CN106683965B - A kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring - Google Patents
A kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring Download PDFInfo
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- CN106683965B CN106683965B CN201710118305.6A CN201710118305A CN106683965B CN 106683965 B CN106683965 B CN 106683965B CN 201710118305 A CN201710118305 A CN 201710118305A CN 106683965 B CN106683965 B CN 106683965B
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- electrode
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- field electrode
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- extraction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The present invention relates to heavy ion avcceleration technical fields, more particularly, to a kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring.Its main feature is that including vacuum chamber, vacuum transmission mechanism, compensating electrode connecting component and high input voltage component are provided with outside the vacuum chamber, it is correspondingly arranged on anode frame and high-field electrode in the vacuum chamber, anode frame is fastened on by transition in vacuum transmission mechanism, cutting plate and measuring rod are provided on anode frame, high-field electrode is fixed by screws in first electrode support and second electrode support, third carrying bolt is fixed by screws on insulated support, and insulated support is connected with the transmission shaft of vacuum transmission mechanism.Its is reasonable for structure, and processing is simple, and high yield rate is conveniently replaced, and spare parts cost is low；Efficiency of transmission is effectively improved, realizes high-field electrode with cutting Board position planar perpendicular to the adjusting of beam direction, it is ensured that transmission process has higher mobile repeatable accuracy and straight-line displacement precision.
Description
Technical field
The present invention relates to heavy ion avcceleration technical fields, more particularly, to one kind for charged particle in cooling storage ring
The electrostatic deflection plates of Injection and extraction.
Background technology
Lanzhou heavy ion accelerator cooling storage ring (HIRFL-CSR) be national " 95 " major scientific projects project it
One, it is made of main ring CSRm and experimental ring CSRe, is mainly used for the Test And Research Work of middle high-energy heavy ion.In Injection and extraction
Can the design of electrostatic deflection plates go out beam and operational efficiency all to CSR and will play the role of and is critical in system.
When traditional electrostatic deflection plates high-field electrode and cutting plate, inlet thickness is unable to reach 0.1mm, according to 0.1mm
When thick plank is as cutting plate, then it will be easy to deformation because of the excessive cutting plate of its area, and cause electric field uneven.Traditional is quiet
For electric deflection plate high-field electrode under the strike of line, surface is easily deformed abrasion, deformation, in addition causing to beat when high voltage
Fire.The insulated support for being used for connecting high-field electrode and vacuum subassembly in conventional electrostatic deflecting plates uses crunch seal part, processing
Difficulty, yield rate is low, complicated, and spare parts cost is high.
Invention content
The purpose of the present invention is to solve the shortcomings of the prior art providing a kind of for charged particle note in cooling storage ring
Enter the electrostatic deflection plates of extraction.To effectively solve the problems of the prior art.
To achieve the above object, the technical solution that the present invention takes is：Described one kind is used in cooling storage ring charge
The electrostatic deflection plates of particle Injection and extraction are provided with vacuum transmission machine its main feature is that including vacuum chamber outside the vacuum chamber
Structure, compensating electrode connecting component and high input voltage component are correspondingly arranged on anode frame and high-field electrode in the vacuum chamber, sun
Pole frame is fastened on by transition in vacuum transmission mechanism, and cutting plate and measuring rod are provided on anode frame, and high-field electrode is logical
It crosses screw to be fixed in first electrode support and second electrode support, third carrying bolt is supported with first electrode and second electrode
Support the groove cooperation of side setting, third carrying bolt is fixed by screws on insulated support, insulated support with it is true
The transmission shaft of empty transmission mechanism is connected.
The vacuum transmission mechanism is four, and four vacuum transmission mechanisms are divided into two groups, every group of vacuum transmission mechanism
Correspondence is connected with anode frame and high-field electrode respectively, realizes anode frame and high-field electrode planar perpendicular to beam direction
Adjustment, the compensating electrode connecting component and high input voltage component are correspondingly arranged to be single, compensating electrode connecting component and sun
Pole frame is connected, and high input voltage component is connected with high-field electrode, and making alive controls incident ion line along anode frame and high pressure
Center line deflection between electrode gap.
