CN202839568U - Device transferring work piece to get in and out of vacuum area and pass through processing zone in vacuum area - Google Patents
Device transferring work piece to get in and out of vacuum area and pass through processing zone in vacuum area Download PDFInfo
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- CN202839568U CN202839568U CN201220445807.2U CN201220445807U CN202839568U CN 202839568 U CN202839568 U CN 202839568U CN 201220445807 U CN201220445807 U CN 201220445807U CN 202839568 U CN202839568 U CN 202839568U
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- vacuum
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Abstract
The utility model provides a device transferring a work piece to get in and out of a vacuum area and pass through a processing zone in a vacuum area. The device transferring the work piece to get in and out of the vacuum area and pass through the processing zone in the vacuum area includes a vacuum process chamber. The vacuum process chamber is divided into a front buffer zone, the processing zone and a rear buffer zone. A horizontal transfer platform is arranged through the front buffer zone, the processing zone and the rear buffer zone in a penetrating manner. The front buffer zone and the rear buffer zone are inside provided with device lifting devices capable of moving the work piece up and down successively. The working piece can be moved down to the horizontal transfer platform or moved up to depart from the horizontal transfer platform. The device transferring the work piece to get in and out of the vacuum area and pass through the processing zone in the vacuum area has advantages in that the work piece is always in linear motion and never turns around in the transfer process; the transfer efficiency is high; the motion mode is simple; the design is simple; the number of required mechanical parts is small; the cost is low; and the reliability is high.
Description
Technical field
The utility model relates to the vacuum process field, particularly relates to a kind of equipment of vacuum transmission processing procedure.
Background technology
In some solar battery sheet manufacturings, all need under vacuum environment, carry out the processing of a lot of workpiece.Inevitably, need workpiece is sent into vacuum and is taken out under the normal temperature and pressure from vacuum from the normal temperature and pressure environment, its whole course of reaction need to repeatedly vacuumize, vacuum breaker, and not only flow process is loaded down with trivial details but also consume the energy, abrasion equipment.
And, when the workpiece of different batches passes in and out vacuum environment, or when in vacuum environment, switching to lower batch of workpiece to be processed from finished work, its processing unit (plant) is to the procedure for processing of the workpiece interrupt of all having to, in this section break period, this processing unit (plant) is in invalid running status fully, has both wasted operation resource, has wasted process time again.
In the prior art, or workpiece can not be processed continuously, or it is very low to add continuously man-hour production efficiency, and the production efficiency that therefore how to improve vacuum process just becomes a vital research topic.
Summary of the invention
In order to solve above technical problem, the utility model provides a kind of can effectively save operation resource and process time, the transferring work piece turnover vacuum of enhancing productivity and the equipment by the processing district in a vacuum.
The utility model also provides a kind of transferring work piece turnover vacuum and the equipment by the processing district in a vacuum, comprise a vacuum process chamber, described vacuum process chamber is divided into front buffering area, processing district and rear buffering area in turn, runs through front buffering area, processing district and rear buffering area in it and is provided with the horizontal transport platform; In front buffering area and the rear buffering area lowering or hoisting gear is set, can descends one by one or the rising workpiece, make to drop under the workpiece on the horizontal transport platform or rise and leave the horizontal transport platform.
In order to reach better effect, the utility model transferring work piece turnover vacuum also also can adopt following measures by the equipment of processing district in a vacuum:
1, this equipment also comprise one arrange at least two can open and close seal enter the sheet chamber, describedly enter the sheet chamber and can open and close seal by one and be connected with the front end in vacuum process chamber; Advance in the sheet chamber connecting gear is set.Can transfer to the vacuum process chamber to the workpiece of N longitudinal arrangement of row from entering the sheet chamber simultaneously.
2, this equipment comprises that also arranges two the slice chambeies that can open and close seal at least, and described slice chamber can open and close seal by one and be connected with the rear end in vacuum process chamber; Slice arranges connecting gear in the chamber.Can transfer to the slice chamber to the workpiece of N longitudinal arrangement of row from the vacuum process chamber simultaneously.3, in the described processing district more than one machining position is set.The setting of machining position quantity can be according to the process characteristic of processing work, and purpose is the efficient that reaches the highest.
4, two machining position are set in the described processing district.
The beneficial effects of the utility model are:
The front buffering area in described vacuum process chamber, processing district and rear buffering area, the lowering or hoisting gear of described front buffering area carries out descending motion, described horizontal transport platform carry out horizontal movement, described rear buffering area in the processing district to workpiece lowering or hoisting gear to workpiece at front buffering area workpiece is carried out again ascending motion at rear buffering area, the workpiece of the last file N in processing district workpiece bottommost moves down like this, deliver to respectively one by one the horizontal transport platform, after completion of processing, workpiece will carry out moving from delivery platform more one by one, finally line up a file N workpiece.So can make workpiece in a vacuum continuously by the processing district, be that rectilinear motion does not turn round in the whole transmission course, thereby efficiency of transmission is high always, motion mode is simple, and is simple in structure, and required component of machine is few, and cost is low, and reliability is high.
