CN108195859A - A kind of X ray crystal orientation and residual stress analysis device - Google Patents
A kind of X ray crystal orientation and residual stress analysis device Download PDFInfo
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Abstract
本发明公开一种X射线晶体取向测定装置。所述测定装置包括机械手、X射线发射器、X射线接收器、三轴联动平台、半环轨道、测距仪和计算机；机械手用于抓取和释放晶体；半环轨道位于机械手的下方，X射线发射器和X射线发射器设置在半环轨道上；X射线发射器和X射线接收器关于半环轨道的主轴线对称；三轴联动平台用于分别调整X射线发射器与X射线接收器和晶体待测面的距离；测距仪标定晶体与测距仪之间的距离；计算机控制机械手完成抓取和释放晶体的动作以及扫描晶体偏离不同取向的角度。本发明的测定装置中全自动化实现晶体不同取向的偏离角度的测定以及晶残余应力的测定，提高晶体的测量速度以及工业化流水程度。
The invention discloses an X-ray crystal orientation measuring device. The measuring device includes a manipulator, an X-ray emitter, an X-ray receiver, a three-axis linkage platform, a half-circle track, a range finder and a computer; the manipulator is used to grab and release crystals; the half-ring track is located under the manipulator, and the X The ray emitter and the X-ray emitter are arranged on the semi-circular orbit; the X-ray emitter and the X-ray receiver are symmetrical about the main axis of the semi-circular orbit; the three-axis linkage platform is used to adjust the X-ray emitter and the X-ray receiver respectively The distance between the crystal and the surface to be measured; the range finder calibrates the distance between the crystal and the range finder; the computer controls the manipulator to complete the action of grasping and releasing the crystal and scanning the angle of the crystal deviating from different orientations. The measurement device of the present invention realizes the measurement of the deviation angles of different orientations of the crystal and the measurement of the residual stress of the crystal fully automatically, and improves the measurement speed of the crystal and the degree of industrial flow.
Description
技术领域technical field
本发明涉及晶体测试领域，特别是涉及一种X射线晶体取向、残余应力测定装置。The invention relates to the field of crystal testing, in particular to an X-ray crystal orientation and residual stress measuring device.
背景技术Background technique
衍射技术广泛地应用与材料结构分析领域。通过该技术可获得的信息对于一些领域很重要，如晶体取向、应力分析、成分分析等等。提高航空燃气涡轮发动机的性能关键在于提高服役的材料性能。而晶体取向是目前某些单晶产品的一个重要的指标，不同晶体取向对单晶产品的力学性能、电学性能、热力学性能、磁学性能都有着很大的影响。而目前应用在单晶取向测定的设备大多偏于实验研究，精度高而可操作性差、效率低。而随着高精端科技产品对材料的基础研发、高端性能的追求不断深入，市场对具有确定取向产品的刚性需求不断扩大。单晶产品的生产不仅在质量上要求更高，对产量的要求也是与日俱增，最终导致目前的绝大多数单晶取向测试仪已经不能满足要求。Diffraction technology is widely used in the field of material structure analysis. The information obtainable by this technique is important for several fields such as crystal orientation, stress analysis, compositional analysis, etc. The key to improving the performance of aviation gas turbine engines is to improve the performance of materials in service. Crystal orientation is an important indicator of some single crystal products at present, and different crystal orientations have a great influence on the mechanical properties, electrical properties, thermodynamic properties, and magnetic properties of single crystal products. However, most of the equipment currently used in the determination of single crystal orientation is biased towards experimental research, with high precision but poor operability and low efficiency. With the deepening of the basic research and development of materials and the pursuit of high-end performance of high-end high-tech products, the market's rigid demand for products with a certain orientation continues to expand. The production of single crystal products not only requires higher quality, but also has increasing requirements for output, which eventually leads to the fact that most of the current single crystal orientation testers can no longer meet the requirements.
发明内容Contents of the invention
本发明的目的是提供一种提高晶体产量的X射线晶体取向测定装置。The object of the present invention is to provide an X-ray crystal orientation measuring device which can improve the yield of crystals.
