CN202403990U - In-situ micro-nano three-point/four-point bending test device for span dimension of microscopic component - Google Patents

In-situ micro-nano three-point/four-point bending test device for span dimension of microscopic component Download PDF

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Publication number
CN202403990U
CN202403990U CN2011204421957U CN201120442195U CN202403990U CN 202403990 U CN202403990 U CN 202403990U CN 2011204421957 U CN2011204421957 U CN 2011204421957U CN 201120442195 U CN201120442195 U CN 201120442195U CN 202403990 U CN202403990 U CN 202403990U
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micro
vehicle frame
frame group
screw
nano
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CN2011204421957U
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赵宏伟
张霖
黄虎
胡晓利
史成利
马志超
王开厅
李泽君
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Jilin University
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Jilin University
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Abstract

The utility model relates to an in-situ micro-nano three-point/four-point bending test device for the span dimension of a microscopic component, which belongs to machinery and comprises a precision driving control unit, an adjusting unit with three degrees of freedom, a transmission and execution unit, a signal detecting unit and a connecting support unit. A precision driving direct-current servo motor is connected with a primary worm gear through a flexible coupler, the primary worm gear is connected with a secondary worm gear through a worm gear and worm transmission pair, and the secondary worm gear is respectively connected with a guide bar I and a guide bar II through a worm gear and worm transmission pair and further drives a bending test punch to complete test. The in-situ micro-nano three-point/four-point bending test device is compact in structure, reliable in function and convenient in installation and operation, can be used for compensating a loading test process and correcting test data by means of displacement and load high-precision control algorithm, and can be placed in various commercial microscopic test devices with limited sizes to accurately test bending performances of microscopic-dimension material test pieces.

Description

Micro-nano 3 points of trans-scale in-situ/four-point bending proving installation under the micro-assembly
Technical field
The utility model relates to mechanical field, relates to not relate to material structure test and in-situ test field, refers to micro-nano 3 points of trans-scale in-situ/four-point bending proving installation under a kind of micro-assembly especially.Be installed under the micro-assembly device that the trans-scale in-situ nanometer solid material is carried out original position 3 points/four-point bending mechanical test and microdeformation pattern, crystal habit deformation observation.Can the microdeformation mechanism and the mechanical property of various materials directly be mapped, disclose the relation of striding yardstick material mechanical performance and macro property.
Background technology
The in-situ nano mechanical test is meant under nanoscale material for test is carried out in the Mechanics Performance Testing that the microdeformation that material under the loading is taken place through observation instruments such as electron microscopes damages a kind of mechanical test technology of carrying out omnidistance dynamic monitoring.The announcement that this technology is deep the Micromechanics behavior of various types of materials and goods thereof, micromechanism of damage and and loading and material property between the correlativity rule.In the category of many nanometer mechanics tests; Parameters such as elastic modulus, hardness, break limit are the topmost tested objects in little member mechanical property testing; Produced various test to these mechanical attributes, like stretching/compression method, torsional technique, bending method, nano impress are sent out and eardrum method etc.; Wherein can reflect the bending strength characteristic of construction material, and can measure important mechanics parameters such as elasticity modulus of materials, yield limit and fracture strength the most intuitively with the original position crooked test.
Micro-nano 3 points of current original position/four-point bending Research of measuring is still located bud; Be in particular in: (1) receives the restriction of the cavity space of atomic force microscope (AFM), scanning electron microscope and transmission electron microscope (TEM) etc.; Present majority research all concentrates on MEMS/NEMS technology and is the basis; On the simple in-situ nano crooked test to atomic minor structures such as nanotube, nano wire and membraneous materials; Lack further investigation, thereby seriously hindered academia the Micromechanics behavior of larger-size micro-structure material and new phenomenon, the discovery of rule newly of damage mechanism to the trans-scale in-situ nanometer mechanical test of macro-size; (2) on means of testing and method; The in-situ nano impression test that is mainly undertaken by business-like nano-hardness tester and by the business-like original position stretching test of carrying out for the nanometer stretching appearance originally; Two kinds of methods all exist cost of equipment expensive; Method of testing is single, the characteristics that content measurement is of inadequate achievement.To compact conformation, 3 points of advantages of small volume, the dual-purpose in-situ testing device of four-point bending rarely have to be mentioned, has greatly restricted going deep into and development of research.
