CN202355972U - 一种化学气相沉积尾气处理装置 - Google Patents
一种化学气相沉积尾气处理装置 Download PDFInfo
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CN2011204351757U CN202355972U (zh) | 2011-11-04 | 2011-11-04 | 一种化学气相沉积尾气处理装置 |
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CN2011204351757U CN202355972U (zh) | 2011-11-04 | 2011-11-04 | 一种化学气相沉积尾气处理装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114053818A (zh) * | 2021-11-03 | 2022-02-18 | 中国科学院金属研究所 | 利用CVI法或CVD法制备SiC基体或SiC涂层用尾气处理装置和尾气处理方法 |
CN114086149A (zh) * | 2021-11-10 | 2022-02-25 | 贵州省紫安新材料科技有限公司 | 一种分体式结构的化学气相沉积炉 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114053818A (zh) * | 2021-11-03 | 2022-02-18 | 中国科学院金属研究所 | 利用CVI法或CVD法制备SiC基体或SiC涂层用尾气处理装置和尾气处理方法 |
CN114053818B (zh) * | 2021-11-03 | 2022-07-05 | 中国科学院金属研究所 | 利用CVI法或CVD法制备SiC基体或SiC涂层用尾气处理装置和尾气处理方法 |
CN114086149A (zh) * | 2021-11-10 | 2022-02-25 | 贵州省紫安新材料科技有限公司 | 一种分体式结构的化学气相沉积炉 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: BEIJING BAIMTEC MATERIAL CO., LTD. Free format text: FORMER OWNER: BEIJING BAIMU AERONAUTIC MATERIAL HIGH-TECHNOLOGY CO., LTD. Effective date: 20150122 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 100095 HAIDIAN, BEIJING TO: 100000 HAIDIAN, BEIJING |
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Effective date of registration: 20150122 Address after: 100000 Beijing city Haidian District Yongxiang Road No. 5 Building 1 room 206 2 Patentee after: BEIJING YOUCAI BAIMU AVIATION EQUIPMENT CO., LTD. Address before: 100095 box 63, box 81, Beijing Patentee before: Beijing Baimu Aeronautic Material High-Technology Co., Ltd. |
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CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20120801 |