CN201890928U - Vapor phase deposition furnace - Google Patents
Vapor phase deposition furnace Download PDFInfo
- Publication number
- CN201890928U CN201890928U CN2010206171805U CN201020617180U CN201890928U CN 201890928 U CN201890928 U CN 201890928U CN 2010206171805 U CN2010206171805 U CN 2010206171805U CN 201020617180 U CN201020617180 U CN 201020617180U CN 201890928 U CN201890928 U CN 201890928U
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- Prior art keywords
- phase deposition
- gears
- gaseous phase
- gear
- furnace
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001947 vapour-phase growth Methods 0.000 title abstract 4
- 238000010438 heat treatment Methods 0.000 claims abstract description 10
- 230000008021 deposition Effects 0.000 claims description 21
- 239000007792 gaseous phase Substances 0.000 claims description 20
- 230000008878 coupling Effects 0.000 claims description 8
- 238000010168 coupling process Methods 0.000 claims description 8
- 238000005859 coupling reaction Methods 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000000151 deposition Methods 0.000 description 16
- 229910052582 BN Inorganic materials 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 241000282693 Cercopithecidae Species 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
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- Chemical Vapour Deposition (AREA)
Abstract
The utility model aims to provide a vapor phase deposition furnace, which comprises a furnace body, a heating body, an air inlet, an air outlet and dies, wherein the air inlet is formed at the bottom or on the top of the furnace body. The vapor phase deposition furnace is characterized in that: a rotary mechanism is arranged inside or outside the furnace body, and consists of 1 to 36 gears, a rotating disc, a gear sleeve, a bevel gear unit, a connecting shaft and a motor; the motor is connected with the rotating disc through the bevel gear unit; the gears are fixed on the rotating disc through the connecting shaft; the gear sleeve is fixed at the peripheries of all the gears, and is engaged with the gears; the rotating disc drives the gears to rotate along the disc-shaped gear sleeve; one die is hung or erected on each gear; and through the rotation and revolution of the dies along with the gears, the revolution and rotation of a product in the furnace are realized. When the vapor phase deposition furnace is used for preparing a pyrolytic boron nitride (PBN) product, the quality of the PBN product can be enhanced, the production efficiency can be improved, and the production cost is lowered.
Description
Technical field
This practicality belongs to the technical field of chemical vapor deposition (CVD), and a kind of gaseous phase deposition stove is provided especially.
Background technology
Boron nitride has very high thermostability, its goods are indispensable apparatus in the preparation process of the many novel materials of high-technology field, pyrolitic boron nitride goods with the vapour deposition process making, wall is thin, density is high, intensity is high, material-saving and yield rate height, become a kind of method that is in daily use, the particularly preparation of pyrolitic boron nitride crucible in the boron nitride prod preparation.
Common gaseous phase deposition stove comprises several parts such as body of heater, heating member, inlet mouth, air outlet, mould, inlet mouth is at bottom of furnace body or top, the air outlet is relative with it usually, for making vapour deposition even, inlet mouth often adopts the mode of concentric drums, the mold alignment inlet mouth, and have gear to make each product of only hanging all carry out rotation.Yet, when making large-sized pyrolitic boron nitride goods, cause the bottom of a pan thicker easily, and sidewall is thinner, simultaneously because unstripped gas in inhomogeneous in spatial distribution, causes the uneven phenomenon of Thickness Distribution to happen occasionally.When making a plurality of pyrolitic boron nitride goods simultaneously, also cause Thickness Distribution inhomogeneous easily.
Summary of the invention
The purpose of this utility model is to provide a kind of gaseous phase deposition stove, and the inlet mouth of this gaseous phase deposition stove is three concentric(al) circles inlet mouths, is provided with rotating mechanism in body of heater or outside the body of heater, can have that many product molds revolve round the sun in stove simultaneously, rotation.Adopt this gaseous phase deposition stove to prepare pyrolitic boron nitride (PBN) goods, can improve PBN quality product and production efficiency thereof, reduce production costs.