The vacuum transmission mechanism is by motor, handwheel, the first synchronous pulley, synchronous belt, the second synchronous pulley, transmission
Axis, screw, double-row angular contact bal bearing, First Transition flange, travel switch, guide part, linear bearing, the second counter flange and
Drive flange forms；Motor and handwheel are mounted on the first synchronous belt wheel shaft, and the second synchronous pulley is same by synchronous belt and first
It walks belt wheel to be connected, the second synchronous pulley is mounted on transmission shaft outer end by screw；The is driven by rotating handwheel or driving motor
One synchronous pulley rotates, the screw rotation that the first synchronous pulley drives the second synchronous pulley and is fixed together again, driving transmission
The back-and-forth motion of axis, to drive the movement of anode frame and high-field electrode planar on beam direction；First Transition
Flange and the second counter flange are mounted on by linear bearing on transmission shaft, and the guiding on transmission shaft is corresponded on First Transition flange
Part is provided with travel switch, and double-row angular contact bal bearing, linear axis are correspondingly arranged on the transmission shaft of First Transition flange side
It holds and is in close contact with transmission shaft, ensure that transmission has higher straight-line displacement precision and mobile repeatable accuracy, the second counter flange logical
It crosses screw with drive flange to be connected, drive flange is corresponding with vacuum chamber to be connected.
The high-field electrode material is titanium alloy sheet, and electrobrightening is passed through on surface；The motion range of high-field electrode is
The motion range of ± 10mm, anode frame are ± 7mm -13mm.
The insulated support uses heat sealing structure.
The cutting plate is not more than 0.1mm using the densely covered formula structure of molybdenum filament, inlet thickness；Molybdenum filament is stretched tight by spring
On anode frame, two wire centers spacing are set as 1mm.
The beneficial effects of the invention are as follows：A kind of electrostatic for charged particle Injection and extraction in cooling storage ring is inclined
Flap, reasonable for structure, processing is simple, and high yield rate is conveniently replaced, and spare parts cost is low；It disclosure satisfy that cutting plate inlet thickness
Particular/special requirement no more than 0.1mm realizes the online switching of cooling storage ring difference injection way, effectively improves efficiency of transmission,
High-field electrode is realized with cutting Board position planar perpendicular to the adjusting of beam direction, it is ensured that transmission process has higher
Mobile repeatable accuracy and straight-line displacement precision.
Description of the drawings：
Fig. 1 is the general structure schematic diagram of the present invention；
Fig. 2 is schematic cross-sectional view at the A-A of Fig. 1 of the present invention.
As shown in the figure：1. vacuum chamber；2. anode frame；3. high-field electrode；4. vacuum transmission mechanism；5. compensating electrode interconnecting piece
Part；6. high input voltage component；7. cutting plate；8. molybdenum filament；9. spring；10. transition connects；11. measuring rod；12. first electrode branch
Support；13. second electrode supports；14. third carrying bolt；15. insulated support；16. motor；17. handwheel；18. first synchronizes
Belt wheel；19. synchronous belt；20. the second synchronous pulley；21. transmission shaft；22. screw；23. double-row angular contact bal bearing；24. first
Counter flange；25. travel switch；26. guide part；27. linear bearing；28. the second counter flange；29. drive flange.
Specific implementation mode
It is described in further detail below in conjunction with the preferred example shown in attached drawing：
As illustrated in fig. 1 and 2, a kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring,
Its main feature is that including vacuum chamber 1, vacuum transmission mechanism 4,5 and of compensating electrode connecting component are provided with outside the vacuum chamber 1
High input voltage component 6 is correspondingly arranged on anode frame 2 and high-field electrode 3 in the vacuum chamber 1, and anode frame 2 is connected by transition
10 are fixed in vacuum transmission mechanism 4, and cutting plate 7 and measuring rod 11 are provided on anode frame 2, and high-field electrode 3 is solid by screw
It is scheduled in first electrode support 12 and second electrode support 13, third carrying bolt 14 and first electrode support 12 and second electrode
The groove cooperation that 13 sides are arranged, third carrying bolt 14 is supported to be fixed by screws on insulated support 15, insulating supporting
Part 15 is connected with the transmission shaft 21 of vacuum transmission mechanism 4.
The vacuum transmission mechanism 4 is four, and it is two groups that four vacuum transmission mechanisms 4, which are divided to, every group of vacuum transmission machine
Correspondence is connected structure 4 with anode frame 2 and high-field electrode 3 respectively, realizes anode frame 2 and high-field electrode 3 planar perpendicular to beam
The adjustment in direction is flowed, the compensating electrode connecting component 5 and high input voltage component 6 are correspondingly arranged to be single, and compensating electrode connects
Relay part 5 is connected with anode frame 2, and high input voltage component 6 is connected with high-field electrode 3, and making alive controls incident ion line
Center line deflection between 3 gap of anode frame 2 and high-field electrode.
