CN202351019U - Device for testing reflectivity of optical thin-film at fixed angle - Google Patents
Device for testing reflectivity of optical thin-film at fixed angle Download PDFInfo
- Publication number
- CN202351019U CN202351019U CN201120463809XU CN201120463809U CN202351019U CN 202351019 U CN202351019 U CN 202351019U CN 201120463809X U CN201120463809X U CN 201120463809XU CN 201120463809 U CN201120463809 U CN 201120463809U CN 202351019 U CN202351019 U CN 202351019U
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- optical
- optical fiber
- light
- fixed
- fixed angle
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- 230000003287 optical effect Effects 0.000 title claims abstract description 25
- 238000012360 testing method Methods 0.000 title claims abstract description 18
- 239000010409 thin film Substances 0.000 title claims abstract description 17
- 238000002310 reflectometry Methods 0.000 title abstract description 9
- 239000013307 optical fiber Substances 0.000 claims abstract description 32
- 239000000523 sample Substances 0.000 claims abstract description 31
- 239000000835 fiber Substances 0.000 claims description 6
- 238000003780 insertion Methods 0.000 abstract 3
- 230000037431 insertion Effects 0.000 abstract 3
- 230000000903 blocking effect Effects 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 5
- 238000010276 construction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000012788 optical film Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000010183 spectrum analysis Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
The utility model belongs to the field of optical thin-film device reflectivity measuring devices, in particular to a device for testing the reflectivity of an optical thin-film at a fixed angle. The device comprises a fixed rack (3), wherein optical fiber probe insertion holes (8) are symmetrically formed in the fixed rack (3); a light through hole (4) is formed at the bottom of each optical fiber probe insertion hole (8) along the direction of a light path; an incidence reflection channel (9) which is communicated with the light through hole (4) is formed at the bottom of the fixed rack (3); an optical fiber probe is arranged in each optical fiber probe insertion hole (8) and comprises an optical fiber and a focusing lens (5), and the focusing lens (5) is arranged at the front end of the optical fiber to change the propagation direction of light; and an anti-interference light blocking sheet (7) is fixed on the lower part of the fixed rack (3). The device for testing the reflectivity of the optical thin-film at the fixed angle is simple in structure and high in generality, and can directly measure the reflectivity of curved and planar thin-film devices.
Description
Technical field
The utility model belongs to device of optical film measuring apparatus for reflection index field, relates in particular to a kind of fixed angle optical thin film reflectance test device that is suitable for plane, measurement of curved surface.
Background technology
The measuring method of optical thin film spectrum is more, but it is comparatively difficult by a certain incident angle measurement of reflectivity to measure curved surface, and conventional spectrometer does not still possess this function.In addition, existing measurement mechanism also exists complex structure aspect structural design, and versatility is poor, direct problem such as measure spectrum reflectivity difficulty on the device of optical film of plane and curved surface.
The utility model content
The utility model is intended to overcome prior art and provides a kind of simple in structure, and highly versatile can be realized the fixed angle optical thin film reflectance test device that curved surface and flat film device reflectivity are directly measured.
For solving the problems of the technologies described above, the utility model is to realize like this.
A kind of fixed angle optical thin film reflectance test device, it comprises: fixed mount; In said fixed mount, be arranged with the fibre-optical probe patchhole; Bottom at said fibre-optical probe patchhole is provided with light hole along optical path direction; Be provided with the incidence reflection passage that communicates with light hole in the bottom of said fixed mount; Said fibre-optical probe patchhole is built-in goes into the optical fiber probe.
As a kind of preferred version, the said fibre-optical probe of the utility model comprises optical fiber and condenser lens; Said condenser lens places the front end of optical fiber, to change the direction of propagation of light.
As a kind of preferred version, the utility model is fixed with the anti-disturbing light catch in the bottom of said fixed mount.
Further, the utility model is provided with the contact fulcrum in the bottom of said anti-disturbing light catch.
