CN202808610U - Glass substrate with adhered organic matter film - Google Patents
Glass substrate with adhered organic matter film Download PDFInfo
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- CN202808610U CN202808610U CN201220483149.6U CN201220483149U CN202808610U CN 202808610 U CN202808610 U CN 202808610U CN 201220483149 U CN201220483149 U CN 201220483149U CN 202808610 U CN202808610 U CN 202808610U
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- glass substrate
- glass
- attached
- phthalic ester
- tunicle
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Abstract
The utility model aims to provide a glass substrate with an adhered organic matter film, which is characterized in that even if foreign matters or dirts are adhered to the surface, the foreign matters or dirts can be easily removed. According to the utility model, phthalates are adhered to the surface of the glass substrate with an adhered organic matter film, so that the average adhesion amount of the phthalates on the surface of the glass substrate GS is 0.5-15 ng/cm<2>, and at least 0.1 ng of phthalates are adhered to any zone with an area of 1 cm<2> on the surface of the glass substrate GS.
Description
Technical field
The utility model relates to a kind of glass substrate that is attached with organic thin film.
Background technology
Such as patent documentation 1(TOHKEMY 2001-276759 communique) shown in, be used for the manufacturing process that the demonstration images such as liquid-crystal display or plasma display are used the glass substrate of machine in the past, after glass substrate is shaped, in order to remove the foreign matters such as the micro powder that is attached to the glass on the glass baseplate surface or abrasive grain, with acid liquid or ultrasonic wave etc. glass baseplate surface is carried out clean.
Patent documentation:
Patent documentation 1: TOHKEMY 2001-276759 communique
The utility model content
But, be the high states of degree of cleaning even finish the surface of the cleaned glass substrate of glass baseplate surface, when carrying or keeping glass substrate, foreign matter or dirt can be attached to the surface of glass substrate afterwards.Its result is utilizing glass substrate to make the stage of various machines, needs again the surface with liquid or ultrasonic glass cleaning substrate.
The purpose of this utility model is, even provide a kind of foreign matter or dirt to be attached to the surface, also can be easily with the glass substrate that is attached with organic thin film of its removal.
The glass substrate that is attached with organic thin film that the utility model relates to has the glass substrate of phthalic ester for its surface attachment.This is attached with on the surface of glass substrate of organic thin film, and the average adhesion amount of phthalic ester is 0.5ng～15ng/1cm
2, and any 1cm on surface
2At least be attached with the phthalic ester of 0.1ng.
In the glass substrate that is attached with organic thin film that the utility model relates to, the molecular weight of phthalic ester is best for being lower than 450.
In the glass substrate that is attached with organic thin film that the utility model relates to, phthalic ester the best is phthalic acid two (2-ethylhexyl).
In the glass substrate that is attached with organic thin film that the utility model relates to, the roughness Ra value the best on surface is less than or equal to 0.4nm.When cleaning glass substrate, the roughness of glass baseplate surface is less, easier surface removal phthalic ester from glass substrate.
The glass substrate that is attached with organic thin film that the utility model relates to, best for to be formed with the base board for display device that Cu is electrode materials, this glass substrate has the surface area greater than the G5 size, and thickness is less than 0.4mm.
The glass substrate that is attached with organic thin film that the utility model relates to, even foreign matter or dirt are attached to its surface, also can be easily with its removal.According to the utility model, organic EL is with the TFT indicating meter or in high-resolution liquid crystal TFT indicating meter, can reduce the surface damage or the foreign matter that cause because of glass powder or glass cullet and be attached to glass baseplate surface.
Therefore, also can use the low distribution/electrode materials of viscosity.For example, can use that to be that electrode or Cr, Mo electrode etc. are compared viscosity low with Al, but low-resistance Cu is electrode materials.That is, can enlarge the range of choice of electrode materials, can solve the RC that occurs easily in the giant display and delay problem.And, can provide the RC that may occur in the miniscope that can solve from now on further high-resolution to delay the glass substrate of problem.
Description of drawings
Fig. 1 is the one-piece construction figure that relates to the device for producing glass sheet of present embodiment;
Fig. 2 is the side-view that relates to the tunicle formation device of present embodiment;
Fig. 3 is the side-view that relates to the tunicle formation device of present embodiment;
Fig. 4 relates to the print position concept figure of the sample substrate of embodiment for expression;
Fig. 5 is the synoptic diagram that relates to the glass substrate tunicle formation device of variation C.
