CN112230027A - High-frequency coaxial signal probe test unit - Google Patents
High-frequency coaxial signal probe test unit Download PDFInfo
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- CN112230027A CN112230027A CN202011507168.3A CN202011507168A CN112230027A CN 112230027 A CN112230027 A CN 112230027A CN 202011507168 A CN202011507168 A CN 202011507168A CN 112230027 A CN112230027 A CN 112230027A
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- plunger
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
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Abstract
The invention discloses a high-frequency coaxial signal probe testing unit which comprises an upper base, a lower base and a signal probe, wherein an upper cavity which is communicated up and down is formed in the upper base, a lower cavity which is communicated up and down and corresponds to the upper cavity is formed in the lower base, the upper base and the lower base form a testing base, the upper cavity and the lower cavity form a signal cavity, the signal probe penetrates through the signal cavity, an upper shaft sleeve is installed in the upper cavity, and a lower shaft sleeve is installed in the lower cavity. The invention has the beneficial effects that: the signal probe has good structure guidance, is coaxially designed with the signal cavity, has small resistance fluctuation, can meet the specific impedance matching requirement of a client chip by performing impedance calculation through the gap size of the signal probe and the signal cavity, avoids the condition of overlarge insertion loss and return loss of the existing probe, improves the application range of chip frequency test, and better meets the higher requirements of 5G and AI times on high-speed chip tests such as high-speed image processing and the like.
Description
Technical Field
The invention relates to the technical field of semiconductor components, in particular to a high-frequency coaxial signal probe test unit.
Background
At present, spring probe and base technologies of domestic test chips are concentrated in the middle and low-grade fields, the technical level and the added value are low, the high-frequency and radio-frequency chip test is still in the starting stage, and a large amount of miniature and high-performance spring test probes are needed in the test link of the high-reliability chip in production and manufacturing. Therefore, the research and development of the novel spring probe and the base testing component suitable for ultrahigh frequency chip testing can fill the blank of the ultrahigh frequency chip testing in China, the technology can promote the research and development of chips in China and the development of testing industries, and the technology has important demonstration and promotion effects on promoting the chip manufacturing industry in regions and even the whole chip production and testing technology in China to advance to the international advanced level.
The existing spring test probe is often used in cooperation with a plastic material base and is of a non-coaxial structure, and impedance matching of input and output of a chip is not considered, so that high-frequency performance is limited to the transmission bandwidth of the probe, signal and power loss is serious, and the test effect is greatly reduced. That is to say, the probe in the prior art is often only suitable for a common frequency bandwidth test or a test environment with relaxed requirements on frequency bandwidth, and cannot meet the test of a chip with ultrahigh frequency, so that the use environment thereof has certain limitations.
Disclosure of Invention
The present invention is directed to a high frequency coaxial probe test unit, which solves the above problems.
In order to achieve the purpose, the invention provides the following technical scheme: a high-frequency coaxial signal probe test unit comprises an upper base, a lower base and a signal probe, wherein an upper cavity which is communicated up and down is formed in the upper base, a lower cavity which is communicated up and down and corresponds to the upper cavity is formed in the lower base, the upper base and the lower base form a test base, the upper cavity and the lower cavity form a signal cavity, the signal probe penetrates through the signal cavity, an upper shaft sleeve is installed in the upper cavity, and a lower shaft sleeve is installed in the lower cavity;
the signal probe comprises a sleeve, a spring is arranged in the sleeve, the upper end of the sleeve is connected with an upper plunger, a lower plunger is arranged below the sleeve, the two ends of the spring are respectively abutted to the lower end of the upper plunger and the upper end of the lower plunger, a one-way thorn structure is arranged in the middle of the sleeve, an insulating ring is clamped in the middle of the one-way thorn structure and is in interference fit with an upper cavity, the outer diameter of the one-way thorn structure is smaller than the inner diameter of the upper cavity, the one-way thorn structure comprises an upper thorn and a lower thorn, and the upper thorn and the lower thorn are arc-shaped bulges.
Preferably, the insulating ring is a circular or petal-shaped structure made of a non-metal material, and the petal-shaped structure is 4-6 petals.
Further preferably, the upper shaft sleeve and the lower shaft sleeve are both formed by injection molding of insulating materials, the upper shaft sleeve is in interference fit with the upper cavity, and the lower shaft sleeve is in interference fit with the lower cavity.
