CN202770763U - Minitype spectrograph - Google Patents
Minitype spectrograph Download PDFInfo
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- CN202770763U CN202770763U CN201220465465.0U CN201220465465U CN202770763U CN 202770763 U CN202770763 U CN 202770763U CN 201220465465 U CN201220465465 U CN 201220465465U CN 202770763 U CN202770763 U CN 202770763U
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Abstract
The utility model relates to the field of optical detection and discloses a minitype spectrograph. The minitype spectrograph comprises an input end, an alignment unit, an optical grating group, a micro-electromechanical system (MEMS) reflecting mirror, a light convergence component, a diaphragm, an optical detector and a micro drive unit, the optical grating group comprises a plurality of optical gratings in different wave bands, the micro drive unit drives the optical grating group to switch and use the optical gratings in different wave bands to work, lights to be detected are input from the input end and emitted on the optical gratings of the optical grating group after aligned by the alignment unit, after the optical grating chromatic dispersion, the lights to be detected with different wavelength are emitted on the MEMS reflecting mirror within different angles respectively and reflected to the light convergence component within different angles, the lights to be detected with different wavelength are converged and emitted on the diaphragm, and finally spectrums selected by the diaphragm are received by the optical detector. According to the minitype spectrograph, by means of a micro stepping motor, a group of optical gratings is rotated or moved horizontally, so that the detecting spectral region of the minitype spectrograph can be increased, the spectrum detection region of the minitype spectrograph can reach to spectrum detection region of traditional large-sized spectrographs, and the resolution ratio is improved.
Description
Technical field
The utility model relates to the optical detection field, relates in particular to a kind of micro spectrometer.
Background technology
The analysis of material composition and in real time detection have been subject to people and have more and more paid close attention to, and its detection technique is also at development, and spectrometer applies to the analysis of material composition, and relative equipment Market is also constantly being segmented and enlarged.Current, the demand of the analysis of material composition and in real time detection is mainly from following fields, such as food security, biologic medical, jewel evaluation, verification retrieval, criminal identification, public safety, address mine locating, material science and environment measuring etc.
Spectrometer detects spectral range and comprises the band spectrums such as ultraviolet light, visible light, near infrared and far infrared.Conventional spectrometers spectral detection scope can reach 350nm ~ 1750nm.Because it is large to detect spectral range, spectrometer itself need to be made of numerous optical elements, electricity component and precision optical machinery element.It is bulky that this causes conventional spectrometers to have, and environment for use requires the shortcomings such as high.Be unfavorable for the application of online spectral measurement.
Along with the progress of science and technology, microelectromechanical systems (MEMS) technology and Micrometer-Nanometer Processing Technology have obtained swift and violent development.Adopt that the spectrometer of MEMS fabrication techniques has that volume is little, low in energy consumption, highly sensitive, good reproducibility, low cost and other advantages.Now become one of a kind of mainstream technology of the microminiaturized development of spectrometer.
Because volume is little and the MEMS rotational angle is limited, single micro spectrometer detects spectral range and resolution is very restricted.Compare in addition larger gap with the detection spectral range of the large-scale spectrometer of tradition.
Summary of the invention
For defects, the utility model proposes a kind of micro spectrometer, have wide spectral detection scope, and resolution is high, cost of manufacture is low.
The technical solution of the utility model is: a kind of micro spectrometer, comprise input end, collimation unit, grating group, MEMS catoptron, light convergent component, light hurdle and photo-detector, and also comprise little driver element; Described grating group comprises the grating of a plurality of different-wavebands; Little driver element drives the grating group and switches the grating work of using different-waveband; Detecting light is inputted by input end, after collimation unit collimation, incide on the grating of grating group, through grating dispersion, the detection light of different wave length incides on the MEMS catoptron with different angles respectively, be reflected on the light convergent component with different angles again, the detection light of different wave length is converged and incides on the light hurdle, and the spectrum of selecting finally by the light hurdle is received by photo-detector.
Further, described grating group also comprises a rotating disk, and the grating of described a plurality of different-wavebands rotates and coils the circumference setting; Described little driver element drives dial rotation.
Further, described grating group also comprises a movable plate, and the grating spread configuration of described a plurality of different-wavebands is on movable plate; Described little driver element drives movable plate and moves.
Further, described little driver element is micro-step motor.
Further, described grating is transmission grating or reflection grating.
Further, described smooth convergent component is cylindrical lens or cylindrical mirror.
