CN106683965A - Electrostatic deflection plate for charged particle injection and extraction in cooling storage ring - Google Patents
Electrostatic deflection plate for charged particle injection and extraction in cooling storage ring Download PDFInfo
- Publication number
- CN106683965A CN106683965A CN201710118305.6A CN201710118305A CN106683965A CN 106683965 A CN106683965 A CN 106683965A CN 201710118305 A CN201710118305 A CN 201710118305A CN 106683965 A CN106683965 A CN 106683965A
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- China
- Prior art keywords
- electrode
- anode frame
- vacuum
- electrostatic deflection
- extraction
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
Abstract
The invention relates to the technical field of heavy ion accelerators, in particular to an electrostatic deflection plate for charged particle injection and extraction in a cooling storage ring. The electrostatic deflection plate is characterized in that a vacuum chamber is included, vacuum transmission mechanisms, a compensation electrode connecting part and a high voltage input part are arranged outside the vacuum chamber, and anode brackets and high voltage electrodes are correspondingly arranged in the vacuum chamber; each anode bracket is fixed to the corresponding vacuum transmission mechanism in a transition connection mode and provided with a cutting plate and a measurement rod, each high voltage electrode is fixed to a first electrode support and a second electrode support through screws, third support bolts are fixed to insulating support parts through screws, and the insulating support parts are connected with transmission shafts of the vacuum transmission mechanisms. The electrostatic deflection plate is reasonable in structure, easy to machine, high in finished product rate, convenient to disassemble and replace and low in spare part cost; the transmission efficiency is effectively improved, position adjustment of the high voltage electrodes and the cutting plates in the direction perpendicular to beam currents in a plane is achieved, and it is guaranteed that the high movement repeating precision and linear displacement precision are achieved in the transmission process.
Description
Technical field
The present invention relates to heavy ion avcceleration technical field, more particularly, to a kind of for charged particle in cooling storage ring
The electrostatic deflection plates of Injection and extraction.
Background technology
HIRFL-CSR (HIRFL-CSR) be national " 95 " major scientific projects project it
One, it is made up of main ring CSRm and experimental ring CSRe, is mainly used in the Test And Research Work of middle high-energy heavy ion.In Injection and extraction
Can the design of electrostatic deflection plates go out beam and operational efficiency to CSR in system will all play critical effect.
When traditional electrostatic deflection plates high-field electrode and cutting plate, inlet thickness is unable to reach 0.1mm, according to 0.1mm
When thick sheet material is as cutting plate, then deformation will be easy to because of the excessive cutting plate of its area, and cause electric field uneven.Traditional is quiet
Under the strike of line, surface is easily deformed abrasion, deformation to electric deflection plate high-field electrode, causes to beat when adding high-tension
Fire.It is used for connecting the insulated support of high-field electrode and vacuum subassembly in conventional electrostatic deflecting plates using crunch seal part, processing
Difficulty, yield rate is low, complex structure, and spare parts cost is high.
The content of the invention
Present invention aims to the deficiencies in the prior art provide a kind of for charged particle note in cooling storage ring
Enter the electrostatic deflection plates of extraction.So as to effectively solving the problems of the prior art.
For achieving the above object, the technical scheme taken of the present invention is：Described one kind is used for powered in cooling storage ring
The electrostatic deflection plates of particle Injection and extraction, are characterized in including vacuum chamber, and vacuum transmission machine is provided with outside described vacuum chamber
Structure, compensating electrode connection member and high input voltage part, are correspondingly arranged on anode frame and high-field electrode in described vacuum room, sun
Pole frame is fastened in vacuum transmission mechanism by transition, and cutting plate and measurement bar are provided with anode frame, and high-field electrode leads to
Cross screw to be fixed in first electrode support and second electrode support, the 3rd carrying bolt is supported and second electrode with first electrode
The groove fit for supporting side to arrange, the 3rd carrying bolt is fixed by screws on insulated support, insulated support with it is true
The power transmission shaft of empty drive mechanism is connected.
Described vacuum transmission mechanism is four, and four vacuum transmission mechanisms are divided into two groups, per group of vacuum transmission mechanism
Correspond to respectively and be connected with anode frame and high-field electrode, realize anode frame and high-field electrode planar perpendicular to beam direction
Adjustment, described compensating electrode connection member and high input voltage part is correspondingly arranged as single, compensating electrode connection member and sun
Pole frame is connected, and high input voltage part is connected with high-field electrode, and making alive controls incident ion line along anode frame and high pressure
Centrage deflection between electrode gap.