为实现上述目的，本发明提供了如下方案：To achieve the above object, the present invention provides the following scheme:
一种X射线晶体取向测定装置，所述测定装置包括机械手、X射线发射器、X射线接收器、三轴联动平台、半环轨道、测距仪和计算机；An X-ray crystal orientation measuring device, the measuring device includes a manipulator, an X-ray emitter, an X-ray receiver, a three-axis linkage platform, a half-circle track, a range finder and a computer;
所述机械手用于抓取和释放晶体；The manipulator is used to grasp and release crystals;
所述半环轨道位于所述机械手的下方，所述半环轨道用于调整所述X射线发射器和所述X射线发射器的空间姿态；The semi-circular track is located below the manipulator, and the semi-circular track is used to adjust the spatial posture of the X-ray emitter and the X-ray emitter;
所述X射线发射器位于所述半环轨道上，所述X射线发射器用于发射X射线；The X-ray emitter is located on the half-circle orbit, and the X-ray emitter is used to emit X-rays;
所述X射线接收器位于所述半环轨道上，所述X射线接收器用于接收X射线发射器发出的X射线；所述X射线发射器和所述X射线接收器关于所述半环轨道的主轴线对称；The X-ray receiver is located on the semi-circular orbit, and the X-ray receiver is used to receive the X-rays sent by the X-ray emitter; the X-ray emitter and the X-ray receiver are about the semi-circular orbit The main axis is symmetrical;
所述三轴联动平台位于所述半环轨道的下方，所述三轴联动平台用于调整所述X射线发射器与所述晶体的距离和用于调整所述X射线接收器与所述晶体的距离；The three-axis linkage platform is located below the half-circle track, and the three-axis linkage platform is used to adjust the distance between the X-ray emitter and the crystal and to adjust the distance between the X-ray receiver and the crystal the distance;
所述测距仪位于所述半环轨道上，所述测距仪用于保证所述晶体与X射线光路测定点始终在所述测定晶体表面上；The range finder is located on the half-circle orbit, and the range finder is used to ensure that the measurement point of the crystal and the X-ray optical path is always on the surface of the measurement crystal;
所述计算机与所述机械手连接，所述计算机用于控制所述机械手完成抓取晶体和释放晶体的动作以及扫描所述晶体偏离不同取向的角度以及完成对晶残余应力的分析。The computer is connected with the manipulator, and the computer is used to control the manipulator to complete the action of grasping and releasing the crystal, to scan the angle of the crystal deviating from different orientations, and to complete the analysis of the residual stress of the crystal.
可选的，所述测定装置还包括一个伺服电机，所述伺服电机分别与所述X射线发射器和所述X射线接收器连接，用于调整所述X射线发射器与所述晶体的角度和用于调整所述X射线接收器与所述晶体的角度。Optionally, the measurement device also includes a servo motor, the servo motor is respectively connected with the X-ray emitter and the X-ray receiver for adjusting the angle between the X-ray emitter and the crystal and for adjusting the angle between the X-ray receiver and the crystal.
可选的，所述测定装置还包括第一伺服电机和第二伺服电机，所述第一伺服电机和所述X射线发射器连接，用于调整所述X射线发射器和所述晶体的角度；所述第二伺服电机和所述X射线接收器连接，用于调整所述X射线接收器和所述晶体的角度。Optionally, the measurement device further includes a first servo motor and a second servo motor, the first servo motor is connected to the X-ray emitter, and is used to adjust the angle between the X-ray emitter and the crystal ; The second servo motor is connected to the X-ray receiver for adjusting the angle between the X-ray receiver and the crystal.
可选的，所述测定装置还包括第一基板，所述第一基板包括第一台阶和第二台阶，所述第一台阶的高度大于所述第二台阶的高度，所述第一台阶上设置所述机械手，所述第二台阶上设置所述三轴联动平台。Optionally, the assay device further includes a first substrate, the first substrate includes a first step and a second step, the height of the first step is greater than the height of the second step, and the first step The manipulator is set, and the three-axis linkage platform is set on the second step.
可选的，所述测定装置还包括第二基板，所述第二基板设置于所述三轴联动平台上，所述第二基板上设置所述半环轨道。Optionally, the measurement device further includes a second base plate, the second base plate is set on the three-axis linkage platform, and the half-circle track is set on the second base plate.
可选的，所述机械手为六轴机械手，所述六轴机械手上包含配套的气动爪。Optionally, the manipulator is a six-axis manipulator, and the six-axis manipulator includes matching pneumatic grippers.
可选的，所述机械手的仰角范围是-30°～﹢60°。Optionally, the elevation angle of the manipulator ranges from -30° to +60°.
可选的，所述X射线发射器的功率值低于20W。Optionally, the power value of the X-ray emitter is lower than 20W.
