CN202583262U - Elastic probe - Google Patents
Elastic probe Download PDFInfo
- Publication number
- CN202583262U CN202583262U CN 201220156320 CN201220156320U CN202583262U CN 202583262 U CN202583262 U CN 202583262U CN 201220156320 CN201220156320 CN 201220156320 CN 201220156320 U CN201220156320 U CN 201220156320U CN 202583262 U CN202583262 U CN 202583262U
- Authority
- CN
- China
- Prior art keywords
- elastic probe
- probe
- testing needle
- sleeve
- elastic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 title claims abstract description 84
- 238000012360 testing method Methods 0.000 claims abstract description 75
- 239000011810 insulating material Substances 0.000 claims abstract description 8
- 239000004809 Teflon Substances 0.000 claims abstract description 5
- 229920006362 Teflon® Polymers 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 1
- 230000002153 concerted effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
Images
Landscapes
- Measuring Leads Or Probes (AREA)
Abstract
The utility model provides an elastic probe, relating to a semiconductor chip test device. A chip testing needle holder is an indispensable test device in a whole test system, and the elastic probe plays a role of transmitting current and a signal. The elastic probe comprises a sleeve and also comprises an upper test needle body, a spring and a lower test needle body which are arranged in the sleeve from top to bottom. Insulating rings are arranged at different positions of the elastic probe. The insulating rings are made of Teflon or other insulating material. A groove is arranged at the upper test needle body, and the insulating rings are arranged in the groove. Two insulating rings can be arranged at different positions of the elastic probe. According to the insulating rings, the elastic probe is prevented from contacting a positioning hole on a probe positioning plate. The elastic probe also can be supported to do a free vertical movement stably in a large positioning hole without being tilted.
Description
Technical field
The utility model relates to semiconductor and electronics web member industry, specially refers to the semiconductor die testing device.
Background technology
Semi-conductor chip must pass through the test aspect electric in research and development and volume production stage, and whether checking chip satisfies the requirement of electric property.The chip testing punch block is exactly to be used for indispensable a kind of proving installation in the whole test system of measured chip; As shown in Figure 1; Chip testing punch block 100 mainly comprises chip location-plate 101, the elastic probe 103 between probe holding plate 102 and connection chip 104 and the measurement circuit plate.The main effect of probe test punch block 100 is assignment test chip 104 and elastic probe 103, and for fear of the short circuit between the elastic probe, most of probe test punch blocks all are to be processed by ambroin.
Elastic probe plays the effect of conduction current and signal.Traditional probe all is made up of metal material, such as doing base material with aldary, the external electric Gold plated Layer.As shown in Figures 2 and 3, traditional elastic probe has two kinds of structures: a kind of is independent needle, as shown in Figure 2, and last testing needle and sleeve move together; Another kind is two moving pins, and as shown in Figure 3, testing needle moves up and down, and sleeve is motionless.Usually, elastic probe has four parts: go up testing needle 301, spring 302, sleeve 303 and following testing needle 304.Under the effect of external force, last testing needle 301 (perhaps with sleeve 303 together) moves up and down, thereby through last testing needle 301, following testing needle 304 conductive electrical current signal.
In recent years, along with chip testing frequency and bandwidth improve constantly, require its probe test punch block also to want to satisfy the demand under the high-frequency test.Developed the coaxial high-frequency test punch block of forming by metal material and ambroin for this reason.
The controllable reactance test punch block of this typical coaxial configuration that comes out newly developed; Centre part is the ground connection copper billet; The aperture of the diameter of elastic probe and ground connection copper billet guarantees specific ratio simultaneously, and the reactance of assurance and input/output terminal is complementary, to reduce the loss in the signals transmission.Do not touch the ground connection copper billet in order to ensure elastic probe, avoid causing the mutual short circuit between the probe, adopt insulating plastics material, with mutually insulated fixing and the assurance elastic probe as chip location-plate and probe holding plate.But do like this, can make the purposes of the test punch block of this kind structure that certain restriction has been arranged:, become a kind of incomplete coaxial configuration because the material of chip location-plate and probe holding plate is insulating material.Influenced the completion property of signal in transmission course greatly.Because structural limitations, the thickness of chip location-plate is thinner relatively, intensity a little less than.When the quantity of elastic probe becomes more for a long time.The chip location-plate can be in the distortion of making a concerted effort to produce down of probe.Thereby influence the performance of chip testing punch block greatly.
