CN202786409U - Coating device of magnetron sputtering ion plating bearing steel ball - Google Patents
Coating device of magnetron sputtering ion plating bearing steel ball Download PDFInfo
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- CN202786409U CN202786409U CN 201220391100 CN201220391100U CN202786409U CN 202786409 U CN202786409 U CN 202786409U CN 201220391100 CN201220391100 CN 201220391100 CN 201220391100 U CN201220391100 U CN 201220391100U CN 202786409 U CN202786409 U CN 202786409U
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- bearing steel
- rotating shaft
- roller
- bearing
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Abstract
The utility model discloses a coating device of a magnetron sputtering ion plating bearing steel ball, which is arranged in a magnetron sputtering ion plating vacuum chamber and comprises a tray arranged on a rotating shaft to lay a bearing steel ball. The tray is supported on a supporting steel ball at the upper end of the rotating shaft through four tension springs; a roller shaft is horizontally arranged on the rotating shaft; a roller is arranged at one end of the roller shaft; the roller ensures that the tray is inclined; the rotating shaft performs rotation motion under the driving of an input shaft; and the tray performs deflection motion under the action of the supporting steel ball and the roller, so that the bearing steel ball in the tray performs revolution and rotation simultaneously. The bearing steel ball performs revolution and rotation simultaneously in the vacuum chamber, so that plating material particles are uniformly sputtered to the surface of the bearing steel ball, the uniformity and the consistence of performance of a surface coating layer of the bearing steel ball are guaranteed, the tissue structure and the mechanical property of the coating layer of the bearing steel ball are improved, and further the precision and the quality reliability of a bearing are improved.
Description
Technical field
The utility model relates to the bearing steel ball film coating apparatus, is specifically related to a kind of film coating apparatus of magnetic controlled sputtering ion plating bearing steel ball.
Background technology
Bearing is the important foundation part of all kinds of mechanized equipments, and there are the important impact in its precision, performance reliability and life-span on precision, performance reliability and the life-span of main frame.The bearing that is used for key position, its performance even directly determine the performance of main frame.The research and development of high-tech product, as: Aerospace Products, high-precision numerical control machine, precision instrument, medium-to-high grade car, low-speed heave-load machinery wind power plant etc. all need high performance bearing as support.But, at present China's bearing technology the aspects such as steel ball precision and added value with compare the larger gap of existence abroad, at a high speed, the main dependence on import of bearing products of high-precision contour performance, seriously restricted the developing water product of China's new and high technology and equipment.
Magnetic controlled sputtering ion plating is as a kind of advanced PVD process for modifying surface, in recent years, obtained fast development and used in product surface coatings art such as cutter, mould, bearing rollers, this technology has changed the movement locus of ion by the electromagnetic field of the magnetron generation at the target back side, be that ion will move as the complex curve that spiral advances around magnetic line of force, thereby prolong the movement locus of ion, improve the ionization level of ion.Because electromagnetic field effect has increased the sputter of ion pair matrix, has reduced the bombardment to matrix, effectively reduces the masking temperature of matrix.Magnetron sputtering has also enlarged the zone of plasma body, has increased target-cardinal distance, is conducive to the deposition of big area matrix.In addition, magnetron sputtering also can make some high energy particles that the coating of matrix and growth is played the effect of bombardment and secondary sputter, greatly reduces coating quality to the dependence of substrate temperature, has improved Coating and mechanical property.But; existing sputtering technology can not suppress the too high problem of matrix temperature rise that causes owing to ion bombardment effects; and cause easily unusual arc discharge phenomenon because use direct supply, cause sputter procedure unstable, cause bearing steel ball mechanical property, surface uniformity poor.
Summary of the invention
The purpose of this utility model provides a kind of magnetic controlled sputtering ion plating bearing steel ball film coating apparatus, to improve mechanical property and the surface uniformity of bearing steel ball.
The purpose of this utility model is to realize like this, a kind of magnetic controlled sputtering ion plating bearing steel ball film coating apparatus, be arranged in the magnetic controlled sputtering ion plating vacuum chamber, comprise and be arranged on the pallet of placing bearing steel ball in the rotating shaft, described pallet is supported on the support steel ball of described rotating shaft upper end by four extension springs, the end that level is provided with roller shaft and described roller shaft in the described rotating shaft is provided with roller, described roller contacts with described tray bottom surface and described pallet is tilted, described rotating shaft rotates under the driving of input shaft, described pallet is done the beat motion under the effect of described support steel ball and described roller, thereby makes the bearing steel ball in the described pallet make simultaneously revolution and spinning motion.
