CN203775410U - MEMS microphone - Google Patents
MEMS microphone Download PDFInfo
- Publication number
- CN203775410U CN203775410U CN201420151318.5U CN201420151318U CN203775410U CN 203775410 U CN203775410 U CN 203775410U CN 201420151318 U CN201420151318 U CN 201420151318U CN 203775410 U CN203775410 U CN 203775410U
- Authority
- CN
- China
- Prior art keywords
- cavity
- circuit board
- shell
- mems microphone
- mems
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005540 biological transmission Effects 0.000 claims abstract description 12
- 238000007789 sealing Methods 0.000 claims abstract description 5
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 239000006260 foam Substances 0.000 claims description 3
- 229910000679 solder Inorganic materials 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 2
- 230000003139 buffering effect Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Details Of Audible-Bandwidth Transducers (AREA)
Abstract
The utility model discloses an MEMS microphone. The MEMS microphone comprises a circuit board, a housing in sealing connection with the circuit board, and an MEMS sensor and an ASIC chip which are both arranged on the circuit board and are electrically connected. The housing comprises a primary housing which encloses a first cavity with the circuit board and a secondary housing which encloses a second cavity with the circuit board and is provided with a sound hole. The MEMS sensor and the ASIC chip are arranged in the first cavity, the MEMS sensor and the circuit board commonly enclose a third cavity, and the circuit board is internally provided with a transmission channel communicating with the second cavity and the rear cavity of the MEMS sensor; and the volume sum of the second cavity and the third cavity is smaller than the volume of the first cavity. Since the volume of the first cavity is greater than the volume sum of the second cavity and the third cavity, the sensitivity of the MEMS microphone is substantially improved. At the same time, the second cavity and the transmission channel exhibit air flow buffering and protection effects, and the problem of failure due to the entering of foreign matters is solved.
Description
Technical field
The utility model relates to acoustic-electric switch technology field, more particularly, relates to a kind of MEMS microphone.
Background technology
Existing MEMS(Micro-Electro-Mechanical System, MEMS (micro electro mechanical system)) microphone adopts top to enter sound design.As shown in fig. 1, sound hole 05 is arranged on shell 01; MEMS transducer 04 and ASIC(Application Specific Integrated Circuit, functional integrated circuit) chip 03 is all arranged on circuit board 02, and forms electrical connection by wire.Sound enters from sound hole 05 the ante-chamber 06(being surrounded with circuit board 02 by shell 01 and is connected with the external world) among, and act on MEMS transducer 04 vibrating diaphragm.Because the volume of ante-chamber 06 is much larger than the back cavity 07 of MEMS transducer 04
(vibrating diaphragm in MEMS transducer 04, the cavity that sensor outer housing and circuit board 02 surround jointly, is not in communication with the outside), cause adopting the MEMS sensitivity of microphone of such design lower.Meanwhile, because ante-chamber 06 is directly connected with outside by sound hole 05, extraneous air-flow and foreign matter easily enter into MEMS microphone inside, cause MEMS microphone to lose efficacy.
By the above, how a kind of MEMS microphone of new structure is provided, low to solve existing product sensitivity, the problem easily losing efficacy because of entering of foreign matter, becomes those skilled in the art and needs badly the technical problem of solution.
Utility model content
In view of this, the utility model provides a kind of MEMS microphone, low to solve existing product sensitivity, the problem easily losing efficacy because of entering of foreign matter.
For achieving the above object, the utility model provides following technical scheme:
A kind of MEMS microphone, comprise circuit board, seal the shell that is connected, all the MEMS transducer and the asic chip that are arranged on circuit board and electrically connect each other with circuit board, shell comprises main shell and auxiliary shell, main shell and circuit board surround the first cavity, and MEMS transducer and asic chip are arranged in the first cavity;
On auxiliary shell, be provided with sound hole, auxiliary shell and circuit board surround the second cavity;
MEMS transducer and circuit board surround the 3rd cavity jointly;
Circuit board inside is provided with the transmission channel that is communicated with the second cavity and the 3rd cavity;
The volume sum of the second cavity and the 3rd cavity is less than the first cavity.