In addition; Offshore company's independent research a series of SEM in-situ mechanical bend testing apparatus, test specification contains micro/nano level test specimen and macroscopical test specimen, but still exists device volume excessive; Cost an arm and a leg, and find to stride the yardstick test equipment to millimeter level yardstick test specimen.
Summary of the invention
The purpose of the utility model is to provide micro-nano 3 points of trans-scale in-situ/four-point bending proving installation under a kind of micro-assembly; Solved existing machinery equipment observe at the measuring mechanical property of material with in this process the test specimen microscopic pattern change be independently, problem that separate, that stride yardstick; And problems such as existing testing apparatus volume is big, complex structure, expensive and poor compatibility; Through different load load modes the material test specimen is carried out the test of microcosmic material mechanical performance, and then slight nanometer 3 points of trans-scale in-situ/four-point bending device under a kind of Electronic Speculum is provided.
The above-mentioned purpose of the utility model realizes through following technical scheme:
Micro-nano 3 points of trans-scale in-situ/four-point bending proving installation under the micro-assembly comprises accurate driving control unit, Three Degree Of Freedom adjustment unit, transmission and performance element, detecting signal unit and is connected support unit; Described accurate driving control unit, transmission and performance element; Comprise DC servo motor (30), flexible clutch I, II 31-1,31-2, one-level worm screw 24, first-stage worm gear 25, second-stage worm 26, two-stage turbine I, II 3-1,3-2 and guiding thick stick I, II 2-1,2-2; Said precision DC servomotor 30 is connected with framework soleplate 12 through the bearing ring flange 28 at motor rear portion; The end screw of the output shaft of said DC servo motor 30 and flexible clutch I 31-1 is fastenedly connected; The other end of said flexible clutch I 31-1 is fastenedly connected with one-level worm screw 24 screws through flexible clutch II 31-2, one-level worm bearing 32; Said one-level worm screw 24 cooperatively interacts with the one-level turbine 25 that is fixed on second-stage worm 27 middle parts, and it is last that two-stage turbine I, II 3-1,3-2 are fastened on guiding thick stick I, II 2-1,2-2 respectively; Reach on the second-stage worm 27 through the power of turbine and worm transmission DC servo motor 30; Respectively through being fastened on the last two-stage turbine 3-1 of guiding thick stick I, II 2-1,2-2, the guiding thick stick 2-1 that 3-2 drives, the rotation of 2-2; Second-stage worm 27 two ends are respectively by the bearings in the second-stage worm bearing 1 that is fixed on frame 12 left and right sides, and guiding thick stick I, II 2-1,2-2 are respectively through the bearings that is anchored on back side panel 10 in frame front, rear, left and right side plate 35,10,6-1, the 6-2; Square nut 4 rigidly fixes with leading screw ball nut 33 and is connected; Vehicle frame group upper plate 5 is fixed on square nut 4 tops through countersunk nut; Said leading screw ball nut 33 meshes with the precision ball screw part 2-B that guides thick stick I, II 2-1,2-2 respectively, drives locomotive frame group through the rotation that guides thick stick I, II 2-1,2-2 and axially guides thick stick I, II 2-1,2-2 to move in the edge; Punch holder 8 is through the side of screw retention at the upper plate 5,9 that moves vehicle frame group, dynamometry vehicle frame group, drift 7 and then be installed on the guide rail of punch holder 8.
Described detecting signal unit is made up of force cell 11, displacement transducer 34, photoelectric encoder 29; One end of said force cell 11 is fixed on the frame back side panel 10; The other end is connected with upper plate 9 rear portions of dynamometry vehicle frame group; Said displacement transducer 34 1 ends are fixedly connected with the vehicle frame group upper plate 5 of mobile vehicle frame group through the mode of pasting, and the other end is fixed on the frame front side board 35, and said photoelectric encoder 29 passes through screw retention at DC servo motor 30 rear portions.
