CN201933199U - Graphite heater - Google Patents
Graphite heater Download PDFInfo
- Publication number
- CN201933199U CN201933199U CN2010206950715U CN201020695071U CN201933199U CN 201933199 U CN201933199 U CN 201933199U CN 2010206950715 U CN2010206950715 U CN 2010206950715U CN 201020695071 U CN201020695071 U CN 201020695071U CN 201933199 U CN201933199 U CN 201933199U
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- heater
- graphite
- heater body
- graphite heater
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Abstract
The utility model discloses a graphite heater, which is composed of a tubular heater body, wherein the middle lower portion of the heater body is narrowed, the bottom of the heater body is provided with a pin which is connected to an electrode, and the whole heater body is in a cup shape. The graphite heater has the advantages that the graphite heater enables the middle lower portion of the graphite heater to be narrowed based on an existing cylindrical heater, enables the whole heater body to be in a cup shape and close to crucible supporting bar, enables the lower portion of the heater also to be heated through currents so as to lead temperature fields in the heater to be more stable, and raw materials are subjected to heat evenly. Accordingly, the graphite heater resolves the problems that changes of the transverse and longitudinal temperature gradient are huge, heat convection in the heater is fierce, and temperature fields of a furnace are unstable.
Description
Technical field
The utility model relates to the graphite heater technical field, is specifically related to a kind of production compound semiconductor graphite heater.
Background technology
Develop rapidly along with industrial economy; compound semiconductor is used gradually more widely; group such as gallium arsenide; gallium phosphide; indium antimonides etc. also more and more are subject to people's attention; and produce its most of process of compound semiconductor is endothermic process; promptly need outside heat supplied; because the resistivity of graphite tool is higher; inhibition to electric current is also bigger; when switching on to graphite; can emit big calorimetric; because of it has 3500 ℃ of high-melting-points; the characteristic that high boiling point is 4827 ℃ can not melt under protection of inert gas; evaporation; reaction, so the graphite tool usually is used to the semi-conductive single crystal growing furnace heating appliances of production compound.At present, the used graphite heater of domestic single crystal growing furnace is the straight barrel type graphite heater, and the straight barrel type graphite heater has laterally, the longitudinal temperature gradient variation is huge, and the interior thermal convection of well heater is violent, a furnace temperature temperature unsettled shortcoming.Make that monocrystalline becomes polycrystalline easily in the crystal pulling process, power consumption is too high.
The utility model content
In view of above-mentioned weak point, technical problem to be solved in the utility model is how a kind of thermal field more uniformly that has is provided, and makes the more stable graphite heater that is used for compound semiconductor production of temperature of expecting in the crucible.
The technical problem that the utility model proposed is to solve like this: construct a kind of graphite heater, be made of the tubular heater body, narrow described heater body middle and lower part, and the bottom is provided with the pin that links to each other with electrode, and whole heater body is cup-shaped.
The beneficial effects of the utility model are: the utility model is the middle and lower part of existing straight-tube shape graphite heater is narrowed, make whole heater body cup-shaped, press close to the crucible pressure pin, make the well heater bottom also generate heat by electric current, thereby allow in the well heater temperature more stable, raw material is heated evenly, solved graphite heater laterally, longitudinal temperature gradient changes huge, the interior thermal convection of well heater is violent, a furnace temperature temperature problem of unstable.
Description of drawings
Fig. 1 is a structural representation provided by the utility model.
Fig. 2 is the vertical cross section figure of Fig. 1.
Among the figure: 1. heater body, 2. pin.
Embodiment
Below in conjunction with accompanying drawing the utility model is described further.
As depicted in figs. 1 and 2, a kind of graphite heater is made of tubular heater body 1, and narrow heater body 1 middle and lower part, and the bottom is provided with the pin 2 that links to each other with electrode, and whole heater body 1 is cup-shaped.
Claims (1)
1. a graphite heater is made of tubular heater body (1), and it is characterized in that: narrow described heater body (1) middle and lower part, and the bottom is provided with the pin (2) that links to each other with electrode, and whole heater body (1) is cup-shaped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206950715U CN201933199U (en) | 2010-12-31 | 2010-12-31 | Graphite heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206950715U CN201933199U (en) | 2010-12-31 | 2010-12-31 | Graphite heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201933199U true CN201933199U (en) | 2011-08-17 |
Family
ID=44444732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206950715U Expired - Fee Related CN201933199U (en) | 2010-12-31 | 2010-12-31 | Graphite heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201933199U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102758248A (en) * | 2012-06-20 | 2012-10-31 | 合肥景坤新能源有限公司 | Isothermal type heating system for single crystal furnace |
| CN102758254A (en) * | 2012-06-20 | 2012-10-31 | 合肥景坤新能源有限公司 | Heating system for single crystal furnace |
| CN102794828A (en) * | 2012-08-27 | 2012-11-28 | 北京博宇半导体工艺器皿技术有限公司 | Fixing rod for preparing cylindrical graphite heater and manufacture method of heater |
| CN103160913A (en) * | 2011-12-18 | 2013-06-19 | 洛阳金诺机械工程有限公司 | Temperature gradient controlling device of crystal growth and method thereof |
| CN107460539A (en) * | 2017-06-30 | 2017-12-12 | 内蒙古中环光伏材料有限公司 | A kind of monocrystalline silicon production method of heater and the application heater |
-
2010
- 2010-12-31 CN CN2010206950715U patent/CN201933199U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103160913A (en) * | 2011-12-18 | 2013-06-19 | 洛阳金诺机械工程有限公司 | Temperature gradient controlling device of crystal growth and method thereof |
| CN102758248A (en) * | 2012-06-20 | 2012-10-31 | 合肥景坤新能源有限公司 | Isothermal type heating system for single crystal furnace |
| CN102758254A (en) * | 2012-06-20 | 2012-10-31 | 合肥景坤新能源有限公司 | Heating system for single crystal furnace |
| CN102794828A (en) * | 2012-08-27 | 2012-11-28 | 北京博宇半导体工艺器皿技术有限公司 | Fixing rod for preparing cylindrical graphite heater and manufacture method of heater |
| CN102794828B (en) * | 2012-08-27 | 2016-03-02 | 北京博宇半导体工艺器皿技术有限公司 | Prepare the manufacture method of tubular graphite heater hold-down bars and heater |
| CN107460539A (en) * | 2017-06-30 | 2017-12-12 | 内蒙古中环光伏材料有限公司 | A kind of monocrystalline silicon production method of heater and the application heater |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110817 Termination date: 20131231 |