CN201311326Y - Micro spectrometer based on step motor - Google Patents
Micro spectrometer based on step motor Download PDFInfo
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- CN201311326Y CN201311326Y CNU2008202178954U CN200820217895U CN201311326Y CN 201311326 Y CN201311326 Y CN 201311326Y CN U2008202178954 U CNU2008202178954 U CN U2008202178954U CN 200820217895 U CN200820217895 U CN 200820217895U CN 201311326 Y CN201311326 Y CN 201311326Y
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- catoptron
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- micro spectrometer
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Abstract
The utility model discloses a micro spectrometer based on step motor, composed of an optical fiber connector, an incident slit, a reflector, a flare grating, a focus lens and a detector, wherein the reflector comprises an external frame, and a plane mirror and a step motor which are arranged in the external frame. The utility model utilizes step motor and novel optical path structure, to design a micro spectrometer with good applicability, simple optical path and the ability for overcoming the defects of prior micro spectrometer with foldable optical path, such as high signal noise and complex optical structure. The micro spectrometer has wide spectral range, flexible application and easy carriage, which eliminates error induction and internal resistance change, while the transform angle of the plane mirror is 360 degrees.
Description
Technical field
The utility model relates to a kind of optical spectrum instrumentation, relates in particular to a kind of micro spectrometer based on stepper motor.
Background technology
Spectroscopy is to measure a kind of technology of ultraviolet, visible, near infrared and infrared band light intensity, is widely used in multiple field, detects or electromagnetic radiation analysis etc. as the concentration of color measuring, chemical analysis.The tradition optical spectrum instrumentation is become by discrete set of devices such as numerous optics, electricity and machineries, need extremely complicated light path system and accurate machine construction, reduced the reliability of whole instrument, instrument work, storage environment have also been had strict requirement, limited it is used more widely.Particularly at the application demand of online (scene) spectral measurement, the unable solution of conventional spectrometers, developing microminiaturized spectrometer has become when last big research focus.
Along with the progress of science and technology, microelectromechanical systems (MEMS) technology and Micrometer-Nanometer Processing Technology have obtained swift and violent development.Numerous new devices based on the MEMS technology are also shown up prominently, and it is compared with traditional devices has many advantages,, good reproducibility little, low in energy consumption, highly sensitive as volume, easily produce in batches, cost is low, stable processing technology etc.Adopt MEMS fabrication techniques spectrometer to become one of mainstream technology of spectrometer exploitation.
(In ' fra:red micro-spect:rometer based on adiffraction grating such as S.H.Kotlg, see SeiqSOrs and Actuators A, 2001,92:88-95) propose to adopt the MEMS technology with black and white diffraction grating and the integrated integration grating spectrometer of having made of thermopile detector in calendar year 2001.
In the structure that Li Tie etc. (200610027341.3, CN1865923A, on Dec 22nd, 2006) propose, also utilized the MEMS technology together with the difference in functionality device stack based on the micro spectrometer of blazed grating and thermopile detector.
These imaginations all attempt to utilize the MEMS fabrication techniques to go out integrated spectrometer, but only stay in the theoretic discussion stage, and the practical devices cost of manufacture is too high, and the market competitiveness is little.
Wen Zhiyu etc. (200610070845.3, CN1831517A, on September 13rd, 2006) propose to utilize pulse infrared light source and scanning micro-mirror to make infrared spectrometer.This structure is applicable to infrared range of spectrum, and the implementation of spectral bands such as ultraviolet, visible, near infrared is mentioned; Its light path system adopts foldable structure, and the shared same light path of diffraction light and incident light increased the difficulty and the complexity of actual light path design, and signal noise is big, has influenced spectral resolution, so being of limited application of this scheme.
A kind of micro spectrometer based on micro-electronic mechanical system technique that He Ye etc. (200710021052.7, CN101021437A, on March 23rd, 2007) propose has been introduced error, and internal resistance changes, and the catoptron rotational angle has only 75 °.
The utility model content
The technical problems to be solved in the utility model is to spectroanalysis instrument microminiaturization, integrated requirement at modern industry, proposed a kind of based on design based on the micro spectral analyser of stepper motor, employing is based on the photoelectric device of micro-electronic mechanical system technique, and designs a kind of micro spectrometer based on stepper motor of novel light channel structure.