Further, the said contact fulcrum of the utility model is three, and its longitudinal cross-section is semicircle.
In addition, the utility model is provided with the fiber position lock screw at the end regions of said optical fiber.
The fixed angle reflectance test device of the utility model design, it is simple in structure, and highly versatile can be realized the direct measurement of curved surface and flat film device reflectivity.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is described further.
Fig. 1 is the one-piece construction synoptic diagram of the utility model.
Fig. 2 is the utility model fixed mount one-piece construction synoptic diagram.
Fig. 3 is the utility model fibre-optical probe one-piece construction synoptic diagram.
Among the figure: 1, incident optical; 2, reflection receives optical fiber; 3, fixed mount; 4, light hole; 5, condenser lens; 6, contact fulcrum; 7, anti-disturbing light catch; 8, fibre-optical probe patchhole; 9, incidence reflection passage; 10, fiber position lock screw.
Embodiment
As shown in the figure, fixed angle optical thin film reflectance test device, it comprises: fixed mount 3; In said fixed mount 3, be arranged with fibre-optical probe patchhole 8; Bottom at said fibre-optical probe patchhole 8 is provided with light hole 4 along optical path direction; Be provided with the incidence reflection passage 9 that communicates with light hole 4 in the bottom of said fixed mount 3; Said fibre-optical probe patchhole 8 is built-in goes into the optical fiber probe.
The said fibre-optical probe of the utility model comprises optical fiber and condenser lens 5; Said condenser lens 5 places the front end of optical fiber, to change the direction of propagation of light.
The utility model is fixed with anti-disturbing light catch 7 in the bottom of said fixed mount 3.The utility model is provided with contact fulcrum 6 in the bottom of said anti-disturbing light catch 7, said contact fulcrum 6 is three, and its longitudinal cross-section is semicircle.The utility model is provided with fiber position lock screw 10 at the end regions of said optical fiber.
Referring to Fig. 1, the utility model mainly comprises a fixing main part, two incident opticals and reflects the reception fibre-optical probe.Two fibre-optical probes that fibre-optical probe is individually fixed in device insert in the hole.Optical fiber is connected to light source and receiver.The angle of two fibre-optical probe patchholes can realize the measurement of different light rays incident angle according to requiring design.
(1) incident optical, reflection receive optical fiber: incident light and receiving element are provided.Incident light is radiated at the device under test surface after the incident optical lens focus, after direct reflection, incide in the reflection collectiong focusing lens, is coupled into reception optical fiber.
(2) fixed mount:, guarantee that the relative position of probe remains unchanged with a certain special angle fixing optical fiber probe.
(3) light hole: light hole is positioned at the front end of optical fiber, and incident light is radiated at minute surface to be measured through light hole, and reflected light gets into reflection and receives optical fiber behind light hole, and light hole guarantees that the light of certain orientation incides substrate surface to be tested, plays the effect of diaphragm.
(4) condenser lens: condenser lens is positioned at the optical fiber front end, converges the light that incides condenser lens, changes the direction of propagation of light.
(5) contact fulcrum: the contact fulcrum is the contact point of test probe and minute surface, totally three fulcrums.Fulcrum adopts semi-circular design, when the testing curved surface device, can guarantee all to realize contacting with curved surface, makes reflection ray fully get into reception optical fiber.
(6) anti-disturbing light catch: the anti-disturbing light catch is circular back-up ring, is fixed on the probe bottom, prevents that external stray light from getting in the optical fiber.
(7) fibre-optical probe patchhole: fixing optical fiber probe, spacing behind the optic fibre patchhole, can not move.
(8) fiber position lock screw: when needs adjustment focal beam spot,, change the focus form and the effect of hot spot, fix through lock screw through the distance of adjustment optical fiber head and lens.
