CN202486072U - Sapphire crystal X-ray automatic orientation material bonding machine - Google Patents
Sapphire crystal X-ray automatic orientation material bonding machine Download PDFInfo
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- CN202486072U CN202486072U CN2012200598100U CN201220059810U CN202486072U CN 202486072 U CN202486072 U CN 202486072U CN 2012200598100 U CN2012200598100 U CN 2012200598100U CN 201220059810 U CN201220059810 U CN 201220059810U CN 202486072 U CN202486072 U CN 202486072U
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Abstract
The utility model belongs to the technical field of X-ray detection, and in particular relates to a sapphire crystal X-ray automatic orientation material bonding machine. A rack is provided with a rotary mechanism; a rotary table of the rotary mechanism is provided with a swing table, a swing mechanism and a standard table; the swing table is provided with a clamping and slewing mechanism for clamping a sapphire crystal; an automatic tracking X-ray orientation detection device is arranged above the clamping and slewing mechanism; and a controller controls the movements of the rotary mechanism, the swing mechanism, the clamping and slewing mechanism and the X-ray orientation detection device. The sapphire crystal X-ray automatic orientation material bonding machine has the advantages that according to the utility model, a rotary to-be-measured crystal is scanned through X-rays; then the relative included angle between a orientation atomic plane of the to-be-measured crystal and the X-rays is calculated in certain mode according to signals detected by an X-ray detector; and the X-ray orientation detection device with an automatic tracking function enables a diffraction point of the X-rays on the surface of the to-be-measured crystal to be always at a horizontal position, and the sapphire crystal X-ray automatic orientation material bonding machine has high accuracy and good practicability, implements the full-automatic orientation of the sapphire crystal, and is suitable for being used in the machining process for drawing and picking of sapphire crystal bars.
Description
Technical field
The utility model belongs to the x-ray detection device technical field, refers in particular to a kind of sapphire crystal X ray self-orientation sizing machine.
Background technology
At present; Artificial sapphire crystal is processed in the crystal bar process; Through manual X ray sizing machine sapphire crystal is carried out directed sizing; There is following shortcoming in it: 1. benchmark is difficult to confirm; Before the sapphire crystal orientation, operating personnel need confirm and adjust the X-ray that x-ray generator launches and the relative angle of reference plane and since the X-ray detectable signal survey and processing procedure in receive the interference of extraneous factor easily and some inherent characteristics of tested atomic plane have determined the mensuration of relative angle and adjustment that bigger error is arranged; 2. adjustment is inconvenient, when the information that operating personnel detect according to x-ray detector is carried out orientation to sapphire crystal, and fixed mechanism that can only the manual adjustment sapphire crystal, operating difficulties; 3. exist and detect error; Operating personnel detect sapphire crystal according to the benchmark of confirming; Can accurately not measure the tested atomic plane of sapphire crystal and the angle of the X-ray that x-ray generator sends equally; Therefore also just can't guarantee the accurate orientation of sapphire crystal, increase the difficulty and the rejection rate of follow-up work, and inefficiency.
Summary of the invention
The purpose of the utility model provides a kind of ability accurate pointing, easy and simple to handle, safe and reliable, and the sapphire crystal X ray self-orientation sizing machine of high efficiency.
The purpose of the utility model is achieved in that sapphire crystal X ray self-orientation sizing machine; Comprise the rotating mechanism that is arranged on the frame; The universal stage of rotating mechanism is provided with swing platform and the tilting mechanism that drives the swing of swing platform; Swing platform middle part is shaped on through hole; Be provided with the standard station of the arrangement sizing plate that is fixed on the universal stage in the through hole; The left and right sides of swing platform is fixed with the clamping slew gear of the clamping sapphire crystal of working in coordination respectively, is fixed with the driving mechanism that the gripper that drives the clamping slew gear rotates on the said clamping slew gear, the X-ray machine structure installing plate that the frame of clamping slew gear top is provided with elevating mechanism and moves up and down with the lifting table of elevating mechanism; The both sides of X-ray machine structure installing plate are separately installed with x-ray generator and x-ray detector; The middle part of X-ray machine structure installing plate is fixed with the displacement transducer of induction crystal to be measured, and x-ray detector, displacement transducer all are electrically connected with the controller that is fixed on frame one side, the action of controller control rotating mechanism, tilting mechanism, clamping slew gear and elevating mechanism.