Preferably, the upper cavity and the lower cavity are designed to be large-diameter and small-diameter cylinders, the small-diameter part of the upper cavity is located above the large-diameter part, and the small-diameter part of the lower cavity is located below the large-diameter part.
Preferably, the upper shaft sleeve and the lower shaft sleeve are designed to have large and small diameter structures, through holes which are vertically communicated and have guide cone angles are formed in the upper shaft sleeve and the lower shaft sleeve, the cross section of the upper shaft sleeve is in a gear shape, the cross section of the lower shaft sleeve is in a ring shape, and the through holes of the upper shaft sleeve are provided with guide cone angles.
Further preferably, the upper plunger and the sleeve are fixed by four-point crimping.
Preferably, the upper plunger comprises a claw head, a plunger disc and a guide head, the claw head is located at the upper end of the upper plunger, the plunger disc is of a disc-shaped structure and is sleeved in the middle of the upper plunger, and the guide head is located at the lower end of the upper plunger.
Preferably, the claw head is designed to be a four-claw crown structure, the guide head is designed to be a cross structure, the radial size of the guide head is larger than the diameter of the spring, and the lower end of the guide head is inserted into the ring diameter of the spring.
More preferably, a flange portion is provided at an upper end of the lower plunger, a diameter of the flange portion is larger than a diameter of the port at the lower end of the sleeve and a diameter of the spring, and an upper end of the flange portion is designed to have a tapered structure.
Advantageous effects
The high-frequency coaxial signal probe test unit has the advantages that the signal probe structure has good guidance, the signal probe and the signal cavity are coaxially designed, the resistance value fluctuation is small, the impedance calculation can be carried out through the size of the gap between the signal probe and the signal cavity, the specific impedance matching requirement of a client chip is met, the condition that the insertion loss and the return loss of the existing probe are overlarge is avoided, the application range of the chip frequency test is improved, the higher requirements of 5G and AI times on high-speed chip tests such as high-speed image processing and the like are better met, the insulating ring, the upper shaft sleeve and the lower shaft sleeve are made of nonmetal materials, the gap is ensured to be reserved between the signal probe and the signal cavity after the signal probe is arranged in the test base, the effective insulation is realized, the.
Drawings
FIG. 1 is a schematic structural diagram of a high-frequency coaxial signal probe test unit according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an internal structure of a signaling probe according to an embodiment of the present invention;
FIG. 3 is a front view of a signaling probe according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a test base and upper and lower sleeves according to an embodiment of the present invention.
Reference numerals
1-upper base, 2-lower base, 3-upper cavity, 4-lower cavity, 5-signal probe, 51-sleeve, 52-spring, 53-upper plunger, 531-claw head, 532-plunger disc, 533-guide head, 54-lower plunger, 541-flange part, 55-insulating ring, 56-one-way thorn structure, 561-upper thorn, 562-lower thorn, 6-upper shaft sleeve and 7-lower shaft sleeve.
Detailed Description
The following are specific embodiments of the present invention and are further described with reference to the drawings, but the present invention is not limited to these embodiments.
As shown in fig. 1-4, a high-frequency coaxial signal probe test unit includes an upper base 1, a lower base 2 and a signal probe 5, wherein the upper base 1 is provided with an upper cavity 3 which is through from top to bottom, the lower base 2 is provided with a lower cavity 4 which is through from top to bottom and corresponds to the upper cavity 3, the upper base 1 and the lower base 2 form a test base, the upper cavity 3 and the lower cavity 4 form a signal cavity, the signal probe 5 is inserted in the signal cavity, an upper shaft sleeve 6 is installed in the upper cavity 3, and a lower shaft sleeve 7 is installed in the lower cavity 4;
the signal probe 5 comprises a sleeve 51, a spring 52 is arranged in the sleeve 51, an upper plunger 53 is connected to the upper end of the sleeve 51, a lower plunger 54 is arranged below the sleeve 51, two ends of the spring 52 are respectively abutted to the lower end of the upper plunger 53 and the upper end of the lower plunger 54, a one-way thorn structure 56 is arranged in the middle of the sleeve 51, and an insulating ring 55 is clamped in the middle of the one-way thorn structure 56.