Nomenclature
10 tunicles form device
12 glass base plate transport devices
14 glass substrate tunicles form device
The 14a tunicle forms the space
14a1 moves into mouth
14a2 takes out of mouth
14b1 the 1st air knife
14b2 the 2nd air knife
14c organism nozzle
100 device for producing glass sheets
200 melt groove
300 clarifying tanks
400 building mortions
500 rinse baths
The GS glass substrate
Embodiment
＜embodiment＞
(1) one-piece construction of glass substrate manufacturing installation
At first, with reference to Fig. 1 the one-piece construction of the device for producing glass sheet 100 of the manufacture method that relates to the utility model glass substrate is described.Device for producing glass sheet 100 mainly is made of melting groove 200, clarifying tank 300, building mortion 400, rinse bath 500.The molten glass raw material generates melten glass in melting groove 200.The melten glass that generates in melting groove 200 is sent to clarifying tank 300.In clarifying tank 300, remove the bubble that comprises in the melten glass.Melten glass in clarifying tank 300 behind the removal bubble is sent to building mortion 400.In building mortion 400, adopt overflow to draw laxative remedy and form continuously sheet glass from melten glass.At the sheet glass that building mortion 400 is shaped, be cut off into the glass substrate of prescribed level, be sent to rinse bath 500.In rinse bath 500, carry out the clean of glass baseplate surface etc., afterwards, as described later, carry out forming on the surface of glass substrate the processing of organic thin film.In rinse bath 500, clean and the surface-treated substrate, as launch.Glass substrate uses as glass substrate for flat display such as liquid-crystal display or plasma displays.
The matting of cleaning glass baseplate surface in rinse bath 500 reaches the tunicle formation operation that forms organic thin film at the glass baseplate surface that cleans.In the matting, in the time of towards horizontal direction moving glass substrate, surperficial spray rinsing agent towards glass substrate is cleaned, or glass substrate is immersed under the state of washings, by ultrasonic irradiation is removed foreign matter or the dirt that is attached on the glass substrate in washings.In addition, before the matting, the end face of glass substrate is carried out chamfer machining process.
Next, to relating to the operation of characteristic in the utility model method for manufacturing glass substrate, namely, tunicle forms operation and describe.It is to form device 10 by tunicle described later to carry out that tunicle forms operation.
(2) tunicle forms the structure of device
Tunicle in the present embodiment forms device 10, mainly forms device 14 by glass base plate transport device 12, glass substrate tunicle and consists of.Fig. 2 and tunicle shown in Figure 3 form the side-view of device 10.Fig. 3 is when observing along arrow III direction shown in Figure 2, and tunicle forms the side-view of device 10.Glass base plate transport device 12 is that vertical line with glass substrate GS surface is under the state of vertical direction, towards the device of horizontal direction moving glass substrate GS.In the present embodiment, as shown in Figure 2, glass base plate transport device 12 is the device that comprises a plurality of conveying rods of configured in parallel.The glass substrate tunicle forms device 14, and its inside has half tubular (Fig. 1 midship section is shaped as semicircle), namely, the tunnel-like tunicle forms the device in space 14.Glass base plate transport device 12 is arranged on the inside that tunicle forms space 14a, makes tunicle form the length direction of space 14a along the carrying direction of glass substrate GS.When glass substrate GS was carried by glass base plate transport device 12, the tunicle that forms device 14 by the glass substrate tunicle formed space 14a.As shown in Figure 2, the glass substrate GS by glass base plate transport device 12 is carried is carried to the inside that tunicle forms space 14a from moving into mouthful 14a1, and takes out of the outside that forms space 14a to tunicle from taking out of mouthful 14a2.
