CN202428315U

CN202428315U - Ultrasonic cleaning device

Info

Publication number: CN202428315U
Application number: CN2012200126218U
Authority: CN
Inventors: 唐晓辉
Original assignee: QINGDAO ISTARWAFER TECHNOLOGY Co Ltd
Current assignee: QINGDAO ISTARWAFER TECHNOLOGY Co Ltd
Priority date: 2012-01-10
Filing date: 2012-01-10
Publication date: 2012-09-12
Anticipated expiration: 2022-01-10

Abstract

The utility model relates to the field of cleaning devices, in particular to an ultrasonic cleaning device which is used in the processes of single-sided grinding and polishing of sapphire wafers. The ultrasonic cleaning device comprises an ultrasonic generator 5, a cleaning tank 2, a transducer 7 and an oblique inserting type cleaning cage. The ultrasonic generator 5 is arranged above the cleaning tank 2, the transducer 7 is disposed at the bottom of the cleaning tank 2, the ultrasonic generator 5 and the transducer 7 are electrically connected through a guide line, and the oblique inserting type cleaning cage is mounted in the cleaning tank 2 and fixedly connected with the cleaning tank 2. The oblique inserting type cleaning cage comprises a cage body 4, a support 3 and a block foot 6, wherein an oblique angle is formed between the support 3 and the bottom surface of the cage body 4, and the block foot 6 is vertically disposed at the bottom of the support 3. The ultrasonic cleaning device has the advantages that the quantity of cleaned wafers at a time is increased, the investment costs of devices are reduced, the producing capacity is improved, the efficiency is increased, the processing cost of the wafers is lowered, the scratching and edge bumping of the sapphire wafers are prevented, and the loss rate of the wafers is reduced.

Description

Ultrasonic cleaning equipment

Technical field

The utility model belongs to the cleaning equipment field, particularly a kind of ultrasonic cleaning equipment that is used for sapphire wafer at single face grinding, polishing process.

Background technology

The supersonic wave cleaning machine principle is the high-frequency oscillation signal that is sent by supersonic generator; Convert the high frequency mechanical oscillation to through transducer and propagate into medium---in the cleaning solvent; Ultrasonic wave in cleaning fluid density interphase to previous irradiation; Make liquid flow and produce the micro-bubble that ten hundreds of diameters is 50-500 μ m, the micro-bubble that is present in the liquid vibrates under the effect of sound field.These bubbles form at the negative pressuren zone of ultrasonic wave longitudinal propagation, growth, and at zone of positive pressure, when acoustic pressure reached certain value, bubble increased rapidly, and are closed suddenly then.And when bubble is closed, produce shock wave, and around it, produce thousands of atmospheric pressure, destroy insoluble dirt and they are scattered in the cleaning fluid; When group's particle is being wrapped up in by greasy dirt and is being attached on cleaning part when surface; Oily by emulsification, solids and disengaging, thus reach the purpose that cleaning part purifies.In the process of this being referred to as " cavitation " effect; The bubble closure can form the high temperature of several Baidu and surpass the instantaneous pressure of 1000 air pressure; Continuously producing instantaneous pressure resembles a succession of little " blast " and constantly impacts object surface; The surface of object and the dirt in the slit are peeled off rapidly, thereby reach the purpose of object surface cleaning.

The supersonic wave cleaning machine that uses in the market no matter be single groove or multiple-grooved, the sapphire wafer single face grind and polishing process in cleaning efficiency all very low.

The utility model content

For solving inefficient problem in the sapphire wafer cleaning process that exists in the above-mentioned technology, the utility model provides the ultrasonic cleaning equipment that a kind of cleaning efficiency is high, the wafer loss rate is little.

The technical scheme of the utility model is: a kind of ultrasonic cleaning equipment, comprise supersonic generator 5, and rinse bath 2, transducer 7 and angle-inserting type clean cage.Supersonic generator 5 is arranged at rinse bath 2 tops, and transducer 7 is positioned at the bottom of rinse bath 2, and supersonic generator 5 and transducer 7 are electrically connected through lead, and angle-inserting type cleans cage and places in the said rinse bath 2, is fixedly connected with rinse bath 2.