Described Three Degree Of Freedom adjustment unit is made up of frame 12, wedge-shaped adjusting block 14, wedge shape guide rail 15, x, y direction manual adjustment worktable 16,17, bevel gear set I, II 19-1,19-2; The below of said frame 12 is equipped with wedge shape guide rail 15; Can carry out the z direction to accurate drive control part through manual adjustment screw I, II 13-1,13-2 finely tunes; X, y direction manual adjustment worktable the 16, the 17th are made up of the bevel gear set I, II 19-1, the 19-2 that have two degree of freedom translations in x, y direction; The adjustment leading screw of its x direction is connected with the outside x directional control handwheel 22-2 of instrument through one group of x direction universal joint 23; The adjustment leading screw of y direction is connected with outside y directional control handwheel 22-1 through bevel gear set I, II 19-1,19-2, connecting link 20 and one group of y direction universal joint 21 of pair of meshing; X, y direction manual adjustment worktable 16,17 are connected with the wedge shape guide rail 15 on top and the base web joint 18 of bottom respectively through screw, and said base web joint 18 is connected with the objective table of micro-assembly.
Described dynamometry vehicle frame group is made up of square nut 4, sliding nut 36, dynamometry vehicle frame group upper plate 9, punch holder 8; The endoporus of the feed rod 2-A part of guiding thick stick I, II 2-1,2-2 and the sliding nut 36 of dynamometry vehicle frame group closely cooperates; Make dynamometry vehicle frame group do micro-displacement along feed rod 2-A; Punch holder 8 back of described dynamometry vehicle frame group are connected with an end of force transducer 11, and the power that force transducer 11 is applied through dynamometry vehicle frame group records the force signal in the BENDING PROCESS.
Described mobile vehicle frame group is made up of square nut 4, precision lead screw nut 33, mobile vehicle frame group upper plate 5, punch holder 8; Said precision lead screw nut 33 partly meshes with the precision ball screw 2-B of guiding thick stick I, II 2-1,2-2; Move Slide Group through the rotation drive of guiding thick stick I, II 2-1,2-2 and axially move, move vehicle frame group upper plate 5 and be fixedly connected on square nut 4 tops through sunk screw along precision ball screw 2-B.
Described drift 7 matches with the shape and structure of test specimen; Drift 7 is removable; Made things convenient for the replacing after drift 7 weares and teares, can carry out the crooked test of 3 points, 4 microcosmic materials simultaneously, also can change the drift 7 of different structure according to the difformity structure of test specimen.
The motion of described mobile vehicle frame group is in micron-sized scope.Through precision ball screw 2-B; Motion in loading procedure is unidirectional; The scrambler 29 that cooperates high line number through the bigger rotation of two-stage than the back of slowing down; The motion of moving the vehicle frame group can be controlled in the micron-sized scope, can realize ultraprecise dynamic and static the loading, also can think that the material bending under " quasistatic " situation is tested simultaneously.
Described DC servo motor 30 matches with the scrambler 29 or the outside servo-drive circuit of high line number; DC servo motor 30 cooperates the scrambler 29 of high line number can make the motion of output have multiple mode; Described DC servo motor 30 can be through outside servo-drive circuit control; Make the load mode variation of testing experiment part, both can be continuous loading, also can be for intermittently loading.
The area of observation coverage below that described drift 7 loads is provided with the device that test specimen is heated or cool off, can carry out the test under the equality of temperature condition not, observes the bending property of microsize material under different temperatures.
The utility model compared with prior art; Have the following advantages and outstanding effect: micro-nano 3 points of trans-scale in-situ/four-point bending proving installation has compact conformation under the Electronic Speculum of the utility model; Reliable in function, easy for installation, the characteristics of being convenient to operate; Can be installed in easily in electron microscope, AFM, Raman spectrometer, X-ray diffractometer, medium other commercialization test observation instruments of scanning electron microscope and use; Applied range, can to various stride the yardstick minute materials carry out continuously, intermittently crooked, and changes of microstructure that can original position recording materials elasticity sex change district.Compare with existing mechanics of materials proving installation; The utility model can utilize the distortion and the microstructure change of electron microscope, AFM, Raman spectrometer, X-ray diffractometer, scanning electron microscope imaging system or other business-like observation instrument imagings and recording materials simultaneously in the material mechanical performance test process; Overcome existing instrument with two of the detections of the measurement of mechanical property and microscopic appearance independently, the defective of separating process; The mechanical property and the micromechanism of material are directly docked; Characteristic with intuitive and detection by quantitative is convenient to find and explain the mechanical property and the change mechanism of material.