Middle part, above-mentioned X-ray machine structure installing plate middle part is provided with more than one arcuate socket; Bolt is fixed on X-ray machine structure installing plate on the lifter plate of elevating mechanism through said arcuate socket; And can unscrew bolt, adjustment X-ray machine structure installing plate regulating device is with limited rotation X-ray machine structure installing plate.
The left and right side of above-mentioned clamping slew gear is provided with through screw mechanism and drives its translation piece of translation in opposite directions, and the driving mechanism of described gripper, gripper is separately positioned on the translation piece of both sides.
Said fixing is a direct driving motor at the driving mechanism of a side of clamping slew gear, and the motor shaft of direct driving motor is directly exported the gripper of torque to side clamping slew gear.
The standard crystal placing plate has removably been set up in the upper end of above-mentioned clamping slew gear.
Described board is provided with translation mechanism; Described translation mechanism comprises the guide rail that is arranged on the board; Translation stage is installed on the guide rail; Be fixed with on the board of translation stage one side and drive the drive unit of translation stage along the guide rail translation, said rotating mechanism is fixed on the translation stage, the action of controller control translation mechanism.
Above-mentioned translation mechanism is provided with rotating mechanism, and described rotating mechanism comprises rotating shaft and universal stage drive motor, the rotation of universal stage drive motor drives universal stage.
The utility model is compared the outstanding and beneficial technical effects of prior art:
1, the utility model is through the crystal to be measured of x-ray scanning rotation; X-ray detector is passed to controller with the signal that receives; And set up database, the data measured according to the single pass of crystal perfection to be measured calculate the relative angle of crystal orientation atomic plane to be measured and X-ray; Its degree of accuracy is high, and practicality is good.
2, the middle part of the X-ray machine structure installing plate of the utility model is fixed with the displacement transducer that induction is preset in the crystal to be measured on the clamping slew gear; Displacement transducer is responded to the variation of plane of crystal vertical direction to be measured; And then, the point diffraction on X-ray to the sapphire crystal cut surface that x-ray generator sends is on the horizontal level all the time through elevating mechanism adjustment X-ray machine structure installing plate.
3, the utility model is realized the full-automatic orientation of sapphire crystal, has saved manual work, and has improved orientation accuracy and work efficiency greatly, and suitable sapphire is drawn in the excellent process and used.
Description of drawings
Front view when Fig. 1 is the utility model loading sapphire crystal.
Fig. 2 is A-A cut-open view of Fig. 1.
Fig. 3 is the axis side view that waits of Fig. 1.
Fig. 4 is the right view of Fig. 1.
Among the figure: 1, board; 2, translation stage; 3, universal stage; 4, swing platform; 5, standard station; 6, sizing plate; 7, gripper; 8, sapphire crystal; 9, x-ray generator; 10, X-ray machine structure installing plate; 11, lifter plate; 12, elevating mechanism; 13, X-ray machine structure installing plate regulating device; 14, bolt (3); 15, displacement transducer; 16, x-ray detector; 17, direct driving motor; 18, swing platform drive motor; 19, universal stage drive motor; 20, translation stage drive motor; 21, slope seat; 22, controller; 23, clamping slew gear; 24, support; 25, through hole; 26, tilting mechanism rotating shaft; 27, frame;
Embodiment
The utility model is further described with specific embodiment below in conjunction with accompanying drawing, referring to Fig. 1-4;
Sapphire crystal self-orientation sizing machine; Comprise the rotating mechanism that is arranged on the frame 27; The universal stage 3 of rotating mechanism is provided with swing platform 4 and the swing platform drive motor 18 that drives 4 swings of swing platform; Swing platform 4 middle parts are shaped on through hole 25; Be provided with the standard station 5 of the arrangement sizing plate 6 that is fixed on the universal stage 3 in the through hole 25; Standard station 5 is fixed on the rotating mechanism and is not swung platform 4 to be influenced, and the left and right sides of swing platform 4 is fixed with the clamping slew gear 23 of the clamping sapphire crystal of working in coordination respectively, is fixed with the direct driving motor 17 of gripper 7 rotations that drive the clamping slew gear on the described clamping slew gear 23; (support 24 is arranged on the rear side of frame 27 to the support 24 of clamping slew gear 23 tops; And be subordinated to frame 27) the X-ray machine structure installing plate 10 that is provided with elevating mechanism 12 and moves up and down with the lifting table 11 of elevating mechanism 12, the both sides of X-ray machine structure installing plate 10 are separately installed with x-ray generator 9 and x-ray detector 16, and the middle part of X-ray machine structure installing plate 10 is fixed with the displacement transducer 15 of induction crystal to be measured; X-ray detector 16, displacement transducer 15 all are electrically connected with the controller 22 that is fixed on frame 27 1 sides, and controller 22 is controlled the action of translation stage drive motor 20, universal stage drive motor 19, wobble drive motor 18, direct driving motor 17 and elevating mechanism 12.
