CN202390538U - Low-temperature acid etching tank - Google Patents
Low-temperature acid etching tank Download PDFInfo
- Publication number
- CN202390538U CN202390538U CN2011205382413U CN201120538241U CN202390538U CN 202390538 U CN202390538 U CN 202390538U CN 2011205382413 U CN2011205382413 U CN 2011205382413U CN 201120538241 U CN201120538241 U CN 201120538241U CN 202390538 U CN202390538 U CN 202390538U
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- tank
- pickling
- pickling tank
- sour
- acid
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Abstract
The utility model belongs to chemical etching devices and particularly relates to a low-temperature acid etching tank having an external freezing tank. The low-temperature acid etching tank comprises a pickling tank, wherein a sliding fixing shaft is arranged at the top of the pickling tank, a pickling mechanism driven by an electrical motor is arranged on the fixing shaft, a rinsing tanks are arranged inside the pickling tank and on the left side of the pickling tank, a multi-layer acid storage freezing tank is arranged on the left side of the pickling tank, an acid pump is arranged at the top of the multi-layer acid storage freezing tank, a suction inlet of the acid pump is arranged at the bottom of the pickling tank, an outlet is arranged at the top of the multi-layer acid storage freezing tank, an acid outlet of the multi-layer acid storage freezing tank is communicated with the pickling tank, a cooling coil is arranged inside the multi-layer acid storage freezing tank, and the cooling coil is connected with a freezing compressor. According to the low-temperature acid etching tank, the cooling coil is arranged inside the pickling tank, and the multi-layer acid storage freezing tank which is used for cooling acid liquor is arranged independently so as to increase the cooling speed of the acid.
Description
Technical field
The utility model belongs to GPP chemical corrosion equipment, particularly a kind of low temperature acid attack groove with external freezing tank.
Background technology
GPP (Glass passivation powder) is meant passivation is carried out with glass powder in the diode chip for backlight unit surface, utilizes the diode of glass protection PN junction.It at first need go out groove in the diode chip for backlight unit surface corrosion, and factors such as the degree of depth of groove, shape can directly have influence on the reverse voltage endurance of diode.Therefore, guttering corrosion is the critical process that the GPP diode chip for backlight unit is made.The temperature of corrosive fluid and homogeneity have very big influence to corrosive effect, in corrosion process, how to guarantee that the corrosive fluid temperature is constant as far as possible, and the concentration of corrosive fluid as far as possible evenly is the problem that corrosion process needs emphasis to consider.
At present GPP chemical corrosion groove cooling system mainly be the etching tank inwall around on a few circle copper pipes, copper pipe is outside to adopt the teflon sleeve protection, prevents copper pipe by acid corrosion, utilizes the refrigeration system of similar air-conditioning to come to lower the temperature to corrosive fluid.Aspect the corrosive fluid homogeneity, the way of employing mainly contains magnetic agitation, bubbling, the circulation of sour pump, gaily decorated basket swing (comprising swing in the horizontal plane, vertical direction swing) etc.The cooling system aspect utilizes copper pipe to add the telescopic scheme, and rate of heat exchange is lower, and the corrosive fluid cooling rate is slow, and the heat that chip and corrosive fluid reaction produce can cause the corrosive fluid temperature sharply to rise, and influences the homogeneity of guttering corrosion.Aspect whipping appts, magnetic agitation is because stirring rotator is little, and mixing effect is undesirable; Though bubbling mode effect is remarkable; But the gas that bubbling is used can be introduced impurity, and the steam that contains in the gas can change the concentration of corrosive fluid, and the oil that contains in the gas can pollute chip surface; Final influence corrosion; Important disadvantages is the most, and there is the potential safety hazard that makes the corrosive fluid splash in Bubbling method, and therefore corrosive fluid stirs the method that seldom adopts bubbling in the industry.
Summary of the invention
To above-mentioned technical problem; The utility model stores up sour freezing tank to acid solution refrigerative multilayer and puies forward highly acid speed of cooling through spiral coil cooling tube being set in pickling tank and being provided with separately; Through the homogenizing plate that is provided with cooled acid can be distributed in the pickling tank uniformly simultaneously; Realized that erosion rate is controlled, improved the corrosive homogeneity.