In sum, the utility model has important significance for theories and good application development future to the measurement of the mechanical property of striding the yardstick material and the detection of microscopic appearance.
Description of drawings:
Accompanying drawing described herein is used to provide the further understanding to the utility model, constitutes the application's a part, and illustrative example of the utility model and explanation thereof are used to explain the utility model, do not constitute the improper qualification to the utility model.
Fig. 1 is the overall appearance three-dimensional structure synoptic diagram of the utility model;
Fig. 2 looks up structural representation for the bottom surface three-dimensional that the utility model does not comprise the Three Degree Of Freedom adjusting mechanism;
Fig. 3 is the structural representation of the mobile vehicle frame group of the utility model;
Fig. 4 is the structural representation of the dynamometry vehicle frame group of the utility model;
Fig. 5 is the plan structure synoptic diagram of the utility model;
Fig. 6 is that the precision of the guiding thick stick of the utility model drives leading screw and feed rod structural representation.
Among the figure:
1, second-stage worm bearing; 2-1, guiding thick stick I; 2-2, guiding thick stick II; 3-1, two-stage turbine I;
3-2, two-stage turbine II; 4, square nut; 5, move vehicle frame group upper plate; 6-1, left plate;
6-2, right plate; 7, drift; 8, punch holder; 9, dynamometry vehicle frame group upper plate;
10, back side panel; 11, force cell; 12, frame; 13-1 adjustment screw I;
13-2 adjustment screw II; 14, wedge-shaped adjusting block; 15, wedge shape guide rail; 16, x direction manual adjustment worktable;
17, y direction manual adjustment worktable; 18, base web joint; 19-1, bevel gear set I; 19-2, bevel gear set II;
20, connecting link; 21, y direction universal joint; 22-1, y directional control handwheel; 22-2, x directional control handwheel;
23, x direction universal joint; 24, one-level worm screw; 25, one-level turbine; 26, second-stage worm;
27, spring bearing; 28, motor flange dish; 29, photoelectric coded disk; 30, DC servo motor;
31-1, flexible clutch I; 31-2, flexible clutch II; 32, one-level worm bearing; 33, accurate ball nut;
34, displacement transducer; 35, front side board; 36, feed rod nut.
Embodiment:
Further specify the detailed content and the embodiment thereof of the utility model below in conjunction with accompanying drawing.
Referring to Fig. 1 and Fig. 2, micro-nano 3 points of trans-scale in-situ/four-point bending proving installation under the micro-assembly of the utility model comprises accurate driving control unit, Three Degree Of Freedom adjustment unit, transmission and performance element, detecting signal unit and is connected support unit; Described accurate driving control unit, transmission and performance element; Comprise DC servo motor (30), flexible clutch I, II 31-1,31-2, one-level worm screw 24, first-stage worm gear 25, second-stage worm 26, two-stage turbine I, II 3-1,3-2 and guiding thick stick I, II 2-1,2-2; Said precision DC servomotor 30 is connected with framework soleplate 12 through the bearing ring flange 28 at motor rear portion; The end screw of the output shaft of said DC servo motor 30 and flexible clutch I 31-1 is fastenedly connected; The other end of said flexible clutch I 31-1 is fastenedly connected with one-level worm screw 24 screws through flexible clutch II 31-2, one-level worm bearing 32; Said one-level worm screw 24 cooperatively interacts with the one-level turbine 25 that is fixed on second-stage worm 27 middle parts, and it is last that two-stage turbine I, II 3-1,3-2 are fastened on guiding thick stick I, II 2-1,2-2 respectively; Reach on the second-stage worm 27 through the power of turbine and worm transmission DC servo motor 30; Respectively through being fastened on the last two-stage turbine 3-1 of guiding thick stick I, II 2-1,2-2, the guiding thick stick 2-1 that 3-2 drives, the rotation of 2-2; Second-stage worm 27 two ends are respectively by the bearings in the second-stage worm bearing 1 that is fixed on frame 12 left and right sides, and guiding thick stick I, II 2-1,2-2 are respectively through the bearings that is anchored on back side panel 10 in frame front, rear, left and right side plate 35,10,6-1, the 6-2; Square nut 4 rigidly fixes with leading screw ball nut 33 and is connected; Vehicle frame group upper plate 5 is fixed on square nut 4 tops through countersunk nut; Said leading screw ball nut 33 meshes with the precision ball screw part 2-B that guides thick stick I, II 2-1,2-2 respectively, drives locomotive frame group through the rotation that guides thick stick I, II 2-1,2-2 and axially guides thick stick I, II 2-1,2-2 to move in the edge; Punch holder 8 is through the side of screw retention at the upper plate 5,9 that moves vehicle frame group, dynamometry vehicle frame group, drift 7 and then be installed on the guide rail of punch holder 8.