The tunicle formation space 14a that the glass substrate tunicle forms device 14 moves near mouthful 14a1, the inner-wall surface that forms the glass substrate tunicle formation device 14 on 14a top, space at tunicle is provided with the 1st air knife 14b1, tunicle forms near taking out of mouthful 14a2 of space 14a, and the inner-wall surface that forms the glass substrate tunicle formation device 14 on 14a top, space at tunicle is provided with the 2nd air knife 14b2.The 1st air knife 14b1 and the 2nd air knife 14b2 are to the compressed-air actuated device of glass substrate GS jet surface of being carried by glass base plate transport device 12.And, the glass substrate tunicle forms moving into mouthful 14a1 and taking out of between mouthful 14a2 of device 14, the glass substrate tunicle that tunicle forms 14a top, space forms on the inner-wall surface of device 14, and the length direction that forms space 14a along tunicle is provided with a plurality of organism nozzle 14c.Organism nozzle 14c fills up tunicle with vaporific phthalic ester to form the required device of space 14a.Phthalic ester is the general name of phthalic acid with the ester of alcohol of adjacent body.In the present embodiment, best for molecular weight is lower than 450, be more preferred from phthalic acid two (2-ethylhexyl).
In addition, in the present embodiment, glass substrate GS is that thickness is 0.4mm, the G5.5 size (substrate of 1300mm * 1500mm).And the surface roughness Ra value of glass substrate GS is not enough 0.4nm.
(3) tunicle forms the action of device
The tunicle of present embodiment forms in the device 10, when glass substrate GS is carried by glass base plate transport device 12, forms space 14a by tunicle.The surface that forms the glass substrate GS of space 14a by tunicle forms the film of phthalic ester.Below, the tunicle that the surface of glass substrate GS is formed the phthalic acid ester film forms operation and describes.
At first, when glass substrate GS is carried by glass base plate transport device 12, moving into a mouthful 14a1, by the 1st air knife 14b1 side surface jet compression air thereon.Consist of according to this, the compressed air of foreign matter that is attached to glass substrate GS uper side surface blows away, and is removed.Next, glass substrate GS is carried in tunicle forms space 14a by glass base plate transport device 12 from moving into mouthful 14a1 to taking out of a mouthful 14a2.Tunicle forms space 14a and fills up the vaporific phthalic ester that ejects from organism nozzle 14c.Therefore, glass substrate GS forms in the process that space 14a is handled upside down at tunicle, the small dropping liquid of the surface attachment phthalic ester of glass substrate GS.Afterwards, when glass substrate GS is carried by glass base plate transport device 12, taking out of mouthful 14a2 the 2nd air knife 14b2 to its uper side surface jet compression air.Remove the unnecessary phthalic ester that is attached to glass substrate GS uper side surface by the 2nd air knife 14b2.And, by the 1st air knife 14b1 and the 2nd air knife 14b2 are set, can control tunicle and form the interior atmosphere of space 14a.
In addition, in the present embodiment, be attached to the average adhesion amount of phthalic ester that forms the glass substrate GS surface of space 14a by tunicle and be surperficial 0.5ng～15ng/1cm
2, the best is surperficial 1ng～10ng/1cm
2Here, " average adhesion amount " is that the phthalic ester adhesion amount of glass substrate GS surface integral is divided by the value of glass substrate GS surface area.Also have, " surface area of glass substrate GS " can be the area of glass baseplate surface integral body, and, when the surface of glass substrate includes as the obsolete zone of the finished product (end etc.), also can be to remove the surface area that this does not use the glass substrate in zone.
In addition, in the present embodiment, form any 1cm on the glass substrate GS surface of space 14a by tunicle
2At least be attached with the phthalic ester of 0.1ng, best be 0.3ng at least, be more preferred from least 0.5ng.Here, " surperficial 1cm arbitrarily
2" can be the arbitrarily surperficial 1cm of glass baseplate surface integral body
2, and, when the surface of glass substrate includes as the obsolete zone of the finished product (end etc.), also can be to remove the arbitrarily surperficial 1cm that this does not use the glass substrate in zone
2
(4) feature
（4—1）
In the present embodiment, glass substrate GS is formed device 10 by tunicle and is exposed to the sun in the rinse bath 500 of device for producing glass sheet 100 under the atmosphere of vaporific phthalic ester, carries out forming on the surface of glass substrate GS the tunicle formation operation of phthalic acid ester film.