In this embodiment, the high-frequency coaxial signal probe test unit is a test assembly composed of an ultrahigh-frequency probe and a test base, and is used for testing a chip with a frequency of more than 55GHz, wherein the ultrahigh-frequency probe is a signal probe 5. The structural principle of the signal probe 5 is as follows: when the upper plunger 53 is subjected to downward pressure from the outside, the upper plunger 53 drives the sleeve 51 to move downward, the pressure of the sleeve is transmitted to the spring 52 through the guide head 533 of the upper plunger 53, and then the spring 52 is compressed and deformed to conduct the chip and the PCB, so that the lower plunger 54 is ensured to be in one-to-one correspondence with the contact points on the PCB, and mechanical conduction is ensured; when the external pressure is removed, the spring 52 automatically resets and bounces, and the upper plunger 53 and the sleeve 51 are forced to return to the initial position.
In this embodiment, the signal probe 5 is centered in the signal cavity through the insulating ring 55, the upper shaft sleeve 6 and the lower shaft sleeve 7, and the upper plunger 53 and the lower plunger 54 are limited by the upper shaft sleeve 6 and the lower shaft sleeve 7, a large gap is left between the signal probe 5 and the signal cavity, and air in the gap is used as an insulating medium, so that insulation between the signal probe 5 and a test base is ensured, and test accuracy of the signal probe 5 is ensured.
Preferably, the one-way spine structure 56 includes an upper spine 561 and a lower spine 562, the upper spine 561 and the lower spine 562 are arc-shaped protrusions, and the one-way spine structure 56 is used for fixing the insulating ring 55 to prevent the insulating ring from moving axially, so that the high-frequency coaxial signal probe test unit is tilted in the installation and use processes, and the test effect of the high-frequency coaxial signal probe test unit is affected.
Preferably, the insulating ring 55 is a circular or petal-shaped structure made of a non-metal material, and the petal-shaped structure is 4-6 petals. In this embodiment, the insulating ring 55 plays an insulating role between the signal probe 5 and the signal cavity, the insulating ring 55 is a 5-petal structure, the insulating ring 55 is used for fixing the signal probe 5, the insulating ring 55 is in interference fit with the upper cavity 3, the outer diameter of the one-way thorn structure 56 is smaller than the inner diameter of the upper cavity 3, a gap is ensured to be reserved between the signal probe 5 and the signal cavity, the upper plunger 53 and the lower plunger 54 are ensured to be centered in the signal cavity, and the coaxiality between the signal probe 5 and the upper shaft sleeve 6, between the lower shaft sleeve 7 and between the signal cavity is ensured.
Preferably, go up axle sleeve 6 and lower axle sleeve 7 and all adopt insulating material injection moulding, go up axle sleeve 6 and the interference fit of last cavity 3, lower axle sleeve 7 and the interference fit of lower cavity 4. In the embodiment, the upper shaft sleeve 6 is pressed into the upper end of the upper cavity 3 in a crimping mode, so that the upper shaft sleeve 6 is tightly matched with the upper cavity 3 and is not easy to axially move; the lower shaft sleeve 7 is pressed into the lower end of the lower cavity 4 in a crimping mode, so that the lower shaft sleeve 7 is tightly matched with the lower cavity 4, and axial movement is not easy to occur. The fixing and insulation of the signal probe 5 and the test base are ensured through the upper shaft sleeve 6 and the lower shaft sleeve 7.
Preferably, the upper cavity 3 and the lower cavity 4 are both designed to be cylindrical with large and small diameters, the small-diameter part of the upper cavity 3 is located above the large-diameter part, and the small-diameter part of the lower cavity 4 is located below the large-diameter part, so that the upper shaft sleeve 6 cannot fall out from the upper end of the upper cavity 3, the lower shaft sleeve 7 cannot fall out from the lower end of the lower cavity 4, and the firmness and reliability of the installation of the signal probe 5 on the test base are guaranteed.
Preferably, the upper shaft sleeve 6 and the lower shaft sleeve 7 are both designed to have a large-diameter structure and a small-diameter structure, and are provided with through holes which are vertically communicated and have guide cone angles, the cross section of the upper shaft sleeve 6 is in a gear shape, so that the friction force between the upper shaft sleeve 6 and the upper cavity 3 can be increased, the upper shaft sleeve 6 is prevented from rotating randomly, the cross section of the lower shaft sleeve 7 is in a circular ring shape, the lower shaft sleeve 7 can be guaranteed to be arranged in the lower cavity 4, and meanwhile, the through holes with the guide cone angles are convenient for the insertion of the signal probe 5.
