CN202839567U - Conveyer used for feeding material and discharging material for vacuum reaction cavity - Google Patents
Conveyer used for feeding material and discharging material for vacuum reaction cavity Download PDFInfo
- Publication number
- CN202839567U CN202839567U CN2012204457864U CN201220445786U CN202839567U CN 202839567 U CN202839567 U CN 202839567U CN 2012204457864 U CN2012204457864 U CN 2012204457864U CN 201220445786 U CN201220445786 U CN 201220445786U CN 202839567 U CN202839567 U CN 202839567U
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- connecting gear
- reaction chamber
- vacuum reaction
- gear
- transfer equipment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model provides a conveyer used for feeding material and discharging material for a vacuum reaction cavity. The conveyer used for feeding material and discharging material for the vacuum reaction cavity includes a vacuum reaction cavity and a converting cavity provided with at least seal pieces capable of being opened and closed. The vacuum reaction cavity is connected with the converting cavity through one of the seal pieces capable of being opened and closed. The converting cavity is provided with an A conveying mechanism and a B conveying mechanism that can be moved together synchronously, and a drive system connected with the A conveying mechanism and the B conveying mechanism respectively. The conveyer used for feeding material and discharging material for the vacuum reaction cavity provided by the utility model has advantages that a problem that silicon wafers cannot be mounted or taken out in a reaction process is solved and a problem of time consumption caused by that the reaction cavity needs to be vacuumized repeatedly is also solved; and the production efficiency is improved substantially and manpower is economized.
Description
Technical field
The utility model relates to the vacuum process field, particularly relates to the transfer equipment of vacuum reaction chamber input and output material.
Background technology
In some manufacturings, all need under vacuum environment, carry out the processing of a lot of workpiece.Inevitably, need workpiece is sent into vacuum and is taken out under the normal temperature and pressure from vacuum from the normal temperature and pressure environment, its whole course of reaction need to repeatedly vacuumize, vacuum breaker, and not only flow process is loaded down with trivial details but also consume the energy, abrasion equipment.
Such as the solar battery sheet manufacturing, the dry method etching device is a kind of special equipment for the solar cell dies etching technique, its principle is under vacuum state, by radio-frequency power supply glow discharge, make reacting gas be ionized into plasma, gas ion is by the effect of electromotive force, the bombardment silicon chip, silicon chip is corroded, with silicon chip generation chemical reaction and physical reactions, reach etching effect.
Whole process is carried out at vacuum chamber, before reacting, cell piece need to be placed into cell piece in the chamber by transmission mechanism.Common transfer approach has two kinds, and the first as shown in Figure 1.Charging tray 2 is placed on the workbench A1, at first carries out load, is about to cell piece 4 and is placed on the charging tray 2; Send sheet, soon charging tray 2 is delivered in the reaction chamber 3 and is reacted again; After question response is complete, carry out slice from original porch again, namely charging tray 2 by in the reaction chamber 3 out; Get back at last workbench A1 and get sheet, finish thus the whole flow process of a solar energy sheet turnover operation.Whole course of work holding time is longer.
Another kind of drive such as Fig. 2 show.Its reaction chamber 3 both sides arrange respectively workbench A1 and workbench B5, are with the first kind of way difference, and send the sheet mouth different from piece mouth, it adopts flow system, in reaction, can carry out load and get sheet, has saved the time to a certain extent.But need vacuumize in course of reaction, then pass into gas and carry out glow discharge, after reaction finishes, for guaranteeing that personal safety needs to exclude having corrosive process gas in the chamber, again vacuumize, identical for guaranteeing the chamber external and internal pressure, also need again to using the inert gas vacuum breaker in the chamber.Above whole course of reaction need to repeatedly vacuumize, vacuum breaker, and not only flow process is loaded down with trivial details but also consume the energy, abrasion equipment; Solar battery sheet in reaction chamber 3, has been wasted the time always simultaneously, has reduced operating efficiency.
In addition, above two kinds of required manpowers of the kind of drive are more, and equipment occupation space is large.
Summary of the invention
The utility model provides a kind of transfer equipment of realizing vacuum reaction chamber input and output material, comprise the vacuum reaction chamber and be provided with at least two conversion chambers that can open and close seal, wherein the vacuum reaction chamber can open and close seal by one with conversion between the chamber and is connected, be provided with A connecting gear and the B connecting gear that can carry out synchronous shift in the conversion chamber, and the drive system that links to each other with A connecting gear, B connecting gear respectively.