Preferably, in above-mentioned MEMS microphone, auxiliary shell is arranged on the outer side near MEMS transducer of main shell.
Preferably, in above-mentioned MEMS microphone, auxiliary shell is arranged on the outer side near asic chip of main shell.
Preferably, in above-mentioned MEMS microphone, sound hole is circular port or square opening.
Preferably, in above-mentioned MEMS microphone, between shell and circuit board, be connected by sealings such as foam, solder(ing) paste or adhesive.
Preferably, in above-mentioned directive property MEMS microphone, main shell and auxiliary shell are integral type structure.
Preferably, in above-mentioned directive property MEMS microphone, between main shell and auxiliary shell, be provided with gap.
Preferably, in above-mentioned directive property MEMS microphone, main shell and auxiliary shell are bonded as one.
The utility model provides a kind of MEMS microphone, comprise circuit board, seal the shell that is connected, all the MEMS transducer and the asic chip that are arranged on circuit board and electrically connect each other with circuit board, shell comprises and surrounds the first cavity main shell with circuit board and surround the second cavity with circuit board and be provided with the auxiliary shell of sound hole, MEMS transducer and asic chip are arranged in the first cavity, MEMS transducer and circuit board surround the 3rd cavity jointly, and circuit board inside is provided with the transmission channel that is communicated with the second cavity and MEMS transducer back cavity; The volume sum of the second cavity and the 3rd cavity is less than the first cavity.
Compared with existing MEMS microphone, in MEMS microphone provided by the utility model, utilize transmission channel to be communicated with the second cavity and the 3rd cavity, because the volume of the first cavity is greater than the volume sum of the second cavity and the 3rd cavity, significantly improved the sensitivity of MEMS microphone.Meanwhile, the second cavity and transmission channel have played buffer gas flow and protective effect, and the foreign matter being entered by sound hole is difficult for touching MEMS transducer and asic chip, thereby have solved the problem losing efficacy because of entering of foreign matter.
Brief description of the drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of existing MEMS microphone;
Fig. 2 provides the structural representation of MEMS microphone for the utility model embodiment;
Fig. 3 provides the structural representation of MEMS microphone for another embodiment of the utility model.
In above Fig. 1-3:
Shell 01, circuit board 02, asic chip 03, MEMS transducer 04, sound hole 05, ante-chamber 06, back cavity 07;
Main shell 1, auxiliary shell 2, circuit board 3, MEMS transducer 4, asic chip 5, sound hole 6, transmission channel 7.
Embodiment
The utility model embodiment discloses a kind of MEMS microphone, low to solve existing product sensitivity, the problem easily losing efficacy because of entering of foreign matter.
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtaining under creative work prerequisite, all belong to the scope of the utility model protection.
Please refer to Fig. 2, in the MEMS microphone that the utility model embodiment provides, comprise main shell 1, auxiliary shell 2, circuit board 3, MEMS transducer 4 and asic chip 5.
The common composition shell of main shell 1 and auxiliary shell 2, both are all connected with circuit board 3 sealings.
Main shell 1 surrounds the first cavity with circuit board 3, and auxiliary shell 2 surrounds the second cavity with circuit board 3.On auxiliary shell 2, be provided with the sound hole 6 that is communicated with the second cavity and space outerpace.
MEMS transducer 4 and asic chip 5 are all arranged on circuit board 3, and are positioned among the first cavity.MEMS transducer 4(comprises sensor housing and vibrating diaphragm etc.) surround the 3rd cavity with circuit board 3.
In circuit board 2, be provided with the transmission channel 7 that is communicated with the second cavity and the 3rd cavity.
The volume of the first cavity is greater than the volume sum of the second cavity and the 3rd cavity.