The vacuum transmission mechanism 4 is by motor 16, handwheel 17, the first synchronous pulley 18, synchronous belt 19, the second synchronous belt
It is wheel 20, transmission shaft 21, screw 22, double-row angular contact bal bearing 23, First Transition flange 24, travel switch 25, guide part 26, straight
Spool holds the 27, second counter flange 28 and drive flange 29 forms；Motor 16 and handwheel 17 are mounted on the first synchronous belt wheel shaft,
Second synchronous pulley 20 is connected by synchronous belt 19 with the first synchronous pulley 18, and the second synchronous pulley 20 is mounted on by screw 22
21 outer end of transmission shaft；The rotation of the first synchronous pulley 18, the first synchronous pulley 18 are driven by rotating handwheel 17 or driving motor 16
It drives the second synchronous pulley 20 and the screw 22 being fixed together to rotate again, the back-and-forth motion of transmission shaft 21 is driven, to drive
Anode frame 2 and the planar movement on beam direction of high-field electrode 3；First Transition flange 24 and the second transition method 28
Orchid is mounted on by linear bearing 27 on transmission shaft 21, and the guide part 26 corresponded on First Transition flange 24 on transmission shaft 21 is arranged
There is travel switch 25, double-row angular contact bal bearing 23, straight line are correspondingly arranged on the transmission shaft 21 of 24 side of First Transition flange
Bearing 27 is in close contact with transmission shaft 21, ensures that transmission has higher straight-line displacement precision and mobile repeatable accuracy, the second transition
Flange 28 is connected by screw with drive flange 29, and drive flange 29 is corresponding with vacuum chamber 1 to be connected.
3 material of high-field electrode is titanium alloy sheet, and electrobrightening is passed through on surface；The motion range of high-field electrode 3
Motion range for ± 10mm, anode frame 2 is ± 7mm -13mm；It is sufficiently large such a construction ensures the area of cutting plate 7 and not
Yielding, electric field is uneven, and under the strike of line, surface abrasion deformation is small, and it is excellent that high voltage when is not easy sparking etc.
Point.
The insulated support uses heat sealing structure.
The cutting plate 7 is not more than 0.1mm using the densely covered formula structure of molybdenum filament, inlet thickness；Molybdenum filament 8 passes through spring 9
It stretches tight on anode frame 2, two wire centers spacing are set as 1mm.
Between the high-field electrode and cutting plate making alive control incident ion line along high-field electrode and cutting plate it
Between center line deflection, high-field electrode and cutting plate by vacuum transmission transmission mechanism realize electrode position planar perpendicular to
The adjustment of beam direction；Anode frame is driven planar by two transmission mechanisms on beam direction respectively with high-field electrode
It is mobile.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all the present invention spirit and
Within principle, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention.
Claims (6)
1. a kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring, it is characterized in that including vacuum chamber, institute
Vacuum transmission mechanism, compensating electrode connecting component and high input voltage component are provided with outside the vacuum chamber stated, the vacuum passes
Motivation structure is four, and four vacuum transmission mechanisms are divided into two groups, and every group of Liang Ge vacuum transmissions mechanism corresponds to respectively and anode frame
It is connected with high-field electrode, realizes anode frame and high-field electrode planar perpendicular to the adjustment of beam direction；The vacuum
Interior is correspondingly arranged on anode frame and high-field electrode, and anode frame is fastened on by transition in vacuum transmission mechanism, anode frame
On be provided with cutting plate and measuring rod, high-field electrode is fixed by screws in first electrode support and second electrode support, the
Three carrying bolts are supported with first electrode and the groove of second electrode support side setting coordinates, and third carrying bolt passes through screw
It is fixed on insulated support, insulated support is connected with the transmission shaft of vacuum transmission mechanism；The compensating electrode interconnecting piece
Part and high input voltage component are correspondingly arranged to be single, and compensating electrode connecting component is connected with anode frame, high input voltage component with
High-field electrode is connected, and making alive controls center line deflection of the incident ion line between anode frame and high-field electrode gap.
2. a kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring as described in claim 1, special
Sign is：The vacuum transmission mechanism by motor, handwheel, the first synchronous pulley, synchronous belt, the second synchronous pulley, transmission shaft,
Screw, double-row angular contact bal bearing, First Transition flange, travel switch, guide part, linear bearing, the second counter flange and biography
Dynamic flange composition；Motor and handwheel are mounted on the first synchronous belt wheel shaft, and the second synchronous pulley is synchronous with first by synchronous belt
Belt wheel is connected, and the second synchronous pulley is mounted on transmission shaft outer end by screw；First is driven by rotating handwheel or driving motor
Synchronous pulley rotates, and the screw rotation that the first synchronous pulley drives the second synchronous pulley and is fixed together again drives transmission shaft
Back-and-forth motion, to drive the movement of anode frame and high-field electrode planar on beam direction；First Transition method
Blue and the second counter flange is mounted on by linear bearing on transmission shaft, and the guide part on transmission shaft is corresponded on First Transition flange
It is provided with travel switch, double-row angular contact bal bearing, linear bearing are correspondingly arranged on the transmission shaft of First Transition flange side
It is in close contact with transmission shaft, ensures that transmission has higher straight-line displacement precision and mobile repeatable accuracy, the second counter flange to pass through
Screw is connected with drive flange, and drive flange is corresponding with vacuum chamber to be connected.