Said angle-inserting type cleans cage and comprises cage body 4, support 3 and retaining pin 6, support 3 and cage body 4 bottom surface bevels, and retaining pin 6 is vertically installed in support 3 bottoms.

The ceramic disk 8 of placing wafer places angle-inserting type to clean on the support 3 in the cage, and sapphire wafer is bonded on the ceramic disk 8 with wax.

In the said rinse bath 2 cleaning fluid is housed.

Said transducer 7 is magnetic force transducer or PZT (piezoelectric transducer).

The magnetic force transducer is processed by the material that meetings such as nickel or nickel alloy deform in the magnetic field that changes.PZT (piezoelectric transducer) is processed by lead zirconate titanate or other potteries, and its principle is, when piezoelectric was put into the electric field of change in voltage, it can deform, and Here it is so-called " piezo-electric effect ".

The operation principle of the utility model is following: supersonic generator 5 produces high-frequency oscillation signal, and transducer 7 converts higher-order of oscillation electric power signal to acoustic energy signal.When acoustic energy reached certain intensity, cleaning fluid was open in the expansion stage of ripple, produced bubble; And at the compression stage of ripple, therefore just instant exploding or the implosion in cleaning fluid of these bubbles produce impulsive force, is used for clean wafers, and this process is known as " cavitation ".

The beneficial effect of the utility model is:

1, the tilt stand of angle-inserting type cleaning cage can be placed a plurality of ceramic disks, has improved the quantity of a clean wafers, reduces equipment investment cost;

2, improve production capacity, raise the efficiency, reduce the wafer process cost;

3, prevent sapphire wafer is caused scuffing, cracks the limit between the teeth, reduce the coefficient of losses of wafer.

Description of drawings

Fig. 1 is the overall structure sketch map of the utility model;

Fig. 2 is the perspective view that angle-inserting type cleans cage in the utility model.

Wherein, 1, draining valve, 2, rinse bath, 3, support, 4, the cage body, 5, supersonic generator, 6, the retaining pin, 7, transducer, 8, ceramic disk.

The specific embodiment

Specify the utility model below in conjunction with accompanying drawing and embodiment.

Embodiment 1:

Referring to Fig. 1 and Fig. 2, the utility model comprises supersonic generator 5, and rinse bath 2, transducer 7 and angle-inserting type clean cage.Supersonic generator 5 is arranged at rinse bath 2 tops, and transducer 7 is positioned at the bottom of rinse bath 2, and supersonic generator 5 and transducer 7 are electrically connected through lead, and angle-inserting type cleans cage and is welded in the rinse bath 2.

Angle-inserting type cleans cage and comprises cage body 4, support 3 and retaining pin 6, support 3 and cage body 4 bottom surface bevels, and retaining pin 6 is vertically installed in support 3 bottoms.

In the rinse bath 2 cleaning fluid is housed,

Transducer 7 is the magnetic force transducer.

During the utility model work, supersonic generator 5 produces high-frequency oscillation signal, and transducer 7 converts higher-order of oscillation electric power signal to acoustic energy signal.When acoustic energy reached certain intensity, the cleaning fluids in the rinse bath 2 were open in the expansion stage of ripple, produced bubble; And at the compression stage of ripple, therefore just instant exploding or the implosion in cleaning fluid of these bubbles produce impulsive force, and then the wafer on the cleaning ceramic dish 8.

Embodiment 2:

Outside distinguishing down, other are with embodiment 1.

Angle-inserting type cleans cage and is fixed in the rinse bath 2 through screw.

Transducer 7 is a PZT (piezoelectric transducer).

Claims

1. ultrasonic cleaning equipment; Comprise supersonic generator (5), rinse bath (2) and transducer (7), said supersonic generator (5) are arranged at rinse bath (2) top; Transducer (7) is positioned at the bottom of rinse bath (2), and supersonic generator (5) is electrically connected through lead with transducer (7); It is characterized in that comprise that also angle-inserting type cleans cage, it comprises cage body (4), support (3) and retaining pin (6); Support (3) and cage body (4) bottom surface bevel; Retaining pin (6) is vertically installed in support (3) bottom, and said angle-inserting type cleans cage and places in the said rinse bath (2), is fixedly connected with rinse bath (2).