Middle part, above-mentioned X-ray machine structure installing plate 10 middle parts is provided with more than one arcuate socket; Arcuate socket is symmetrical set on X-ray machine structure installing plate 10; Bolt 14 passes said arcuate socket according to the three-point fix principle and X-ray machine structure installing plate 10 is fixed on the lifter plate of elevating mechanism 12; And can unscrew bolt 14, adjustment X-ray machine structure installing plate regulating device 13 is with limited rotation X-ray machine structure installing plate 10.
The left and right side of above-mentioned clamping slew gear 23 is provided with through screw mechanism and drives its translation piece of translation in opposite directions, and the clamping slew gear of described gripper 7, gripper 7 is separately positioned on the translation piece of both sides.
The driving mechanism of an above-mentioned side that is fixed on clamping slew gear 23 is a direct driving motor 17, and the motor shaft of direct driving motor 17 is directly exported the gripper 7 of torque to clamping slew gear 23.
The standard crystal placing plate has removably been set up in the upper end of above-mentioned clamping slew gear 23.
The board 1 of described frame is provided with translation mechanism; Described translation mechanism comprises two guide rails parallel to each other that are arranged on the board 1; Translation stage 2 is installed on the guide rail; Be fixed with on the board 1 of translation stage 2 one sides and drive the drive motor 20 of translation stage 2 along the guide rail translation, said rotating mechanism is fixed on the translation stage 2, the action of controller 22 control translation mechanisms.
Described translation mechanism is provided with rotating mechanism, and described rotating mechanism comprises rotating shaft and universal stage drive motor 19, and 3 rotations of universal stage drive motor 19 driven in rotation platforms need in orientation axial and radially to guarantee sapphire crystal.
Above-mentioned tilting mechanism is: a side of universal stage 3 is fixed with swing platform drive motor 18, and slope seat 21 is move left and right under swing platform drive motor 18 drives, and the roller of swing platform 4 bottoms cooperates with the domatic rolling of slope seat 21.
The course of work of the utility model:
1., confirming of X-ray and standard station 5 relative angles: the resettlement standard crystal is laid plate on the clamping slew gear; Regulate tilting mechanism to standard crystal and lay plate and standard station 5 equal (whether equally measuring) through leveller; Lay plate middle part resettlement standard crystal at standard crystal; The X-ray that x-ray generator 9 sends is diffracted into x-ray detector 16 through the directed atomic plane of standard crystal; The directed atomic plane of standard crystal deflects with 4 swings of swing platform, and controller is set up database according to the scanning information that x-ray detector 16 in the directed atomic plane deflection of standard crystal receives, and the relative angle that calculates directed atomic plane of standard crystal and X-ray is (if the relative angle deviation is excessive; Then adjust X-ray machine structure installing plate through adjustment X-ray machine structure installing plate regulating device 13; Make it near predetermined value, duplicate detection is with the relative angle of accurate bioassay standard crystal orientation atomic plane and X-ray again), the relative angle of finally definite standard station and X-ray.
2., sapphire crystal is installed and is detected and prepare: take away standard crystal installing plate and standard crystal; Elevating mechanism drives on the X-ray lifting table and moves to the top, and translation mechanism drives the reach of clamping slew gear, on standard station, settles the sizing plate; Clamping sapphire crystal on the clamping slew gear; Translation mechanism resets, and the X-ray lifting table is displaced downwardly to correct position, and (when the X-ray lifting table dropped to certain position, displacement sensor was sensed sapphire crystal; And then send signal to controller, controller control elevating mechanism stops).