The phthalic acid ester film inhibition foreign matter or the dirt that are formed at glass substrate GS surface directly are bonded on the surface of glass substrate GS.Here; foreign matter is the micro powder of the glass that As time goes on produces from end face because of the end face of grinding glass substrate GS; namely, the organo-siloxane that combines with alkyl etc. of the Si atom of particulate or siloxane bond (Si-O-Si key) (for example; hexamethyldisiloxane) or after the matting of glass substrate; when being necessary to change the size etc. of glass substrate, small sheet glass that produces because of breaking glass substrate etc.And dirt is according to the carrying of glass substrate GS and keeping state, the material of separating out on the surface of glass substrate GS.For example, when producing dewfall because of the temperature variation around the glass substrate GS on the surface of glass substrate GS, the water droplet that is attached to glass substrate GS surface absorbs and swims in glass substrate GS material on every side.And in case the surface drying of glass substrate GS, the material that is absorbed by dewfall is bonded at the surface of glass substrate GS, separates out as dirt.
In the present embodiment, form the phthalic acid ester film that is formed at glass substrate GS surface in the operation at tunicle, the barrier performance effect as to above-mentioned foreign matter or dirt suppresses the surface that foreign matter or dirt directly are bonded at glass substrate GS.And, when foreign matter or dirt are attached on the phthalic acid ester film that is formed at glass substrate GS surface, by after operation in clean glass substrate GS surface, can together remove foreign matter or dirt with the film like phthalic ester from glass substrate GS surface.In addition, in order to clean the glass substrate GS surface that is formed with the phthalic acid ester film, for example, with the surface of purified rinse water glass substrate GS.The phthalic ester that molecular weight is little usually shows water-soluble or can be considered water miscible character, therefore, and by can easily removing phthalic ester from the surface of glass substrate GS with purified rinse water.
（4—2）
In the present embodiment, the phthalic ester adhesion amount on glass substrate GS surface is surperficial 0.5ng～15ng/1cm
2That is, the phthalic ester adhesion amount of glass substrate GS surface integral is 0.5ng/cm divided by the value of the surface area of glass substrate GS
2～15ng/cm
2Form the phthalic acid ester film by the surface at glass substrate GS, even foreign matter or dirt are attached to the surface of glass substrate GS, also can be easily with its removal.
Although depend on molecular weight or the physical property of the phthalic ester that is attached to glass substrate GS surface, when the adhesion amount of phthalic ester was too small, foreign matter or dirt were attached directly on the surface of glass substrate GS easily.And, when the adhesion amount of phthalic ester is excessive, when cleaning glass substrate GS, can't be fully from the surface removal phthalic acid ester film of glass substrate GS, after operation in, produce easily the bad phenomenon that causes because remaining in the lip-deep phthalic ester of glass substrate GS.In the present embodiment, be set in suitable scope by the adhesion amount with the phthalic ester on glass substrate GS surface, suppress foreign matter or dirt and be attached directly to the surface of glass substrate GS, and can easily remove phthalic ester from glass substrate GS surface.
（4-3）
In the present embodiment, any 1cm of glass substrate GS
2The surface on be attached with at least the phthalic ester of 0.1ng.Consist of according to this, the surface of glass substrate GS does not have the few zone of the adhesion amount of phthalic ester, and phthalic ester balancedly is attached on the surface of glass substrate GS to a certain extent.Therefore, in the present embodiment, can suppress the specific region that foreign matter or dirt are attached to glass substrate GS surface terrifically.
＜embodiment＞
Below, according to present embodiment, the phthalic ester amount on the glass baseplate surface that is attached to of measuring and the relation of having cleaned between the glass substrate condition of surface afterwards that is attached with phthalic ester are described.
In the present embodiment, at first utilize tunicle to form device, make the glass substrate of G5 size form the space by the tunicle under the phthalic ester atmosphere, form the phthalic acid ester film on the surface of glass substrate.Be attached to the amount of the phthalic ester of glass baseplate surface, be not the amount that forms the phthalic ester in space by changing tunicle, but regulate by the carrying glass sheet speed that changes glass base plate transport device.In addition, in the present embodiment, use phthalic acid two (2-ethylhexyl) as phthalic ester.