Referring to Fig. 1, Fig. 2 and Fig. 5; Described detecting signal unit is made up of force cell 11, displacement transducer 34, photoelectric encoder 29; One end of said force cell 11 is fixed on the frame back side panel 10; The other end is connected with upper plate 9 rear portions of dynamometry vehicle frame group; Said displacement transducer 34 1 ends are fixedly connected with the vehicle frame group upper plate 5 of mobile vehicle frame group through the mode of pasting, and the other end is fixed on the frame front side board 35, and said photoelectric encoder 29 passes through screw retention at DC servo motor 30 rear portions.
Referring to Fig. 1 and Fig. 2; Described Three Degree Of Freedom adjustment unit is made up of frame 12, wedge-shaped adjusting block 14, wedge shape guide rail 15, x, y direction manual adjustment worktable 16,17, bevel gear set I, II 19-1,19-2; The below of said frame 12 is equipped with wedge shape guide rail 15; Can carry out the z direction to accurate drive control part through manual adjustment screw I, II 13-1,13-2 finely tunes; X, y direction manual adjustment worktable the 16, the 17th are made up of the bevel gear set I, II 19-1, the 19-2 that have two degree of freedom translations in x, y direction; The adjustment leading screw of its x direction is connected with the outside x directional control handwheel 22-2 of instrument through one group of x direction universal joint 23; The adjustment leading screw of y direction is connected with outside y directional control handwheel 22-1 through bevel gear set I, II 19-1,19-2, connecting link 20 and one group of y direction universal joint 21 of pair of meshing; X, y direction manual adjustment worktable 16,17 are connected with the wedge shape guide rail 15 on top and the base web joint 18 of bottom respectively through screw, and said base web joint 18 is connected with the objective table of micro-assembly.
Referring to Fig. 1 and Fig. 4; Described dynamometry vehicle frame group is made up of square nut 4, sliding nut 36, dynamometry vehicle frame group upper plate 9, punch holder 8; The endoporus of the feed rod 2-A part of guiding thick stick I, II 2-1,2-2 and the sliding nut 36 of dynamometry vehicle frame group closely cooperates; Make dynamometry vehicle frame group do micro-displacement along feed rod 2-A, punch holder 8 back of described dynamometry vehicle frame group are connected with an end of force transducer 11, and the power that force transducer 11 is applied through dynamometry vehicle frame group records the force signal in the BENDING PROCESS.
Referring to Fig. 1 and Fig. 3; Described mobile vehicle frame group is made up of square nut 4, precision lead screw nut 33, mobile vehicle frame group upper plate 5, punch holder 8; Said precision lead screw nut 33 partly meshes with the precision ball screw 2-B of guiding thick stick I, II 2-1,2-2; Move Slide Group through the rotation drive of guiding thick stick I, II 2-1,2-2 and axially move, move vehicle frame group upper plate 5 and be fixedly connected on square nut 4 tops through sunk screw along precision ball screw 2-B.