The utility model content
The technical matters that the utility model will solve is to overcome deficiency of the prior art; When a kind of new high-frequency test punch block of exploitation substitutes traditional coaxial controllable reactance test punch block; A kind of new elastic probe is proposed; The ratio of aperture and the diameter of elastic probe in the middle of the chip location-plate, probe holding plate is guaranteed on specific ratio value, satisfying the requirement of controllable reactance, thereby make the high-frequency test punch block can reach the demand of test high-frequency signal.
The utility model is to realize through following technical measures.A kind of elastic probe comprises sleeve, is arranged on last testing needle, spring and following testing needle in the sleeve from top to down; Meanwhile, the diverse location at elastic probe is provided with insulating ferrule.
Described insulating ferrule is processed with insulating material.
Described insulating material is Teflon material, stupalith.
[0009]Groove is set on testing needle on the described elastic probe, and described insulating ferrule is fixed in the groove.
First insulating ferrule and second insulating ferrule are set on the diverse location of described elastic probe.
Described insulating ferrule is arranged on down on the testing needle.
After the utility model adopted abovementioned technology, insulating ferrule can avoid elastic probe to touch the pilot hole on the probe location-plate.Can also support elastic probe free vertical moving in bigger pilot hole, can run-off the straight; And can avoid elastic probe in last pilot hole, to eject, perhaps from ejecting in the pilot hole down.Insulating ferrule is fixed on and can makes more straight being positioned in the probe pilot hole of sleeve on the sleeve, and testing needle can stably move up and down in sleeve thereby can make up and down.
Description of drawings
Accompanying drawing 1 is a prior art middle probe testing needle shelf structure synoptic diagram;
Accompanying drawing 2 is the structural representation of single-lift elastic probe in the prior art;
Accompanying drawing 3 is the structural representation of double-acting elastic probe in the prior art;
Accompanying drawing 4 is the structural representation of the elastic probe of the utility model embodiment 1;
Accompanying drawing 5 is the A portion enlarged drawing of accompanying drawing 4;
Accompanying drawing 6 is the layout synoptic diagram of the elastic probe of the utility model embodiment 1;
Accompanying drawing 7 is the structural representation of the elastic probe of the utility model embodiment 2;
Accompanying drawing 8 is the B portion enlarged drawing of accompanying drawing 7;
Accompanying drawing 9 is the layout synoptic diagram of the elastic probe of the utility model embodiment 2;
Accompanying drawing 10 is the structural representation of the elastic probe of the utility model embodiment 3;
Accompanying drawing 11 is the C portion enlarged drawing of accompanying drawing 10;
Accompanying drawing 12 is the layout synoptic diagram of the elastic probe of the utility model embodiment 3;
Accompanying drawing 13 is the structural representation of the elastic probe of the utility model embodiment 4;
Accompanying drawing 14 is the D portion enlarged drawing of accompanying drawing 10;
Accompanying drawing 15 is the layout synoptic diagram of the elastic probe of the utility model embodiment 4.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is described further.
Embodiment 1: like Fig. 4～shown in Figure 6, a kind of independent needle type elastic probe comprises testing needle 1, spring 2, sleeve 3 and following testing needle 4.Under the effect of external force, last testing needle 1 moves up and down with sleeve 3 together, thereby through last testing needle 1, following testing needle 4 conductive electrical current signal.On last testing needle 1, groove 5 is set, 6 of the insulating ferrules of processing with the Teflon material are fixed in the groove 5.The independent needle type elastic probe that has insulating ferrule 6 like this is fixed in the probe holding plate 7.Under external force, when last testing needle 1 moved up and down with sleeve 3 together, insulating ferrule 6 can be located elastic probe well, avoided elastic probe to contact with pilot hole 8 in the probe holding plate 7; When current signal conducts, can avoid the short circuit that produces owing to this kind contact.