Compared with existing MEMS microphone, the little ante-chamber that the MEMS microphone that the utility model embodiment provides adopts, the design of large back cavity.Concrete, the first cavity in the present embodiment, is not connected with the external world, is equivalent to the back cavity in existing MEMS microphone; The second cavity in the present embodiment and the 3rd cavity communicate with each other, and are jointly connected with the external world, are equivalent to the ante-chamber in existing MEMS microphone.Because the volume of the first cavity is greater than the volume sum of the second cavity and the 3rd cavity, by changing the volume ratio of front/back cavity, make back cavity volume larger, significantly improve the acoustical behavior such as sensitivity, the signal to noise ratio index of MEMS microphone.
Meanwhile, MEMS transducer 4 and asic chip 5 all by main shell 1 enclosed package in the first cavity, well protected.Vibrating diaphragm in MEMS transducer 4 will could be connected with the external world by the 3rd cavity, transmission channel and the second cavity, cushioning effect is played to air-flow in tortuous passageway and the space of three's composition, the foreign matter that enters into MEMS microphone is difficult for touching MEMS transducer 4, thereby has solved the problem losing efficacy because of entering of foreign matter.
Concrete, in the MEMS microphone providing at above-described embodiment, auxiliary shell 2 both can be as shown in Figure 2, is arranged on the outer side near MEMS transducer 4 of main shell 1; Also can be as shown in Figure 3, be arranged on the outer side near asic chip 5 of main shell 1.Meanwhile, sound hole 6 both can adopt circular port, also can this A Yong square opening.Its concrete selection needs those skilled in the art to judge in conjunction with actual conditions, repeats no more herein.
Preferably, in the MEMS microphone providing at above-described embodiment, between shell and circuit board 3, be connected by sealings such as foam, solder(ing) paste or adhesive.
Concrete, in the MEMS microphone providing at above-described embodiment, transmission channel 7 can be both the hollow channel directly processing in circuit board 3, also can be for being arranged on the individual components on circuit board 3.As, first the installation position of groove shape is set on circuit board 2, then on the surface of installation position, covering is set, its part is hidden, thus " hollow pipeline " formula of formation structure.Those skilled in the art, according to conventional means, can utilize multiple mode to realize this structure of transmission channel in MEMS microphone, repeat no more herein.
In order to simplify production technology, reduce production costs, in the technical scheme providing at another embodiment of the utility model, main shell 2 is integral type structure with auxiliary shell 3.That is, be provided with in the shell of two sound holes one, be divided into main shell part and auxiliary housing parts by dividing plate, thus realize with above-described embodiment in the function of split type main shell 2 and auxiliary shell 3.
Further, in the directive property MEMS microphone providing at above-described embodiment, between main shell 2 and auxiliary shell 3, both can leave certain gap, and make to be separated from each other; Also main shell 2 and auxiliary shell 3 can be bonded as one, thereby make the structure of directive property MEMS microphone more firm.
In this specification, each embodiment adopts the mode of going forward one by one to describe, and what each embodiment stressed is and the difference of other embodiment, between each embodiment identical similar part mutually referring to.
To the above-mentioned explanation of the disclosed embodiments, make professional and technical personnel in the field can realize or use the utility model.To be apparent for those skilled in the art to the multiple amendment of these embodiment, General Principle as defined herein can, in the situation that not departing from spirit or scope of the present utility model, realize in other embodiments.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (8)
1. a MEMS microphone, comprise circuit board, seal the shell that is connected, all the MEMS transducer and the asic chip that are arranged on described circuit board and electrically connect each other with described circuit board, it is characterized in that, described shell comprises main shell and auxiliary shell, described main shell and described circuit board surround the first cavity, and described MEMS transducer and described asic chip are arranged in described the first cavity;
On described auxiliary shell, be provided with sound hole, described auxiliary shell and described circuit board surround the second cavity;
Described MEMS transducer and described circuit board surround the 3rd cavity jointly;
Described circuit board inside is provided with the transmission channel that is communicated with described the second cavity and described the 3rd cavity;
The volume sum of described the second cavity and described the 3rd cavity is less than described the first cavity.