可选的，所述测距仪为红外线测距仪。Optionally, the range finder is an infrared range finder.
根据本发明提供的具体实施例，本发明公开了以下技术效果：According to the specific embodiments provided by the invention, the invention discloses the following technical effects:
本发明的X射线晶体取向测定装置，通过计算机编程完成不同晶体取向测定要求的参数，通过机械手示教器编程完成测定所需要的动作编程，机械手将通过计算机软件完成晶体的自动抓取、测定与释放，从而快速的实现晶体不同取向的测定以及对晶残余应力的分析，提高了晶体取向测定的效率以及全自动化测定的工程化需求。The X-ray crystal orientation measuring device of the present invention completes the parameters required for measuring different crystal orientations through computer programming, completes the action programming required for the measurement through the programming of the manipulator teaching device, and the manipulator will complete the automatic grasping, measuring and processing of crystals through computer software. Release, so as to quickly realize the determination of different orientations of crystals and the analysis of residual stress of crystals, improve the efficiency of crystal orientation determination and the engineering requirements of fully automated determination.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动性的前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings required in the embodiments. Obviously, the accompanying drawings in the following description are only some of the present invention. Embodiments, for those of ordinary skill in the art, other drawings can also be obtained according to these drawings without paying creative labor.
图1为本发明实施例一种X射线晶体取向测定装置结构图。Fig. 1 is a structural diagram of an X-ray crystal orientation measuring device according to an embodiment of the present invention.
图2为本发明实施例机械手与计算机连接的结构图。Fig. 2 is a structural diagram of the connection between the manipulator and the computer according to the embodiment of the present invention.
具体实施方式Detailed ways
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
本发明的目的是提供一种提高晶体产量的X射线晶体取向测定装置。The object of the present invention is to provide an X-ray crystal orientation measuring device which can improve the yield of crystals.
为使本发明的上述目的、特征和优点能够更加明显易懂，下面结合附图和具体实施方式对本发明作进一步详细的说明。In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
具体实施例1：Specific embodiment 1:
图1为本发明实施例1一种X射线晶体取向测定装置结构图。如图1所示，一种X射线晶体取向测定装置，所述测定装置包括：机械手1、半环轨道2、X射线发射器3、X射线接收器4、三轴联动平台5、测距仪6和计算机7；Fig. 1 is a structural diagram of an X-ray crystal orientation measuring device according to Embodiment 1 of the present invention. As shown in Figure 1, a kind of X-ray crystal orientation measuring device, described measuring device comprises: manipulator 1, semi-circular track 2, X-ray emitter 3, X-ray receiver 4, three-axis linkage platform 5, rangefinder 6 and computer 7;
所述机械手1用于抓取和释放晶体以及用于所述晶体的转动和摆动；The manipulator 1 is used to grab and release crystals and to rotate and swing the crystals;
所述半环轨道2位于所述机械手1的下方，所述半环轨道2用于设置所述X射线发射器3和所述X射线发射器4的空间姿态；The semi-circular track 2 is located below the manipulator 1, and the semi-circular track 2 is used to set the spatial attitude of the X-ray emitter 3 and the X-ray emitter 4;
所述X射线发射器3位于所述半环轨道2上，所述X射线发射器3用于发射X射线；The X-ray emitter 3 is located on the half-circle orbit 2, and the X-ray emitter 3 is used to emit X-rays;
所述X射线接收器4位于所述半环轨道2上，所述X射线接收器4用于接收X射线发射器3发出的X射线；所述X射线发射器3和所述X射线接收器4关于所述半环轨道2的主轴线对称；The X-ray receiver 4 is located on the half-circle track 2, and the X-ray receiver 4 is used to receive the X-rays sent by the X-ray emitter 3; the X-ray emitter 3 and the X-ray receiver 4 is symmetrical about the main axis of the half-circle track 2;
所述三轴联动平台5位于所述半环轨道2的下方，所述三轴联动平台5用于调整所述X射线发射器3与X射线接收器4与所述晶体的距离；The three-axis linkage platform 5 is located below the half-circle track 2, and the three-axis linkage platform 5 is used to adjust the distance between the X-ray emitter 3 and the X-ray receiver 4 and the crystal;
所述测距仪6位于所述半环轨道2上，所述测距仪6用于保证所述晶体与X射线光路测定点始终在所述测定晶体表面上，测距仪用于测量并调整所述晶体与所述测距仪之间的距离；The range finder 6 is located on the semi-circular track 2, the range finder 6 is used to ensure that the measuring point of the crystal and the X-ray optical path is always on the surface of the measuring crystal, and the range finder is used to measure and adjust the distance between the crystal and the range finder;
图2为本发明实施例机械手与计算机连接的结构图。如图2所示，所述计算机7与所述机械手1连接，所述计算机7用于控制所述机械手1完成抓取晶体和释放晶体的动作以及扫描所述晶体偏离不同取向的角度以及完成对晶残余应力的分析。Fig. 2 is a structural diagram of the connection between the manipulator and the computer according to the embodiment of the present invention. As shown in Figure 2, the computer 7 is connected to the manipulator 1, and the computer 7 is used to control the manipulator 1 to complete the action of grasping the crystal and releasing the crystal, scanning the angles of the crystal deviating from different orientations, and completing the alignment. Analysis of crystal residual stress.