Embodiment 2: like Fig. 7～shown in Figure 9, a kind of independent needle type elastic probe comprises testing needle 1, spring 2, sleeve 3 and following testing needle 4.Under the effect of external force, last testing needle 1 moves up and down with sleeve 3 together, thereby through last testing needle 1, time testing needle 4 conductive electrical current signal.First insulating ferrule of processing with stupalith 6 is arranged on the testing needle 1; Second insulating ferrule of processing with stupalith 6 ' then the be arranged on bottom of sleeve 3.First insulating ferrule 6 and second insulating ferrule 6 ' not only move up and down but also can make more stable being fixed in the pilot hole 8 in the probe holding plate 7 of probe synchronously with sleeve 3 with last testing needle 1; When last testing needle and sleeve move up and down; Probe can vertically move in the probe pilot hole, can not tilt.Avoid contact between the pilot hole 8 in elastic probe and the probe holding plate 7 and produced short circuit.
Embodiment 3: like Figure 10～shown in Figure 12, a kind of two moving pin type elastic probes comprise testing needle 1, spring 2, sleeve 3 and following testing needle 4.Under the effect of external force, last testing needle 1 moves up and down with following testing needle 4 together, and sleeve 3 does not move, thereby through last testing needle 1, spring 2 and following testing needle 4 conductive electrical current signal.First insulating ferrule of processing with the Teflon material 6 and second insulating ferrule 6 ' all be arranged on the sleeve 3.Because sleeve 3 does not move; Can push first insulating ferrule 6 and second insulating ferrule, 6 ＇ suitable position from the tip of upper and lower testing needle 1,4 to sleeve 3; First insulating ferrule 6 and second insulating ferrule 6 ' be pressed together on the sleeve 3; Promptly first insulating ferrule 6 and second insulating ferrule, 6 ＇ are fixed on the sleeve 3, can not be subjected to displacement.When even one of upper and lower testing needle 1,4 is moved, first insulating ferrule 6 and second insulating ferrule 6 are also fixed, and probe is vertically located in the pilot hole 8 in the holding plate 7 preferably, do not tilt.Two insulating ferrules 6 can be located elastic probe well, avoid elastic probe to contact with pilot hole 8 in the probe holding plate 7, and then produce short circuit.
Embodiment 4: as scheming: 13～shown in Figure 15, a kind of two moving pin type elastic probes comprise testing needle 1, spring 2, sleeve 3 and following testing needle 4.Under the effect of external force, last testing needle 1 moves up and down with following testing needle 4 together, and sleeve 3 does not move, thereby through last testing needle 1, following testing needle 4 conductive electrical current signal.First insulating ferrule of processing with insulating material 6 is arranged on the testing needle 1 (or sleeve 3), and second insulating ferrule, 6 ＇ that process with insulating material then are arranged on down on the testing needle 4.Make down like this testing needle 4 vertical be positioned at 8 li of pilot holes in the probe holding plate 7.Even when pilot hole 8 than probe external diameter bigger a little the time, second insulating ferrule, 6 ＇ also can make probe be positioned at 8 li of pilot holes in the probe holding plate 7, and are unlikely to eject pilot hole 8.
Above-described only is the preferred implementation of the utility model.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the utility model principle, can also make some modification and improvement, these also should be regarded as belonging to the protection domain of the utility model.
Claims (6)
1. elastic probe comprises sleeve (3), is arranged on last testing needle (1), spring (2) and following testing needle (4) in the sleeve (3) from top to down; It is characterized in that: the diverse location at elastic probe is provided with insulating ferrule (6).
2. a kind of elastic probe according to claim 1 is characterized in that: described insulating ferrule (6) is processed with insulating material.
3. a kind of elastic probe according to claim 2 is characterized in that: described insulating material is Teflon material or stupalith.
4. a kind of elastic probe according to claim 1 is characterized in that: groove (5) is set on testing needle on the described elastic probe (1), and described insulating ferrule (6) is arranged in the described groove (5).
5. a kind of elastic probe according to claim 1 is characterized in that: first insulating ferrule (6) and second insulating ferrule (6 ＇) are set on the diverse location of described elastic probe.