The utility model adopts following technical scheme: a kind of micro spectrometer based on stepper motor of the utility model, it is characterized in that this spectrometer is made up of the joints of optical fibre, entrance slit, catoptron, blazed grating, focus lamp and detector, wherein catoptron comprises external frame and is arranged at level crossing and stepper motor in the external frame; The optical signals joints of optical fibre to be measured insert spectrometer, entrance slit is positioned at joints of optical fibre rear portion, light signal incides on the minute surface of catoptron via entrance slit, the rotating shaft of minute surface and stepper motor is oppositely arranged, the rotating shaft of stepper motor drives catoptron and does cyclical movement, make the monochromatic spatial disposition position in the incident angle of incident optical signal on blazed grating and each incident optical signal be cyclical variation, blazed grating resolves into incident optical signal in the monochromatic light of different wave length, after the monochromatic light line focus mirror of various wavelength is assembled, enter in the detector successively, realize the scanning of full spectrum, detector is positioned over the meeting focal spot of focus lamp.
According to the utility model, external fiber reaches the joints of optical fibre with light signal to be measured, and light signal enters instrument internal by entrance slit, and entrance slit is near joints of optical fibre rear portion.The utility model uses the joints of optical fibre and entrance slit that light signal to be measured is introduced spectrometer inside, effectively avoid the environment parasitic light to enter in the instrument, and the width of change optical fiber tube core diameter and slit width scalable incident beam, the optical resolution of raising instrument.
Enter the light signal to be measured of spectrometer through the joints of optical fibre and entrance slit, be incident to catoptron, and incident light reflexed on the blazed grating via catoptron.The minute surface of catoptron can move under control, and blazed grating is a dispersion element, finishes the branch light action.Catoptron combines with blazed grating, finishes for light signal to be measured beam split on each wavelength and scanning in its spectral range.
The minute surface of the catoptron that the utility model is related can move.Add the power supply signal excitation outside down, the minute surface of catoptron moves, and its motion frequency, amplitude and pattern are controlled by external signal.When catoptron turned to a certain mirror angle, the light signal that reflexes to blazed grating had only the monochromatic light of specific wavelength to enter in the detector after the convergence of line focus mirror after the blazed grating beam split.This certain wavelengths value depends on the mirror surface angle value.The minute surface of control catoptron is done cyclical movement, and the monochromatic light of various different wave lengths will be entered in the detector successively, realizes treating the full spectral line scanning of photometry signal.
The related catoptron of the utility model adopts the MEMS fabrication techniques to form, and micro-electronic mechanical system technique is main the manufacturing with the semiconductor technology, and its primary raw material comprises but is not limited only to silicon, silicon-containing compound, metal etc.Utilize devices such as MEMS fabrication techniques catoptron in modern industry, to obtain many application.In the optical communication industry, micro mirror reflection-type mems optical switch product has appearred, as the digital micro-mirror array (DMD) that is used for projection arrangement of company of Texas Instruments (Texas Instnlinents) production; Lucent development based on new router of MEMS optical switch or the like.In the utility model, described catoptron includes but not limited to, static driven formula catoptron and electromagnetic drive type catoptron.
In the prior art, static driven formula catoptron generally is made up of a high reflectance level crossing, semi-girder, a pair of back electrode and external frame, as Fig. 2, shown in Figure 3.By change level crossing and back electrode between voltage, the level crossing of suspension is deflected, its deflection angle is controlled by magnitude of voltage.
The electromagnetic drive type catoptron is made up of high reflectance level crossing, semi-girder, wire coil, an external permanent magnets, and its manufacture craft is used silicon deep reactive ion etch technology and potassium hydroxide anisotropic corrosion technique.Level crossing and coil are in the magnetic field of permanent magnet, and when coil electricity, the magnetic field force of generation drives level crossing deflection, the strength of current control plane mirror deflection angle in the coil.
For improving the reflection efficiency of catoptron, the film at mirror surface covering one deck high reflectance includes but not limited to metal A g, Au, Al film.
Catoptron reflexes to incident light on the blazed grating, finish beam split by blazed grating for light signal to be measured, be blazed grating as dispersion element, the polychromatic light of incident is resolved into the monochromatic light of the various wavelength in its spectral range, the monochromatic light that makes different wave length is dispersed arrangement spatially.The monochromatic distributing position of various wavelength depends on grating attribute and original incident beam width.For improving the spectroscopic behaviour of blazed grating (4), can also be at the film of its surface coverage high reflectance, the film kind includes but are not limited to metal A g, Au, Al film.