Next, as shown in Figure 4, obtain nine sample A～I from the glass substrate that is formed with the phthalic acid ester film.Each sample is the glass-based plate that its length on one side has the square shape of 50mm.Sample E is the glass-based plate that obtains from the square square of the 50mm that is positioned at the glass substrate central position.And sample A～D, F～I are from the quadrangle of the 50mm inboard of glass substrate end face (among Fig. 4, the quadrangle that dotted line is represented), namely, the glass-based plate that obtains of the most peripheral of sample area R.For example, as shown in Figure 4, sample A be from sample area R the glass-based plate that obtains of the square quadrangle of the adjacent contacted 50mm in both sides.And, as shown in Figure 4, sample D be from one side of sample area R, and the glass-based plate that the square quadrangle of contacted 50mm obtains at the center.
Next, measured the phthalic ester adhesion amount of nine sample A～I that obtain from the glass substrate that is formed with the phthalic acid ester film by gas-chromatography and mass spectroscopy (GC/MS).Particularly, in the air-flow of rare gas element, each print is heated to 400 ℃, catches with solid adsorbent after the phthalic ester of a concentrated side surface thermal desorption from each print, measure by GC/MS.
And, measure under the identical method of the glass substrate of sample A～I of phthalic ester and the identical condition with obtaining by GC/MS, made to estimate and used glass substrate.In the present embodiment, made respectively 5 evaluation glass substrates corresponding with sample substrate 1～5, carried out environmental experiment, and measured the condition of surface after cleaning.Particularly, each is estimated with dropping into thermostatic bath behind the glass substrate bale packing, under 10 ℃～60 ℃ temperature cycles (1 cycle is 24 hours) atmosphere, place a week.Next, each is estimated with behind the glass substrate with the cleaning of pure water scrolling, uses inspection machine to detect with foreign matters such as the glass particle on the glass baseplate surface or organo-siloxanes being attached to each evaluation.
Shown in the table 1, to having regulated respectively five kinds of glass substrates of phthalic ester adhesion amount, namely, the phthalic ester adhesion amount of sample A～I of measuring of sample substrate 1～5 and clean the result of the condition of surface of corresponding evaluation after with glass substrate.
Table 1
In the table 1, " average adhesion amount " is the mean value of the phthalic ester adhesion amount of 9 sample A～I." maximum adhesion amount " is the maximum value of phthalic ester adhesion amount among 9 sample A～I." minimum adhesion amount " is the minimum value of phthalic ester adhesion amount among 9 sample A～I." condition of surface after the cleaning " is according to the amount that does not have the solid foreign materials such as removed glass particle after the surface of cleaning glass substrate.In addition, sample substrate 2～5th, by improving the transporting velocity of glass substrate, the time that forms the space by tunicle is shorter than the glass substrate that sample substrate 1 is made.Also have, in the present embodiment, although the every cm of glass baseplate surface that 9 sample A～I that employing is obtained from glass substrate calculate
2The phthalic ester adhesion amount as " average adhesion amount ", and be attached to any 1cm of glass baseplate surface
2On the minimum value of phthalic ester as " minimum adhesion amount ", confirmed " the average adhesion amount " that calculates from above-mentioned 9 sample A～I reach " minimum adhesion amount " according to evaluation experimental in advance and be considered as respectively reaching " minimum adhesion amount " from " on average adhesion amount " that the surface integral of glass substrate calculates.
As follows known to the table 1.After the clean surface, be lower than standard value from the adhesion amount of the solid foreign materials such as surperficial detected glass particle of sample substrate 1.In addition, the sample substrate 1 after cleaning obtains 9 sample A～I, has measured the amount that is attached to the phthalic ester on each sample surfaces.Its result, with clean before compare, the adhesion amount of the phthalic ester of each sample has reduced.Still be attached with phthalic ester on each sample surfaces after the cleaning.Therefore, the method of phthalic ester adhesion amount is adjusted in utilization by changing the Negotiation speed of glass substrate in tunicle formation space, make to estimate and use glass substrate, and after dropping into testing circumstance, having put into becomes in the colored filter of the subsequent handling production process (CF operation).In the CF operation, at first, carry out the scrolling flushing of pure water, next form each operation of black matrix (BM) film, formation model, formation protective membrane, formation transparency electrode, make colored filter substrate.And, a plurality of colored filter substrates different from phthalic ester adhesion amount are originally checked, be lower than 15ng/cm if estimate with the average adhesion amount of the phthalic ester of glass substrate
2, then being confirmed to be the flow process that does not need to adjust the back operation can use.