从所述测距仪6里发出一束点激光，其中心光线被调整为与主轴线重合，落在晶体表面的点用于指示取向待测点；所述测距仪6距离调整为入射的X射线与接收反射的所述X射线接收器4中心线交点与晶体表面待测点重合时的距离，所述三轴联动平台5将始终监控此距离。通过所述计算机7编程完成不同晶体取向测定要求的的参数，通过机械手示教器编程完成测定所需要的动作编程。所述机械手1可将通过计算机软件完成试样的自动拿取、测定与释放。Send out a bunch of point lasers from described range finder 6, and its central light is adjusted to coincide with main axis, and the point that falls on crystal surface is used for indicating orientation to be measured point; Described range finder 6 distances are adjusted to incident The distance between X-rays and the intersection point of the center line of the X-ray receiver 4 that receives the reflection coincides with the point to be measured on the crystal surface, and the three-axis linkage platform 5 will always monitor this distance. The parameters required for the measurement of different crystal orientations are completed through the programming of the computer 7, and the action programming required for the measurement is completed through the programming of the manipulator teaching device. The manipulator 1 can automatically take, measure and release samples through computer software.
本发明的X射线晶体取向测定装置，通过计算机7编程完成不同晶体取向测定要求的参数，通过机械手1示教器编程完成测定所需要的动作编程，机械手1将通过计算机软件完成晶体的自动抓取、测定与释放，从而快速的实现晶体不同取向的测定以及对晶残余应力的分析，提高了晶体取向测定的效率以及全自动化测定的工程化需求。The X-ray crystal orientation measuring device of the present invention completes the parameters required for different crystal orientation measurements through computer 7 programming, completes the action programming required for the measurement through the manipulator 1 teaching device programming, and the manipulator 1 will complete the automatic grasping of crystals through computer software , measurement and release, so as to quickly realize the measurement of different orientations of crystals and the analysis of residual stress of crystals, improve the efficiency of crystal orientation determination and the engineering requirements of fully automatic determination.
具体实施例2:Specific embodiment 2:
所述测定装置还包括一个伺服电机8，所述伺服电机8分别与所述X射线发射器3和所述X射线接收器4连接，用于调整所述X射线发射器3与所述晶体的角度和用于调整所述X射线接收器4与所述晶体的角度。The measuring device also includes a servo motor 8, which is connected to the X-ray emitter 3 and the X-ray receiver 4 respectively, for adjusting the distance between the X-ray emitter 3 and the crystal. The angle sum is used to adjust the angle between the X-ray receiver 4 and the crystal.
将一组待测晶体放置于所述机械手1附近预先设定位置，所述机械手1将根据程序选择第一个晶体进行抓取。该晶体经过所述机械手1抓取后，其待测表面将被所述机械手1垂直的放置于所述X射线发射器3与所述X射线接收器4光路的交点。特别的，所述测距仪6通过所述计算机7闭环控制所述三轴联动平台5的高度使得每一个晶体样品无论高低都可以使其表面位于所述X射线发射器与3所述X射线接收器4光路的交点处。A group of crystals to be tested is placed at a preset position near the manipulator 1, and the manipulator 1 will select the first crystal to grab according to the program. After the crystal is grasped by the manipulator 1 , its surface to be measured will be vertically placed by the manipulator 1 at the intersection of the optical paths of the X-ray emitter 3 and the X-ray receiver 4 . In particular, the rangefinder 6 controls the height of the three-axis linkage platform 5 through the computer 7 closed-loop so that each crystal sample can have its surface located between the X-ray emitter and the X-ray beam regardless of its height. The intersection of receiver 4 light paths.
