CN202390569U - Graphite heater - Google Patents
Graphite heater Download PDFInfo
- Publication number
- CN202390569U CN202390569U CN2011204722884U CN201120472288U CN202390569U CN 202390569 U CN202390569 U CN 202390569U CN 2011204722884 U CN2011204722884 U CN 2011204722884U CN 201120472288 U CN201120472288 U CN 201120472288U CN 202390569 U CN202390569 U CN 202390569U
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- CN
- China
- Prior art keywords
- heater
- graphite heater
- graphite
- shaped
- disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a graphite heater, which comprises a cylindrical hater body, wherein the top of the heater body is provided with a disk-shaped graphite heater, the bottom of the heater body is provided with a pin which is connected with an electrode, the whole heater body is compote-shaped, and the disk-shaped graphite heater is petal-shaped. According to the graphite heater, the disk-shaped graphite heater is arranged on the top of an existing straight graphite heater, the bottom of the is straight graphite heater is provided with the pin, the whole graphite heater is compote-shaped, so that an electricity heating area is increased, the temperature field inside the heater is table, materials are heated evenly, and the problems that transverse and vertical temperature gradients change greatly, the heat convection inside the heater is severe and the temperature of the furnace field is not stable are solved.
Description
Technical field
The utility model relates to the graphite heater technical field, the semi-conductive graphite heater of specifically a kind of production compound.
Background technology
Continuous development along with science and technology; Compound semiconductor is used by wide sending out, yet the production of compound semiconductor is an endothermic process, so need the outside that heat is provided; Because graphite has the high characteristic of resistivity; So graphite is also big to the inhibition of electric current, when switching on, can discharge great amount of heat to graphite; Moreover because the characteristics that graphite has HMP and high boiling characteristic and under protection of inert gas, can not dissolve, evaporates and react, so graphite usually is used to the semi-conductive single crystal growing furnace heating appliances of production compound.At present, the graphite heater that domestic single crystal growing furnace uses is generally the vertical barrel type graphite heater, and the vertical barrel type graphite heater has laterally, the longitudinal temperature gradient variation is huge, and the interior thermal convection of well heater is violent, the unsettled characteristics of field, stove field temperature.Moreover, be exactly that power consumption is high, be easy to generate heteromorphism.
Summary of the invention
The purpose of the utility model is to overcome the weak point described in the background technology, and a kind of thermal field more uniformly that has is provided, and makes the stable more graphite heater that is used for compound semiconductor production of temperature.
The utility model adopts following technical scheme in order to realize described goal of the invention:
A kind of graphite heater is made up of the tubular heater body, it is characterized in that: described heater body top is provided with a plate-like graphite heater, and the bottom is provided with the pin that links to each other with electrode, and whole heater body is the compote shape.
Described plate-like graphite heater is petal-shaped.
Beneficial effect
The utility model is established a plate-like graphite heater with the top of existing vertical barrel type graphite heater, and a pin is established in the bottom, makes whole graphite heater be the compote shape; Make the area of well heater heating power increase; Make in the well heater temperature more stable, being heated of material is more even, has solved laterally, longitudinal temperature gradient changes huge; The interior thermal convection of well heater is violent, field, stove field temperature problem of unstable.
Description of drawings
Fig. 1 is the vertical view figure of graphite heater;
Fig. 2 is the horizontal section structural representation;
Fig. 3 is the upward view of graphite heater;
Fig. 4 is the graphite heater front view;
1 is heater body; 2 is the plate-like well heater, and 3 is pin.
Embodiment
Below in conjunction with accompanying drawing the utility model is done further explanation.
As depicted in figs. 1 and 2, the utility model is made up of tubular heater body 1, and heater body 1 top is provided with a plate-like graphite heater 2, and the bottom is provided with the pin 3 that links to each other with electrode, and whole heater body 1 is the compote shape.
Preferred construction is: plate-like graphite heater 2 is petal-shaped.
Claims (2)
1. a graphite heater is made up of the tubular heater body, it is characterized in that: described heater body top is provided with a plate-like graphite heater, and the bottom is provided with the pin that links to each other with electrode, and whole heater body is the compote shape.
2. a kind of graphite heater according to claim 1 is characterized in that: described plate-like graphite heater is petal-shaped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204722884U CN202390569U (en) | 2011-11-24 | 2011-11-24 | Graphite heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204722884U CN202390569U (en) | 2011-11-24 | 2011-11-24 | Graphite heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202390569U true CN202390569U (en) | 2012-08-22 |
Family
ID=46665506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204722884U Expired - Fee Related CN202390569U (en) | 2011-11-24 | 2011-11-24 | Graphite heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202390569U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109922545A (en) * | 2017-12-08 | 2019-06-21 | 北京机电工程研究所 | Graphite heating component, graphite heater and design method |
-
2011
- 2011-11-24 CN CN2011204722884U patent/CN202390569U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109922545A (en) * | 2017-12-08 | 2019-06-21 | 北京机电工程研究所 | Graphite heating component, graphite heater and design method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120822 Termination date: 20181124 |