Relevant sample substrate 2 and 3, with sample substrate 1 in the same manner, after the clean surface, be lower than standard value from the adhesion amount of the solid foreign materials such as the detected glass particle in surface.And, relevant sample 4, after the clean surface, although from the adhesion amount of the solid foreign materials such as the detected glass particle in surface, compare with sample substrate 1～3 many, also after operation in the spendable standard range.In addition, by sample substrate 4 is further put in the ultrasonic cleaning operation, can be attached to sample substrate 4 lip-deep fixedly foreign matters be removed to clean after the identical level of sample substrate 1～3.
About sample substrate 5, after the clean surface, be higher than standard value from the adhesion amount of the solid foreign materials such as the detected glass particle in surface.In addition, about sample substrate 5, be attached to lip-deep solid foreign materials by further putting into to try in the ultrasonic cleaning operation to remove, but since the part of the foreign matters such as glass particle be bonded on the surface of glass substrate, it can't be removed to clean after the identical level of sample substrate 1～3.
In addition, as the deformation pattern of present embodiment, consider and improve the cycle time that tunicle forms operation, the transporting velocity of glass substrate is increased to is higher than sample substrate 3, carried out identical test.Its result makes the average adhesion amount of phthalic ester of glass baseplate surface be higher than 1.0ng/cm if carry out tunicle formation operation
2, and minimum adhesion amount is 0.5ng/cm
2, the condition of surface that is identified after the cleaning becomes " very ".And the glass substrate of making under the condition of this adhesion amount after the flushing of pure water scrolling, can fully be removed phthalic ester from the surface of glass substrate.At this moment, clean the maximum adhesion amount of rear phthalic ester less than 0.1ng/cm
2According to as can be known above-mentioned, if the adhesion amount of the phthalic ester of glass baseplate surface is identical with the degree of sample substrate 1, although the certain phthalic ester of its remained on surface after cleaning, if but adhesion amount were suppressed to identical with the degree of sample substrate 3, could almost entirely remove phthalic ester after then cleaning.
And, average adhesion amount is reached be higher than 20ng/cm if the handling time of glass substrate is controlled to
2, can produce tunicle and form the elongated problem of operation required time.And this moment, scrolling detected the surface that phthalic ester is attached to glass substrate scatteredly after cleaning.
In the present embodiment, as mentioned above, if the average adhesion amount of phthalic ester is lower than 15ng/cm
2, it is no problem to think.This is, considers with after the flushing of pure water scrolling, and in order by the phthalic ester that remains in the real estate hydrophobicity level and the level of hydrophilicity of glass baseplate surface to be remained on certain level, higher limit the best of average adhesion amount is 15ng/cm
2
＜variation＞
(1) variation A
In the present embodiment, filled up tunicle with vaporific phthalic ester and formed space 14a, but also available vaporous phthalic ester has filled up tunicle formation space 14a.As long as it is the atmosphere of phthalic ester that tunicle forms space 14a, can form on the surface of glass substrate GS the film of phthalic ester.
According to this variation, under the atmosphere of vaporous phthalic ester, made the glass substrate that is formed with the phthalic acid ester film.Change shape and spend the time that tunicle forms space 14a, made 5 kinds of glass substrates, and carried out measurement result same as the previously described embodiments, the average adhesion amount of substrate surface is at 0.5ng/cm
2～1.0ng/cm
2Scope in, the minimum adhesion amount of substrate surface is at 0.1ng/cm
2～0.3ng/cm
2Scope in.Made in the same manner to estimate with embodiment and use glass substrate, carried out envrionment test to estimating with glass substrate, and confirmed that the result of the condition of surface after the cleaning, condition of surface are " qualified " with sample substrate 4 pars.
(2) variation B
In the present embodiment, although used phthalic acid two (2-ethylhexyl) as phthalic ester, also can use molecular weight less than other phthalic esters of 450.For example, also can use dibutyl phthalate, butyl benzoate, diisononyl phthalate and Diisodecyl Phthalate (DIDP) etc. as phthalic ester.Usually, use the less phthalic ester of molecular weight, easier removal in matting.
