CN202828945U - Automatic material handling system - Google Patents

Automatic material handling system Download PDF

Info

Publication number
CN202828945U
CN202828945U CN 201220499223 CN201220499223U CN202828945U CN 202828945 U CN202828945 U CN 202828945U CN 201220499223 CN201220499223 CN 201220499223 CN 201220499223 U CN201220499223 U CN 201220499223U CN 202828945 U CN202828945 U CN 202828945U
Authority
CN
China
Prior art keywords
handling system
material handling
automated material
space
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN 201220499223
Other languages
Chinese (zh)
Inventor
杨政谕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
L&K ENGINEERING (SUZHOU) Co Ltd
Original Assignee
L&K ENGINEERING (SUZHOU) Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by L&K ENGINEERING (SUZHOU) Co Ltd filed Critical L&K ENGINEERING (SUZHOU) Co Ltd
Priority to CN 201220499223 priority Critical patent/CN202828945U/en
Application granted granted Critical
Publication of CN202828945U publication Critical patent/CN202828945U/en
Anticipated expiration legal-status Critical
Withdrawn - After Issue legal-status Critical Current

Links

Images

Landscapes

  • Ventilation (AREA)

Abstract

The utility model discloses an automatic material handling system. The automatic material handling system comprises an automatic material handling system body and at least one procedure processing area. The automatic material handling system body comprises a processing area automatic transportation rail loop and at least one storage bin, and further comprises a framework space, a cleaning space and a circulating space from top to bottom. A ceiling is arranged between the framework space and the cleaning space. Separating boards are arranged around the automatic material handling system body so that the cleaning space where the automatic material handling system body is located and at least a part of the framework space form an independent cleaning microenvironment structure. According to the automatic material handling system, the independent cleaning microenvironment structure is formed, when corrosive gas in a processing device overflows and flows into an external large-scale cleaning space, the corrosive gas does not enter the cleaning microenvironment structure formed by the automatic material handling system body, and therefore influence on product quality from the corrosive gas is avoided.

