The specific embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present utility model is described further.
" engaging of vertical guide rail formula ground " of the present utility model refers to guide tracked cooperation between two parts, and two parts can relatively vertically slide." engaging of horizontal guide rail formula ground " refers to guide tracked cooperation between two parts, but and two parts relative levels slips.
Test handgrip of the present utility model combination die set as shown in Figure 1 and Figure 2, this device mainly by vertical servomotor 501, laterally servomotor 502, test handgrip assembly be connected plate 503, test handgrip assembly apparatus 51, laterally roller screw slide block combination transmission 505, test handgrip assembly combination lifting slider 506, vertical roller screw slide block combination transmission 507, left side installing plate 508, synchrome conveying belt 509, left side riser 510, right side riser 511, connect transverse slat 513, connection top board 514, vacuum generator 516 etc. and form.
This device is comprised of forward and backward two groups of structures and the identical test handgrip of performance aggregate motion module, front side test handgrip aggregate motion module is installed in be used to the left side riser 510 that is fixed on the work top, the material boat equipment setting of corresponding front side, specially the front side is expected that the chip on the left material ship of boat equipment tests from the corresponding test bit that left material ship is moved into test machine, put it into again after test is finished on the right material ship of front side material boat equipment; Rear side test handgrip aggregate motion module is installed in be used to the right side riser 511 that is fixed on the work top, corresponding rear side material boat equipment arranges, specially the chip on the left material ship of rear side material boat equipment is tested from the corresponding test bit that left material ship is moved into test machine, put it into again on the right material ship of rear side material boat equipment after test is finished.Left side riser 510 is connected with the right side riser and is connected transverse slat 513 by one and connect top board 514 and connect firmly together with being connected.Wherein, the back side of left side riser 510 also is provided with vacuum generator 516, and the power of absorption is provided for the suction nozzle of test handgrip aggregate motion module.
Side test handgrip aggregate motion module was example in the past, illustrated that the structure of test handgrip combination die set forms.Be installed in the vertical servomotor 501 on the installing plate 508 of left side, it drives the vertical roller screw slide block combination transmission 507 that is packed on the installing plate 508 of left side by synchrome conveying belt 509, thereby the test handgrip assembly combination lifting slider 506 that drives in the vertical roller screw slide block combination transmission moves up and down, vertical roller screw slide block combination transmission 507 mainly comprises a roller screw, itself and test handgrip assembly combination lifting slider cooperate, and realize moving up and down of test handgrip assembly combination lifting slider 506.Slip for firm test handgrip assembly combination lifting slider 506, it is positioned at both sides and the 508 guide tracked cooperations of left side installing plate of vertical roller screw slide block combination transmission 507, namely play the effect of a guiding, also play the effect of a steady testing handgrip assembly combination lifting slider 506.
Wherein also have many vertical movement apparatus can realize testing sliding up and down of handgrip assembly combination lifting slider 506 in the prior art, such as pulley, drag chain or controllable cylinder etc. are not enumerated one by one at this.
Laterally servomotor 502 drives horizontal roller screw slide block combination transmission 505, thereby drive test handgrip assembly combination move left and right slide block 518 move left and right that connect firmly in this slide block combination transmission, laterally roller screw slide block combination transmission 505 mainly comprises a roller screw, itself and test handgrip assembly combination move left and right slide block 518 cooperate, and realize the move left and right of test assembly combination move left and right slide block 518.It is positioned at both sides and the 508 guide tracked cooperations of left side installing plate of horizontal roller screw slide block combination transmission 505, namely plays the effect of a guiding, also plays the effect of a steady testing handgrip assembly combination move left and right slide block 518.Wherein, the test handgrip assembly that is slidingly matched vertically on the test handgrip assembly combination move left and right slide block 518 plate 503 that is connected, test handgrip assembly be connected top and the 506 guide tracked cooperations of test handgrip assembly combination lifting slider of plate 503, like this, test handgrip assembly combination move left and right slide block 518 is connected in plate 503 transverse movements driving test handgrip assembly, test handgrip assembly be connected plate 503 also the guide rail on the test handgrip assembly combination lifting slider 506 laterally slide.Simultaneously, test handgrip assembly combination lifting slider 506 also drives the test handgrip assembly plate 503 that is connected and moves up and down along the guide rail on the test handgrip assembly combination move left and right slide block 518 when moving up and down.Thereby so that connect firmly test handgrip assembly apparatus on test handgrip assembly is connected plate 503 about in the of 51, move left and right.