(3) variation C
In the present embodiment, although the not enough 0.4nm of the roughness Ra value on glass substrate GS surface, the best is the not enough 0.3nm of Ra value.Usually, the surfaceness of glass substrate GS is less, and is when cleaning glass substrate GS, easier of glass substrate GS surface removal phthalic ester.
(4) variation D
In the present embodiment, glass substrate GS has used G5.5 size (1300mm * 1500mm), and thickness is the substrate of 0.4mm.
In the glass substrate of thin plate, even there is atomic little flaw also can become broken reason.The glass substrate that is attached with organic thin film that the utility model relates to can be removed foreign matter by the scrolling flushing of pure water.Therefore, need not adopt brush cleaning etc. may produce the purging method of stress to glass substrate, can remove the foreign matter that is attached on the substrate surface, can avoid producing atomic little flaw.
Particularly the glass substrate of the large template thin plate more than the G5 size produces the fluctuating of wriggling easily when carrying in matting.In case the glass substrate of large template produces to wriggle and rises and falls, do not use in the cleaning (for example, Excimer uv cleans) of brush, produce spot in the face, the problem that foreign matter remains in substrate surface appears.
According to the utility model, even thickness is glass substrate or the 1100mm * 1300mm(G5 size of 0.3mm～0.4mm thin plate) demonstration of above large template is with the wriggle glass substrate of fluctuating of may having of glass substrate, foreign matter is remained in the face, can be easily with its removal.
And the glass substrate GS of present embodiment have the above surface area of G5 size, and thickness is to be formed with the base board for display device that Cu is electrode materials less than 0.4mm.
Utilizability on the industry
The glass substrate that is attached with organic thin film that the utility model relates to, even foreign matter or dirt adhere to from the teeth outwards, also can be easily with its removal.
Claims (6)
1. a glass substrate that is attached with organic thin film is attached with phthalic ester at glass baseplate surface, it is characterized in that,
The average adhesion amount of the described phthalic ester on described glass baseplate surface is 0.5ng～15ng/1cm
2, and any 1cm of described glass baseplate surface
2On be attached with at least the described phthalic ester of 0.1ng.
2. the glass substrate that is attached with organic thin film according to claim 1, wherein,
The molecular weight of described phthalic ester is less than 450.
3. the glass substrate that is attached with organic thin film according to claim 2, wherein,
Described phthalic ester is phthalic acid two (2-ethylhexyl).
4. the described glass substrate that is attached with organic thin film of any one according to claim 1～3, wherein, the not enough 0.4nm of the roughness Ra value of described glass baseplate surface.
5. the described glass substrate that is attached with organic thin film of any one according to claim 1～3, wherein, described glass substrate is to be formed with the base board for display device that Cu is electrode materials, and described glass substrate has the above surface area of G5 size, and thickness is less than 0.4mm.
6. the glass substrate that is attached with organic thin film according to claim 4, wherein,
Described glass substrate is to be formed with the base board for display device that Cu is electrode materials, and described glass substrate has the above surface area of G5 size, and thickness is less than 0.4mm.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-217952 | 2011-09-30 | ||
| JP2011217952A JP2013075807A (en) | 2011-09-30 | 2011-09-30 | Method for producing glass substrate with organic thin film, and glass substrate with organic thin film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202808610U true CN202808610U (en) | 2013-03-20 |
Family
ID=47867527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220483149.6U Expired - Lifetime CN202808610U (en) | 2011-09-30 | 2012-09-20 | Glass substrate with adhered organic matter film |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2013075807A (en) |
| CN (1) | CN202808610U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106103314A (en) * | 2014-03-20 | 2016-11-09 | 日本电气硝子株式会社 | The method for carrying of workpiece and the Handling device of workpiece |
-
2011
- 2011-09-30 JP JP2011217952A patent/JP2013075807A/en not_active Withdrawn
-
2012
- 2012-09-20 CN CN201220483149.6U patent/CN202808610U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106103314A (en) * | 2014-03-20 | 2016-11-09 | 日本电气硝子株式会社 | The method for carrying of workpiece and the Handling device of workpiece |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013075807A (en) | 2013-04-25 |
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