Description

A kind of automated material handling system
Technical field
The utility model relates to a kind of automated material handling system, can be used in the flat-panel screens manufacturing field.
Background technology
Automated material handling system (AMHS, Automatic Material Handling System) claims again Overhead travelling crane system.The field of application of this conveyer is wider, such as the goods transport on airport, the material transportation of automatic factory etc.; When AMHS was applied to flat-panel screens manufacturing field, because the manufacturing of flat-panel screens depends on the multiple processing step of different treatment facilities, this need to utilize automated material handling system (AMHS) to transmit product between treatment facility.
Existing automated material handling system (AMHS) mainly comprises automated material handling system and a plurality of programs processing district 1(Process Bays referring to shown in the accompanying drawing 1); Wherein, be provided with various Fabricating machinerys 15 in the program processing district; Automated material handling system comprises processing interval automatic conveying rail loop 2 and a plurality of storage warehouse 3(Stocker), the transmission between the described storage warehouse is to finish by the suspension type handling system 16 in the processing interval automatic conveying rail loop.
The general approximate rectangular or round rectangle in existing processing interval automatic conveying rail loop, shown in accompanying drawing 1, the suspension type handling system runs in the processing interval automatic conveying rail loop; Described each storage warehouse lays respectively at a side of program processing district, and each storage warehouse comprises the storage bin of some vertical stackings, in order to load plane card casket.
Fig. 2 is the A-A cutaway view of Fig. 1, and as seen from the figure, existing processing interval automatic conveying rail loop comprises three sheaf spaces from top to bottom: framework space 4(TRUSS), clean room 5(FAB) and cyclic space 6(SUBFAB); Be provided with top ceiling 7 between framework space and the clean room, top ceiling is provided with blower fan filter unit 9(FFU, Fan Filter Units), existing top ceiling is provided with air extractor vent, so that the air after the filtration that FFU provides enters clean room; Be provided with raised floor 17 between clean room and the cyclic space, raised floor is provided with breather hole, so that gas is by circulation.
Existing automated material handling system (AMHS) generally is to be wholy set in the large-scale clean room (in large-scale workshop), to realize transportation and the processing of material.Yet, the employed pure air of employed pure air in the existing automated material handling system and a plurality of programs processing district all is that the pure air with the large-scale clean room of factory building directly is communicated with and mixes, find in actual applications, owing to being provided with a lot of Fabricating machinerys in the program processing district, these equipment can produce various waste gas or aggressive fume in process of production (such as chlorine, hydrogen chloride etc.), after in case these aggressive fumes overflow, these gases can be gone in the outside large-scale clean room, thereby product direct and in the automated material handling system contacts, especially directly contact with the product that stores in storage warehouse (Stocker), this has just affected the quality of product greatly; After in case this kind situation occurs then be difficult to remove.
On the other hand, in order to keep cleanliness and the constant temperature in the clean room, need to form the wind circulation of certain air quantity, this has just proposed requirement to the cyclic space (SUBFAB) and the dry coil pipe established in the inner, because the air circulation of storage warehouse (Stocker) must be processed with the air circulation of large-scale clean room, air circulation is larger, and therefore the height of the existing cyclic space is all higher, and laid down cost is higher.
Again on the other hand, consider the minority Fabricating machinery to the demand of little vibration, often comprehensive whole factory builds wafer board (Waffle Slab) for these equipment, increases found the factory time and cost.
Summary of the invention
Goal of the invention of the present utility model provides a kind of automated material handling system.
To achieve the above object of the invention, the technical solution adopted in the utility model is: a kind of automated material handling system, comprise automated material handling system and at least 1 program processing district, described automated material handling system comprises processing interval automatic conveying rail loop and at least 1 storage warehouse; Described automated material handling system comprises framework space, clean room and the cyclic space from top to bottom, is provided with top ceiling between framework space and the clean room, is provided with raised floor between clean room and the cyclic space; Described automated material handling system be provided with dividing plate all around, make the clean room at its place and at least a portion framework space consist of independently clean microenvironment structure.