Described vacuum transmission mechanism is by motor, handwheel, the first synchronous pulley, Timing Belt, the second synchronous pulley, transmission
Axle, screw, double-row angular contact bal bearing, First Transition flange, travel switch, guide, linear bearing, the second counter flange and
Drive flange is constituted；Motor and handwheel are arranged on the first Timing Belt wheel shaft, and the second synchronous pulley is same with first by Timing Belt
Step belt wheel is connected, and the second synchronous pulley is arranged on power transmission shaft outer end by screw；The is driven by rotating handwheel or motor
One synchronous pulley is rotated, and the first synchronous pulley drives the second synchronous pulley and the screw rotation being fixed together again, drives transmission
Axle it is movable, so as to drive the movement of anode frame and high-field electrode planar on beam direction；First Transition
Flange and the second counter flange are arranged on power transmission shaft by linear bearing, the guiding on First Transition flange on correspondence power transmission shaft
Part is provided with travel switch, and on the power transmission shaft of First Transition flange side double-row angular contact bal bearing, linear axis are correspondingly arranged on
Hold and be in close contact with power transmission shaft, it is ensured that transmission has higher straight-line displacement precision and mobile repeatable accuracy, the second counter flange leads to
Cross screw to be connected with drive flange, drive flange is corresponding with vacuum chamber to be connected.
Described high-field electrode material is titanium alloy sheet, and its surface is through electrobrightening；The range of movement of high-field electrode is
± 10mm, the range of movement of anode frame is ± 7mm -13mm.
Described insulated support adopts heat sealing structure.
Described cutting plate is not more than 0.1mm using the densely covered formula structure of molybdenum filament, its inlet thickness；Molybdenum filament is stretched tight by spring
On anode frame, two wire centers spacing are set to 1mm.
The invention has the beneficial effects as follows：A kind of described electrostatic for charged particle Injection and extraction in cooling storage ring is inclined
Flap, its is rational in infrastructure, and processing is simple, and high yield rate is conveniently replaced, and spare parts cost is low；Disclosure satisfy that cutting plate inlet thickness
No more than the particular/special requirement of 0.1mm, realizes the online switching of cooling storage ring difference injection way, effectively improves efficiency of transmission,
High-field electrode is realized with cutting Board position planar perpendicular to the regulation of beam direction, it is ensured that transmission process has higher
Mobile repeatable accuracy and straight-line displacement precision.
Description of the drawings：
Fig. 1 is the general structure schematic diagram of the present invention；
Fig. 2 is cross section structure diagram at the A-A of Fig. 1 of the present invention.
Shown in figure：1. vacuum chamber；2. anode frame；3. high-field electrode；4. vacuum transmission mechanism；5. compensating electrode connecting portion
Part；6. high input voltage part；7. cutting plate；8. molybdenum filament；9. spring；10. transition connection；11. measurement bars；12. first electrodes
Support；13. second electrodes are supported；14. the 3rd carrying bolts；15. insulated supports；16. motors；17. handwheels；18. first is synchronous
Belt wheel；19. Timing Belts；20. second synchronous pulleys；21. power transmission shafts；22. screws；23. double-row angular contact bal bearings；24. first
Counter flange；25. travel switches；26. guides；27. linear bearings；28. second counter flanges；29. drive flanges.
Specific embodiment
It is described in further detail below in conjunction with the preferred example shown in accompanying drawing：
As illustrated in fig. 1 and 2, described a kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring,
It is characterized in including vacuum chamber 1, vacuum transmission mechanism 4, the and of compensating electrode connection member 5 is provided with outside described vacuum chamber 1
High input voltage part 6, is correspondingly arranged on anode frame 2 and high-field electrode 3 in described vacuum chamber 1, anode frame 2 is connected by transition
10 are fixed in vacuum transmission mechanism 4, and cutting plate 7 and measurement bar 11 are provided with anode frame 2, and high-field electrode 3 is solid by screw
It is scheduled on first electrode to support in 12 and second electrode support 13, the 3rd carrying bolt 14 supports 12 and second electrode with first electrode
The groove fit for supporting 13 sides to arrange, the 3rd carrying bolt 14 is fixed by screws on insulated support 15, insulating supporting
Part 15 is connected with the power transmission shaft 21 of vacuum transmission mechanism 4.
Described vacuum transmission mechanism 4 is four, and four 4 points of vacuum transmission mechanisms are two groups, per group of vacuum transmission machine
Structure 4 corresponds to be connected with anode frame 2 and high-field electrode 3 respectively, realizes anode frame 2 and high-field electrode 3 planar perpendicular to beam
The adjustment in stream direction, described compensating electrode connection member 5 and high input voltage part 6 is correspondingly arranged as single, compensating electrode company
Relay part 5 is connected with anode frame 2, and high input voltage part 6 is connected with high-field electrode 3, making alive control incident ion line
Centrage deflection between anode frame 2 and the gap of high-field electrode 3.