Further, the aperture on described smooth hurdle is micron dimension.
Further, described input end is a fiber connector; Described collimation unit is collimation lens.
The beneficial effects of the utility model are: micro spectrometer of the present utility model rotates or one group of grating of translation by micro-stepping motors, detect spectral range to increase micro spectrometer, make its spectral detection scope reach the spectral detection scope of traditional large-scale spectrometer, and improved resolution, this spectrometer architecture is compact, cost of manufacture is low.
Description of drawings
Fig. 1 is the utility model micro spectrometer embodiment one structural representation;
Fig. 2 is the utility model micro spectrometer embodiment two structural representations;
Fig. 3 is embodiment one and the two grating group structural representations that adopt;
Fig. 4 is the utility model micro spectrometer embodiment three structural representations;
Fig. 5 is the utility model micro spectrometer embodiment four structural representations;
Fig. 6 is the grating group structural representation that embodiment four adopts.
Reference numeral: 1, housing; 2, fiber connector; 3, collimation lens; 4, grating group; 401, transmission grating; 402, rotating disk; 403, reflection grating; 404, movable plate; 5, MEMS catoptron; 6, cylindrical lens; 7, Guang Lan; 8, photo-detector; 9, micro-step motor; 901, motor shaft; 10, cylindrical mirror.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described further.
The utility model is by arranging the grating of a plurality of different-wavebands in micro spectrometer, and adopt a micro-step motor that a plurality of gratings are driven, to switch as required the grating work of using different-waveband, enlarge spectrometer and detected spectral range, and improved spectrometer resolution, reduced cost of manufacture.Concrete, this micro spectrometer comprises input end, collimation unit, grating group 4, MEMS catoptron 5, light convergent component, light hurdle 7 and photo-detector 8, also comprises little driver element; Wherein, grating group 4 comprises the grating of a plurality of different-wavebands, and little driver element drives the grating group and switches the grating work of using different-waveband; Detecting light is inputted by input end, after collimation unit collimation, incide on the grating of grating group 4, through grating dispersion, the detection light of different wave length incides on the MEMS catoptron 5 with different angles respectively, is reflected on the light convergent component with different angles again, and the detection light of different wave length is converged and incides on the light hurdle 7, the spectrum of selecting finally by light hurdle 7 is received by photo-detector 8, by rotating MEMS catoptron 5, different wave length is reflected, finally enter photo-detector 8.The grating number of different-waveband determines according to detection spectral range and the single grating work spectral range of spectrometer needs.
Be illustrated in figure 1 as embodiment one of the present utility model, successively installing optical fibres connector 2, collimation lens 3, grating group 4, MEMS catoptron 5, cylindrical lens 6, light hurdle 7 and photo-detector 8 in spectrometer housing 1.Among this embodiment, grating group 4 adopts be the transmission grating 401 of a plurality of different-waveband work spectrum around a rotating disk 402 circumference settings, rotating disk 402 is installed on the motor shaft 901 of a micro-step motor 9, as shown in Figure 3.Wherein, the number of transmission grating 401 depends on the required spectrum test scope of spectrometer and single transmission grating work spectral range.Its course of work is: detect light by fiber connector 2 inputs, after collimation lens 3 collimations, incide on the transmission grating 4, according to the demand of different spectral detection scopes, rotate to select the transmission grating 401 of corresponding spectral band by the stepping of micro-step motor 9; Detect light and behind transmission grating 401, dispersion occurs, different wave length incides on the MEMS catoptron 5 with different angles, select to detect a certain wavelength of light by regulating MEMS catoptron 5, make it after 5 reflections of MEMS catoptron, incide cylindrical lens 6, assemble and by light hurdle 7, finally received by photo-detector 8 through cylindrical lens 6.The detection light of other wavelength is then because by 5 reflections of MEMS catoptron and after cylindrical lens 6 is assembled, its angle deviating can pass through the angular range in 7 apertures, light hurdle, and is all blocked by light hurdle 7, finally can not incide on the photo-detector 8, thereby realize spectral detection.Wherein, 7 apertures, light hurdle are micron dimension.