Wherein also have many horizontally moving devices can realize testing sliding up and down of handgrip assembly combination move left and right slide block 518 in the prior art, such as drag chain or controllable cylinder etc. are not enumerated one by one at this.
Test handgrip assembly apparatus 51 is comprised of two identical test handgrips of structural principle, on each test handgrip assembly apparatus two suction nozzle rod is arranged, and each suction nozzle rod can hold a chip to be measured.The test handgrip assembly 51 that is installed on the front side test handgrip aggregate motion module can grasp four chip blocks simultaneously.
During the side test gripper equipment is corresponding before the left material boat-carrying of front side material boat equipment first group four chips to be measured and arrived position, the cross motor 502 of front side test gripper equipment starts, make the test handgrip assembly apparatus 51 of front side test gripper equipment move to the top that the left material ship of boat equipment is expected in the front side, vertical servomotor 501 starts afterwards, test handgrip assembly apparatus 51 is moved down, until aliging separately with four chip blocks on the left material ship, four vacuum slots of test handgrip assembly below contact, and hold chip, then vertical servomotor 501 and horizontal servomotor 502 are coordinated to start in succession, the top that the test handgrip assembly apparatus 51 that holds chip is moved quickly into test machine front side test bit (meanwhile, front side material boat equipment also is moved to the left, prepare to receive again new chip to be measured, the correspondence position of side test gripper equipment before the right material ship of front side material boat equipment arrives simultaneously, prepare to receive the chip after testing), afterwards, vertical servomotor 501 descends, each test point position of four chip blocks to be measured is contacted with each measuring head on the test machine, test.After test was finished, vertical servomotor 501 and horizontal servomotor 502 were coordinated to start in succession, first group of four chip block testing are put on the right material ship of front side material boat equipment.Afterwards, front side material boat equipment moves right, and first group of four chip of testing delivered to blanking sorting handgrip stage apparatus correspondence position, and the Awaiting Triage sorting is placed.Meanwhile, the left material ship of front side material boat equipment is delivered to position corresponding to front side test gripper equipment with the 3rd group of four chip blocks again, and the side test gripper equipment is tested material grasping to it before waiting for.So repeatedly, just the front side can be expected that the chip to be measured on the boat equipment tests one by one.
When the left material boat-carrying of rear side material boat equipment the second group four chips arrival to be measured positions that the side test gripper equipment is corresponding afterwards, the cross motor 502 of rear side test gripper equipment starts, make test handgrip assembly apparatus 51 move to the top of the left material ship of rear side material boat equipment, vertical servomotor 501 starts afterwards, test handgrip assembly apparatus 51 is moved down, until aliging separately with four chip blocks on the left material ship, four vacuum slots of test handgrip assembly below contact, and hold chip, then vertical servomotor 501 and horizontal servomotor 502 are coordinated to start in succession, the top that the test handgrip assembly that holds chip is moved quickly into test machine rear side test bit (meanwhile, rear side material boat equipment also is moved to the left, prepare to receive again new chip to be measured, the correspondence position of side test gripper equipment after the right material ship of rear side material boat equipment arrives simultaneously, prepare to receive the chip after testing), afterwards, vertical servomotor 501 descends, each test point position of four chip blocks to be measured is contacted with each test contact on the test machine, test.After test was finished, vertical servomotor 501 and horizontal servomotor 502 were coordinated to start, and second group of four chip block testing are put on the right material ship of rear side material boat equipment.Afterwards, rear side material boat equipment moves right, and second group of four chip of testing delivered to blanking sorting handgrip stage apparatus correspondence position, and the Awaiting Triage sorting is placed.Meanwhile, the left material ship of rear side material boat equipment is delivered to position corresponding to rear side test gripper equipment with the 4th group of four chip blocks again, and the side test gripper equipment is tested material grasping to it after waiting for.So repeatedly, just the chip to be measured on the rear side material boat equipment can be tested one by one.
Test handgrip combination die set of the present utility model has the combination of two groups of test handgrip assemblies, every group of test handgrip assembly driven by front side test handgrip aggregate motion module and rear side test handgrip aggregate motion module separately, can be in the movement that realizes the combination of test handgrip assembly at forward and backward and upper and lower both direction, four accurate grab chips of suction nozzle that are conducive to its below are finished test.Its novel structure, complete function, production efficiency height can grasp simultaneously at least four chip blocks and test.