3., the sapphire crystal axial direction is directed: x-ray generator 9 sends the tested atomic plane of X-ray to sapphire crystal; And be diffracted into x-ray detector 16; Sapphire crystal 8 directed atomic planes deflect with 4 swings of swing platform; Controller is set up database according to the scanning information that x-ray detector 16 in the sapphire crystal 8 directed atomic plane deflection receives, and calculates the directed atomic plane of sapphire crystal at the angle of axial direction and standard station 5 (the directed atomic plane of sapphire crystal at angle=sapphire crystal orientation atomic plane of axial direction and standard station and X-ray at the angle-standard station of axial direction and the angle of X-ray).According to the angle of the directed atomic plane of detected sapphire crystal, sapphire crystal is carried out leveling at last through the control tilting mechanism at axial direction and standard station.Rotating mechanism driven rotary platform is rotated in the forward 90 °.
4., the sapphire crystal radial direction is directed: x-ray generator 9 sends the tested atomic plane of X-ray to sapphire crystal; And be diffracted into x-ray detector 16; Sapphire crystal 8 directed atomic planes rotate with deflecting with the direct driving motor 17 of clamping slew gear; Controller is set up database according to the scanning information that x-ray detector 16 in the crystal orientation atomic plane deflection receives, and calculates the directed atomic plane of sapphire crystal at the angle of radial direction and standard station 5 (sapphire crystal at the angle=sapphire crystal atomic plane of radial direction and standard station and X-ray at the angle-standard station of radial direction and the angle of X-ray).According to the angle of the directed atomic plane of detected sapphire crystal, sapphire crystal is carried out leveling at last through the control direct driving motor at radial direction and standard station.90 ° of rotating mechanism driven rotary platform retrograde rotations.
5., according to 3., 4. the adjustment amount in two steps determines whether that needs are directed once more, like needs, then repeat 3., 4. two steps, to guarantee directed precision.
6., sizing: elevating mechanism drives on the X-ray machine structure installing plate and moves, and the sapphire crystal of translation mechanism after with leveling released, and artificial sapphire crystal is bonded on the sizing plate on the standard station.
After the sizing plate that is fixed with sapphire crystal is removed, on standard station, settle new sizing plate again, and the new sapphire crystal of clamping, carry out new one again and take turns directed sizing.
During the clamping sapphire crystal, if the cut surface of sapphire crystal towards improper, can drive sapphire crystal to correct position through direct driving motor.
When using x-ray scanning standard crystal or sapphire crystal; There are certain distance in the oscillation centre of standard crystal or sapphire crystal and X-ray point diffraction; And then cause X-ray on the oblique line of point diffraction in a perpendicular on standard crystal or sapphire crystal surface, to move; The variation of the induction point on the displacement transducer 15 induction sapphire crystal cut surfaces at X-ray machine structure installing plate middle part; Controller is adjusted X-ray machine structure lifting table automatically according to the signal of sensor, and X-ray is positioned on the horizontal level of a perpendicular at the point diffraction on the sapphire crystal cut surface all the time, has guaranteed the accuracy of detection of the angle of X-ray and sapphire crystal tangent plane.
The utility model can detect the angle of sapphire crystal atomic plane and standard station accurately, and leveling automatically, and is easy to use, and precision is high, excellent in efficiency.
The foregoing description is merely the preferred embodiment of the utility model, is not the protection domain that limits the utility model according to this, so: the equivalence that all structures according to the utility model, shape, principle are done changes, and all should be covered by within the protection domain of the utility model.
Claims (7)
1. sapphire crystal X ray self-orientation sizing machine; It is characterized in that: comprise the rotating mechanism that is arranged on the frame; The universal stage of rotating mechanism is provided with swing platform and the tilting mechanism that drives the swing of swing platform; Swing platform middle part is shaped on through hole; Be provided with the standard station of the arrangement sizing plate that is fixed on the universal stage in the through hole; The left and right sides of swing platform is fixed with the clamping slew gear of the clamping sapphire crystal of working in coordination respectively, is fixed with the driving mechanism that the gripper that drives the clamping slew gear rotates on the described clamping slew gear, the X-ray machine structure installing plate that the frame of clamping slew gear top is provided with elevating mechanism and moves up and down with the lifting table of elevating mechanism; The both sides of X-ray machine structure installing plate are separately installed with x-ray generator and x-ray detector; The middle part of X-ray machine structure installing plate is fixed with the displacement transducer of induction crystal to be measured, and x-ray detector, displacement transducer all are electrically connected with the controller that is fixed on frame one side, the action of controller control rotating mechanism, tilting mechanism, clamping slew gear and elevating mechanism.