Described vacuum transmission mechanism 4 is by motor 16, handwheel 17, the first synchronous pulley 18, Timing Belt 19, the second Timing Belt
It is wheel 20, power transmission shaft 21, screw 22, double-row angular contact bal bearing 23, First Transition flange 24, travel switch 25, guide 26, straight
Bobbin holds the 27, second counter flange 28 and drive flange 29 is constituted；Motor 16 and handwheel 17 are arranged on the first Timing Belt wheel shaft,
Second synchronous pulley 20 is connected by Timing Belt 19 with the first synchronous pulley 18, and the second synchronous pulley 20 is arranged on by screw 22
The outer end of power transmission shaft 21；The first synchronous pulley 18 is driven to rotate by rotating handwheel 17 or motor 16, the first synchronous pulley 18
Drive the second synchronous pulley 20 and the screw 22 being fixed together to rotate again, the movable of power transmission shaft 21 is driven, so as to drive
The movement planar on beam direction of anode frame 2 and high-field electrode 3；The transition method 28 of First Transition flange 24 and second
Orchid is arranged on power transmission shaft 21 by linear bearing 27, and the guide 26 on First Transition flange 24 on correspondence power transmission shaft 21 is arranged
There is travel switch 25, on the power transmission shaft 21 of the side of First Transition flange 24 double-row angular contact bal bearing 23, straight line are correspondingly arranged on
Bearing 27 is in close contact with power transmission shaft 21, it is ensured that transmission has higher straight-line displacement precision and mobile repeatable accuracy, the second transition
Flange 28 is connected by screw with drive flange 29, and drive flange 29 is corresponding with vacuum chamber 1 to be connected.
The described material of high-field electrode 3 is titanium alloy sheet, and its surface is through electrobrightening；The range of movement of high-field electrode 3
For ± 10mm, the range of movement of anode frame 2 is ± 7mm -13mm；The area that such a construction ensures cutting plate 7 is sufficiently large and not
Yielding, electric field is uneven, and under the strike of line, surface abrasion deformation is little, sparking etc. is not easy when high voltage excellent
Point.
Described insulated support adopts heat sealing structure.
Described cutting plate 7 is not more than 0.1mm using the densely covered formula structure of molybdenum filament, its inlet thickness；Molybdenum filament 8 passes through spring 9
Stretch tight on anode frame 2, two wire centers spacing are set to 1mm.
Between described high-field electrode and cutting plate making alive control incident ion line along high-field electrode and cutting plate it
Between centrage deflection, high-field electrode and cutting plate by vacuum transmission drive mechanism realize electrode position planar perpendicular to
The adjustment of beam direction；Anode frame and high-field electrode are driven planar on beam direction respectively by two drive mechanisms
It is mobile.
The foregoing is only presently preferred embodiments of the present invention, not to limit the present invention, all spirit in the present invention and
Within principle, any modification, equivalent substitution and improvements made etc. should be included within the scope of the present invention.
Claims (6)
1. a kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring, is characterized in that including vacuum chamber, institute
Vacuum transmission mechanism, compensating electrode connection member and high input voltage part, described vacuum chamber are provided with outside the vacuum chamber stated
Anode frame and high-field electrode are inside correspondingly arranged on, anode frame is fastened in vacuum transmission mechanism, on anode frame by transition
Cutting plate and measurement bar are provided with, high-field electrode is fixed by screws in first electrode support and second electrode is supported, the 3rd
Carrying bolt is supported with first electrode and second electrode supports the groove fit of side setting, and the 3rd carrying bolt is solid by screw
It is scheduled on insulated support, insulated support is connected with the power transmission shaft of vacuum transmission mechanism.
2. a kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring as claimed in claim 1, it is special
Levy and be：Described vacuum transmission mechanism is four, and four vacuum transmission mechanisms are divided into two groups, per group of vacuum transmission mechanism point
Dui Ying not be connected with anode frame and high-field electrode, realize anode frame and high-field electrode planar perpendicular to the tune of beam direction
Whole, described compensating electrode connection member and high input voltage part is correspondingly arranged as single, compensating electrode connection member and anode
Frame is connected, and high input voltage part is connected with high-field electrode, and making alive controls incident ion line along anode frame and high-tension electricity
Centrage deflection between clearance between poles.
