictional force is the suction that the gravity of car body 1 deducts upwards, car body 1 is along with the rotation smooth running forward of transmission system power wheel 8.
Embodiment 9
Startup optimization ito film continuity vacuum magnetron sputtering coating film equipment, vacuumizes in continuity vacuum magnetron sputtering coating film canyon, makes background vacuum be 5 × 10-4Pa-6.8 × 10-4Pa, passes into the oxygen O2 of sputter gas argon Ar and composition as a supplement; Under the condition of vacuum, at least one piece of rectangle target is loaded at the ito thin film installing zone of car body 1, adopt the ceramic target that the powder be made up of 3-10%SnO2 and 90%-97%In2O3 sinters through heat, static pressure, control vacuum chamber wall body temperature control heating device and vacuum chamber temperature control door are to target homogeneous heating, regulate substrate substrate preheating temperature, justifying evenly reaches 50 DEG C-200 DEG C, prepares and deposit ito thin film on clean glass substrate;
Run plated film carriage device, strong magnetic S pole 10 in T-shaped magnet sheath 9 produces with the strong magnetic N pole 5 in inverted U-shaped magnet sheath 4 magnetic force attracted each other, plated film carriage device is at the uniform velocity advanced with the speed of 0.5-1m/min, upper collets 2 and lower bench insulator 6 make car body 1 insulate with the positive and negative electrode of vacuum chamber, ito thin film in guarantee ito thin film installing zone is by the interference of the positive and negative electrode of vacuum chamber, simultaneously, magnetically controlled DC sputtering is carried out to glass substrate, sputtering power is 4KW-5KW, during sputtering, operating pressure is 0.4-0.6Pa, be 120-160Sccm by the Flow-rate adjustment of the argon Ar passed into, the Flow-rate adjustment of oxygen O2 is 3-7Sccm, and control vacuum chamber wall body temperature control heating device and vacuum chamber temperature control door and evenly fully 1-3 minute is heated for target, regulate substrate underlayer temperature, justifying evenly reaches 200 DEG C-350 DEG C,
The ito thin film prepared on a glass substrate, thickness is 30nm, then carries out plated film annealing; Making resistivity is 2 × 10
-4 Ω/cm, transmitance are the finished product of the ito film of more than 90%, packaging warehouse-in.
Claims (9)
1. a vacuum magnetron sputtering coating film magnetic suspension driving gear, be by: car body (1), upper collets (2), magnetic boots (3), inverted U-shaped magnet sheath (4), strong magnetic N pole (5), lower bench insulator (6), transmission tail rod (7), transmission system power wheel (8), T-shaped magnet sheath (9), strong magnetic S pole (10), No. two magnetic boots (11), screws (12) are formed; It is characterized in that: car body (1) top arranges at least five upper collets (2), below arranges at least five lower bench insulators (6), a magnetic boots (3) is set between the top of upper collets (2) and inverted U-shaped magnet sheath (4), in inverted U-shaped magnet sheath (4), strong magnetic N pole (5) is set, lower bench insulator (6) below arranges transmission tail rod (7), and transmission tail rod (7) below is corresponding with transmission system power wheel (8) to be arranged; Inverted U-shaped magnet sheath (4) top arranges T-shaped magnet sheath (9), reserved the action of a magnetic field space between T-shaped magnet sheath (9) and inverted U-shaped magnet sheath (4), strong magnetic S pole (10) is set in T-shaped magnet sheath (9), T-shaped magnet sheath (9) top arranges No. two magnetic boots (11), T-shaped magnet sheath (9) is fixed on No. two magnetic boots (11) by screw (12), and No. two magnetic boots (11) are arranged on vacuum chamber top (13).
2. a kind of vacuum magnetron sputtering coating film magnetic suspension driving gear according to claim 1, it is characterized in that: the section of described upper collets (2) is H-shaped, the upper and lower of upper collets (2) forms upper draw-in groove and lower bayonet slot respectively, lower bayonet slot is corresponding with car body (1) top to be arranged, and upper draw-in groove is corresponding with the below of a magnetic boots (3) to be arranged.
3. a kind of vacuum magnetron sputtering coating film magnetic suspension driving gear according to claim 1, is characterized in that: arrange magnet cavity in described T-shaped magnet sheath (9), arranges strong magnetic S pole (10) in magnet cavity; In inverted U-shaped magnet sheath (4), magnet cavity is set, arrange strong magnetic N pole (5) in magnet cavity, the strong magnetic N pole (5) in inverted U-shaped magnet sheath (4) is corresponding with the top of a magnetic boots (3) to be arranged.
4. a kind of vacuum magnetron sputtering coating film magnetic suspension driving gear according to claim 1, it is characterized in that: the top of described lower bench insulator (6) arranges draw-in groove, below arranges arc groove, upper draw-in groove is corresponding with car body (1) below to be arranged, and arc groove is corresponding with transmission tail rod (7) to be arranged.
5. a kind of vacuum magnetron sputtering coating film magnetic suspension driving gear according to claim 1, is characterized in that: described T-shaped magnet sheath (9) and inverted U-shaped magnet sheath (4) are positioned on same vertical line.
6. a kind of vacuum magnetron sputtering coating film magnetic suspension driving gear according to claim 1, is characterized in that: the strong magnetic S pole (10) in described T-shaped magnet sheath (9) is perpendicular to No. two magnetic boots (11).