Above, described automated material handling system comprises processing interval automatic conveying rail loop and at least 1 storage warehouse, and can also be respectively equipped with transmission system between storage warehouse and the processing district equipment, this transmission system can comprise Robot, Cassette station, Load/Unload etc.
The general approximate rectangular or round rectangle in described processing interval automatic conveying rail loop, the suspension type handling system runs in the processing interval automatic conveying rail loop, and described suspension type handling system can be OHS.
Described automated material handling system be provided with dividing plate all around, and filling into new wind, to form one be the clean microenvironment of malleation with respect to large-scale clean room, thereby when be corrosive in the Fabricating machinery gas overflowing and go in the outside large-scale clean room after, can not enter automated material handling system yet, thereby avoid the impact of these gases on product design.
Clean room and at least a portion framework space at described automated material handling system place are consisted of independently clean microenvironment structure, and namely the bottom of dividing plate only reaches on the raised floor, and does not go deep into the cyclic space of below; The top section of dividing plate gos deep among the framework space.
In the technique scheme, in described processing interval automatic conveying rail loop, top ceiling directly over its track is provided with blower fan filter unit, the medial surface of track is provided with the baffle plate of vertical setting, baffle plate is located on the whole processing interval automatic conveying rail loop, consist of a return air channel, described return air channel over against top ceiling be provided with through hole;
Be provided with new wind delivery system directly over the described through hole, and make air pressure in the described independently clean microenvironment structure greater than the air pressure of its outside clean room.
Further technical scheme, the distance between described baffle plate and the raised floor is 2 ~ 4 m.
Another kind of technical scheme correspondingly, a kind of automated material handling system comprises automated material handling system and at least 1 program processing district, described automated material handling system comprises processing interval automatic conveying rail loop and at least 1 storage warehouse; Described automated material handling system comprises framework space, clean room and the cyclic space from top to bottom, is provided with top ceiling between framework space and the clean room, is provided with raised floor between clean room and the cyclic space; Described automated material handling system be provided with dividing plate all around, make clean room, the cyclic space and at least a portion framework space at its place consist of independently clean microenvironment structure;
The bulkhead sides that is positioned at the cyclic space is provided with the gas regulation air door.
Above, clean room, the cyclic space and at least a portion framework space at described automated material handling system place are consisted of independently clean microenvironment structure, be the cyclic space of the deep below, bottom of dividing plate, make the clean microenvironment structure with the clean room of top; Simultaneously in the bulkhead sides that is positioned at the cyclic space gas regulation air door is set, provides pressure to regulate.This gas regulation air door preferably can the adjusting gas flow size.
In the technique scheme, in described processing interval automatic conveying rail loop, top ceiling directly over its track is provided with blower fan filter unit, the medial surface of track is provided with the baffle plate of vertical setting, baffle plate is located on the whole processing interval automatic conveying rail loop, consist of a return air channel, described return air channel over against top ceiling be provided with through hole;
Be provided with new wind delivery system directly over the described through hole, and make air pressure in the described independently clean microenvironment structure greater than the air pressure of its outside clean room.
Further technical scheme, the distance between described baffle plate and the raised floor is 2 ~ 4 m.
Because technique scheme is used, the utility model compared with prior art has following advantages:
1, the utility model design has obtained a kind of new automated material handling system, it arranges dividing plate all around automated material handling system, consisted of independently clean microenvironment structure, even thereby when be corrosive in the Fabricating machinery gas overflowing and go in the outside large-scale clean room after, can not enter among the clean microenvironment of automated material handling system formation yet, thereby avoid the impact of these gases on product design.
2, the utility model is provided with vertical baffle plate at the track medial surface in processing interval automatic conveying rail loop, baffle plate is located on the whole processing interval automatic conveying rail loop, consist of a return air channel, thereby take full advantage of the space of processing interval automatic conveying rail loop zone line, and the return air channel that forms can form microcirculation in the clean microenvironment structure, not only take full advantage of the pure air in it, reduced consumption, simultaneously do not need to utilize the cyclic space of outside large-scale clean room, realize the possibility of the reduction cyclic space (SUBFAB) height, and then reduced the cost of founding the factory.
