CN202374441U - Silicon microphone - Google Patents
Silicon microphone Download PDFInfo
- Publication number
- CN202374441U CN202374441U CN2011204236000U CN201120423600U CN202374441U CN 202374441 U CN202374441 U CN 202374441U CN 2011204236000 U CN2011204236000 U CN 2011204236000U CN 201120423600 U CN201120423600 U CN 201120423600U CN 202374441 U CN202374441 U CN 202374441U
- Authority
- CN
- China
- Prior art keywords
- silicon
- microphone
- sound hole
- chip
- inlet hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 57
- 239000010703 silicon Substances 0.000 title claims abstract description 57
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 56
- 125000006850 spacer group Chemical group 0.000 claims description 18
- 238000010276 construction Methods 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 7
- 230000004888 barrier function Effects 0.000 claims 4
- 238000013461 design Methods 0.000 abstract description 14
- 230000000694 effects Effects 0.000 abstract description 7
- 239000000428 dust Substances 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 2
- 238000005538 encapsulation Methods 0.000 abstract 3
- 238000002955 isolation Methods 0.000 abstract 3
- 230000000903 blocking effect Effects 0.000 abstract 2
- 230000003139 buffering effect Effects 0.000 abstract 2
- 238000007664 blowing Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 14
- 230000008569 process Effects 0.000 description 12
- 230000009471 action Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000035939 shock Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003434 inspiratory effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Images
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011204236000U CN202374441U (en) | 2011-10-31 | 2011-10-31 | Silicon microphone |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011204236000U CN202374441U (en) | 2011-10-31 | 2011-10-31 | Silicon microphone |
Publications (1)
Publication Number | Publication Date |
---|---|
CN202374441U true CN202374441U (en) | 2012-08-08 |
Family
ID=46598128
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2011204236000U Expired - Lifetime CN202374441U (en) | 2011-10-31 | 2011-10-31 | Silicon microphone |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN202374441U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103391502A (en) * | 2013-06-25 | 2013-11-13 | 歌尔声学股份有限公司 | Method for manufacturing waterproof sheets of microphones |
CN112839291A (en) * | 2020-12-24 | 2021-05-25 | 佳禾智能科技股份有限公司 | Device and method for testing pop sound generated by negative pressure of microphone |
-
2011
- 2011-10-31 CN CN2011204236000U patent/CN202374441U/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103391502A (en) * | 2013-06-25 | 2013-11-13 | 歌尔声学股份有限公司 | Method for manufacturing waterproof sheets of microphones |
CN112839291A (en) * | 2020-12-24 | 2021-05-25 | 佳禾智能科技股份有限公司 | Device and method for testing pop sound generated by negative pressure of microphone |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20200615 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
|
TR01 | Transfer of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20120808 |
|
CX01 | Expiry of patent term |