Monochromatic light after blazed grating decomposes forms certain space distribution, has only the monochromatic luminous energy of specific wavelength to reflex on the focus lamp, is assembled monochromatic light and is reflexed on the detector by focus lamp, and detector is positioned over the meeting focal spot of focus lamp.Detector measurement goes out to receive monochromatic light intensity.
In the related light path system of the utility model, have only the minute surface of catoptron to move, all the other devices are all fixing.Therefore when catoptron keeps a certain mirror angle, have only the monochromatic light of specific wavelength just can enter in the detector.The control mirror mirror is done cyclical movement, and the monochromatic light of different wave length is entered in the detector successively, realizes treating the full spectral line scanning of photometry signal.
Detector described in the utility model can adopt any detector with photoelectricity transformation function general in the prior art.According to the concrete requirement that detects wave band under the practical application, change detector, can realize spectral measurement function to the light signal to be measured of different-waveband, for example at near-infrared band, can select indium gallium arsenic detector for use, infrared band can be used mercury-cadmium tellurid detector.The detector kind, include but are not limited to, photodiode (Photo Diode), charge-coupled device (CCD), indium gallium arsenic detector (InGaAs Detector), mercury-cadmium tellurid detector (HgCdTe Detector), cmos image sensor (CMOSImage Sensor) etc.
The related optical system of the utility model needs number of optical devices few, and has adopted the device based on micro-electronic mechanical system technique, system architecture compactness, excellent performance.
The related light path system of the utility model is simple in structure, and device is few, light path is short, is separated from each other on diffraction light and the incident light space, does not produce between the two to interfere or problem such as crosstalk, and it is low to measure noise, the spectral resolution height.
The utility model has realized that a kind of spectral range is wide, uses flexibly portable micro spectrometer.This micro spectrometer has the not available advantage of large-scale spectrometer, as in light weight, be easy to carry, easy to use and with low cost etc., can be applied to fields such as laboratory chemical analysis, clinical medical inspection, industry monitoring, Aero-Space remote sensing.Especially for the higher place of danger coefficients such as colliery, oil well, high-performance, portable micro spectral analyser can go deep into forefront of the production on the spot, carry out important safety security functions such as methane gas detection, poisonous and harmful substance monitoring.
The utility model utilizes stepper motor and novel light channel structure, design micro spectrometer with good applicability, light channel structure is simple, can overcome the shortcoming that signal noise is big, optical texture is complicated that existing micro spectrometer foldable structure light path system design exists, and the spectral range that micro spectrometer of the present utility model is suitable for is wide, use flexibly, be easy to carry.Not having error introducing and internal resistance variation, level crossing translation-angle is 360 °.
Description of drawings
Fig. 1: the utility model one-piece construction figure;
Fig. 2: the utility model mirror structure figure.
Embodiment
As shown in Figure 1 and Figure 2.Specify the related micro spectral instrument system of the utility model below in conjunction with accompanying drawing.The title of the related device that provides among the embodiment, model and parameter comprise described device only as example usefulness for implementing the device that the utility model adopted, but not limited.As shown in Figure 1, the related micro spectrometer of the utility model is made up of the joints of optical fibre 1, entrance slit 2, catoptron 3, blazed grating 4, focus lamp 5 and detector 6.Reach joints of optical fibre 1SMA905 in the optical signals external fiber to be measured, enter instrument internal by entrance slit 2, entrance slit 2 is positioned at the joints of optical fibre 1 rear portion, 50 microns of slit widths, and less than fibre core diameter, this design will improve spectral resolution.Light signal incides on the catoptron 3 via entrance slit 2, and catoptron 3 reflected light signals are to blazed grating 4, and blazed grating 4 resolves into the incident polychromatic light in the monochromatic light of different wave length.The ECO SCAN:ESSll5 electromagnetic drive type catoptron of the Japanese signal of catoptron 3 employings company, has structure as shown in Figure 4, the minute surface pendulum angle of catoptron 3 is～350, frequency 50---100Hz, therefore can in a hunting period, finish the scanning of full spectrum, measure the time spent and be less than 20ms.Blazed grating can be selected for use at measured wavelength coverage.This example is for the near infrared application demand of infrared band one by one, and selecting the blaze wavelength of blazed grating is 1000nm, and grating fringe density is 600/mm or higher, and optical resolution is better than 0.3nm.The monochromatic light of a certain wavelength can reflex on the detector 6 by coalescence via focus lamp 5, and detector 6 is positioned over the meeting focal spot of focus lamp; Detector 6 is measured the monochromatic light intensity that receives.