3, the utility model return air channel over against top ceiling through hole is set, new wind delivery system is set directly over through hole, and make air pressure in the described independently clean microenvironment structure greater than the air pressure of its outside clean room, this has prevented further that not only aggressive fume from entering among the clean microenvironment of automated material handling system formation, can also utilize new wind and carry out premix by return air channel pure air out, realize the preset adjustment of temperature.
4, because the utility model can reduce the height of the cyclic space (SUBFAB), therefore, for little vibration sensing Fabricating machinery, can directly use the vibrationproof pedestal, do not need whole factory to build wafer board (Waffle Slab) comprehensively, shorten the time of founding the factory and the reduction cost of founding the factory.
5, of the present utility model simple in structure, be easy to preparation, be suitable for applying.
Description of drawings
Fig. 1 is the birds-eye view of automated material handling system in the background technology (AMHS);
Fig. 2 is the A-A cutaway view of Fig. 1;
Fig. 3 is the birds-eye view of the utility model embodiment one;
Fig. 4 is the B-B cutaway view of Fig. 3;
Fig. 5 is the air-flow schematic diagram of Fig. 4;
Fig. 6 is the part sectional view of the utility model embodiment two;
Fig. 7 is the air-flow schematic diagram of Fig. 6.
Wherein: 1, program processing district; 2, processing interval automatic conveying rail loop; 3, storage warehouse; 4, framework space; 5, clean room; 6, the cyclic space; 7, top ceiling; 8, dividing plate; 9, blower fan filter unit; 10, baffle plate; 11, return air channel; 12, through hole; 13, new wind delivery system; 14, gas regulation air door; 15, Fabricating machinery; 16, suspension type handling system; 17, raised floor.
The specific embodiment
Below in conjunction with drawings and Examples the utility model is further described:
Embodiment one
Shown in Fig. 3 ~ 5, a kind of automated material handling system, comprise automated material handling system and 6 program processing districts 1, be provided with various Fabricating machinerys 15 in the program processing district, described automated material handling system comprises processing interval automatic conveying rail loop 2 and 6 storage warehouses; Described automated material handling system comprises framework space 4, clean room and the cyclic space 6 from top to bottom, is provided with top ceiling 7 between framework space and the clean room; Be provided with raised floor 17 between clean room and the cyclic space, raised floor is provided with breather hole, so that gas circulation; Described automated material handling system be provided with dividing plate 8 all around, make the clean room at its place and at least a portion framework space consist of independently clean microenvironment structure.
In described processing interval automatic conveying rail loop, top ceiling directly over its track is provided with blower fan filter unit 9, the medial surface of track is provided with the baffle plate 10 of vertical setting, baffle plate is located on the whole processing interval automatic conveying rail loop, consist of a return air channel 11, described return air channel over against top ceiling be provided with through hole 12;
Be provided with new wind delivery system 13 directly over the described through hole, and make air pressure in the described independently clean microenvironment structure greater than the air pressure of its outside clean room.Distance between described baffle plate and the raised floor is 3 m.
Embodiment two
Shown in Fig. 6 ~ 7, a kind of automated material handling system comprises automated material handling system and 6 program processing districts, and described automated material handling system comprises processing interval automatic conveying rail loop and 6 storage warehouses; Described automated material handling system comprises framework space, clean room and the cyclic space from top to bottom, is provided with top ceiling between framework space and the clean room; 6 described automated material handling systems be provided with dividing plate all around, make clean room, the cyclic space and at least a portion framework space at its place consist of independently clean microenvironment structure;
The bulkhead sides that is positioned at the cyclic space is provided with gas regulation air door 14.
In described processing interval automatic conveying rail loop, top ceiling directly over its track is provided with blower fan filter unit, the medial surface of track is provided with the baffle plate of vertical setting, baffle plate is located on the whole processing interval automatic conveying rail loop, consist of a return air channel, described return air channel over against top ceiling be provided with through hole;
Be provided with new wind delivery system directly over the described through hole, and make air pressure in the described independently clean microenvironment structure greater than the air pressure of its outside clean room.Distance between described baffle plate and the raised floor is 3 m.