Referring to Fig. 1 and Fig. 6; Described drift 7 matches with the shape and structure of test specimen, and drift 7 is removable, has made things convenient for the replacing after drift 7 weares and teares; Can carry out simultaneously the crooked test of 3 points, 4 microcosmic materials, also can change the drift 7 of different structure according to the difformity structure of test specimen.The motion of described mobile vehicle frame group is in micron-sized scope.Through precision ball screw 2-B; Motion in loading procedure is unidirectional; The scrambler 29 that cooperates high line number through the bigger rotation of two-stage than the back of slowing down; The motion of moving the vehicle frame group can be controlled in the micron-sized scope, can realize ultraprecise dynamic and static the loading, also can think that the material bending under " quasistatic " situation is tested simultaneously.Described DC servo motor 30 matches with the scrambler 29 or the outside servo-drive circuit of high line number; DC servo motor 30 cooperates the scrambler 29 of high line number can make the motion of output have multiple mode; Described DC servo motor 30 can be through outside servo-drive circuit control; Make the load mode variation of testing experiment part, both can be continuous loading, also can be for intermittently loading.
Referring to Fig. 1, Fig. 2 and Fig. 5, the area of observation coverage below that described drift 7 loads is provided with the device that test specimen is heated or cool off, can carry out the test under the equality of temperature condition not, observes the bending property of microsize material under different temperatures.
The preferred embodiment that the above is merely the utility model is not limited to the utility model, and for a person skilled in the art, the utility model can have various changes and variation.All within the spirit and principle of the utility model, any modification of being done, be equal to replacement, improvement etc., all should be included within the protection domain of the utility model.

Claims (9)

1. micro-nano 3 points of trans-scale in-situ/four-point bending proving installation under the micro-assembly is characterized in that: comprise accurate driving control unit, Three Degree Of Freedom adjustment unit, transmission and performance element, detecting signal unit and be connected support unit; Described accurate driving control unit, transmission and performance element; Comprise DC servo motor (30), flexible clutch I, II (31-1,31-2), one-level worm screw (24), first-stage worm gear (25), second-stage worm (26), two-stage turbine I, II (3-1,3-2) and guiding thick stick I, II (2-1,2-2); Said precision DC servomotor (30) is connected with framework soleplate (12) through the bearing ring flange (28) at motor rear portion; One end screw of the output shaft of said DC servo motor (30) and flexible clutch I (31-1) is fastenedly connected; The other end of said flexible clutch I (31-1) is fastenedly connected with one-level worm screw (24) screw through flexible clutch II (31-2), one-level worm bearing (32); Said one-level worm screw (24) cooperatively interacts with the one-level turbine (25) that is fixed on second-stage worm (27) middle part, and two-stage turbine I, II (3-1,3-2) are fastened on respectively on guiding thick stick I, the II (2-1,2-2); Second-stage worm (27) two ends are respectively by the bearings in the second-stage worm bearing (1) that is fixed on frame (12) left and right sides, and guiding thick stick I, II (2-1,2-2) are respectively through the interior bearings that is anchored on back side panel (10) of frame front, rear, left and right side plate (35,10,6-1,6-2); Square nut (4) rigidly fixes with leading screw ball nut (33) and is connected; Vehicle frame group upper plate (5) is fixed on square nut (4) top through countersunk nut, and said leading screw ball nut (33) meshes with the precision ball screw part (2-B) that guides thick stick I, II (2-1,2-2) respectively; Punch holder (8) is through the side of screw retention at the upper plate (5,9) that moves vehicle frame group, dynamometry vehicle frame group, drift (7) and then be installed on the guide rail of punch holder (8).
2. micro-nano 3 points of trans-scale in-situ/four-point bending proving installation under the micro-assembly according to claim 1; It is characterized in that: described detecting signal unit is made up of force cell (11), displacement transducer (34), photoelectric encoder (29); One end of said force cell (11) is fixed on the frame back side panel (10); The other end is connected with upper plate (9) rear portion of dynamometry vehicle frame group; Said displacement transducer (34) one ends are fixedly connected with the vehicle frame group upper plate (5) of mobile vehicle frame group through the mode of pasting; The other end is fixed on the frame front side board (35), and said photoelectric encoder (29) passes through screw retention at DC servo motor (30) rear portion.