3. a kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring as described in claim 1, special
Sign is：The high-field electrode material is titanium alloy sheet, and electrobrightening is passed through on surface；The motion range of high-field electrode be ±
The motion range of 10mm, anode frame are ± 7mm.
4. a kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring as described in claim 1, special
Sign is：The high-field electrode material is titanium alloy sheet, and electrobrightening is passed through on surface；The motion range of high-field electrode be ±
The motion range of 10mm, anode frame are ± 13mm.
5. a kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring as described in claim 1, special
Sign is：The insulated support uses heat sealing structure.
6. a kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring as described in claim 1, special
Sign is：The cutting plate is not more than 0.1mm using the densely covered formula structure of molybdenum filament, inlet thickness；Molybdenum filament is stretched tight by spring
On anode frame, two adjacent molybdenum filament center spacing are set as 1mm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710118305.6A CN106683965B (en) | 2017-03-01 | 2017-03-01 | A kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710118305.6A CN106683965B (en) | 2017-03-01 | 2017-03-01 | A kind of electrostatic deflection plates for charged particle Injection and extraction in cooling storage ring |
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| Publication Number | Publication Date |
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| CN106683965A CN106683965A (en) | 2017-05-17 |
| CN106683965B true CN106683965B (en) | 2018-11-09 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109496053A (en) * | 2018-12-26 | 2019-03-19 | 合肥中科离子医学技术装备有限公司 | A kind of regulating device for cyclotron electrostatic deflection plates |
| CN110595870B (en) * | 2019-09-17 | 2021-09-28 | 华北水利水电大学 | Mechanical property testing equipment for rubber material |
| CN116056305B (en) * | 2023-02-01 | 2023-08-25 | 中国科学院近代物理研究所 | Beam loss control device and injection static deflection plate |
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| CN101631418A (en) * | 2009-01-12 | 2010-01-20 | 中国科学院近代物理研究所 | System for cascade cyclotron and dual-cooling storage ring |
| CN101815399A (en) * | 2009-01-12 | 2010-08-25 | 中国科学院近代物理研究所 | Radio frequency excitation leading-out method and device in heavy-ion cancer therapy synchronous accelerator |
| CN106402399A (en) * | 2016-10-25 | 2017-02-15 | 北京交通大学 | Magnetic liquid sealing device capable of reducing magnetic liquid evaporation |
| CN206628439U (en) * | 2017-03-01 | 2017-11-10 | 中国科学院近代物理研究所 | A kind of electrostatic deflection plates for being used for charged particle Injection and extraction in cooling storage ring |
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2017
- 2017-03-01 CN CN201710118305.6A patent/CN106683965B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101420171A (en) * | 2008-10-11 | 2009-04-29 | 中国科学院近代物理研究所 | Method for stacked bus-bar of large power switch power supply |
| CN101631418A (en) * | 2009-01-12 | 2010-01-20 | 中国科学院近代物理研究所 | System for cascade cyclotron and dual-cooling storage ring |
| CN101815399A (en) * | 2009-01-12 | 2010-08-25 | 中国科学院近代物理研究所 | Radio frequency excitation leading-out method and device in heavy-ion cancer therapy synchronous accelerator |
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Application publication date: 20170517 Assignee: Lanzhou Kejin Taiji Corp.,Ltd. Assignor: INSTITUTE OF MODERN PHYSICS, CHINESE ACADEMY OF SCIENCES Contract record no.: X2021620000012 Denomination of invention: The utility model relates to an electrostatic deflection plate for injecting and extracting charged particles in a cooling storage ring Granted publication date: 20181109 License type: Common License Record date: 20210914 |
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Change date: 20220706 Contract record no.: X2021620000012 Assignor after: INSTITUTE OF MODERN PHYSICS, CHINESE ACADEMY OF SCIENCES Assignor after: HUIZHOU ION SCIENCE RESEARCH CENTER Assignor before: INSTITUTE OF MODERN PHYSICS, CHINESE ACADEMY OF SCIENCES |