The utility model specifically provides a kind of gaseous phase deposition stove, this gaseous phase deposition stove comprises body of heater, heating member, inlet mouth, air outlet and mould, inlet mouth is at bottom of furnace body or top, it is characterized in that: be provided with rotating mechanism in body of heater or outside the body of heater, described rotating mechanism is by 1 ~ 36 gear, rotating disk, the tooth cover, the conical gear group, coupling shaft and motor are formed, motor links to each other with rotating disk by the conical gear group, gear is fixed on the rotating disk by coupling shaft, it is peripheral fixing that tooth is enclosed within all gears, and and toothing, the dial rotation driven gear is along the rotation of disc type tooth cover, all hang on each gear or a upright mould, mould is along with the rotation revolution of gear has realized revolution and the rotation of product (mould) in stove.
The gaseous phase deposition stove that the utility model provides is characterized in that: upper end or the lower end of described rotating mechanism in stove.
The gaseous phase deposition stove that the utility model provides is characterized in that: inlet mouth is three concentric(al) circles inlet mouths (quantity of inlet mouth is generally 2 ~ 12).As required, three concentric(al) circles inlet mouth principles are extensible is the air inlet pattern of arc, semicircle, rectangle or the like.Adopt three concentric(al) circles air inlets can make the unstripped gas blended more even, cause gas that tangible segregation does not take place, make the monkey color even of many in a big crucible and a stove.Three concentric(al) circles inlet mouths are better than concentric(al) circles inlet mouth for the effect of production large size product.
Adopt gaseous phase deposition stove preparation that the utility model provides and product, consistent size, color normalizing, specification are identical, when improving product percent of pass, have also improved its production efficiency greatly.
Description of drawings
Three gaseous phase deposition stove structure iron of Fig. 1 one stove;
Five gaseous phase deposition stove structure iron of Fig. 2 one stove.
Embodiment
Embodiment 1
As shown in Figure 1, this gaseous phase deposition stove comprises double-walled water-cooled body of heater 1, inlet mouth 2, air outlet 3, mould 4, rotating mechanism 5 and heating element 6, and wherein rotating mechanism is made up of rotating disk 5.1, gear 5.2, coupling shaft 5.3, conical gear group 5.4, tooth cover 5.5 and motor 5.6.Heating element 6 is made up of ruhmkorff coil 6.1, heating member 6.2 and graphite sleeve 6.3.Wherein motor 5.6 links to each other with rotating disk 5.1 by conical gear group 5.4, and two gears 5.2 are fixed on rotating disk 5.1 times by coupling shaft, and all hangs a mould 4 under each gear.Tooth cover 5.5 is placed on the graphite sleeve 6.3 and with all gears 5.2 and meshes.Inlet mouth 2 is three concentric(al) circles inlet mouths, is arranged on the body of heater lower end.
As shown in Figure 2, this gaseous phase deposition stove comprises double-walled water-cooled body of heater 1, inlet mouth 2, air outlet 3, mould 4, rotating mechanism 5 and heating element 6, and wherein rotating mechanism is made up of rotating disk 5.1, gear 5.2, coupling shaft 5.3, conical gear group 5.4, tooth cover 5.5 and motor 5.6.Heating element 6 is made up of ruhmkorff coil 6.1, heating member 6.2 and graphite sleeve 6.3.Wherein motor 5.6 links to each other with rotating disk 5.1 by conical gear group 5.4, and five gears 5.2 are fixed on the rotating disk 5.1 by coupling shaft, and an all upright mould 4 on each gear.Tooth cover 5.5 is placed on the graphite sleeve 6.3 and with all gears 5.2 and meshes.Inlet mouth 2 is three concentric(al) circles inlet mouths, is arranged on the body of heater upper end.
Claims (4)
1. gaseous phase deposition stove, this gaseous phase deposition stove comprises body of heater, heating element, inlet mouth, air outlet and mould, inlet mouth is at bottom of furnace body or top, it is characterized in that: be provided with rotating mechanism in body of heater or outside the body of heater, described rotating mechanism is made up of 1 ~ 36 gear, rotating disk, tooth cover, conical gear group, coupling shaft and motor, motor links to each other with rotating disk by the conical gear group, gear is fixed on the rotating disk by coupling shaft, it is peripheral fixing that tooth is enclosed within all gears, and and toothing, all hang on each gear or a upright mould.
2. according to the described gaseous phase deposition stove of claim 1, it is characterized in that: upper end or the lower end of described rotating mechanism in stove.
3. according to claim 1 or 2 described gaseous phase deposition stoves, it is characterized in that: inlet mouth is three concentric(al) circles inlet mouths.