Preferably, the upper plunger 53 and the sleeve 51 are fixed by four-point crimping, so that the connection is simple and convenient, and the reliable connection of the upper plunger 53 and the sleeve 51 is ensured.
Preferably, the upper plunger 53 includes a claw head 531, a plunger disc 532 and a guide head 533, the claw head 531 is located at the upper end of the upper plunger 53, the plunger disc 532 is in a disc-shaped structure and is sleeved in the middle of the upper plunger 53, the guide head 533 is located at the lower end of the upper plunger 53, the plunger disc 532 is used for limiting the position where the upper plunger 53 is connected with the sleeve 51, the connection accuracy of the upper plunger 53 is ensured, meanwhile, the size of the shaft diameter of the upper plunger 53 below the plunger disc 532 is the same as the size of the diameter of the upper end opening end of the sleeve 51, and no gap is formed between the mounting surface of the upper plunger 53 and the side wall of the sleeve 51.
Preferably, the claw head 531 is designed in a four-claw crown structure, the guide head 533 is designed in a cross structure, the radial size of the guide head is larger than the diameter size of the spring 52, the lower end of the guide head is inserted into the ring diameter of the spring 52, the claw head 531 is convenient to be connected with an upper computer, the connection between the guide head 533 and the spring 52 is simple, and meanwhile, the compression limit of the spring 52 and the spring 52 can be fixed.
Preferably, the upper end of the lower plunger 54 is provided with a flange 541, the diameter of the flange 541 is larger than the diameter of the port at the lower end of the sleeve 51 and the diameter of the spring 52, and the upper end of the flange 541 is designed to have a tapered structure, so that the upper tip of the flange 541 is inserted into the spring 52, the accuracy of the compression direction of the spring 52 is ensured, and the flange 541 can jack up the spring 52 to realize the compression function of the spring 52.
In this embodiment, the assembly process of the high-frequency coaxial signal probe test unit is as follows:
first, the lower plunger 54 is placed in the cavity of the sleeve 51, wherein the flange 541 is located inside the sleeve 51;
secondly, the spring 52 is arranged in the cavity of the sleeve 51, so that the lower end of the spring 52 is abutted with the upper end of the flange 541;
thirdly, a guide head 533 of the upper plunger 53 is downwardly installed in the sleeve, the lower end of the guide head 533 is inserted into the upper end part of the spring 52, the plunger disc 532 is abutted against the upper end of the sleeve 51, no gap is left at the joint of the upper plunger 53 and the sleeve 51, and the upper plunger 53 is fixed by four-point punching;
fourthly, sleeving the insulating ring 55 on the sleeve 51, and pressing the insulating ring 55 into the space between the upper thorn 561 and the lower thorn 562 of the one-way thorn structure 56 to prevent the insulating ring 55 from axially moving on the sleeve 51;
fifthly, press-fitting the upper shaft sleeve 6 into the upper cavity 3 from the lower end of the upper base 1 and pressing to the upper end of the upper cavity 3, and press-fitting the lower shaft sleeve 7 into the lower cavity 4 from the upper end of the lower base 2 and pressing to the lower end of the lower cavity 4;
sixthly, inserting the lower plunger 54 of the assembled signal probe 5 into the lower shaft sleeve 7, and then sleeving the upper base 1 from the upper end of the signal probe 5 and combining and fixing the upper base with the lower base 2, wherein the upper plunger 53 is inserted into the upper shaft sleeve 6, thereby completing the assembly of the signal probe 5 and the test base of the test unit.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the content of the present invention within the scope of the protection of the present invention.
Claims (9)
1. A high-frequency coaxial signal probe test unit is characterized in that: the testing device comprises an upper base (1), a lower base (2) and a signal probe (5), wherein the upper base (1) is provided with an upper cavity (3) which is communicated up and down, the lower base (2) is provided with a lower cavity (4) which is communicated up and down and corresponds to the upper cavity (3), the upper base (1) and the lower base (2) form a testing base, the upper cavity (3) and the lower cavity (4) form a signal cavity, the signal probe (5) is arranged in the signal cavity in a penetrating manner, an upper shaft sleeve (6) is installed in the upper cavity (3), and a lower shaft sleeve (7) is installed in the lower cavity (4);
the signal probe (5) comprises a sleeve (51), a spring (52) is arranged in the sleeve (51), an upper plunger (53) is connected to the upper end of the sleeve (51), a lower plunger (54) is arranged below the sleeve (51), two ends of the spring (52) are respectively abutted to the lower end of the upper plunger (53) and the upper end of the lower plunger (54), a one-way thorn structure (56) is arranged in the middle of the sleeve (51), an insulating ring (55) is clamped in the middle of the one-way thorn structure (56), the insulating ring (55) is in interference fit with the upper cavity (3), the outer diameter of the one-way thorn structure (56) is smaller than the inner diameter of the upper cavity (3), the one-way thorn structure (56) comprises an upper thorn (561) and a lower thorn (562), and the upper thorn (561) and the lower thorn (562) are arc-shaped protrusions.