7. a kind of vacuum magnetron sputtering coating film magnetic suspension driving gear according to claim 1, it is characterized in that: described strong magnetic N pole (5) adopts the samarium cobalt magnet of 3200-4500 Gauss, and strong magnetic S pole (10) adopts the samarium cobalt magnet of 3800-5000 Gauss.
8. the application method of a vacuum magnetron sputtering coating film magnetic suspension driving gear, it is characterized in that: the upper collets (2) of car body (1) upper and lower and lower bench insulator (6) make car body (1) and vacuum chamber insulate to reach and the moon, anodized insulation, strong magnetic S pole (10) in T-shaped magnet sheath (9) produces mutual magnetism with the strong magnetic N pole (5) in inverted U-shaped magnet sheath (4), car body (1) is made upwards to be in suspended state, simultaneously, after the magnet stupid school power of strong magnetic S pole (10) and strong magnetic N pole (5) offsets, strong magnetic S pole (10) and strong magnetic N pole (5) is made to avoid inhaling together, transmission tail rod (7) and transmission system power wheel (8) friction contact, frictional force is the suction that the gravity of car body (1) deducts upwards, car body (1) is along with the rotation smooth running forward of transmission system power wheel (8).
9. the application method of a kind of vacuum magnetron sputtering coating film magnetic suspension driving gear according to claim 8, it is characterized in that: startup optimization ito film continuity vacuum magnetron sputtering coating film equipment, vacuumize in continuity vacuum magnetron sputtering coating film canyon, make background vacuum be 5 × 10-4Pa-6.8 × 10-4Pa, pass into the oxygen O2 of sputter gas argon Ar and composition as a supplement; Under the condition of vacuum, at least one piece of rectangle target is loaded at the ito thin film installing zone of car body (1), adopt the ceramic target that the powder be made up of 3-10%SnO2 and 90%-97%In2O3 sinters through heat, static pressure, control vacuum chamber wall body temperature control heating device and vacuum chamber temperature control door are to target homogeneous heating, regulate substrate substrate preheating temperature, justifying evenly reaches 50 DEG C-200 DEG C, prepares and deposit ito thin film on clean glass substrate;
Run plated film carriage device, strong magnetic S pole (10) in T-shaped magnet sheath (9) produces with the strong magnetic N pole (5) in inverted U-shaped magnet sheath (4) magnetic force attracted each other, plated film carriage device is at the uniform velocity advanced with the speed of 0.5-1m/min, upper collets (2) and lower bench insulator (6) make car body (1) insulate with the positive and negative electrode of vacuum chamber, ito thin film in guarantee ito thin film installing zone is by the interference of the positive and negative electrode of vacuum chamber, simultaneously, magnetically controlled DC sputtering is carried out to glass substrate, sputtering power is 4KW-5KW, during sputtering, operating pressure is 0.4-0.6Pa, be 120-160Sccm by the Flow-rate adjustment of the argon Ar passed into, the Flow-rate adjustment of oxygen O2 is 3-7Sccm, and control vacuum chamber wall body temperature control heating device and vacuum chamber temperature control door and evenly fully 1-3 minute is heated for target, regulate substrate underlayer temperature, justifying evenly reaches 200 DEG C-350 DEG C,
The ito thin film prepared on a glass substrate, thickness is 30nm, then carries out plated film annealing; Make the finished product that resistivity is 2 × 10-4 Ω/cm, transmitance is the ito film of more than 90%, packaging warehouse-in.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410736254.XA CN104404465A (en) | 2014-11-29 | 2014-11-29 | Vacuum magnetron sputtering coating magnetic suspension transmission device and application method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410736254.XA CN104404465A (en) | 2014-11-29 | 2014-11-29 | Vacuum magnetron sputtering coating magnetic suspension transmission device and application method |
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| Publication Number | Publication Date |
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| CN104404465A true CN104404465A (en) | 2015-03-11 |
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| CN201410736254.XA Pending CN104404465A (en) | 2014-11-29 | 2014-11-29 | Vacuum magnetron sputtering coating magnetic suspension transmission device and application method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105621895A (en) * | 2016-01-12 | 2016-06-01 | 江苏津通先锋光电显示技术有限公司 | Anti-diffraction coating trolley |
| RU2811325C2 (en) * | 2021-10-11 | 2024-01-11 | Общество С Ограниченной Ответственностью "Изовак" | Vacuum installation for production of multilayer interference coatings on optical element |
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| CN202913053U (en) * | 2012-03-14 | 2013-05-01 | 无锡康力电子有限公司 | Magnetic positioning system with substrate frames |
| CN204325488U (en) * | 2014-12-23 | 2015-05-13 | 洛阳康耀电子有限公司 | A kind of vacuum magnetron sputtering coating film magnetic suspension driving gear |
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- 2014-11-29 CN CN201410736254.XA patent/CN104404465A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN202913053U (en) * | 2012-03-14 | 2013-05-01 | 无锡康力电子有限公司 | Magnetic positioning system with substrate frames |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105621895A (en) * | 2016-01-12 | 2016-06-01 | 江苏津通先锋光电显示技术有限公司 | Anti-diffraction coating trolley |
| RU2811325C2 (en) * | 2021-10-11 | 2024-01-11 | Общество С Ограниченной Ответственностью "Изовак" | Vacuum installation for production of multilayer interference coatings on optical element |
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Application publication date: 20150311 |
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