6. a kind of elastic probe according to claim 1 is characterized in that: described insulating ferrule (6) is arranged on down on the testing needle (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220156320 CN202583262U (en) | 2012-04-14 | 2012-04-14 | Elastic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220156320 CN202583262U (en) | 2012-04-14 | 2012-04-14 | Elastic probe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202583262U true CN202583262U (en) | 2012-12-05 |
Family
ID=47252663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220156320 Expired - Lifetime CN202583262U (en) | 2012-04-14 | 2012-04-14 | Elastic probe |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202583262U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102608365A (en) * | 2012-04-14 | 2012-07-25 | 安拓锐高新测试技术（苏州）有限公司 | Elastic probe |
| CN103063883A (en) * | 2011-10-21 | 2013-04-24 | 东京毅力科创株式会社 | Contact terminal for probe card, and probe card |
| CN106603005A (en) * | 2016-11-30 | 2017-04-26 | 浙江创盛光能源有限公司 | Grounding voltage withstand insulation integrated testing method of photovoltaic component |
| CN106841691A (en) * | 2015-12-04 | 2017-06-13 | 三星电子株式会社 | Pin and semiconductor package part test system |
| CN106841999A (en) * | 2017-03-24 | 2017-06-13 | 深圳市斯纳达科技有限公司 | Arrangement for testing integrated circuit and its test probe |
| CN111458541A (en) * | 2020-05-22 | 2020-07-28 | 上海电连旭晟通信技术有限公司 | Test probe and electronic equipment |
| CN112230027A (en) * | 2020-12-18 | 2021-01-15 | 苏州和林微纳科技股份有限公司 | High-frequency coaxial signal probe test unit |
-
2012
- 2012-04-14 CN CN 201220156320 patent/CN202583262U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103063883A (en) * | 2011-10-21 | 2013-04-24 | 东京毅力科创株式会社 | Contact terminal for probe card, and probe card |
| CN102608365A (en) * | 2012-04-14 | 2012-07-25 | 安拓锐高新测试技术（苏州）有限公司 | Elastic probe |
| CN106841691A (en) * | 2015-12-04 | 2017-06-13 | 三星电子株式会社 | Pin and semiconductor package part test system |
| CN106841691B (en) * | 2015-12-04 | 2020-05-01 | 三星电子株式会社 | Pin and semiconductor package testing system |
| CN106603005A (en) * | 2016-11-30 | 2017-04-26 | 浙江创盛光能源有限公司 | Grounding voltage withstand insulation integrated testing method of photovoltaic component |
| CN106841999A (en) * | 2017-03-24 | 2017-06-13 | 深圳市斯纳达科技有限公司 | Arrangement for testing integrated circuit and its test probe |
| CN111458541A (en) * | 2020-05-22 | 2020-07-28 | 上海电连旭晟通信技术有限公司 | Test probe and electronic equipment |
| CN112230027A (en) * | 2020-12-18 | 2021-01-15 | 苏州和林微纳科技股份有限公司 | High-frequency coaxial signal probe test unit |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202583262U (en) | Elastic probe | |
| CN203965580U (en) | A kind of ICT measurement jig for detection of circuit board plug connector | |
| KR101149760B1 (en) | a probe | |
| TW201809684A (en) | Probe device of vertical probe card | |
| TW200419158A (en) | Inspection jig for radio frequency device, and contact probe incorporated in the jig | |
| CN203117381U (en) | Testing device for radio frequency integrated circuit chip | |
| TW201430350A (en) | Testing device | |
| CN204044247U (en) | A kind of flex circuit application resistance tester | |
| CN102608365A (en) | Elastic probe | |
| CN202126447U (en) | Testing socket controllable in impedance | |
| CN204925176U (en) | Semiconductor chip tests punch block with compound coaxial configuration | |
| CN202661566U (en) | Detector for pin of electronic element | |
| KR20100077724A (en) | Contact probe | |
| CN203827598U (en) | Microwave vertical interconnect circuit by use of fuzz buttons for connection | |
| CN107238505B (en) | A kind of fixture for SAW filter the high and low temperature test | |
| CN108205081B (en) | Device for measuring return loss of microscale solder balls | |
| CN106597030B (en) | Method and device for connecting mainboard and small board signals | |
| CN107850625B (en) | Radio frequency detection device | |
| CN102520216A (en) | Metal insulation chip test needle frame | |
| TWI416115B (en) | ||
| CN204359822U (en) | A kind of test fixture for pcb board | |
| CN103076555A (en) | Testing needle frame for chip | |
| CN202404126U (en) | Metal insulating chip test pin frame | |
| CN204679531U (en) | A kind of sheet capacitor high-frequency parameter test fixture | |
| CN204536382U (en) | Modular probe card device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121205 |