2. A high frequency coaxial signal probe test unit as defined in claim 1, wherein: the insulating ring (55) is of a circular or petal type structure made of a non-metal material, and the petal type structure is 4-6 petals.
3. A high frequency coaxial signal probe test unit as defined in claim 1, wherein: go up axle sleeve (6) and lower axle sleeve (7) and all adopt insulating material injection moulding, go up axle sleeve (6) and last cavity (3) interference fit, lower axle sleeve (7) and lower cavity (4) interference fit.
4. A high frequency coaxial signal probe test unit as defined in claim 1, wherein: the upper cavity (3) and the lower cavity (4) are designed to be large-diameter and small-diameter cylinders, the small-diameter part of the upper cavity (3) is located above the large-diameter part, and the small-diameter part of the lower cavity (4) is located below the large-diameter part.
5. A high frequency coaxial signal probe test unit as defined in claim 1, wherein: the upper shaft sleeve (6) and the lower shaft sleeve (7) are designed to be of large and small diameter structures, through holes which are vertically communicated and have guide cone angles are formed in the upper shaft sleeve and the lower shaft sleeve, the cross section of the upper shaft sleeve (6) is in a gear shape, and the cross section of the lower shaft sleeve (7) is in a circular ring shape.
6. A high frequency coaxial signal probe test unit as defined in claim 1, wherein: the upper plunger (53) and the sleeve (51) are fixed by four-point compression joint.
7. A high frequency coaxial signal probe test unit as defined in claim 1, wherein: the upper plunger (53) comprises a claw head (531), a plunger disc (532) and a guide head (533), the claw head (531) is positioned at the upper end of the upper plunger (53), the plunger disc (532) is of a disc-shaped structure and is sleeved in the middle of the upper plunger (53), and the guide head (533) is positioned at the lower end of the upper plunger (53).
8. The high frequency coaxial signal probe test unit of claim 7, wherein: the claw head (531) is designed in a four-claw crown structure, the guide head (533) is designed in a cross structure, the radial size of the guide head is larger than the diameter size of the spring (52), and the lower end of the guide head is inserted into the ring diameter of the spring (52).
9. A high frequency coaxial signal probe test unit as defined in claim 1, wherein: the upper end of the lower plunger (54) is provided with a flange part (541), the diameter size of the flange part (541) is larger than the diameter size of a port at the lower end of the sleeve (51) and the diameter size of the spring (52), and the upper end of the flange part (541) is designed to be in a conical structure.
Priority Applications (1)
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CN202011507168.3A CN112230027A (en) | 2020-12-18 | 2020-12-18 | High-frequency coaxial signal probe test unit |
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CN202011507168.3A CN112230027A (en) | 2020-12-18 | 2020-12-18 | High-frequency coaxial signal probe test unit |
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CN202011507168.3A Withdrawn CN112230027A (en) | 2020-12-18 | 2020-12-18 | High-frequency coaxial signal probe test unit |
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Cited By (3)
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CN113447681A (en) * | 2021-06-23 | 2021-09-28 | 苏州迪克微电子有限公司 | Single-end spring test probe |
CN113777360A (en) * | 2021-07-29 | 2021-12-10 | 中国电子科技集团公司第二十九研究所 | Device for detecting radio frequency performance of radio frequency connector after assembly |
CN114034894A (en) * | 2021-11-19 | 2022-02-11 | 法特迪精密科技(苏州)有限公司 | Vertical probe card device and detection method thereof |
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CN114034894A (en) * | 2021-11-19 | 2022-02-11 | 法特迪精密科技(苏州)有限公司 | Vertical probe card device and detection method thereof |
CN114034894B (en) * | 2021-11-19 | 2022-04-26 | 法特迪精密科技(苏州)有限公司 | Vertical probe card device and detection method thereof |
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