Test handgrip assembly apparatus 51 of the present utility model can adopt structure known in the art, preferred structure as shown in Figure 3, this assembly apparatus is by the piston fine setting and heat module 51a, vacuum slot handgrip module 51b two parts form, the former is fixed together lower upper (being called for short the top assembly) latter (being called for short the bottom assembly), and both link with Rapid fastener.Piston fine setting and heating module reach the temperature of expecting the piece test request on the one hand for the suction nozzle of vacuum slot handgrip module provides definite value stable thermal source in order to guarantee the material piece that suction nozzle holds; For vacuum slot and material interblock provide adjustable required distance, guarantee that suction nozzle is stable with the dynamics that contacts of material piece on the other hand.Test handgrip assembly apparatus is mainly by upper mounted plate 5101, vacuum adapter 5102, heating rod 5103, temperature-sensitive head 5104, suction plate 5105, Rapid fastener 5106, thermal insulation board 5107, cylinder barrel 5108, trip bolt 5109, Level tune spiral 5110, suction nozzle overcoat 5111, piston rod connects rebound 5112, piston 5113, piston top cover labyrinth plate 5114, gas-tpe fitting 5115, Compress Spring 5116, heating plate 5117, fixed guide pin installing plate 5118, fixed guide pin 5119, gathering sill 5120, deck 5121, suction nozzle installing plate 5122, anti-rotation guide finger 5123, suction nozzle Compress Spring 5124, suction nozzle rod 5125, the spacing cover plate 5126 of suction nozzle, test position fix cover 5127, sealing ring 5128, anti-rotation guiding breach 5129 compositions such as grade.
Piston fine setting and heating module 51a(call top assembly 51a in the following text) structure as shown in Figure 4, the piston top cover labyrinth plate 5114 that the middle part is provided with through hole will be encapsulated in the cylinder barrel 5108 with the piston 5113 of piston rod and the Compress Spring 5116 usefulness bolts that are enclosed within on the piston rod, connect firmly with bolt between upper mounted plate 5101 and the piston top cover labyrinth plate 5114.Upper mounted plate 5101 is provided with gas-tpe fitting 5115, the air that enters from gas-tpe fitting 5115 passes the upper mounted plate 5101 inner gas passages that arrange, and pass from the pore outlet of the setting at upper mounted plate 5101 middle parts, after upper mounted plate 5101 connected firmly with piston top cover labyrinth plate 5114, the through hole of pore outlet and piston top cover labyrinth plate 5114 was corresponding.Like this, compressed air can enter from the gas-tpe fitting 5115 on the upper mounted plate 5101, the aperture in process upper mounted plate 5101 centres out, arrive the top of piston 5113 from piston top cover labyrinth plate 5114 centres, the resistance that pushing piston 5113 overcomes Compress Spring 5116 moves down, interrupt when gas-tpe fitting 5115 ventilations, Compress Spring 5116 upwards resets piston 5113.
The lower end of the fixed guide pin installing plate 5118 that connects firmly with cylinder barrel 5108 lower ends is fixedly connected with piston rod and is connected rebound 5112, can the lower end that piston rod connects the piston rod of rebound 5112 and piston 5113 be connected firmly with screw or other means, to guarantee when connecting firmly that the fixed guide pin 5119 that arranges on the fixed guide pin installing plate 5118 is connected the gathering sill 5120 that arranges on the rebound 5112 and aligns with piston rod, thereby when piston 5113 is moving up and down, can guarantee that piston rod connects rebound 5112 and can not rotate.Wherein, fixed guide pin installing plate 5118 not necessarily for example, can connect piston rod rebound 5112 and directly connect firmly lower end at piston rod, and fixed guide pin 5119 is arranged on sidewall or the end of cylinder barrel 5108, also can realize identical function.
Heating plate 5117 is connected with thermal insulation board and is connected rebound 5112 with piston rod by bolt and connects firmly, and when piston 5113 drives piston rods and connects rebounds 5112 and move up and down, heating plate 5117 also will move up and down.Thermal insulation board 5117 is to prevent that heat on the heating plate 5117 is to being uploaded to the parts such as piston cylinder.Be provided with vacuum adapter 5102, heating rod 5103, temperature-sensitive head 514 and deck 5121 on the heating plate 5117.Vacuum adapter 5102 is that the vacuum slot for bottom assembly 51b provides vacuum air-channel, heating rod 5103 provides heating-up temperature for heating plate 5117, temperature-sensitive head 5104 is control temperature of heating plate, and deck 5121 is Rapid fasteners of fixedly bottom assembly 51b.