Claims (6)

1. an automated material handling system comprises automated material handling system and at least 1 program processing district (1), and described automated material handling system comprises processing interval automatic conveying rail loop (2) and at least 1 storage warehouse (3); Described automated material handling system comprises framework space (4), clean room (5) and the cyclic space (6) from top to bottom, be provided with top ceiling (7) between framework space and the clean room, be provided with raised floor between clean room and the cyclic space; It is characterized in that: described automated material handling system be provided with dividing plate (8) all around, make the clean room at its place and at least a portion framework space consist of independently clean microenvironment structure.
2. automated material handling system according to claim 1, it is characterized in that: in described processing interval automatic conveying rail loop, top ceiling directly over its track is provided with blower fan filter unit (9), the medial surface of track is provided with the baffle plate (10) of vertical setting, baffle plate is located on the whole processing interval automatic conveying rail loop, consist of a return air channel (11), described return air channel over against top ceiling be provided with through hole (12);
Be provided with new wind delivery system (13) directly over the described through hole, and make air pressure in the described independently clean microenvironment structure greater than the air pressure of its outside clean room.
3. automated material handling system according to claim 2, it is characterized in that: the distance between described baffle plate and the raised floor is 2 ~ 4 m.
4. an automated material handling system comprises automated material handling system and at least 1 program processing district, and described automated material handling system comprises processing interval automatic conveying rail loop and at least 1 storage warehouse; Described automated material handling system comprises framework space, clean room and the cyclic space from top to bottom, is provided with top ceiling between framework space and the clean room, is provided with raised floor between clean room and the cyclic space; It is characterized in that: described automated material handling system be provided with dividing plate all around, make clean room, the cyclic space and at least a portion framework space at its place consist of independently clean microenvironment structure;
The bulkhead sides that is positioned at the cyclic space is provided with gas regulation air door (14).
5. automated material handling system according to claim 4, it is characterized in that: in described processing interval automatic conveying rail loop, top ceiling directly over its track is provided with blower fan filter unit, the medial surface of track is provided with the baffle plate of vertical setting, baffle plate is located on the whole processing interval automatic conveying rail loop, consist of a return air channel, described return air channel over against top ceiling be provided with through hole;
Be provided with new wind delivery system directly over the described through hole, and make air pressure in the described independently clean microenvironment structure greater than the air pressure of its outside clean room.
6. automated material handling system according to claim 5, it is characterized in that: the distance between described baffle plate and the raised floor is 2 ~ 4 m.
CN 201220499223 2012-09-27 2012-09-27 Automatic material handling system Withdrawn - After Issue CN202828945U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220499223 CN202828945U (en) 2012-09-27 2012-09-27 Automatic material handling system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201220499223 CN202828945U (en) 2012-09-27 2012-09-27 Automatic material handling system

Publications (1)

Publication Number Publication Date
CN202828945U true CN202828945U (en) 2013-03-27

Family

ID=47940704

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201220499223 Withdrawn - After Issue CN202828945U (en) 2012-09-27 2012-09-27 Automatic material handling system

Country Status (1)

Country Link
CN (1) CN202828945U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102874597A (en) * 2012-09-27 2013-01-16 亚翔系统集成科技(苏州)股份有限公司 Automatic material handling system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102874597A (en) * 2012-09-27 2013-01-16 亚翔系统集成科技(苏州)股份有限公司 Automatic material handling system
CN102874597B (en) * 2012-09-27 2015-09-30 亚翔系统集成科技(苏州)股份有限公司 A kind of automated material handling system

Similar Documents

Publication Publication Date Title
KR950012146B1 (en) Clean airroom for a semiconductor factory
US20140013556A1 (en) Method and Apparatus for a Cleanspace Fabricator
US6514137B1 (en) Modular clean room plenum
CN103046776B (en) A kind of toilet for semiconductor factory building
US20080022881A1 (en) Traveling rails for carriage
US20120199065A1 (en) Multi-Module System for Processing Thin Film Photovoltaic Devices
US20180311695A1 (en) Coating booth
CN204809199U (en) Wafer box transports system
CN202828945U (en) Automatic material handling system
CN102874597B (en) A kind of automated material handling system
US20150249031A1 (en) Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator
CN106364860A (en) Enhanced transformer substation dispatching system
JP7030483B2 (en) Clean room air conditioning system
JP2011247492A (en) Clean room
JP2011002108A (en) Local cleaning air conditioning system
CN103332459A (en) Carrier device and carrier method
CN103206101B (en) Clean room for semiconductor plant
CN202988268U (en) Cleaning room provided with automated material processing system
EP4006434A1 (en) Clean workshop capable of being controlled in partition mode
CN107795063A (en) A kind of high-level clean room's furred ceiling and its installation method
US11235926B2 (en) Storage system including a vertical transfer device
CN211177202U (en) Purification air conditioning system, clean room and industrial production factory building
CN206353723U (en) Transformer station's centralized dispatching system
CN210345720U (en) Clean factory building
CN101492118A (en) Method for reducing raise dust in house, warehousing system and moving apparatus

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20130327

Effective date of abandoning: 20150930

RGAV Abandon patent right to avoid regrant