Described A connecting gear and B connecting gear have three working positions when carrying out synchronous shift.Workpiece carries out first being processed and completion of processing in the vacuum reaction chamber after, need to be introduced into the conversion chamber, the conversion chamber switches between atmosphere and vacuum, workpiece switches between three working positions in the conversion chamber, and workpiece to be processed is delivered to the vacuum reaction chamber from the external world and the completion of processing workpiece is sent extraneous transmission from the vacuum reaction chamber to finish.
The direction that described A connecting gear and B connecting gear carry out displacement can be vertical direction, also can be horizontal direction, even be to save the space can be circumferencial direction, as long as keep zero-bit corresponding with the same straight line of workbench or the plane of the external world and the indoor place work piece of vacuum reaction chamber, just can reach identical effect.Correspondingly, in the transfer equipment of described realization vacuum reaction chamber input and output material, upper connecting gear and lower connecting gear also can change the direction of motion and track.In any case it carries out pattern and the structure that working position switches around zero-bit, all belong to the similar distortion to technical scheme described in the utility model, belong to protection range of the present utility model.
For reaching better effect, transfer equipment described in the utility model can also adopt following measures:
1, described drive system is specially the lifting drive system, comprise motor, cross steering gear, spiral lift, motor links to each other with two cross steering gears respectively by decelerator, shaft coupling, the cross steering gear links to each other with spiral lift by shaft coupling, and the push rod that arranges on spiral lift and upper connecting gear and the lower connecting gear links to each other.
2, described A connecting gear and B connecting gear are specially connecting gear and lower connecting gear, the two structure is identical, comprise respectively motor, bevel gear and power transmission shaft, motor links to each other with magnetic fluid by decelerator, shaft coupling, bevel gear is arranged in the rotating shaft of magnetic fluid, bevel gear links to each other with power transmission shaft by shaft coupling, and power transmission shaft is fixed on by supporting seat on the platform of transmission mechanism, is provided with roller on the power transmission shaft.
3, described transfer equipment also comprises the welding bellows that is fixed on the reaction chamber outer surface, and its push rod that is positioned at connecting gear and lower connecting gear is outside.As vacuum seal structure, welding bellows is on the basis of satisfying the vacuum requirement, and having advantages of stretches does not repeatedly damage with compression.
4, described upper connecting gear and lower connecting gear are integrated.Its two synchronous rise and fall of assurance that like this can be the easiest.
During work, the motor of lifting drive system through decelerator by shaft coupling, cross steering gear with transmission of power to spiral lift, make the rise and fall of connecting gear and lower connecting gear on the transfer chamber inside by spiral lift, after arriving the precalculated position, the motor-driven magnetic fluid of transmission mechanism rotates, under the commutation effect of bevel gear, thereby drive power transmission shaft, roller rotates the transmission purpose that is up to the standard.
Described transfer equipment has adopted cross steering gear, spiral lift, reached when using four differences of a motor-driven to move up and down, and upper-lower position can accurately be controlled; Adopt magnetic fluid to reach transmission of power and vacuum seal requirement as intermediate link.
The transfer equipment of described vacuum reaction chamber input and output material not only can be used for dry method etching device discharging system, and may be used in numerous production lines.
Description of drawings
Fig. 1 is the schematic diagram of the first transfer approach in the prior art.
Fig. 2 is the schematic diagram of the second transfer approach in the prior art.
Fig. 3 is transfer equipment work schematic diagram described in the utility model.
Fig. 4 is the vertical view of the jacking system of transfer equipment described in the utility model.
Fig. 5 is the front view with the jacking system of upper connecting gear or lower connecting gear.
Fig. 6 is the vertical view of upper driving mechanism or lower connecting gear.
Fig. 7 is the front view of upper driving mechanism and lower connecting gear.
Each piece number explanation among the figure:
1-workbench A; The 2-charging tray; The 3-reaction chamber; The 4-cell piece; 5-workbench B; 6-upper driving mechanism; Connecting gear under the 7-; 8-changes chamber; 9-reaction chamber valve; 10-conversion chamber valve; The 11-motor; The 12-decelerator; The 13-shaft coupling; The 14-connecting axle; The steering gear of 15-cross; The 16-spiral lift; The 17-welding bellows; The 18-push rod; The 19-supporting seat; The 20-bevel gear; The 21-power transmission shaft; The 22-roller; The 23-magnetic fluid.