4. according to the described gaseous phase deposition stove of claim 3, it is characterized in that: three concentric(al) circles inlet mouths are arc, semicircle or rectangular air inlet pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206171805U CN201890928U (en) | 2010-11-22 | 2010-11-22 | Vapor phase deposition furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206171805U CN201890928U (en) | 2010-11-22 | 2010-11-22 | Vapor phase deposition furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201890928U true CN201890928U (en) | 2011-07-06 |
Family
ID=44220405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206171805U Expired - Fee Related CN201890928U (en) | 2010-11-22 | 2010-11-22 | Vapor phase deposition furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201890928U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102021533A (en) * | 2010-11-22 | 2011-04-20 | 赵凤鸣 | Chemical vapor deposition technology and vapor deposition furnace for preparing pyrolytic boron nitride (PBN) products |
| CN102796995A (en) * | 2012-08-27 | 2012-11-28 | 北京博宇半导体工艺器皿技术有限公司 | Vapor deposition furnace and method for preparing pyrolytic boron nitride product |
| CN102839361A (en) * | 2011-10-24 | 2012-12-26 | 南通天华和睿科技创业有限公司 | Chemical vapor deposition furnace |
| CN108414671A (en) * | 2018-03-02 | 2018-08-17 | 上海理工大学 | Air-sensitive performance is tested and photocatalytic degradation evaluates combined apparatus |
| CN113005426A (en) * | 2021-02-18 | 2021-06-22 | 上海韵申新能源科技有限公司 | Preparation method and equipment of pyrolytic boron nitride |
-
2010
- 2010-11-22 CN CN2010206171805U patent/CN201890928U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102021533A (en) * | 2010-11-22 | 2011-04-20 | 赵凤鸣 | Chemical vapor deposition technology and vapor deposition furnace for preparing pyrolytic boron nitride (PBN) products |
| CN102021533B (en) * | 2010-11-22 | 2012-08-08 | 赵凤鸣 | Chemical vapor deposition technology and vapor deposition furnace for preparing pyrolytic boron nitride (PBN) products |
| CN102839361A (en) * | 2011-10-24 | 2012-12-26 | 南通天华和睿科技创业有限公司 | Chemical vapor deposition furnace |
| CN102796995A (en) * | 2012-08-27 | 2012-11-28 | 北京博宇半导体工艺器皿技术有限公司 | Vapor deposition furnace and method for preparing pyrolytic boron nitride product |
| CN102796995B (en) * | 2012-08-27 | 2015-01-28 | 北京博宇半导体工艺器皿技术有限公司 | Vapor deposition furnace and method for preparing pyrolytic boron nitride product |
| CN108414671A (en) * | 2018-03-02 | 2018-08-17 | 上海理工大学 | Air-sensitive performance is tested and photocatalytic degradation evaluates combined apparatus |
| CN113005426A (en) * | 2021-02-18 | 2021-06-22 | 上海韵申新能源科技有限公司 | Preparation method and equipment of pyrolytic boron nitride |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: ZHAO LIN Effective date: 20130522 Owner name: CHANGSHU EAST STAR ELECTRONIC MATERIAL CO., LTD. Free format text: FORMER OWNER: ZHAO FENGMING Effective date: 20130522 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 110000 SHENYANG, LIAONING PROVINCE TO: 215500 SUZHOU, JIANGSU PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130522 Address after: 215500 Jiangsu Province Economic and Technological Development Zone Changshou City Maqiao industrial square 22 Patentee after: Changshu East Star Electronic Material Co., Ltd. Address before: Wu'ai street in Shenhe District of Shenyang City, Liaoning province 110000 building 15-28 1-13-1 Patentee before: Zhao Fengming Patentee before: Zhao Lin |
|
| ASS | Succession or assignment of patent right |
Owner name: JIANGSU ZHAOMING INFORMATION MATERIALS CO., LTD. Free format text: FORMER OWNER: CHANGSHU EAST STAR ELECTRONIC MATERIAL CO., LTD. Effective date: 20150723 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150723 Address after: 215513 Jiangsu city of Changzhou Province, Changshu economic and Technological Development Zone, Road No. 6 Building 22 Patentee after: JIANGSU ZHAOMING INFORMATION MATERIAL CO., LTD. Address before: 215500 Jiangsu Province Economic and Technological Development Zone Changshou City Maqiao industrial square 22 Patentee before: Changshu East Star Electronic Material Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110706 Termination date: 20161122 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |