CN202685120U - 线锯控制系统和线锯 - Google Patents
线锯控制系统和线锯 Download PDFInfo
- Publication number
- CN202685120U CN202685120U CN 201120560605 CN201120560605U CN202685120U CN 202685120 U CN202685120 U CN 202685120U CN 201120560605 CN201120560605 CN 201120560605 CN 201120560605 U CN201120560605 U CN 201120560605U CN 202685120 U CN202685120 U CN 202685120U
- Authority
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- Prior art keywords
- line
- scroll saw
- camera
- control system
- scroll
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
Description
Claims (11)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP11187049.9A EP2586582B1 (en) | 2011-10-28 | 2011-10-28 | Wire saw control system and wire saw |
EP11187049.9 | 2011-10-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN202685120U true CN202685120U (zh) | 2013-01-23 |
Family
ID=47540787
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110459141.6A Active CN103085185B (zh) | 2011-10-28 | 2011-12-23 | 线锯控制系统和线锯 |
CN 201120560605 Expired - Lifetime CN202685120U (zh) | 2011-10-28 | 2011-12-23 | 线锯控制系统和线锯 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110459141.6A Active CN103085185B (zh) | 2011-10-28 | 2011-12-23 | 线锯控制系统和线锯 |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2586582B1 (zh) |
JP (1) | JP2013094959A (zh) |
CN (2) | CN103085185B (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103085185A (zh) * | 2011-10-28 | 2013-05-08 | 应用材料瑞士有限责任公司 | 线锯控制系统和线锯 |
CN104227856A (zh) * | 2013-06-21 | 2014-12-24 | 应用材料瑞士有限责任公司 | 丝锯的丝线监控系统和用于监控丝锯的方法 |
CN107263750A (zh) * | 2017-08-07 | 2017-10-20 | 苏州赛万玉山智能科技有限公司 | 太阳能硅片的切割方法及三维结构太阳能硅片 |
CN110000941A (zh) * | 2019-04-28 | 2019-07-12 | 宇晶机器(长沙)有限公司 | 一种多线切割机工作台进给速度控制系统及其控制方法 |
CN110039671A (zh) * | 2019-04-24 | 2019-07-23 | 宇晶机器(长沙)有限公司 | 一种鲁棒多线切割机走线速度控制系统 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015188859A1 (en) * | 2014-06-11 | 2015-12-17 | APPLIED MATERIALS SWITZERLAND SàRL | Wire saw system |
CN104108138B (zh) * | 2014-07-09 | 2015-09-30 | 华侨大学 | 一种绳锯线弓角度的控制方法及控制装置 |
FR3040318B1 (fr) * | 2015-08-28 | 2018-03-23 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede et dispositif de controle d'un fil de decoupe a abrasifs lies |
WO2018042864A1 (ja) * | 2016-08-31 | 2018-03-08 | 住友電気工業株式会社 | 半導体基板の製造方法 |
CN106891451A (zh) * | 2017-02-22 | 2017-06-27 | 平凉中电科新能源技术有限公司 | 一种金刚线多线切割机断线检测方法 |
KR102063751B1 (ko) * | 2017-05-24 | 2020-01-08 | 김판용 | 다이아몬드 와이어컷팅 머신 |
FR3088838B1 (fr) | 2018-11-28 | 2022-11-25 | Commissariat Energie Atomique | Procédé de mesure d’au moins un paramètre d’usure d’un fil de coupe, son application à un procédé de coupe ou de fabrication des fils et dispositif associé |
DE102018221922A1 (de) * | 2018-12-17 | 2020-06-18 | Siltronic Ag | Verfahren zur Herstellung von Halbleiterscheiben mittels einer Drahtsäge, Drahtsäge und Halbleiterscheibe aus einkristallinem Silizium |