The technical scheme that realizes the utility model is following:
Low temperature acid attack groove, it comprises pickling tank, the top of pickling tank is provided with the slip stationary shaft; Stationary shaft is provided with motor-driven pickling mechanism, and in the pickling tank and the rinse bath that is arranged on the pickling tank left side, it is characterized in that: the right side of described pickling tank is provided with a multilayer and stores up sour freezing tank; The top that described multilayer is stored up sour freezing tank is provided with sour pump; The acid pump intake is arranged on the bottom of pickling tank, and relief outlet is arranged on the top that multilayer is stored up sour freezing tank, and the acid mouth that goes out that described multilayer is stored up sour freezing tank is communicated with pickling tank; The set inside that described multilayer is stored up sour freezing tank has spiral coil cooling tube, and described spiral coil cooling tube is connected with refrigerant condenser.
The utility model stores up sour freezing tank through the multilayer of independent setting; Improved the speed of cooling of the acid solution after the corrosion; Also guaranteed to reach required temperature after the acid solution cooling, be convenient to control the erosion rate of silicon chip in pickling tank, also improved the homogeneity of acid liquid corrosion simultaneously.
Described pickling mechanism comprises the moving slider that is connected on the stationary shaft, and the top of moving slider is provided with hook, and the push rod that connects moving slider and motor; Hang with the gaily decorated basket that is used for fixing the silicon chip of treating pickling on the described hook; Above-mentioned pickling mechanism has realized the robotization that silicon chip moves in pickling tank, avoided the staff directly to touch acid solution, has prevented the generation of security incident; Automated job also helps improving the homogeneity of acid liquid corrosion simultaneously, guarantees the quality of product.
The edge of the described gaily decorated basket is provided with magnet, and the bottom of described pickling tank also is provided with the magnetic force piece, here through the magnet that is provided with drive the gaily decorated basket cooperating of magnetic force piece and carry out a rotation, improved the homogeneity of silicon slice corrosion.
The described gaily decorated basket comprises peg; Be connected the vertical rod at peg two ends; The bottom of vertical rod is provided with the gaily decorated basket dish of dodecagon, also comprises the fixed link with thread groove that is connected between two gaily decorated basket dishes, and described fixed link is uniformly distributed with setting along the center of gaily decorated basket dish.
Right side in the described pickling tank is set with and is uniformly distributed with the homogenizing plate that is provided with a plurality of through holes from top to bottom, and the homogenizing plate of setting carries out water conservancy diversion to cooled acid solution, makes in the pickling tank temperature of acid solution everywhere identical with concentration, helps follow-up operations.
Inwall around pickling tank is provided with second spiral coil cooling tube, and second spiral coil cooling tube of setting can carry out an adjusting according to the actual temperature of acid solution in the pickling tank, guarantees the needed temperature of silicon chip pickling.
In sum, the utility model stores up sour freezing tank through multilayer reaction acid solution is later carried out a cooling fast, has improved the speed of cooling of the acid solution after the corrosion; Also guaranteed to reach required temperature after the acid solution cooling, be convenient to control the erosion rate of silicon chip in pickling tank, also guaranteed the homogeneity of acid liquid corrosion simultaneously; Simultaneously can in pickling tank, carry out a rotation with it to the gaily decorated basket; Guarantee the corrosion speed of each silicon chip, also help the mixing of the acid solution in the pickling tank, prevented the generation of excessive corrosion; Also can quicken simultaneously the cooling of acid solution, guarantee the temperature of acid solution in the pickling tank at the spiral coil cooling tube of the set inside of pickling tank.
Description of drawings
Fig. 1 is the structural representation of the utility model;
Fig. 2 is the structural representation of the gaily decorated basket;
Among the figure, 1 is pickling tank, and 2 is the magnetic force piece, and 3 is magnet, and 4 is second spiral coil cooling tube, and 5 are the slip stationary shaft; 6 is push rod, and 7 is moving slider, and 8 are hook, and 9 is motor, and 10 is the gaily decorated basket, and 11 is homogenizing plate; 12 is suction port, and 13 is spiral coil cooling tube, and 14 is relief outlet, and 15 is sour pump, and 16 store up sour freezing tank for multilayer, and 17 for going out acid mouthful; 18 is refrigerant condenser, and 19 is rinse bath, and 101 is peg, and 102 is vertical rod, and 103 is gaily decorated basket dish, and 104 is fixed link.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment the utility model is further specified.