2. sapphire crystal X ray self-orientation sizing machine according to claim 1; It is characterized in that: said X-ray machine structure installing plate middle part is provided with more than one arcuate socket; Bolt is fixed on X-ray machine structure installing plate on the lifter plate of elevating mechanism through described arcuate socket; And can unscrew bolt, adjustment X-ray machine structure installing plate regulating device is with limited rotation X-ray machine structure installing plate.
3. sapphire crystal X ray self-orientation sizing machine according to claim 1; It is characterized in that: the left and right side of described clamping slew gear is provided with through screw mechanism and drives its translation piece of translation in opposite directions, and the driving mechanism of described gripper, gripper is separately positioned on the translation piece of both sides.
4. want 3 described sapphire crystal X ray self-orientation sizing machines according to right, it is characterized in that: described driving mechanism is a direct driving motor, and the motor shaft of direct driving motor is directly exported the gripper of torque to clamping slew gear.
5. sapphire crystal X ray self-orientation sizing machine according to claim 1, it is characterized in that: the standard crystal placing plate has removably been set up in the upper end of described left and right sides clamping slew gear.
6. according to each described sapphire crystal X ray self-orientation sizing machine of claim 1-5; It is characterized in that: the board of described frame is provided with translation mechanism; Described translation mechanism comprises the guide rail that is arranged on the board, and translation stage is installed on the guide rail, is fixed with on the board of translation stage one side to drive the drive unit of translation stage along the guide rail translation; Said rotating mechanism is fixed on the translation stage, the action of controller control translation mechanism.
7. sapphire crystal X ray self-orientation sizing machine according to claim 6; It is characterized in that: described translation mechanism is provided with rotating mechanism; Described rotating mechanism comprises rotating shaft and universal stage drive motor, the rotation of universal stage drive motor drives universal stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200598100U CN202486072U (en) | 2012-02-23 | 2012-02-23 | Sapphire crystal X-ray automatic orientation material bonding machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200598100U CN202486072U (en) | 2012-02-23 | 2012-02-23 | Sapphire crystal X-ray automatic orientation material bonding machine |
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| Publication Number | Publication Date |
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| CN202486072U true CN202486072U (en) | 2012-10-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200598100U Expired - Fee Related CN202486072U (en) | 2012-02-23 | 2012-02-23 | Sapphire crystal X-ray automatic orientation material bonding machine |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103267767A (en) * | 2013-04-01 | 2013-08-28 | 合肥晶桥光电材料有限公司 | Multifunctional x-ray direction finder |
| CN103434036A (en) * | 2013-08-12 | 2013-12-11 | 元鸿（山东）光电材料有限公司 | Crystal rod orientation device |
| CN104359928A (en) * | 2014-11-28 | 2015-02-18 | 温岭市朗杰机械设备有限公司 | Oscillation angle mechanism of automatic X-ray directional material sticking machine for round bar crystal |
| CN104458779A (en) * | 2014-11-28 | 2015-03-25 | 温岭市朗杰机械设备有限公司 | Crystal angle adjusting mechanism of automatic X-ray directional bonding machine of round-bar crystals |
| CN105738385A (en) * | 2014-12-12 | 2016-07-06 | 宜兴市九洲封头锻造有限公司 | Sealing head flaw detection mechanism |
| CN106442547A (en) * | 2016-11-22 | 2017-02-22 | 苏州爱彼光电材料有限公司 | Automatic sapphire piece clamping device |