Be illustrated in figure 2 as embodiment two of the present utility model, different from embodiment one is, cylindrical lens 6 is wherein replaced by a cylindrical mirror 10, therefore, by regulating a certain wavelength of the detection light that MEMS catoptron 5 selects, after 5 reflections of MEMS catoptron, incide on the cylindrical mirror 10, after cylindrical mirror 10 reflections are assembled, by light hurdle 7, finally received by photo-detector 8.The detection light of other wavelength is then because by 5 reflections of MEMS catoptron and after cylindrical mirror 10 reflections are assembled, its angle deviating can be by the angular range in 7 apertures, light hurdle, and all blocked by light hurdle 7, finally can not incide on the photo-detector 8, thereby realize spectral detection.
Be illustrated in figure 4 as embodiment three of the present utility model, different from embodiment one is, what grating group 4 adopted is reflection grating 403, and the transmission grating 401 that is about among Fig. 3 changes reflection grating 403 into.So, detect the directional light of light after collimation lens 3 collimations and incide on the reflection grating 403, according to the demand of different spectral detection scopes, rotate to select the reflection grating of corresponding spectral band by the stepping of micro-step motor 9; Detect light through the dispersion interaction of reflection grating 403, different wave length incides on the MEMS catoptron 5 with different angles, select to detect a certain wavelength of light by regulating MEMS catoptron 5, make it after 5 reflections of MEMS catoptron, incide cylindrical lens 6, assemble and by light hurdle 7, finally received by photo-detector 8 through cylindrical lens 6.The detection light of other wavelength is then because by 5 reflections of MEMS catoptron and after cylindrical lens 6 is assembled, its angle deviating can pass through the angular range in 7 apertures, light hurdle, and is all blocked by light hurdle 7, finally can not incide on the photo-detector 8, thereby realize spectral detection.
Be illustrated in figure 5 as embodiment four of the present utility model, with the embodiment two the same cylindrical mirrors 10 that adopt as the light convergence unit, different is, the transmission grating 401 of its a plurality of different-wavebands is to be arranged side by side on a movable plate 404, as shown in Figure 6, micro-step motor 9 drives the switching that this movable plate 404 moves to realize transmission grating 401.Its course of work is: detect light by fiber connector 2 inputs, after collimation lens 3 collimations, incide on the transmission grating 401, demand according to different spectral detection scopes, stepping by micro-step motor 9 drives the transmission grating 401 that movable plate 404 moves to select corresponding spectral band, detect light and behind transmission grating 401, dispersion occurs, different wave length incides on the MEMS catoptron 5 with different angles, select to detect a certain wavelength of light by regulating MEMS catoptron 5, it is incided on the cylindrical mirror 10 after 5 reflections of MEMS catoptron, after assembling, cylindrical mirror 10 reflections by light hurdle 7, finally received by photo-detector 8.The detection light of other wavelength is then because by 5 reflections of MEMS catoptron and after cylindrical mirror 10 reflections are assembled, its angle deviating can be by the angular range in 7 apertures, light hurdle, and all blocked by light hurdle 7, finally can not incide on the photo-detector 8, thereby realize spectral detection.
Its Guang Lan aperture, light hurdle in the various embodiments described above is micron dimension; Photo-detector adopts PD; Fiber connector is as light input end, and collimation lens is as the collimation unit.
Although specifically show and introduced the utility model in conjunction with preferred embodiment; but the those skilled in the art should be understood that; within not breaking away from the spirit and scope of the present utility model that appended claims limits; the various variations of in the form and details the utility model being made are protection domain of the present utility model.
Claims (9)
1. a micro spectrometer comprises input end, collimation unit, grating group, MEMS catoptron, light convergent component, light hurdle and photo-detector, it is characterized in that: also comprise little driver element; Described grating group comprises the grating of a plurality of different-wavebands; Little driver element drives the grating group and switches the grating work of using different-waveband; Detecting light is inputted by input end, after collimation unit collimation, incide on the grating of grating group, through grating dispersion, the detection light of different wave length incides on the MEMS catoptron with different angles respectively, be reflected on the light convergent component with different angles again, the detection light of different wave length is converged and incides on the light hurdle, and the spectrum of selecting finally by the light hurdle is received by photo-detector.
2. a kind of micro spectrometer as claimed in claim 1, it is characterized in that: described grating group also comprises a rotating disk, the dish circumference setting that rotates of the grating of described a plurality of different-wavebands; Described little driver element drives dial rotation.
3. a kind of micro spectrometer as claimed in claim 1, it is characterized in that: described grating group also comprises a movable plate, the grating spread configuration of described a plurality of different-wavebands is on movable plate; Described little driver element drives movable plate and moves.
4. such as claim 1-3 a kind of micro spectrometer as described in each, it is characterized in that: described little driver element is micro-step motor.