3. a kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring as claimed in claim 2, it is special
Levy and be：Described vacuum transmission mechanism by motor, handwheel, the first synchronous pulley, Timing Belt, the second synchronous pulley, power transmission shaft,
Screw, double-row angular contact bal bearing, First Transition flange, travel switch, guide, linear bearing, the second counter flange and biography
Dynamic flange composition；Motor and handwheel are arranged on the first Timing Belt wheel shaft, and the second synchronous pulley is synchronous with first by Timing Belt
Belt wheel is connected, and the second synchronous pulley is arranged on power transmission shaft outer end by screw；First is driven by rotating handwheel or motor
Synchronous pulley is rotated, and the first synchronous pulley drives the second synchronous pulley and the screw rotation being fixed together again, drives power transmission shaft
It is movable, so as to drive the movement of anode frame and high-field electrode planar on beam direction；First Transition method
Blue and the second counter flange is arranged on power transmission shaft by linear bearing, the guide on First Transition flange on correspondence power transmission shaft
Travel switch is provided with, on the power transmission shaft of First Transition flange side double-row angular contact bal bearing, linear bearing are correspondingly arranged on
It is in close contact with power transmission shaft, it is ensured that transmission has higher straight-line displacement precision and mobile repeatable accuracy, the second counter flange passes through
Screw is connected with drive flange, and drive flange is corresponding with vacuum chamber to be connected.
4. a kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring as claimed in claim 1, it is special
Levy and be：Described high-field electrode material is titanium alloy sheet, and its surface is through electrobrightening；The range of movement of high-field electrode for ±
10mm, the range of movement of anode frame is ± 7mm -13mm.
5. a kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring as claimed in claim 1, it is special
Levy and be：Described insulated support adopts heat sealing structure.
6. a kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring as claimed in claim 1, it is special
Levy and be：Described cutting plate is not more than 0.1mm using the densely covered formula structure of molybdenum filament, its inlet thickness；Molybdenum filament is stretched tight by spring
On anode frame, two wire centers spacing are set to 1mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710118305.6A CN106683965B (en) | 2017-03-01 | 2017-03-01 | A kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710118305.6A CN106683965B (en) | 2017-03-01 | 2017-03-01 | A kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring |
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| Publication Number | Publication Date |
|---|---|
| CN106683965A true CN106683965A (en) | 2017-05-17 |
| CN106683965B CN106683965B (en) | 2018-11-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710118305.6A Active CN106683965B (en) | 2017-03-01 | 2017-03-01 | A kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109496053A (en) * | 2018-12-26 | 2019-03-19 | 合肥中科离子医学技术装备有限公司 | A kind of regulating device for cyclotron electrostatic deflection plates |
| CN110595870A (en) * | 2019-09-17 | 2019-12-20 | 华北水利水电大学 | Mechanical property testing equipment for rubber material |
| CN116056305A (en) * | 2023-02-01 | 2023-05-02 | 中国科学院近代物理研究所 | Beam loss control device and injection static deflection plate |
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| CN101815399A (en) * | 2009-01-12 | 2010-08-25 | 中国科学院近代物理研究所 | Radio frequency excitation leading-out method and device in heavy-ion cancer therapy synchronous accelerator |
| CN106402399A (en) * | 2016-10-25 | 2017-02-15 | 北京交通大学 | Magnetic liquid sealing device capable of reducing magnetic liquid evaporation |
| CN206628439U (en) * | 2017-03-01 | 2017-11-10 | 中国科学院近代物理研究所 | A kind of electrostatic deflection plates for being used for charged particle Injection and extraction in cooling storage ring |
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Patent Citations (5)
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| CN101420171A (en) * | 2008-10-11 | 2009-04-29 | 中国科学院近代物理研究所 | Method for stacked bus-bar of large power switch power supply |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109496053A (en) * | 2018-12-26 | 2019-03-19 | 合肥中科离子医学技术装备有限公司 | A kind of regulating device for cyclotron electrostatic deflection plates |
| CN110595870A (en) * | 2019-09-17 | 2019-12-20 | 华北水利水电大学 | Mechanical property testing equipment for rubber material |
| CN110595870B (en) * | 2019-09-17 | 2021-09-28 | 华北水利水电大学 | Mechanical property testing equipment for rubber material |
| CN116056305A (en) * | 2023-02-01 | 2023-05-02 | 中国科学院近代物理研究所 | Beam loss control device and injection static deflection plate |
| CN116056305B (en) * | 2023-02-01 | 2023-08-25 | 中国科学院近代物理研究所 | Beam loss control device and injection static deflection plate |
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| Publication number | Publication date |
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| CN106683965B (en) | 2018-11-09 |
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| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20170517 Assignee: Lanzhou Kejin Taiji Corp.,Ltd. Assignor: INSTITUTE OF MODERN PHYSICS, CHINESE ACADEMY OF SCIENCES Contract record no.: X2021620000012 Denomination of invention: The utility model relates to an electrostatic deflection plate for injecting and extracting charged particles in a cooling storage ring Granted publication date: 20181109 License type: Common License Record date: 20210914 |
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Change date: 20220706 Contract record no.: X2021620000012 Assignor after: INSTITUTE OF MODERN PHYSICS, CHINESE ACADEMY OF SCIENCES Assignor after: HUIZHOU ION SCIENCE RESEARCH CENTER Assignor before: INSTITUTE OF MODERN PHYSICS, CHINESE ACADEMY OF SCIENCES |
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