When catoptron 3 keeps a certain mirror angle, have only the monochromatic light of specific wavelength just can enter in the detector 6; The minute surface of catoptron 3 is cyclical movement, make the incident angle of incident polychromatic light on blazed grating 4 and each monochromatic spatial disposition position be cyclical variation, and after making monochromatic light line focus mirror 5 convergences of different wave length, enter successively in the detector 6, realize treating the scanning of the full spectral line of photometry signal.The minute surface hunting frequency of catoptron 3 is 50---100Hz, can in one-period, finish the scanning of full spectrum, and the measurement time spent is less than 20ms, has really realized measuring at a high speed.
Claims (1)
1, a kind of micro spectrometer based on stepper motor, it is characterized in that this spectrometer is made up of the joints of optical fibre (1), entrance slit (2), catoptron (3), blazed grating (4), focus lamp (5) and detector (6), wherein catoptron (3) comprises external frame (7) and is arranged at level crossing (8) and stepper motor (9) in the external frame (7); The optical signals joints of optical fibre to be measured (1) insert spectrometer, entrance slit (2) is positioned at the joints of optical fibre (1) rear portion, light signal incides on the minute surface (8) of catoptron (3) via entrance slit (2), minute surface (8) is oppositely arranged with the rotating shaft of stepper motor (9), the rotating shaft of stepper motor (9) drives catoptron (3) and does cyclical movement, make the monochromatic spatial disposition position in the incident angle of incident optical signal on blazed grating (4) and each incident optical signal be cyclical variation, blazed grating (4) resolves into incident optical signal in the monochromatic light of different wave length, after the monochromatic light line focus mirror (5) of various wavelength is assembled, enter successively in the detector (6), realize the scanning of full spectrum, detector (6) is positioned over the meeting focal spot of focus lamp (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202178954U CN201311326Y (en) | 2008-12-03 | 2008-12-03 | Micro spectrometer based on step motor |
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| CNU2008202178954U CN201311326Y (en) | 2008-12-03 | 2008-12-03 | Micro spectrometer based on step motor |
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| CN201311326Y true CN201311326Y (en) | 2009-09-16 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102890070A (en) * | 2012-09-14 | 2013-01-23 | 江苏惠通集团有限责任公司 | Near infrared spectrum analyzer for quality of agricultural product based on micro electro-mechanical technology |
| WO2013107064A1 (en) * | 2012-01-19 | 2013-07-25 | 杭州远方光电信息有限公司 | Low stray light polychromator |
| CN103822651A (en) * | 2014-03-03 | 2014-05-28 | 安徽理工大学 | Plane mirror reflection based micro-cantilever deflection detecting system of micro-cantilever array sensor and detecting method |
| CN105814469A (en) * | 2013-12-09 | 2016-07-27 | 皇家飞利浦有限公司 | Optical fiber connector |
-
2008
- 2008-12-03 CN CNU2008202178954U patent/CN201311326Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013107064A1 (en) * | 2012-01-19 | 2013-07-25 | 杭州远方光电信息有限公司 | Low stray light polychromator |
| CN102890070A (en) * | 2012-09-14 | 2013-01-23 | 江苏惠通集团有限责任公司 | Near infrared spectrum analyzer for quality of agricultural product based on micro electro-mechanical technology |
| CN105814469A (en) * | 2013-12-09 | 2016-07-27 | 皇家飞利浦有限公司 | Optical fiber connector |
| CN105814469B (en) * | 2013-12-09 | 2018-12-25 | 皇家飞利浦有限公司 | Optical fiber connector |
| US10379290B2 (en) | 2013-12-09 | 2019-08-13 | Koninklijke Philips N.V. | Optical fiber connector |
| CN103822651A (en) * | 2014-03-03 | 2014-05-28 | 安徽理工大学 | Plane mirror reflection based micro-cantilever deflection detecting system of micro-cantilever array sensor and detecting method |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090916 Termination date: 20161203 |