Vacuum slot handgrip module 51b(calls bottom assembly 51b in the following text) structure as shown in Figure 5, suction nozzle rod 5125 is comprised of suction nozzle rod main body (upper bar and lower pole) and imperfect disk (at the suction nozzle rod middle part), the upper bar cover of suction nozzle rod 5125 has suction nozzle Compress Spring 5124, and this suction nozzle Compress Spring 5124 is to contact when the suction nozzle rod absorption chip and with chip to play cushioning effect when being squeezed.First cover there is the suction nozzle rod 5125 of suction nozzle Compress Spring 5124 to put into the groove of spacing cover plate 5126 settings of suction nozzle and the lower pole of suction nozzle rod 5125 is passed, the shape of this groove is similar with the shape of the imperfect disk of suction nozzle rod, because be imperfect disk, rotate so can prevent suction nozzle rod.Above-mentioned incomplete disk can be the shape of similar " D " font, also can be to be fan-shaped etc.Can also be provided with anti-rotation guiding breach 5129 at imperfect disk, it is used with the anti-rotation guide finger 5123 that is packed in below the suction nozzle installing plate 5122, and suction nozzle rod 5125 can not rotated when moving up and down.
The upper bar god of suction nozzle rod 5125 enters in the through hole that arranges on the suction nozzle installing plate 5122, and can do moving up and down of trace in through hole.With bolt the spacing cover plate 5126 of suction nozzle is connected firmly with suction nozzle installing plate 5122 again, suction nozzle rod 5125 is encapsulated.To make one by one corresponding matching of anti-rotation guide finger 5123 and anti-rotation guiding breach 5129 when connecting firmly, the top of suction nozzle rod 5125 is cooperated with hole on the suction nozzle installing plate 22, guarantee that suction nozzle rod can do trace and move up and down in this hole.Then in the shape that the suction plate 5105 of the spacing cover plate 5126 of suction nozzle being packed into the arranges groove similar with spacing cover plate 5216 shapes of suction nozzle, the degree of depth of groove is so that can connect firmly suction nozzle installing plate 5122 and suction plate 5105 with bolt, simultaneously, the lower pole of suction nozzle rod 5125 passes the suction nozzle overcoat 5111 that suction plate 5105 lower ends arrange, thereby so that the lower pole of suction nozzle rod can freely trace be mobile up and down in this overcoat.Wherein, the spacing cover plate 5126 of suction nozzle and suction plate 5105 also can be one.
At this, suction nozzle installing plate, suction plate can be regarded as the shell of bottom assembly, the suction nozzle installing plate consists of the top of this shell, and the suction plate is as the bottom of this shell.
In the time of combination, the Rapid fastener 5106 that arranges on the suction nozzle installing plate 5122 is fastened on the deck 5121 of heating plate 5117, with vacuum slot handgrip module 51b(bottom assembly) finely tune with piston and heating module 51a(top assembly) be connected.Vacuum adapter 5102 provides vacuum air-channel by the through hole on the suction nozzle installing plate 5122 for suction nozzle rod.Through hole between suction nozzle installing plate 5122 and the heating plate 5117 adds a sealing ring 5128, can effectively form sealing with suction nozzle rod 25 with assurance from the vacuum adapter 5102 on the heating plate 5117 of top assembly and stablize path.
When off working state and material grasping, the lower transverse plane of suction nozzle rod 5125 is than the outstanding about 0.5mm of the lower transverse plane of suction nozzle overcoat 5111, and in test process, suction nozzle rod 5125 holds chip.Be fixed with test position fix cover 5127 in the both sides of suction plate 5105, its effect is, when chip is shifted into test position, for the test position measuring head corresponding with test machine that makes chip aligns, this test position fix cover 5127 should guarantee accurately to be inserted in the test position fix pin (perhaps pilot pin) of test machine test position.