FR3115485B1 (fr) * | 2020-10-26 | 2023-10-06 | Commissariat Energie Atomique | Procédé de découpe en tranches d’un bloc |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3827675B2 (ja) * | 2004-02-26 | 2006-09-27 | 株式会社ノリタケスーパーアブレーシブ | 切断装置 |
JP4017627B2 (ja) * | 2004-10-20 | 2007-12-05 | 株式会社ノリタケスーパーアブレーシブ | 切断装置 |
US7503831B2 (en) * | 2006-04-26 | 2009-03-17 | Siemens Medical Solutions Usa, Inc. | System and method for cutting soluble scintillator material |
CN101596749B (zh) * | 2009-06-26 | 2011-11-02 | 江苏中博钻石科技有限公司 | 钎焊钻石线锯的制作方法 |
JP5373502B2 (ja) * | 2009-08-04 | 2013-12-18 | 三菱電機株式会社 | マルチワイヤソーのワイヤ断線予防装置 |
WO2011070386A1 (en) * | 2009-12-11 | 2011-06-16 | Applied Materials, Inc. | Monitoring device for the wire of a wire saw device and method for operating the same |
JP2011143504A (ja) * | 2010-01-14 | 2011-07-28 | Mitsubishi Electric Corp | ワイヤソー装置 |
EP2586582B1 (en) * | 2011-10-28 | 2017-03-01 | Toyo Advanced Technologies Co., Ltd. | Wire saw control system and wire saw |
-
2011
- 2011-10-28 EP EP11187049.9A patent/EP2586582B1/en not_active Not-in-force
- 2011-12-23 CN CN201110459141.6A patent/CN103085185B/zh active Active
- 2011-12-23 CN CN 201120560605 patent/CN202685120U/zh not_active Expired - Lifetime
-
2012
- 2012-10-29 JP JP2012237407A patent/JP2013094959A/ja active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103085185A (zh) * | 2011-10-28 | 2013-05-08 | 应用材料瑞士有限责任公司 | 线锯控制系统和线锯 |
CN103085185B (zh) * | 2011-10-28 | 2016-07-06 | 应用材料公司 | 线锯控制系统和线锯 |
CN104227856A (zh) * | 2013-06-21 | 2014-12-24 | 应用材料瑞士有限责任公司 | 丝锯的丝线监控系统和用于监控丝锯的方法 |
CN107263750A (zh) * | 2017-08-07 | 2017-10-20 | 苏州赛万玉山智能科技有限公司 | 太阳能硅片的切割方法及三维结构太阳能硅片 |
CN110039671A (zh) * | 2019-04-24 | 2019-07-23 | 宇晶机器(长沙)有限公司 | 一种鲁棒多线切割机走线速度控制系统 |
CN110039671B (zh) * | 2019-04-24 | 2021-01-22 | 宇晶机器(长沙)有限公司 | 一种鲁棒多线切割机走线速度控制系统 |
CN110000941A (zh) * | 2019-04-28 | 2019-07-12 | 宇晶机器(长沙)有限公司 | 一种多线切割机工作台进给速度控制系统及其控制方法 |
Also Published As
Publication number | Publication date |
---|---|
CN103085185B (zh) | 2016-07-06 |
EP2586582B1 (en) | 2017-03-01 |
JP2013094959A (ja) | 2013-05-20 |
CN103085185A (zh) | 2013-05-08 |
EP2586582A1 (en) | 2013-05-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: Lausanne Patentee after: Applied Materials Switzerland Sarl Address before: Lausanne Patentee before: Applied Materials Switzerland Sa |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160506 Address after: American California Patentee after: Applied Materials Inc. Address before: Lausanne Patentee before: Applied Materials Switzerland Sarl |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20161031 Address after: Hiroshima County Patentee after: Toyo Advanced Machine Tool Co., Ltd. Address before: American California Patentee before: Applied Materials Inc. |
|
CX01 | Expiry of patent term |
Granted publication date: 20130123 |
|
CX01 | Expiry of patent term |