Described four extension springs are fixed in the chamber on the guide rail by slide block.
Described rotating shaft is arranged on the bearing support and by driving key and is connected with input shaft, and described bearing support is arranged on the base plate.
The utlity model has following beneficial effect, bearing steel ball of the present utility model is made revolution and spinning motion simultaneously in vacuum chamber, make plating material particle be splashed to equably the bearing steel ball surface, homogeneity and the consistency of performance of bearing steel ball overlay coating have been guaranteed, improve weave construction and the mechanical property of bearing steel ball coating, and then improved precision and the reliability of bearing.
Description of drawings
Fig. 1 is the utility model structural representation;
Fig. 2 is the utility model schematic perspective view.
Among the figure, 1. guide rail in the chamber, 2. slide block, 3. base plate, 4. input shaft, 5. extension spring, 6. driving key, 7. bearing support, 8. rotating shaft, 9. bearing steel ball, 10. pallet, 11. roller shafts, 12. rollers.
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is elaborated.
A kind of magnetic controlled sputtering ion plating bearing steel ball film coating apparatus, be arranged in the magnetic controlled sputtering ion plating vacuum chamber, comprise and be arranged on the pallet 10 of placing bearing steel ball 9 in the rotating shaft 8, pallet 10 is supported on the support steel ball of rotating shaft 8 upper ends by four extension springs 5, level is provided with roller shaft 11 in the rotating shaft 8, one end of roller shaft 11 is provided with roller 12, roller 12 contacts with pallet 10 bottom surfaces pallet 10 is tilted, rotating shaft 8 rotates under the driving of input shaft 4, pallet 8 is done the beat motion under the effect of supporting steel ball 4 and roller 12, thereby makes the bearing steel ball 9 in the pallet 8 make simultaneously revolution and spinning motion.Four extension springs 5 are fixed in the chamber on the guide rail 1 by slide block 2.Rotating shaft 8 is arranged on the bearing support 7, and by transmission, and 6 are connected with input shaft 4, and bearing support 7 is arranged on the base plate 3.
The magnetic controlled sputtering ion plating technology is that the electromagnetic field of generation has changed the movement locus of ion at target back side design magnetron, and namely ion will prolong the movement locus of ion around magnetic line of force do the complex curve motion that spiral advances, and improve the ionization level of ion.Because electromagnetic field effect has also increased the sputter of ion pair matrix, has reduced the bombardment to matrix, effectively reduces the masking temperature of matrix.Magnetron sputtering has also enlarged the zone of plasma body, has increased target-cardinal distance, is conducive to the deposition of big area matrix.In addition, magnetron sputtering also can make some high energy particles that the coating of matrix and growth is played the effect of bombardment and secondary sputter, greatly reduces coating quality to the dependence of substrate temperature, has improved Coating and mechanical property.The utility model proposes the bearing steel ball surface film coating device on the basis of magnetic controlled sputtering ion plating equipment, can form uniform multicomponent composite coating, the self lubricity of Effective Raise bearing, wear resistance and work-ing life etc. on bearing steel ball 9 surfaces.
During work, bearing steel ball 9 to be plated is placed in the pallet 10, drive rotating shaft 8 rotations by input shaft 4.This rotating mechanism is under the automatic control of microcomputer, can realize at the uniform velocity, speed change, positive and negative motion etc., drive rotating shaft 8 and do corresponding rotatablely moving, make pallet 10 realize just rising and falling regular swing, and then realize around the shaft 8 revolution of bearing steel ball 9 to be plated and around the compound motion of self rotation, finish the coating film treatment on bearing steel ball 9 surfaces.
Claims (3)
1. magnetic controlled sputtering ion plating bearing steel ball film coating apparatus, be arranged in the magnetic controlled sputtering ion plating vacuum chamber, it is characterized in that: comprise being arranged on the upper pallet (10) of placing bearing steel ball (9) of rotating shaft (8), described pallet (10) is supported on the support steel ball of described rotating shaft (8) upper end by four extension springs (5), the end that the upper level of described rotating shaft (8) is provided with roller shaft (11) and described roller shaft (11) is provided with roller (12), described roller (12) contacts with described pallet (10) bottom surface and described pallet (10) is tilted, described rotating shaft (8) rotates under the driving of input shaft (4), described pallet (10) is done the beat motion under the effect of described support steel ball and described roller (12), thereby makes the bearing steel ball (9) in the described pallet (10) make simultaneously revolution and spinning motion.