Embodiment
Dry method making herbs into wool turnover sheet system is elaborated to transfer equipment described in the utility model in conjunction with Fig. 4 to Fig. 7 as example in the solar battery sheet manufacturing.
As shown in Figure 4, motor 11 supports the use with decelerator 12, is connected with cross steering gear 15 by connecting axle 14 and shaft coupling 13, and then is connected with spiral lift 16 by shaft coupling 13, reaches the simultaneously rise and fall of four differences of a motor-driven.
As shown in Figure 5, spiral lift 16 is connected by the push rod 18 of supporting base with conversion chamber 8 inner upper connecting gears 6 or lower connecting gear 7, for reaching seal request, in push rod 18 outsides, has increased welding bellows 17 between supporting base and conversion chamber 8 cavitys.
As shown in Figure 6, upper connecting gear 6 or lower connecting gear 7 are that motor 11, decelerator 12 are connected by shaft coupling 13 with magnetic fluid 23, reach seal request, magnetic fluid 23 specific customization, bevel gear 20 is installed in the rotating shaft of magnetic fluid 23, can move up and down in rotating shaft.
Upper connecting gear 6 or lower connecting gear 7 can be an integral body, simultaneously rise and fall, its two driven by motor 11 respectively, but complete independently input and output material process, as shown in Figure 7.
During work, motor 11 through decelerators 12 by shaft coupling 13, connecting axle 14, cross steering gear 15 with transmission of power to spiral lift 16, the effect of spiral lift 16 is the rise and fall that drive upper connecting gear 6 and lower connecting gear 7, after arriving the precalculated position, motor 11 drives magnetic fluid 23 and rotates, by bevel gear 20 commutations, reach the transmission purpose by shaft coupling, power transmission shaft 21, roller 22 again.
Transfer equipment described in the utility model, its jacking system has adopted cross steering gear, spiral lift, reached when using four differences of a motor-driven to move up and down, and upper-lower position can accurately be controlled; For satisfying the vacuum degree requirement, adopted the welding bellows sealing as vacuum seal structure, both having satisfied stretches does not repeatedly damage with compression, has satisfied again the vacuum requirement; Upper connecting gear and lower connecting gear have directly adopted magnetic fluid to reach transmission of power and vacuum seal requirement as intermediate link, and bevel gear can move up and down in the magnetic fluid rotating shaft simultaneously.
Transfer equipment described in the utility model is to have increased a transfer process between the transmission of the workbench 1 of legacy equipment and reaction chamber 3, comprises 2#, 3# and 4# working position in this process, and as shown in the figure, its position is to distribute successively from bottom to top; Workbench 1 is the 1# position, and reaction chamber is the 5# position.
Upper connecting gear 6 and lower connecting gear 7 connect as one, and can switch to 3#, 4# position by jacking system 2#, 3# position.
The following Fig. 3 of specific works step shows: 1# is arranged in the whole system, 2#, 3#, 4#, 5# is totally 5 service positions, suppose that wherein initial position is: charging tray 2 is respectively at 1#, the upper connecting gear of 4#(), the 5# position, change chamber 8 this moment, reaction chamber 3 all is under the vacuum state, after technique is finished in the 5# position, open reaction chamber valve 9, the charging tray of 5# position is transferred on the lower connecting gear 7, by jacking system with 3#, the 4# position switches to 2#, the 3# position, charging tray 2 on the upper connecting gear 6 is delivered to the 5# position, off-response chamber valve 9 carries out again secondary response, in reaction time, once carried out the process of vacuum breaker-vacuumize-vacuum breaker in conversion chamber 8, open conversion chamber valve 10,1# position charging tray 2 is delivered on the upper connecting gear 6, by jacking system with 2#, the 3# position switches to 3#, the 4# position, the charging tray 2 of lower connecting gear 7 sent to the 1# service position get sheet and load in order to next step, closing baffle plate valve 1, in the process of load, the conversion chamber again vacuumizes to reach with reaction chamber and approaches, this moment, reaction chamber 3 interior cell pieces 4 reacted complete, open reaction chamber 9,5# position charging tray 2 is sent, carried out next duty cycle.
