CN202323119U - Furnace cover of single crystal furnace - Google Patents

Furnace cover of single crystal furnace Download PDF

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Publication number
CN202323119U
CN202323119U CN2011203899961U CN201120389996U CN202323119U CN 202323119 U CN202323119 U CN 202323119U CN 2011203899961 U CN2011203899961 U CN 2011203899961U CN 201120389996 U CN201120389996 U CN 201120389996U CN 202323119 U CN202323119 U CN 202323119U
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CN
China
Prior art keywords
bell
passage
single crystal
observation
growing furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2011203899961U
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Chinese (zh)
Inventor
王元斌
邹宇琦
曹凤凯
刘献伟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHANGHAI SKT OPTOELECTRONIC MATERIAL CO Ltd
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SHANGHAI SKT OPTOELECTRONIC MATERIAL CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN2011203899961U priority Critical patent/CN202323119U/en
Application granted granted Critical
Publication of CN202323119U publication Critical patent/CN202323119U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a furnace cover of a single crystal furnace. The furnace cover is provided with a seed crystal rod passage and at least on observation window; the observation window is at least one observation passage raised out of the upper surface of the furnace cover; glass is arranged in the observation passage; and a sheltering mechanism for optionally opening or closing the observation passage is arranged below the glass. The furnace cover of the single crystal furnace has the advantages of simple structure, high support strength, low possibility of damage to the observation windows, and comprehensive observation on the growth of crystals in the furnace.