3. micro-nano 3 points of trans-scale in-situ/four-point bending proving installation under the micro-assembly according to claim 1; It is characterized in that: described Three Degree Of Freedom adjustment unit is made up of frame (12), wedge-shaped adjusting block (14), wedge shape guide rail (15), x, y direction manual adjustment worktable (16,17), bevel gear set I, II (19-1,19-2); The below of said frame (12) is equipped with wedge shape guide rail (15); X, y direction manual adjustment worktable (16,17) are to be made up of the bevel gear set I that has two degree of freedom translations in x, y direction, II (19-1,19-2); The adjustment leading screw of its x direction is connected with the outside x directional control handwheel (22-2) of instrument through one group of x direction universal joint (23); The adjustment leading screw of y direction is connected with outside y directional control handwheel (22-1) through bevel gear set I, II (19-1,19-2), connecting link (20) and one group of y direction universal joint (21) of pair of meshing; X, y direction manual adjustment worktable (16,17) are connected with the wedge shape guide rail (15) on top and the base web joint (18) of bottom respectively through screw, and said base web joint (18) is connected with the objective table of micro-assembly.
4. micro-nano 3 points of trans-scale in-situ/four-point bending proving installation under the micro-assembly according to claim 1; It is characterized in that: described dynamometry vehicle frame group is made up of square nut (4), sliding nut (36), dynamometry vehicle frame group upper plate (9), punch holder (8); The endoporus of feed rod (2-A) part of guiding thick stick I, II (2-1,2-2) and the sliding nut (36) of dynamometry vehicle frame group closely cooperates; Make dynamometry vehicle frame group do micro-displacement along feed rod (2-A); Punch holder (8) back of described dynamometry vehicle frame group is connected with an end of force transducer (11), through dynamometry vehicle frame group the power that force transducer (11) applies is recorded the force signal in the BENDING PROCESS.
5. micro-nano 3 points of trans-scale in-situ/four-point bending proving installation under the micro-assembly according to claim 1; It is characterized in that: described mobile vehicle frame group is made up of square nut (4), precision lead screw nut (33), mobile vehicle frame group upper plate (5), punch holder (8); Said precision lead screw nut (33) meshes with precision ball screw (2-B) part of guiding thick stick I, II (2-1,2-2); Rotation through guiding thick stick I, II (2-1,2-2) drives mobile Slide Group axially along precision ball screw (2-B) motion, moves vehicle frame group upper plate (5) and is fixedly connected on square nut (4) top through sunk screw.
6. micro-nano 3 points of trans-scale in-situ/four-point bending proving installation under the micro-assembly according to claim 1 is characterized in that: described drift (7) matches with the shape and structure of test specimen.
7. according to micro-nano 3 points of trans-scale in-situ/four-point bending proving installation under claim 1 or the 5 described micro-assemblies, it is characterized in that: the motion of described mobile vehicle frame group is in micron-sized scope.
8. micro-nano 3 points of trans-scale in-situ/four-point bending proving installation under the micro-assembly according to claim 1 and 2; It is characterized in that: described DC servo motor (30) matches with the scrambler (29) or the outside servo-drive circuit of high line number; DC servo motor (30) cooperates the scrambler (29) of high line number can make the motion of output have multiple mode; Described DC servo motor (30) can be through outside servo-drive circuit control; Make the load mode variation of testing experiment part, both can be continuous loading, also can be for intermittently loading.
9. according to micro-nano 3 points of trans-scale in-situ/four-point bending proving installation under claim 1 or the 6 described micro-assemblies, it is characterized in that: the area of observation coverage below that described drift (7) loads is provided with the device that test specimen is heated or cools off.
CN2011204421957U 2011-11-10 2011-11-10 In-situ micro-nano three-point/four-point bending test device for span dimension of microscopic component Withdrawn - After Issue CN202403990U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102494955A (en) * 2011-11-10 2012-06-13 吉林大学 Cross-scale in-situ micro-nanometer three-point/four-point bending test device under microscopic assembly

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102494955A (en) * 2011-11-10 2012-06-13 吉林大学 Cross-scale in-situ micro-nanometer three-point/four-point bending test device under microscopic assembly
CN102494955B (en) * 2011-11-10 2013-04-24 吉林大学 Cross-scale in-situ micro-nanometer three-point/four-point bending test device under microscopic assembly

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