The transfer equipment of dry method making herbs into wool described in the utility model turnover sheet has reached when dress is got sheet, conversion, reaction and has carried out, and has improved greatly operating efficiency, and whole process carries out automated job, and shared manpower reduces one times.
Claims (5)
1. the transfer equipment of a vacuum reaction chamber input and output material, it is characterized in that it comprises the vacuum reaction chamber and is provided with at least two conversion chambers that can open and close seal, wherein the vacuum reaction chamber can open and close seal by one with conversion between the chamber and is connected, be provided with A connecting gear and the B connecting gear that can carry out synchronous shift in the conversion chamber, and the drive system that links to each other with A connecting gear, B connecting gear respectively.
2. the transfer equipment of described vacuum reaction chamber input and output material according to claim 1, it is characterized in that described drive system is specially the lifting drive system, it comprises motor, cross steering gear, spiral lift, motor links to each other with two cross steering gears respectively by decelerator, shaft coupling, the cross steering gear links to each other with spiral lift by shaft coupling, and the push rod that arranges on spiral lift and upper connecting gear and the lower connecting gear links to each other.
3. the transfer equipment of described vacuum reaction chamber input and output material according to claim 1 and 2, it is characterized in that described A connecting gear and B connecting gear are specially upper connecting gear identical with lower connecting gear structure, comprise respectively motor, bevel gear and power transmission shaft, motor links to each other with magnetic fluid by decelerator, shaft coupling, bevel gear is arranged in the rotating shaft of magnetic fluid, bevel gear links to each other with power transmission shaft by shaft coupling, power transmission shaft is fixed on by supporting seat on the platform of transmission mechanism, is provided with roller on the power transmission shaft.
4. the transfer equipment of described vacuum reaction chamber input and output material according to claim 3 is characterized in that described transfer equipment also comprises the welding bellows that is fixed on the reaction chamber outer surface, and its push rod that is positioned at connecting gear and lower connecting gear is outside.
5. the transfer equipment of described realization vacuum reaction chamber input and output material according to claim 3 is characterized in that what described upper connecting gear and lower connecting gear were integrated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012204457864U CN202839567U (en) | 2012-09-04 | 2012-09-04 | Conveyer used for feeding material and discharging material for vacuum reaction cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012204457864U CN202839567U (en) | 2012-09-04 | 2012-09-04 | Conveyer used for feeding material and discharging material for vacuum reaction cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202839567U true CN202839567U (en) | 2013-03-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012204457864U Expired - Lifetime CN202839567U (en) | 2012-09-04 | 2012-09-04 | Conveyer used for feeding material and discharging material for vacuum reaction cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202839567U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102842649A (en) * | 2012-09-04 | 2012-12-26 | 青岛赛瑞达电子装备股份有限公司 | Transmitting method for feeding and discharging of vacuum reaction chamfer and transmitting equipment |
| CN109207966A (en) * | 2018-10-23 | 2019-01-15 | 杭州海莱德智能科技有限公司 | A kind of building block system panel PECVD coating system |
| CN114481098A (en) * | 2022-01-17 | 2022-05-13 | 成都四威高科技产业园有限公司 | Cavity PECVD equipment transmission with safeguard function |
-
2012
- 2012-09-04 CN CN2012204457864U patent/CN202839567U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102842649A (en) * | 2012-09-04 | 2012-12-26 | 青岛赛瑞达电子装备股份有限公司 | Transmitting method for feeding and discharging of vacuum reaction chamfer and transmitting equipment |
| CN109207966A (en) * | 2018-10-23 | 2019-01-15 | 杭州海莱德智能科技有限公司 | A kind of building block system panel PECVD coating system |
| CN114481098A (en) * | 2022-01-17 | 2022-05-13 | 成都四威高科技产业园有限公司 | Cavity PECVD equipment transmission with safeguard function |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211220 Address after: 214000 three comma maker spaces in the east of 1 / F, building 6, Ruiyun, No. 99, Furong Zhongsan Road, Xishan District, Wuxi City, Jiangsu Province Patentee after: Sairuida intelligent electronic equipment (Wuxi) Co.,Ltd. Address before: 266100 No. 10, Tongchuan Road, Licang District, Qingdao, Shandong Patentee before: QINGDAO SUNRED ELECTRONIC EQUIPMENT Co.,Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130327 |