根据材料晶体衍射手册查询待测取向的该晶体衍射角2θ角，输入计算机7，可以设定入射X射线与接收反射X射线接收器4中心线通过所述伺服电机8运动与圆弧主轴线同时成(90-θ)°，此时，入射X射线与接收反射X射线的所述X射线接收器4中心线成(180-2θ)°。Query the crystal diffraction angle 2θ angle of the orientation to be measured according to the material crystal diffraction manual, input it into the computer 7, and set the center line of the incident X-ray and the receiving reflected X-ray receiver 4 through the servo motor 8 to move simultaneously with the main axis of the arc. At this time, the incident X-ray is at (180-2θ)° from the center line of the X-ray receiver 4 that receives the reflected X-ray.
通过计算机7编程完成待测晶体取向测定所需扫描参数Ψ和Φ角。开始测试时，所述机械手1由原本垂直于地面位置沿着以x射线光路的交点为圆心，以某一距离为半径作圆周摆动，每摆动1°后机械爪将沿着样品中心以自转360°再继续摆动1°，直到摆渡至Ψ。X射线光路的交点始终在晶体表面的测定位置。当试样扫描完毕，机械手将晶体沿原路径放回，电脑自动记录不同角度时X射线探测器记录的数据，并自动寻峰标记出该偏离设定取向的角度。The scanning parameters Ψ and Φ angles required for determining the orientation of the crystal to be measured are completed by programming the computer 7 . At the beginning of the test, the manipulator 1 swings in a circle with a certain distance as the radius from the original position perpendicular to the ground along the intersection point of the X-ray optical path, and the mechanical claw will rotate 360 degrees along the center of the sample after every 1° swing. ° continue to swing 1° until the ferry reaches Ψ. The intersection point of the X-ray beam paths is always at the measured position on the crystal surface. When the sample is scanned, the manipulator puts the crystal back along the original path, and the computer automatically records the data recorded by the X-ray detector at different angles, and automatically finds the peak to mark the angle that deviates from the set orientation.
具体实施例3:Specific embodiment 3:
所述测定装置还包括第一伺服电机和第二伺服电机，所述第一伺服电机和所述X射线发射器3连接，用于调整所述X射线发射器3和所述晶体的角度；所述第二伺服电机和所述X射线接收器4连接，用于调整所述X射线接收器4和所述晶体的角度。The measurement device also includes a first servo motor and a second servo motor, the first servo motor is connected to the X-ray emitter 3 for adjusting the angle between the X-ray emitter 3 and the crystal; The second servo motor is connected to the X-ray receiver 4 for adjusting the angle between the X-ray receiver 4 and the crystal.
具体实施例4：Specific embodiment 4:
将一组待测晶体放置于所述机械手1附近预先设定位置，所述机械手1用将根据程序选择第一个晶体进行抓取。A group of crystals to be tested is placed at a preset position near the manipulator 1, and the manipulator 1 will select the first crystal to grab according to the program.
晶体经过所述机械手1抓取后，其待测表面将被所述机械手1垂直的放置于所述X射线发射器3与所述X射线接收器4光路的交点。特别的，所述测距仪6通过所述计算机7闭环控制所述三轴联动平台5的高度使得每一个晶体样品无论高低都可以使其表面位于所述X射线发射器与3所述X射线接收器4光路的交点处。After the crystal is grasped by the manipulator 1 , its surface to be tested will be vertically placed by the manipulator 1 at the intersection of the optical paths of the X-ray emitter 3 and the X-ray receiver 4 . In particular, the rangefinder 6 controls the height of the three-axis linkage platform 5 through the computer 7 closed-loop so that each crystal sample can have its surface located between the X-ray emitter and the X-ray beam regardless of its height. The intersection of receiver 4 light paths.