5. such as claim 1-3 a kind of micro spectrometer as described in each, it is characterized in that: described grating is transmission grating or reflection grating.
6. such as claim 1-3 a kind of micro spectrometer as described in each, it is characterized in that: described smooth convergent component is cylindrical lens or cylindrical mirror.
7. such as claim 1-3 a kind of micro spectrometer as described in each, it is characterized in that: the aperture on described smooth hurdle is micron dimension.
8. such as claim 1-3 a kind of micro spectrometer as described in each, it is characterized in that: described input end is a fiber connector; Described collimation unit is collimation lens.
9. such as claim 1-3 a kind of micro spectrometer as described in each, it is characterized in that: described input end, collimation unit, grating group, MEMS catoptron, light convergent component, Guang Lan, photo-detector and little driver element are installed in the spectrometer housing.
Priority Applications (1)
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| CN201220465465.0U CN202770763U (en) | 2012-09-13 | 2012-09-13 | Minitype spectrograph |
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| CN201220465465.0U CN202770763U (en) | 2012-09-13 | 2012-09-13 | Minitype spectrograph |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103323112A (en) * | 2013-07-02 | 2013-09-25 | 中国科学院苏州生物医学工程技术研究所 | Optical mechanical structure of broad spectrum high resolution micro flat-field spectrometer |
| CN104535181A (en) * | 2015-01-09 | 2015-04-22 | 哈尔滨工业大学 | Device for observing visible spectrum with naked eyes and reading wavelength through transmission grating and method for carrying out observation and reading wavelength based on device |
| CN105136293A (en) * | 2015-06-09 | 2015-12-09 | 河南理工大学 | MEMS micro-mirror micro spectrometer based on transmission grating |
| CN105157832A (en) * | 2015-09-28 | 2015-12-16 | 厦门大学 | Compact type raster replacement device |
| CN107290052A (en) * | 2016-04-13 | 2017-10-24 | 福州高意光学有限公司 | One kind projection spectrometer system |
| CN108693111A (en) * | 2017-04-06 | 2018-10-23 | 谱钜科技股份有限公司 | Spectrometer |
| CN110411563A (en) * | 2018-04-27 | 2019-11-05 | 福州高意光学有限公司 | A kind of spectrometer architecture |
| CN111326434A (en) * | 2018-12-14 | 2020-06-23 | 三星电子株式会社 | Spectroscopic system, optical inspection apparatus, and semiconductor device manufacturing method |
| CN112612014A (en) * | 2020-11-27 | 2021-04-06 | 西安知微传感技术有限公司 | High-performance MEMS laser radar receiving system |
-
2012
- 2012-09-13 CN CN201220465465.0U patent/CN202770763U/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103323112A (en) * | 2013-07-02 | 2013-09-25 | 中国科学院苏州生物医学工程技术研究所 | Optical mechanical structure of broad spectrum high resolution micro flat-field spectrometer |
| CN104535181A (en) * | 2015-01-09 | 2015-04-22 | 哈尔滨工业大学 | Device for observing visible spectrum with naked eyes and reading wavelength through transmission grating and method for carrying out observation and reading wavelength based on device |
| CN104535181B (en) * | 2015-01-09 | 2016-06-29 | 哈尔滨工业大学 | Utilize the device that visible spectrum bore hole is observed and read wavelength by transmission grating and the method observing and reading wavelength based on this device |
| CN105136293A (en) * | 2015-06-09 | 2015-12-09 | 河南理工大学 | MEMS micro-mirror micro spectrometer based on transmission grating |
| CN105157832A (en) * | 2015-09-28 | 2015-12-16 | 厦门大学 | Compact type raster replacement device |
| CN107290052A (en) * | 2016-04-13 | 2017-10-24 | 福州高意光学有限公司 | One kind projection spectrometer system |
| CN108693111A (en) * | 2017-04-06 | 2018-10-23 | 谱钜科技股份有限公司 | Spectrometer |
| CN110411563A (en) * | 2018-04-27 | 2019-11-05 | 福州高意光学有限公司 | A kind of spectrometer architecture |
| CN111326434A (en) * | 2018-12-14 | 2020-06-23 | 三星电子株式会社 | Spectroscopic system, optical inspection apparatus, and semiconductor device manufacturing method |
| CN112612014A (en) * | 2020-11-27 | 2021-04-06 | 西安知微传感技术有限公司 | High-performance MEMS laser radar receiving system |
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