Description

The bell of single crystal growing furnace
Technical field
The utility model belongs to sapphire production unit technical field, relates to producing sapphire sapphire single-crystal stove, relates in particular to the bell of single crystal growing furnace.
Background technology
The sapphire single-crystal stove is with Al 2O 3Powdered or block raw material is made into arranges orderly monocrystalline sapphire crystalline visual plant, and sapphire crystal is the important substrate material of LED product.Sapphire good stability, character cooperate and to be superior to other substrate materials, its electrical isolation, transparent, be prone to advantages such as heat conduction, hardness is high, wear-resisting, become the most rising present LED substrate material.And LED is a long and multiduty environmental protection light source of a kind of energy-conserving and environment-protective, life-span, also is state key development environmental protection and energy saving projects.So the development of sapphire crystal directly influences the development of LED industry.
In growing sapphire monocrystalline process, need to observe the process of growth of sapphire single-crystal body through form, be convenient to ordering parameter, obtain high-quality sapphire single-crystal body.Present monocrystalline bell all is the inner concave surface structure, and such structure difficulty of processing is big, and unstable to the support of seed crystal, just following seed crystal technology has been produced difficulty.Yet present single crystal growing furnace form all is again to use double-deck silica glass, and middle logical water coolant constitutes.Complicated with cooling water passage structure, and need the assembling cooling water recirculation system, the mobile of water can produce the ripples line simultaneously, and accuracy is observed in influence, because the temperature in the sapphire single-crystal stove is up to 2100 ℃, the inhomogeneous meeting of water coolant causes glass broken.In addition, it all is one-sided observation that present sapphire single-crystal stove form is observed, and such observation has limitation, can not fully understand the full condition of crystal growth.So we cover three inclination forms of design at the plane sapphire single crystal growing furnace and observe simultaneously, and the position of observing in the stove is identical, growth can be held fully to crystalline like this, is convenient to design variable, grows fine sapphire single-crystal body
The utility model content
The utility model technical problem to be solved provides a kind of simple in structure, and the bell of the non-damageable single crystal growing furnace of observation window is to overcome the deficiency that prior art exists.
In order to solve the problems of the technologies described above, the utility model adopts following technical scheme:
A kind of bell of single crystal growing furnace; Have seed rod passage and observation window on it; It is characterized in that: said observation window is raised in the observation passage of bell upper surface at least one; Be provided with glass in the said observation passage, glass is fixed on the upper position of observing the passage raised body, and said glass below is provided with the guard mechanism that optionally opens or closes said observation passage.
In order to observe central zone in the stove, said observation passage is centroclinal to bell.
In order all to observe crystal growth situation in the stove from different perspectives, said observation passage has 2, is distributed on the bell.
In the embodiment of the utility model, said guard mechanism is a baffle plate of being located at the bell lower surface.Said bell upper surface is provided with the knob that passes bell, and the lower end of said knob connects said baffle plate.Realize driving baffle plate through knob just and open or close said observation passage.
In the utility model embodiment, said seed rod passage is positioned at the center of bell, observes passage for 2 and is provided with around said seed rod passage.
In the embodiment of the utility model, said seed rod passage is by tang on corrugated tube, the bell and connect that air locking and the tongued and grooved flanges between the tang constitutes on corrugated tube, the bell.
The upper surface and the lower surface of said bell are the plane.
Adopt technique scheme, that the bell of the single crystal growing furnace of the utility model has is simple in structure, support strength big, observation window cracky and crystal growth in the stove observed comprehensive advantage not.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is described:
Fig. 1 is the three-dimensional structure diagram one of the utility model;
Fig. 2 is the three-dimensional structure diagram two of the utility model;
Fig. 3 is the side-view of the utility model;
Fig. 4 is the lower surface synoptic diagram of the bell of the utility model;
Among the figure: the 100-bell, 200-seed rod passage, the 201-corrugated tube, tang on the 202-bell, 203-tongued and grooved flanges 203,300-observes passage, 401-knob, 402-baffle plate.
Embodiment
As depicted in figs. 1 and 2, the bell 100 of the single crystal growing furnace of the utility model, the upper surface and the lower surface of bell 100 are the plane.Has seed rod passage 200 in bell 100 central positions; Evenly be intervally distributed with 2 columned observation passages 300 that are raised in the bell upper surface around this seed rod passage 200; And it is all centroclinal to stove 100 lids to observe passage 300, with these 2 observation windows of observing passage 300 as the utility model.The glass that is positioned at the viewing window outside is installed in observing passage 300.Seal with sealing-ring between glass and the observation passage 300.
Seed rod passage 200 comprises tang 202 and air locking between them and tongued and grooved flanges 203 on corrugated tube 201, the bell.The upper end of corrugated tube 201 lower ends and bell epirelief outlet 202 is blocked with tongued and grooved flanges 203 and is connected, between seal with air locking (being sealing-ring).
In addition, corresponding each observation passage 300 also is provided with and is used for the alternative guard mechanism of observing passage 300 that opens and closes.This guard mechanism is that a baffle plate 401 and a knob 402 constitute, and knob 402 is arranged on the upper surface and the lower end of bell 100 and passes bell 100.Baffle plate 401 is an oblong plate, is positioned at the lower surface of bell 100, and an end of this baffle plate 401 is connected with the lower end of knob 402.Like this, in bell, can block observation passage 300, baffle plate 401 usefulness knobs 402 controls revolution with baffle plate 401; Rotating to certain angle makes and observes passage 200 and open and just can observe the interior situation of stove; Again knob 402 is rotated back to equal angular after having observed and block subjectivity and examine passage 300, help protective glass work at high temperature like this, this angle of rotation is a fixed; In case excessively rotation, the sealing effectiveness that influence is inner; Seal with sealing-ring in the bell outside between knob 402 and the bell 100.
It more than is exactly the bell 100 of the single crystal growing furnace of the utility model; The upper surface of bell 100 and lower surface all adopt the plane, help improving the support strength of bell like this, and the columned observation passage of convexity that adopts three inclinations in addition is as observation window and combine the guard mechanism of form; Design not only can be from crystalline growing state in the omnibearing observation stove of all angles like this; And be not easy also to cause that observation window is damaged by high temperature, simultaneously this relatively simple for structure, saved cooling water recirculation system; Do not have the existence of ripples line, more help accurate observation.
The utlity model has best observing effect in order to make, the utility model should combine Fig. 3 and Fig. 4 to implement by following formula:
sin θ = h + L + H h + L · d D - - - ( 1 )
R = L + H tan θ - - - ( 2 )
φ = arctan ( ( h + L ) cot θ + d 2 sin θ h + L ) - arctan ( ( h + L ) cot θ - d 2 sin θ h + L ) - - - ( 3 )
y 1 = R · H sin θ - d ( H + L ) R sin θ · ( h + L ) + d ( L + H ) · ( L + h ) - - - ( 4 )
y 1 = R · H sin θ + d ( H + L ) R sin θ · ( h + L ) - d ( L + H ) · ( L + h ) - - - ( 5 )
In the formula: H for the optimum depth that will observe; D for the diameter of liquid level at the optimum depth place that will observe; θ is the form design point of view; But the viewing angle that Φ designs for form; R is the distance (confirm the position of form) of the focus of form center and bell upper surface to the bell center; D is the interior diameter of form passage; H is the height of form apart from the bell upper surface; L is the thickness of bell; Y1 is that form can be observed the distance of the vertex of body of heater hub to bell; Y2 is that form can be observed the distance of the valley of body of heater hub to bell; β is for inspecting the angle between the mouth.
The meaning of formula (1) is, can calculate and observe the degree of depth is H, and diameter is the optimum design angle θ of form in the zone of D.The meaning of formula (2) is, has calculated the form angle and has confirmed that the back is in the stove covering position.The meaning of formula (3) is, but calculated the viewing angle of form.The meaning of formula (4) and formula (5) is, can estimate the objective use range of this form.Generally between y1 and y2.
Case-study:
H=800mm,D=250mm,h=81mm,L=30mm,d=30mm;
Then can calculate:
θ=80°,R=145mm,Φ=15.2°。
The degree of depth that can observe is within 303mm-is greater than the 1462mm scope.
Certainly, in concrete design, can come design angle, to reach best observing effect according to concrete demand.
Therefore, can find out that the bell of the single crystal growing furnace of the utility model has is simple in structure, support strength big, observation window cracky and crystal growth in the stove observed comprehensive advantage not through above-mentioned detailed description.
But; Those skilled in the art will recognize that; Above-mentioned embodiment is exemplary, is to be the restriction that this patent is comprised scope in order better to make those skilled in the art can understand this patent, can not to be interpreted as; So long as according to spirit that this patent discloses done anyly be equal to change or modify, all fall into the scope that this patent comprises.