The utility model incident optical and reflection receive optical fiber and are fixed on the fixed support, and fixed support is placed on the eyeglass to be tested, and three fulcrums contact with mirror point.Light is radiated on the minute surface to be measured through incident optical, after direct reflection, is reflected to receive the optical fiber reception, incides and carries out spectral analysis in the receiver.
Be with being appreciated that; More than about the specific descriptions of the utility model; Only be used to the utility model is described and be not to be subject to the described technical scheme of the utility model embodiment; Those of ordinary skill in the art should be appreciated that still and can make amendment or be equal to replacement the utility model, to reach identical technique effect; As long as satisfy the use needs, all within the protection domain of the utility model.
Claims (6)
1. a fixed angle optical thin film reflectance test device is characterized in that, comprising: fixed mount (3); In said fixed mount (3), be arranged with fibre-optical probe patchhole (8); Bottom at said fibre-optical probe patchhole (8) is provided with light hole (4) along optical path direction; Be provided with the incidence reflection passage (9) that communicates with light hole (4) in the bottom of said fixed mount (3); Said fibre-optical probe patchhole (8) is built-in goes into the optical fiber probe.
2. fixed angle optical thin film reflectance test device according to claim 1 is characterized in that: said fibre-optical probe comprises optical fiber and condenser lens (5); Said condenser lens (5) places the front end of optical fiber, to change the direction of propagation of light.
3. fixed angle optical thin film reflectance test device according to claim 2 is characterized in that: be fixed with anti-disturbing light catch (7) in the bottom of said fixed mount (3).
4. fixed angle optical thin film reflectance test device according to claim 3 is characterized in that: be provided with contact fulcrum (6) in the bottom of said anti-disturbing light catch (7).
5. fixed angle optical thin film reflectance test device according to claim 4, it is characterized in that: said contact fulcrum (6) is three, its longitudinal cross-section is semicircle.
6. according to the arbitrary described fixed angle optical thin film reflectance test device of claim 2～5, it is characterized in that: the end regions at said optical fiber is provided with fiber position lock screw (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120463809XU CN202351019U (en) | 2011-11-21 | 2011-11-21 | Device for testing reflectivity of optical thin-film at fixed angle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120463809XU CN202351019U (en) | 2011-11-21 | 2011-11-21 | Device for testing reflectivity of optical thin-film at fixed angle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202351019U true CN202351019U (en) | 2012-07-25 |
Family
ID=46540016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120463809XU Expired - Lifetime CN202351019U (en) | 2011-11-21 | 2011-11-21 | Device for testing reflectivity of optical thin-film at fixed angle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202351019U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105823440A (en) * | 2016-03-18 | 2016-08-03 | 南京工程学院 | Optical fiber angular displacement sensor based on differential light intensity principle and measurement method |
| CN112964456A (en) * | 2021-02-08 | 2021-06-15 | 上海天马微电子有限公司 | Device for testing film reflectivity and method for testing film reflectivity |
-
2011
- 2011-11-21 CN CN201120463809XU patent/CN202351019U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105823440A (en) * | 2016-03-18 | 2016-08-03 | 南京工程学院 | Optical fiber angular displacement sensor based on differential light intensity principle and measurement method |
| CN112964456A (en) * | 2021-02-08 | 2021-06-15 | 上海天马微电子有限公司 | Device for testing film reflectivity and method for testing film reflectivity |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: SHENYANG ACADEMY OF INSTRUMENTATION SCIENCE CO., L Free format text: FORMER NAME: SHENYANG INSTRUMENT SCIENTIFIC ACADEMY |
|
| CP01 | Change in the name or title of a patent holder |
Address after: 110043 Beihai street, Shenyang, Liaoning, No. 242 Patentee after: Shenyang Academy of Instrumentation Science Co., Ltd. Address before: 110043 Beihai street, Shenyang, Liaoning, No. 242 Patentee before: Shenyang Instrument Scientific Academy |
|
| CX01 | Expiry of patent term |
Granted publication date: 20120725 |
|
| CX01 | Expiry of patent term |