2. magnetic controlled sputtering ion plating bearing steel ball film coating apparatus as claimed in claim 1, it is characterized in that: described four extension springs (5) are fixed on the guide rail in the chamber (1) by slide block (2).
3. magnetic controlled sputtering ion plating bearing steel ball film coating apparatus as claimed in claim 1 or 2, it is characterized in that: described rotating shaft (8) is arranged on bearing support (7) and upward and by driving key (6) is connected with described input shaft (4), and described bearing support (7) is arranged on the base plate (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220391100 CN202786409U (en) | 2012-08-08 | 2012-08-08 | Coating device of magnetron sputtering ion plating bearing steel ball |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220391100 CN202786409U (en) | 2012-08-08 | 2012-08-08 | Coating device of magnetron sputtering ion plating bearing steel ball |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202786409U true CN202786409U (en) | 2013-03-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220391100 Expired - Fee Related CN202786409U (en) | 2012-08-08 | 2012-08-08 | Coating device of magnetron sputtering ion plating bearing steel ball |
Country Status (1)
| Country | Link |
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| CN (1) | CN202786409U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104862661A (en) * | 2015-05-04 | 2015-08-26 | 洛阳理工学院 | Steel ball film coating fixture device based on magnetron sputtering technology |
| CN105063566A (en) * | 2015-09-08 | 2015-11-18 | 南京工业大学 | Device and method for ball micro-arc ion carbon-based film plating for precision bearing |
| CN108060400A (en) * | 2016-11-09 | 2018-05-22 | 上海朗亿新材料科技有限公司 | A kind of powder dispersal device for magnetron sputtering plating |
| CN108165947A (en) * | 2018-03-19 | 2018-06-15 | 哈尔滨工业大学 | For repairing the self-priming magnetic control sputtering system of planar depositions film layer and sputtering method |
| CN108300972A (en) * | 2018-01-22 | 2018-07-20 | 哈尔滨工业大学 | A kind of precision ball surface prepares the device and method of deposition modified coating |
| EP3567128A1 (en) * | 2018-05-08 | 2019-11-13 | IHI Hauzer Techno Coating B.V. | Deposition apparatus and method of coating spherical objects |
| CN113073306A (en) * | 2021-03-24 | 2021-07-06 | 中国科学院近代物理研究所 | Method for uniformly coating metal ball surface in batch |
| CN113151785A (en) * | 2020-01-22 | 2021-07-23 | 中国工程物理研究院激光聚变研究中心 | Film preparation assembly, film preparation method and application thereof |
-
2012
- 2012-08-08 CN CN 201220391100 patent/CN202786409U/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104862661A (en) * | 2015-05-04 | 2015-08-26 | 洛阳理工学院 | Steel ball film coating fixture device based on magnetron sputtering technology |
| CN105063566A (en) * | 2015-09-08 | 2015-11-18 | 南京工业大学 | Device and method for ball micro-arc ion carbon-based film plating for precision bearing |
| CN105063566B (en) * | 2015-09-08 | 2018-07-13 | 南京工业大学 | Device and method for ball micro-arc ion carbon-based film plating for precision bearing |
| CN108060400A (en) * | 2016-11-09 | 2018-05-22 | 上海朗亿新材料科技有限公司 | A kind of powder dispersal device for magnetron sputtering plating |
| CN108060400B (en) * | 2016-11-09 | 2024-05-14 | 上海朗亿功能材料有限公司 | Powder dispersing device for magnetron sputtering coating |
| CN108300972A (en) * | 2018-01-22 | 2018-07-20 | 哈尔滨工业大学 | A kind of precision ball surface prepares the device and method of deposition modified coating |
| CN108165947A (en) * | 2018-03-19 | 2018-06-15 | 哈尔滨工业大学 | For repairing the self-priming magnetic control sputtering system of planar depositions film layer and sputtering method |
| EP3567128A1 (en) * | 2018-05-08 | 2019-11-13 | IHI Hauzer Techno Coating B.V. | Deposition apparatus and method of coating spherical objects |
| CN113151785A (en) * | 2020-01-22 | 2021-07-23 | 中国工程物理研究院激光聚变研究中心 | Film preparation assembly, film preparation method and application thereof |
| CN113151785B (en) * | 2020-01-22 | 2022-02-08 | 中国工程物理研究院激光聚变研究中心 | Film preparation assembly, film preparation method and application thereof |
| CN113073306A (en) * | 2021-03-24 | 2021-07-06 | 中国科学院近代物理研究所 | Method for uniformly coating metal ball surface in batch |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20150808 |
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| EXPY | Termination of patent right or utility model |