根据材料晶体衍射手册查询<420>、<331>方向的该晶体衍射角2θ角分别为θ1、θ2，输入计算机7。首先，入射X射线与接收反射X射线接收器4中心线通过伺服电机运动与圆弧主轴线同时成(90-θ1)°，此时，入射X射线与接收反射X射线接收器4中心线成(180-2θ1)°。通过计算机7编程完成晶体<420>取向测定所需扫描参数Ψ和Φ角。开始测试时，机械手1由原本垂直于地面位置沿着以X射线光路的交点为圆心，以某一距离为半径作圆周摆动，每摆动1°后机械爪将沿着样品中心以自转360°再继续摆动1°，直到摆渡至Ψ。X射线光路的交点始终在晶体表面的测定位置。当试样扫描完毕，机械手将晶体沿原路径放回，所述计算机7自动记录不同角度时X射线接收器4记录的数据，并自动寻峰标记出该试样表面偏离<420>取向的4个角度。Query the diffraction angle 2θ of the crystal in the <420> and <331> directions according to the Material Crystal Diffraction Manual, and input them into the computer 7 . First, the incident X-ray and the centerline of the receiving and reflecting X-ray receiver 4 form (90-θ 1 )° with the main axis of the arc through the movement of the servo motor. At this time, the incident X-ray and the receiving and reflecting X-ray receiver 4 centerline into (180-2θ 1 )°. The scanning parameters Ψ and Φ angles required for crystal <420> orientation determination are completed by programming the computer 7 . At the beginning of the test, the manipulator 1 swings from the original position perpendicular to the ground along the intersection point of the X-ray optical path as the center and a certain distance as the radius. After each swing of 1°, the mechanical claw will rotate 360° along the center of the sample. Continue to swing 1° until the ferry reaches Ψ. The intersection point of the X-ray beam paths is always at the measured position on the crystal surface. When the sample is scanned, the manipulator puts the crystal back along the original path, and the computer 7 automatically records the data recorded by the X-ray receiver 4 at different angles, and automatically finds peaks to mark the 4 points on the surface of the sample that deviate from the <420> orientation. angle.
其次，将入射X射线与接收反射X射线接收器4中心线通过伺服电机运动与圆弧主轴线调整成(90-θ2)°，此时，入射X射线与接收反射X射线的探测器中心线成(180-2θ2)°。通过计算机7编程完成晶体<331>取向测定所需扫描参数Ψ和Φ角。开始测试时，机械手由原本垂直于地面位置沿着以x射线光路的交点为圆心，以某一距离为半径作圆周摆动，每摆动1°后机械爪将沿着样品中心以自转360°再继续摆动1°，直到摆渡至Ψ。X射线光路的交点始终在晶体表面的测定位置。当试样扫描完毕，机械手将晶体沿原路径放回，计算机7自动记录不同角度时X射线探测器记录的数据，并自动寻峰标记出该试样表面偏离<331>取向的6个角度。电脑通过计算自动得出该测量晶体表面的残余应力。Secondly, adjust the center line of the incident X-ray and the receiving reflected X-ray receiver 4 to (90-θ 2 )° through the servo motor movement and the main axis of the arc. The line is (180-2θ 2 )°. The scanning parameters Ψ and Φ angles required for crystal <331> orientation determination are completed by programming the computer 7 . At the beginning of the test, the manipulator swings from the original position perpendicular to the ground along the intersection point of the X-ray optical path as the center and a certain distance as the radius. After each swing of 1°, the mechanical claw will rotate 360° along the center of the sample and continue Pivot 1° until ferry to Ψ. The intersection point of the X-ray beam paths is always at the measured position on the crystal surface. When the sample is scanned, the manipulator puts the crystal back along the original path, and the computer 7 automatically records the data recorded by the X-ray detector at different angles, and automatically finds peaks to mark the 6 angles where the surface of the sample deviates from the <331> orientation. The computer automatically obtains the residual stress on the surface of the measured crystal through calculation.
本说明书中各个实施例采用递进的方式描述，每个实施例重点说明的都是与其他实施例的不同之处，各个实施例之间相同相似部分互相参见即可。Each embodiment in this specification is described in a progressive manner, each embodiment focuses on the difference from other embodiments, and the same and similar parts of each embodiment can be referred to each other.
本文中应用了具体个例对本发明的原理及实施方式进行了阐述，以上实施例的说明只是用于帮助理解本发明的方法及其核心思想；同时，对于本领域的一般技术人员，依据本发明的思想，在具体实施方式及应用范围上均会有改变之处。综上所述，本说明书内容不应理解为对本发明的限制。In this paper, specific examples have been used to illustrate the principle and implementation of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea; meanwhile, for those of ordinary skill in the art, according to the present invention Thoughts, there will be changes in specific implementation methods and application ranges. In summary, the contents of this specification should not be construed as limiting the present invention.
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