The duty of test handgrip assembly apparatus 51 of the present utility model is as follows: when the suction nozzle that the quilt that arrives left material ship when test handgrip assembly apparatus is grabbed chip to be measured top and the suction nozzle rod 5125 on it soon contacts with chip, vacuum adapter 5102 demand workings, make the suction nozzle of suction nozzle rod 5125 hold chip, then arrive the corresponding test position of test machine with test handgrip assembly apparatus, when the test point of the chip to be measured measuring head corresponding with test machine contacts, gas-tpe fitting 5115 is ventilated immediately, pushing piston 5113 is slightly mobile downwards, by with piston, the suction nozzle installing plate 5122 that is connected with piston rod promotes suction nozzle and chip further compresses measuring head, in this process, suction nozzle rod 5125 is subject to reaction force and suction nozzle Compress Spring 24 is shortened, suction nozzle rod 5125 moves up in suction nozzle overcoat 5111, until suction nozzle overcoat 5111 lower surfaces are compressed chip surface, and remain this impaction state, until chip testing is finished.After chip testing is finished, gas-tpe fitting 5115 is died, Compress Spring 5116 makes piston reset, and chip surface is left in suction nozzle overcoat 5111 lower surfaces therefore, and the suction nozzle of suction nozzle rod 5125 holds the chip of test, and under the effect of suction nozzle Compress Spring 5124, reset, at last, arrive right material ship top with test handgrip assembly apparatus, vacuum adapter 5102 disconnects afterwards, the suction nozzle rod vacuum passage is closed, and the chip that suction nozzle is finished test is put into right material ship.And so forth, the chip to be measured on just can just left material ship, crawl is put into the test seat in the plane and tests one by one, and the chip that then test can be finished again is discharged on the right material ship.
As required, heating plate 5117 can be always by heating rod 5103 heating, and by temperature-sensitive head 5104 temperature controls, the temperature heat of heating plate passes to suction nozzle rod 5125 by suction nozzle installing plate 5122, further pass to again chip to be measured, thereby guarantee the probe temperature of chip to be measured.
Test handgrip assembly apparatus of the present utility model, can a plurality ofly be used in combination, have the function that heats by chip testing temperature requirement to be tested, provide necessary temperature by heating plate to suction nozzle installing plate and suction nozzle rod, its necessary temperature is by the first-class control of temperature-sensitive.The vacuum slot reliable operation of this test handgrip assembly apparatus, again to blowing, vacuum slot is always stable to hold chip material piece, finishes whole test jobs from feeding to test.This test handgrip assembly apparatus has the fine setting pressurization function, its objective is by the fine setting piston makes the suction nozzle overcoat that is packed on the suction plate along the suction nozzle rod down sliding, treat the slightly pressurization of test chip surface with suction nozzle, thereby the tested pilot of chip is contacted with the measuring head of test machine more reliably, realize reliable and stable test.The both sides of the suction plate of each test handgrip assembly apparatus all are fixed with the test position fix cover, its purpose is when test handgrip assembly apparatus holds chip to be measured to the corresponding test bit decline of test machine, movement will make alignment pin (perhaps pilot pin) corresponding on test position fix cover and the test machine align, thereby guarantees that corresponding measuring head aligns on test point and the test machine on the chip to be measured.Test handgrip assembly apparatus is comprised of top assembly and bottom assembly, and the connection between top assembly and the bottom assembly is to realize by being installed in two Rapid fasteners on the suction nozzle installing plate and two decks on the heating plate, and is simple in structure, convenient disassembly.
The utility model is by preferred embodiment having carried out detailed explanation.Yet, by to the studying carefully of preamble, to the variation of each embodiment with to increase also be that one of ordinary skill in the art institute is apparent.The applicant is intended that all these variations and increases the part that has comprised in the scope that drops on the utility model claim of the present utility model.
Similar numbering refers to similar element in the whole text.For the purpose of clear, the situation that some line, layer, element, parts or feature are amplified may be arranged in the accompanying drawings.
Term used herein is only for to be illustrated specific embodiment, and it is not to be intended to the utility model is limited.Unless otherwise defined, all terms used herein (comprising technical term and scientific terminology) are all identical with the utility model one of ordinary skill in the art's understanding.Also must be clear and definite be, except clear and definite definition is arranged in this article, such as in the dictionary usually the term of definition should be interpreted as in the linguistic context of this specification and correlation technique, can having the consistent meaning, and the idealized or undue formalization that should not explain.Known function or structure are in briefly and clearly consider or repeat no more.