Enter sheet chamber and slice chamber and can open and close seal by controlling on it, it is switched between atmospheric condition and vacuum state, thus can transferring work piece turnover vacuum.Avoided that the vacuum process chamber constantly vacuumizes itself, vacuum breaker, this time has been transferred to into sheet chamber and slice chamber, made the vacuum process chamber be in vacuum state always, carried out specially the batch machining of workpiece.Workpiece enters the sheet chamber or enters the sheet chamber then at vacuum breaker when the vacuum process chamber is transmitted and processed, puts into or export workpiece.The further so effective saving load time, do not cause any time loss.
Equipment described in the utility model is applied to solar energy ion implantor industry, and production capacity is greatly improved.The processing production capacity that such as specification is the solar silicon wafers of 156mm*156mm reaches more than 3000 slices/hour, specification is that the processing production capacity of the solar silicon wafers of 125mm*125mm can reach more than 5000 slices/hour, thereby can satisfy the solar energy industry for the requirement of the large production capacity of Implantation, ion implantation technology is reduced greatly at sun industry processing procedure cost, and can in market, promote on a large scale.
Transferring work piece turnover vacuum described in the utility model not only can be used for solar energy ion implantor in the photovoltaic industry also in a vacuum by the equipment of processing district, and may be used in the industry and production of other numerous applicable vacuum process.
Description of drawings
Fig. 1 is the vertical view of an embodiment of described equipment under the utility model.
Fig. 2 is that Fig. 1 looks perspective view the master of running status one.
Fig. 3 is that Fig. 1 looks perspective view the master of running status two.
Fig. 4 is that Fig. 1 looks perspective view the master of running status three.
Fig. 5 is that Fig. 1 looks perspective view the master of running status four.
Fig. 6 is that Fig. 1 looks perspective view the master of running status five.
Fig. 7 is that Fig. 1 looks perspective view the master of running status six.
Fig. 8 is that Fig. 1 looks perspective view the master of running status seven.
Each piece number explanation among the figure:
1-valve A; 2-valve B; 3-valve C; 4-valve D; 5-enters the sheet chamber; Buffering area before the 6-; The 7-processing district; Buffering area behind the 8-; 9-slice chamber; First subjob of 10I-; 10II-second batch subjob; The 3rd batch of workpiece of 10III –; The 1011-machining position.
Embodiment
In conjunction with Fig. 1 to Fig. 8, transferring work piece turnover vacuum described in the utility model also is elaborated by the equipment of processing district in a vacuum.
As shown in Figure 1, transferring work piece described in the utility model turnover vacuum and the equipment by the processing district in a vacuum, the front buffering area 6 at its middle part, processing district 7 and the rear buffering area 8 common vacuum process chambeies that form connect between front buffering area 6, processing district 7 and the rear buffering area 8 each other.
Entering sheet chamber 5, vacuum process chamber, slice chamber 9 connects by valve B2, valve C3 in turn.Enter sheet chamber 5 and slice chamber 9 another valve A1 and valve D4 also are set respectively.Enter sheet chamber 5 and slice chamber 9 by the control to valve A1 and valve D4, carry out and the external world between work piece delivery; By the control of valve B2, valve C3, carry out and the vacuum process chamber between work piece delivery.In order to carry out work piece delivery, advance also to be respectively arranged with in sheet chamber 5 and the slice chamber 9 connecting gear (not shown in the figures, as to be positioned at workpiece 10 places), connecting gear can transmit toward extraneous or past vacuum process chamber the file workpiece of N vertical direction.
Enter sheet chamber 5 and slice chamber 9 is provided with the vacuum pump (not shown), can between atmosphere and vacuum state, switch, thus finish and extraneous, and the vacuum process chamber between work piece delivery.
As shown in Figure 2, described vacuum process chamber, the bottom of running through front buffering area 6, processing district 7 and rear buffering area 8 in it is provided with horizontal transport platform (not shown); Front buffering area 6 and the rear buffering area 8 interior lowering or hoisting gear (not shown) that arrange, lowering or hoisting gear can carry out elevating movement to the file workpiece of N vertical direction.
In processing district 7, according to the process characteristic of processing work, the machining position 11 of varying number is set,
The present embodiment is two machining position 11.
During operation, suppose initial condition: enter sheet chamber 5 and be atmosphere, the slice chamber is vacuum.Valve A1 opens, and valve B2 closes, and valve C3 opens, and valve D4 closes.A collection of subjob is 12.Whole workflow is as follows:
1, first batch 12 workpiece 10I files all enter into sheet chamber 5, and as shown in Figure 2, valve A1 closes.
2, enter sheet chamber 5 and vacuumize, complete late gate B2 opens.
3,12 workpiece 10I enter front buffering area 6 together from entering sheet chamber 5, as shown in Figure 3; After entering front buffering area 6, valve B2 closes.
4, first subjob 10I the past buffering area 6 progressively descends, and falls in turn and carries out rectilinear motion on the horizontal feed platform, as shown in Figure 4; Enter simultaneously sheet chamber 5 and pour atmosphere, valve A1 opens.