| CN106737176A (en) * | 2016-12-30 | 2017-05-31 | 苏州纳维科技有限公司 | The processing of crystal reference face orients fixture and orientation method with X-ray |
| CN107870175A (en) * | 2017-12-31 | 2018-04-03 | 唐山国芯晶源电子有限公司 | SC quartz crystal bars X-ray orients haftplatte machine and its once bonds localization method |
| CN108195859A (en) * | 2017-12-20 | 2018-06-22 | 北京航空航天大学 | A kind of X ray crystal orientation and residual stress analysis device |
| CN108801184A (en) * | 2018-07-23 | 2018-11-13 | 安徽创谱仪器科技有限公司 | Two-dimentional orientation error precision measurement system for thin plate crystals |
| CN108943451A (en) * | 2018-02-23 | 2018-12-07 | 丹东新东方晶体仪器有限公司 | A kind of semiconductor grade monocrystalline silicon crystal bar orientation test macro |
| CN110341060A (en) * | 2019-06-28 | 2019-10-18 | 河北远东通信系统工程有限公司 | A kind of cutting technique of high-accuracy double corner quartz wafers |
| CN110487224A (en) * | 2019-08-16 | 2019-11-22 | 俐玛精密技术(苏州)有限公司 | A kind of x-ray imaging detection system |
| CN113977785A (en) * | 2021-11-03 | 2022-01-28 | 丹东新东方晶体仪器有限公司 | Automatic crystal orientation measurement and polycrystalline rod bonding rechecking equipment |
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2012
- 2012-02-23 CN CN2012200598100U patent/CN202486072U/en not_active Expired - Fee Related
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103267767B (en) * | 2013-04-01 | 2016-01-27 | 合肥晶桥光电材料有限公司 | Multifunctional x-ray direction finder |
| CN103267767A (en) * | 2013-04-01 | 2013-08-28 | 合肥晶桥光电材料有限公司 | Multifunctional x-ray direction finder |
| CN103434036A (en) * | 2013-08-12 | 2013-12-11 | 元鸿（山东）光电材料有限公司 | Crystal rod orientation device |
| CN104359928A (en) * | 2014-11-28 | 2015-02-18 | 温岭市朗杰机械设备有限公司 | Oscillation angle mechanism of automatic X-ray directional material sticking machine for round bar crystal |
| CN104458779A (en) * | 2014-11-28 | 2015-03-25 | 温岭市朗杰机械设备有限公司 | Crystal angle adjusting mechanism of automatic X-ray directional bonding machine of round-bar crystals |
| CN104458779B (en) * | 2014-11-28 | 2017-01-25 | 温岭市朗杰机械设备有限公司 | Crystal angle adjusting mechanism of automatic X-ray directional bonding machine of round-bar crystals |
| CN105738385B (en) * | 2014-12-12 | 2018-08-07 | 宜兴市九洲封头锻造有限公司 | A kind of end socket flaw detection mechanism |
| CN105738385A (en) * | 2014-12-12 | 2016-07-06 | 宜兴市九洲封头锻造有限公司 | Sealing head flaw detection mechanism |
| CN106442547A (en) * | 2016-11-22 | 2017-02-22 | 苏州爱彼光电材料有限公司 | Automatic sapphire piece clamping device |
| CN106737176A (en) * | 2016-12-30 | 2017-05-31 | 苏州纳维科技有限公司 | The processing of crystal reference face orients fixture and orientation method with X-ray |
| CN108195859A (en) * | 2017-12-20 | 2018-06-22 | 北京航空航天大学 | A kind of X ray crystal orientation and residual stress analysis device |
| CN107870175A (en) * | 2017-12-31 | 2018-04-03 | 唐山国芯晶源电子有限公司 | SC quartz crystal bars X-ray orients haftplatte machine and its once bonds localization method |
| CN107870175B (en) * | 2017-12-31 | 2023-10-20 | 唐山国芯晶源电子有限公司 | SC quartz crystal bar X-ray directional plate bonding machine and one-time bonding positioning method thereof |
| CN108943451A (en) * | 2018-02-23 | 2018-12-07 | 丹东新东方晶体仪器有限公司 | A kind of semiconductor grade monocrystalline silicon crystal bar orientation test macro |
| CN108801184A (en) * | 2018-07-23 | 2018-11-13 | 安徽创谱仪器科技有限公司 | Two-dimentional orientation error precision measurement system for thin plate crystals |
| CN110341060A (en) * | 2019-06-28 | 2019-10-18 | 河北远东通信系统工程有限公司 | A kind of cutting technique of high-accuracy double corner quartz wafers |
| CN110487224A (en) * | 2019-08-16 | 2019-11-22 | 俐玛精密技术(苏州)有限公司 | A kind of x-ray imaging detection system |
| CN113977785A (en) * | 2021-11-03 | 2022-01-28 | 丹东新东方晶体仪器有限公司 | Automatic crystal orientation measurement and polycrystalline rod bonding rechecking equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121010 Termination date: 20130223 |