Referring to Fig. 1, low temperature acid attack groove, it comprises pickling tank 1; Be used to store acid solution silicon chip is carried out a corrosion processing, the top of pickling tank 1 is provided with slip stationary shaft 5, and stationary shaft 5 is provided with motor-driven pickling mechanism; Described pickling mechanism is used to drive silicon chip and carries out a motion, helps controlling the corrosive degree of depth and shape, in the pickling tank 1 and the rinse bath 19 that is arranged on pickling tank 1 left side; The rinse bath that is provided with is used for pickling silicon chip is later carried out a cleaning, and the right side of described pickling tank 1 is provided with a multilayer and stores up sour freezing tank 16, and multilayer is stored up sour freezing tank and adopted multilayered structure; Can according to the speed of cooling of acid solution with and the size of the amount of pickling tank acid solution select the number of plies, adopted 12 layers of structure design in this embodiment, the top that described multilayer is stored up sour freezing tank 16 is provided with sour pump 15; The suction port 12 of acid pump 15 is arranged on the bottom of pickling tank 1; Relief outlet 14 is arranged on the top that multilayer is stored up sour freezing tank 16, and described sour pump is used for that the acid solution after the corrosion is sucked multilayer and stores up in the sour freezing tank, and the acid mouthfuls 19 of going out that described multilayer is stored up sour freezing tank 16 is communicated with pickling tank 1; The set inside that described multilayer is stored up sour freezing tank 16 has spiral coil cooling tube 13; Described spiral coil cooling tube 13 is connected with refrigerant condenser 18, and the utility model adopts refrigerant condenser with spiral coil cooling tube reacted acid solution to be carried out one and forces to cool off, and can be fast the temperature of acid solution be cooled to required temperature; Be convenient to control the erosion rate of silicon chip in pickling tank, improved the quality of corrosion processing.
Above-mentioned pickling mechanism comprises the moving slider 7 that is connected on the stationary shaft 5, and the top of moving slider 7 is provided with hook 8, and the push rod 6 that connects moving slider 7 and motor 9; Motor described herein is a servomotor; Can control the moving slider slippage accurately, hang with the gaily decorated basket 10 that is used for fixing the silicon chip of treating pickling on the described hook 8, above-mentioned pickling mechanism has realized the robotization that silicon chip moves in pickling tank; Avoided the staff directly to touch acid solution; Prevented the generation of security incident, automated job also helps improving the homogeneity of acid liquid corrosion simultaneously, guarantees the quality of product.
The edge of the described gaily decorated basket 10 is provided with magnet 3; And the bottom of described pickling tank 1 also is provided with magnetic force piece 2; The edge of the gaily decorated basket is a dodecagon in the utility model, and under the effect of magnet and magnetic force piece, the gaily decorated basket can carry out a rotation; The comparatively trench digging environment of uniformity is provided for the silicon chip in the gaily decorated basket, helps the control of depth of corrosion and shape.
The described gaily decorated basket comprises peg 101; Be connected the vertical rod at peg 101 two ends; The bottom of vertical rod is provided with the gaily decorated basket dish 103 of dodecagon; Also comprise the fixed link with thread groove 104 that is connected between two gaily decorated basket dishes 103, described fixed link 104 is uniformly distributed with setting along the center of gaily decorated basket dish, and described magnet is uniformly distributed with the dodecagon that is arranged on gaily decorated basket dish on the cross section that does not become.
Right side in the described pickling tank 1 is set with and is uniformly distributed with the homogenizing plate 11 that is provided with a plurality of through holes from top to bottom; The 11 pairs of cooled acid solutions of homogenizing plate that are provided with are carried out water conservancy diversion; Make in the pickling tank temperature of acid solution everywhere identical, help follow-up operations with concentration.
Inwall around pickling tank 1 is provided with second spiral coil cooling tube 4, and second spiral coil cooling tube 4 of setting can carry out an adjusting according to the actual temperature of acid solution in the pickling tank, guarantees the needed temperature of silicon chip pickling.
Adopted such scheme, the utility model stores up sour freezing tank through multilayer reaction acid solution is later carried out a cooling fast, has improved the speed of cooling of the acid solution after the corrosion; Also guaranteed to reach required temperature after the acid solution cooling, be convenient to control the erosion rate of silicon chip in pickling tank, also guaranteed the homogeneity of acid liquid corrosion simultaneously; Simultaneously can in pickling tank, carry out a rotation with it to the gaily decorated basket; Guarantee the corrosion speed of each silicon chip, also help the mixing of the acid solution in the pickling tank, prevented the generation of excessive corrosion; Also can quicken simultaneously the cooling of acid solution, guarantee the temperature of acid solution in the pickling tank at the spiral coil cooling tube of the set inside of pickling tank.