Claims (9)

1. the bell of a single crystal growing furnace; Have seed rod passage and observation window on it; It is characterized in that: said observation window is raised in the observation passage of bell upper surface at least one; Be provided with glass in the said observation passage, said glass below is provided with the guard mechanism that optionally opens or closes said observation passage.
2. the bell of single crystal growing furnace according to claim 1, it is characterized in that: said observation passage is centroclinal to bell.
3. the bell of single crystal growing furnace according to claim 2, it is characterized in that: said observation passage has 2, is distributed on the bell.
4. the bell of single crystal growing furnace according to claim 3, it is characterized in that: said guard mechanism is a baffle plate of being located at the bell lower surface.
5. the bell of single crystal growing furnace according to claim 4, it is characterized in that: said bell upper surface is provided with the knob that passes bell, and the lower end of said knob connects said baffle plate.
6. the bell of single crystal growing furnace according to claim 5, it is characterized in that: said baffle plate is an oblong.
7. the bell of single crystal growing furnace according to claim 3, it is characterized in that: said seed rod passage is positioned at the center of bell, observes passages and is provided with around said seed rod passage for said 2.
8. the bell of single crystal growing furnace according to claim 1 is characterized in that: said seed rod passage is by tang on corrugated tube, the bell and connect that air locking and the tongued and grooved flanges between the tang constitutes on corrugated tube, the bell.
9. the bell of single crystal growing furnace according to claim 1, it is characterized in that: the upper surface and the lower surface of said bell are the plane,
CN2011203899961U 2011-10-14 2011-10-14 Furnace cover of single crystal furnace Expired - Fee Related CN202323119U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011203899961U CN202323119U (en) 2011-10-14 2011-10-14 Furnace cover of single crystal furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011203899961U CN202323119U (en) 2011-10-14 2011-10-14 Furnace cover of single crystal furnace

Publications (1)

Publication Number Publication Date
CN202323119U true CN202323119U (en) 2012-07-11

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CN2011203899961U Expired - Fee Related CN202323119U (en) 2011-10-14 2011-10-14 Furnace cover of single crystal furnace

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023173786A1 (en) * 2022-03-14 2023-09-21 银川隆基光伏科技有限公司 Connecting assembly, image collection apparatus and high-temperature furnace

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023173786A1 (en) * 2022-03-14 2023-09-21 银川隆基光伏科技有限公司 Connecting assembly, image collection apparatus and high-temperature furnace

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C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120711

Termination date: 20131014