5, first subjob 10I passes through the processing district one by one; Second batch subjob 10II begins to enter into sheet chamber 5, as shown in Figure 5 simultaneously.
6, second batch subjob 10II is with the process of step 1; Meanwhile, be up to the standard the one by one motion terminator of delivery platform of first subjob 10I, and rise in the rear cushion chamber, as shown in Figure 6 by elevating mechanism one by one after arriving.
7, enter sheet chamber 5 and vacuumize, complete late gate B2 opens.
8, after last falls among first subjob 10I, second batch subjob 10II enters front cushion chamber 6 simultaneously together, as shown in Figure 7; The process of second batch subjob 10II repeating step 3～step 4.
9, after first subjob 10I all enters rear buffering area, enter together slice chamber 9, valve C3 closes.
10, atmosphere is filled in slice chamber 9, and valve D4 opens.
11, first subjob 10I is begun to be removed by slice chamber 9, and the 3rd batch of workpiece 10III enters into sheet chamber 5, as shown in Figure 8 simultaneously.
Finish thus and transmit first subjob turnover vacuum and pass through continuously in a vacuum machining area, the circulation of second batch, the 3rd batch above step of beginning.
Claims (5)
1. transferring work piece turnover vacuum and the in a vacuum equipment by the processing district, it is characterized in that it comprises a vacuum process chamber, described vacuum process chamber is divided into front buffering area, processing district and rear buffering area in turn, runs through front buffering area, processing district and rear buffering area in it and is provided with the horizontal transport platform; In front buffering area and the rear buffering area lowering or hoisting gear is set, can descends one by one or the rising workpiece, make to drop under the workpiece on the horizontal transport platform or rise and leave the horizontal transport platform.
2. according to claim 1 described a kind of transferring work piece turnover vacuum and the in a vacuum equipment by the processing district, it is characterized in that it also comprise one arrange at least two can open and close seal enter the sheet chamber, describedly enter the sheet chamber and can open and close seal by one and be connected with the front end in vacuum process chamber; Advance in the sheet chamber connecting gear is set, can transfer to the vacuum process chamber to the workpiece of N longitudinal arrangement of row from entering the sheet chamber simultaneously.
3. according to claim 1 and 2 described a kind of transferring work piece turnover vacuum and the in a vacuum equipment by the processing district, comprise that also arranges two the slice chambeies that can open and close seal at least, described slice chamber can open and close seal by one and be connected with the rear end in vacuum process chamber; Slice arranges connecting gear in the chamber, can transfer to the slice chamber to the workpiece of N longitudinal arrangement of row from the vacuum process chamber simultaneously.
4. described a kind of transferring work piece turnover vacuum is characterized in that being provided with in the described processing district more than one machining position also in a vacuum by the equipment of processing district according to claim 3.
5. described a kind of transferring work piece turnover vacuum is characterized in that being provided with in the described processing district two machining position also in a vacuum by the equipment of processing district according to claim 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220445807.2U CN202839568U (en) | 2012-09-04 | 2012-09-04 | Device transferring work piece to get in and out of vacuum area and pass through processing zone in vacuum area |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220445807.2U CN202839568U (en) | 2012-09-04 | 2012-09-04 | Device transferring work piece to get in and out of vacuum area and pass through processing zone in vacuum area |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202839568U true CN202839568U (en) | 2013-03-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220445807.2U Expired - Lifetime CN202839568U (en) | 2012-09-04 | 2012-09-04 | Device transferring work piece to get in and out of vacuum area and pass through processing zone in vacuum area |
Country Status (1)
| Country | Link |
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| CN (1) | CN202839568U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102842528A (en) * | 2012-09-04 | 2012-12-26 | 青岛赛瑞达电子装备股份有限公司 | Method for transferring workpieces to enter and exit vacuum environment and ensuring workpieces to pass through processing region in vacuum environment and equipment |
-
2012
- 2012-09-04 CN CN201220445807.2U patent/CN202839568U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102842528A (en) * | 2012-09-04 | 2012-12-26 | 青岛赛瑞达电子装备股份有限公司 | Method for transferring workpieces to enter and exit vacuum environment and ensuring workpieces to pass through processing region in vacuum environment and equipment |
| CN102842528B (en) * | 2012-09-04 | 2015-04-29 | 青岛赛瑞达电子装备股份有限公司 | Method for transferring workpieces to enter and exit vacuum environment and ensuring workpieces to pass through processing region in vacuum environment and equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211214 Address after: 214000 three comma maker spaces in the east of 1 / F, building 6, Ruiyun, No. 99, Furong Zhongsan Road, Xishan District, Wuxi City, Jiangsu Province Patentee after: Sairuida intelligent electronic equipment (Wuxi) Co.,Ltd. Address before: 266100 No. 10, Tongchuan Road, Licang District, Qingdao, Shandong Patentee before: QINGDAO SUNRED ELECTRONIC EQUIPMENT Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130327 |
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| CX01 | Expiry of patent term |