Claims (6)
1. low temperature acid attack groove, it comprises pickling tank, the top of pickling tank is provided with the slip stationary shaft; Stationary shaft is provided with motor-driven pickling mechanism, and in the pickling tank and the rinse bath that is arranged on the pickling tank left side, it is characterized in that: the right side of described pickling tank is provided with a multilayer and stores up sour freezing tank; The top that described multilayer is stored up sour freezing tank is provided with sour pump; The acid pump intake is arranged on the bottom of pickling tank, and relief outlet is arranged on the top that multilayer is stored up sour freezing tank, and the acid mouth that goes out that described multilayer is stored up sour freezing tank is communicated with pickling tank; The set inside that described multilayer is stored up sour freezing tank has spiral coil cooling tube, and described spiral coil cooling tube is connected with refrigerant condenser.
2. low temperature acid attack groove according to claim 1; It is characterized in that: described pickling mechanism comprises the moving slider that is connected on the stationary shaft; The top of moving slider is provided with hook; And the push rod that connects moving slider and motor, hang with the gaily decorated basket that is used for fixing the silicon chip of treating pickling on the described hook.
3. low temperature acid attack groove according to claim 2, it is characterized in that: the edge of the described gaily decorated basket is provided with magnet, and the bottom of described pickling tank also is provided with the magnetic force piece.
4. low temperature acid attack groove according to claim 2; It is characterized in that: the described gaily decorated basket comprises peg; Be connected the vertical rod at peg two ends; The bottom of vertical rod is provided with the gaily decorated basket dish of dodecagon, also comprises the fixed link with thread groove that is connected between two gaily decorated basket dishes, and described fixed link is uniformly distributed with setting along the center of gaily decorated basket dish.
5. low temperature acid attack groove according to claim 1 is characterized in that: the right side in the described pickling tank is set with and is uniformly distributed with the homogenizing plate that is provided with a plurality of through holes from top to bottom.
6. low temperature acid attack groove according to claim 1 is characterized in that: the inwall around pickling tank is provided with second spiral coil cooling tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205382413U CN202390538U (en) | 2011-12-21 | 2011-12-21 | Low-temperature acid etching tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205382413U CN202390538U (en) | 2011-12-21 | 2011-12-21 | Low-temperature acid etching tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202390538U true CN202390538U (en) | 2012-08-22 |
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ID=46665475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205382413U Expired - Lifetime CN202390538U (en) | 2011-12-21 | 2011-12-21 | Low-temperature acid etching tank |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202390538U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103056349A (en) * | 2013-01-09 | 2013-04-24 | 南昌航空大学 | Method for flowingly corroding complicated slender copper tube cores made of aluminum alloy castings |
| CN107887292A (en) * | 2016-09-30 | 2018-04-06 | 宫朝光 | Silicon chip chemical reduction equipment |
| CN111354662A (en) * | 2020-03-10 | 2020-06-30 | 南通欧贝黎新能源电力股份有限公司 | Pickling device for removing phosphorus and silicon glass from silicon wafer for preparing solar cell |
-
2011
- 2011-12-21 CN CN2011205382413U patent/CN202390538U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103056349A (en) * | 2013-01-09 | 2013-04-24 | 南昌航空大学 | Method for flowingly corroding complicated slender copper tube cores made of aluminum alloy castings |
| CN107887292A (en) * | 2016-09-30 | 2018-04-06 | 宫朝光 | Silicon chip chemical reduction equipment |
| CN111354662A (en) * | 2020-03-10 | 2020-06-30 | 南通欧贝黎新能源电力股份有限公司 | Pickling device for removing phosphorus and silicon glass from silicon wafer for preparing solar cell |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20161221 Address after: 213022 Changzhou, Jiangsu new North District, Tianmu Lake Road, No. 1 Patentee after: Changzhou Star Sea Electronics Co., Ltd. Address before: 213022 Changzhou, Jiangsu new North District, Tianmu Lake Road, No. 1 Patentee before: Changzhou Star Sea Electronics Co., Ltd. Patentee before: Changzhou Star Sea Technolgy Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 213022 Changzhou, Jiangsu new North District, Tianmu Lake Road, No. 1 Patentee after: Changzhou Xinghai Electronic Limited by Share Ltd Address before: 213022 Changzhou, Jiangsu new North District, Tianmu Lake Road, No. 1 Patentee before: Changzhou Star Sea Electronics Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120822 |