2. MEMS microphone according to claim 1, is characterized in that, described auxiliary shell is arranged on the outer side near described MEMS transducer of described main shell.
3. MEMS microphone according to claim 1, is characterized in that, described auxiliary shell is arranged on the outer side near described asic chip of described main shell.
4. MEMS microphone according to claim 1, is characterized in that, described sound hole is circular port or square opening.
5. MEMS microphone according to claim 1, is characterized in that, between described shell and described circuit board, is connected by sealings such as foam, solder(ing) paste or adhesive.
6. directive property MEMS microphone according to claim 1, is characterized in that, described main shell and described auxiliary shell are integral type structure.
7. directive property MEMS microphone according to claim 1, is characterized in that, between described main shell and described auxiliary shell, is provided with gap.
8. directive property MEMS microphone according to claim 1, is characterized in that, described main shell and described auxiliary shell are bonded as one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420151318.5U CN203775410U (en) | 2014-03-31 | 2014-03-31 | MEMS microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420151318.5U CN203775410U (en) | 2014-03-31 | 2014-03-31 | MEMS microphone |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203775410U true CN203775410U (en) | 2014-08-13 |
Family
ID=51292550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420151318.5U Expired - Lifetime CN203775410U (en) | 2014-03-31 | 2014-03-31 | MEMS microphone |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203775410U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104301850A (en) * | 2014-11-11 | 2015-01-21 | 山东共达电声股份有限公司 | Silicon microphone |
| CN105721998A (en) * | 2016-04-27 | 2016-06-29 | 歌尔声学股份有限公司 | Separated cavity packaging structure of integrated sensor |
| CN108712695A (en) * | 2018-05-18 | 2018-10-26 | 维沃移动通信有限公司 | The manufacturing method and terminal of a kind of microphone module, printing board PCB |
-
2014
- 2014-03-31 CN CN201420151318.5U patent/CN203775410U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104301850A (en) * | 2014-11-11 | 2015-01-21 | 山东共达电声股份有限公司 | Silicon microphone |
| CN105721998A (en) * | 2016-04-27 | 2016-06-29 | 歌尔声学股份有限公司 | Separated cavity packaging structure of integrated sensor |
| CN108712695A (en) * | 2018-05-18 | 2018-10-26 | 维沃移动通信有限公司 | The manufacturing method and terminal of a kind of microphone module, printing board PCB |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103888879A (en) | Directional MEMS microphone | |
| US10567858B2 (en) | Loudspeaker module and terminal device | |
| CN103888880A (en) | Directional MEMS microphone | |
| JP2012506173A5 (en) | ||
| CN105721998A (en) | Separated cavity packaging structure of integrated sensor | |
| CN203775410U (en) | MEMS microphone | |
| CN203775411U (en) | MEMS microphone | |
| CN205179362U (en) | Single directional MEMS microphone | |
| CN204968106U (en) | Directional MEMS microphone | |
| CN103313172A (en) | Micromechanical Sound Transducer Arrangement and a Corresponding Production Method | |
| CN103957498A (en) | Side-sound-input silicon microphone packaging structure | |
| CN202663538U (en) | Mems microphone | |
| US10104476B2 (en) | Miniature loudspeaker | |
| CN201860438U (en) | Loudspeaker module | |
| CN203883957U (en) | Loudspeaker module | |
| CN204968105U (en) | Directional MEMS microphone | |
| CN202799144U (en) | Micro-electromechanical systems (MEMS) microphone | |
| CN204442688U (en) | Mems microphone | |
| CN206413130U (en) | A kind of integrating device of microphone and environmental sensor | |
| CN102395093A (en) | Silicic miniature microphone | |
| CN202663539U (en) | MEMS (micro-electro-mechanical system) microphone | |
| CN202679624U (en) | Mems microphone | |
| CN203193893U (en) | MEMS (micro-electromechanical systems) microphone | |
| CN203748005U (en) | MEMS microphone | |
| CN202679629U (en) | MEMS (Micro-electromechanical System) microphone |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140813 |