CN102605420A - Full-angle view window of kyropoulos method mono-crystal furnace - Google Patents
Full-angle view window of kyropoulos method mono-crystal furnace Download PDFInfo
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- CN102605420A CN102605420A CN2012100717655A CN201210071765A CN102605420A CN 102605420 A CN102605420 A CN 102605420A CN 2012100717655 A CN2012100717655 A CN 2012100717655A CN 201210071765 A CN201210071765 A CN 201210071765A CN 102605420 A CN102605420 A CN 102605420A
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Abstract
The invention relates to a full-angle view window of a kyropoulos method mono-crystal furnace, which is structurally characterized in that the top of a seed rod is connected with a corrugated pipe through a convex furnace cover port in the center of the furnace cover and a sealed connector, thus the seed rod can be controlled by the corrugated pipe in the vacuum condition. The furnace is in the structure that the upper part and the lower part of the furnace cover are planes, and the furnace cover is provided with three view windows, the three view windows are aslant arranged in an array on the furnace cover by three view window cylinders, and are higher than the furnace cover, the tops of the view window cylinders are provided with quartz glass through sealing rings, and the furnace cover at the lower ends of the three view window cylinders is provided with three baffle plates controlled by control buttons. When the kyropoulos method mono-crystal furnace is required to be observed, the situation in the furnace can be observed through the view windows by unwinding the baffle plates. When the kyropoulos method mono-crystal furnace does not need to be observed, the lower ends of the view windows are shielded by the baffle plates, and the normal operation of the quartz glass can be protected by the heat insulation function of the baffle plates. The full-angle view window is suitable for technicians to clearly observe the growth situation of crystals in the kyropoulos method mono-crystal furnace, is beneficial for technicians to control and adjust in time, and is beneficial for the growth of the high-quality sapphire crystals.
Description
Technical field
The present invention relates to the synthetic sapphire technical field, relate to the design and the manufacturing of sapphire single-crystal stove, concrete is a kind of full angle form of kyropoulos single crystal growing furnace.
Background technology
The sapphire single-crystal stove is with aluminum oxide (Al
2O
3) block raw material or sapphire seed crystal be made into the visual plant of arranging orderly sapphire crystal.And the good stability of sapphire crystal, its insulation, transparent, be prone to advantages such as heat conduction, hardness is high, wear-resisting and make it to become semi-conductor GaN/Al
2O
3Photodiode (LED), large-scale integrated circuit SOI and SOS and the important substrate material of superconducting nano structural membrane are big rising crystalline materials.At present, LED has obtained good development and application, becomes a kind of energy-conserving and environment-protective, long, multiduty environmental protection light source of life-span, and therefore, the development of sapphire crystal can directly influence the development of LED industry.
In the process of utilizing single crystal growing furnace synthetic sapphire monocrystalline, need to observe the process of growth of sapphire single-crystal through the form on the body of heater, in time ordering parameter is produced high-quality sapphire single-crystal body.Therefore, how can observe the complete generating state of sapphire single-crystal in the single crystal growing furnace all sidedly, become the problem that the producer is concerned about.
Existing single crystal growing furnace, what the form on the body of heater adopted is double-deck silica glass, the centre of double-deck silica glass is provided with cooling water recirculation system.The weak point of existing window structure is: the mobile of water can produce ripple in the middle of (1) double-deck silica glass, and the accuracy of the complete generation of sapphire single-crystal is observed in influence; (2) since sapphire single-crystal stove stove in temperature up to 2100 ℃, in case the inhomogeneous fragmentation that will cause sight glass of water coolant; (3) the inside of form is a concave structure, and not only difficulty of processing is very big for this, and the form that can carry out to observe all be one-sided observation, this has limitation with regard to the observation that makes form, not enough to the sow support of operation of seed crystal, the operation that seed crystal is sowed is so not convenient; (4) can not fully understand the top and bottom of crystal growth in the stove through form.
Summary of the invention
The objective of the invention is to address the above problem; A kind of full angle form of kyropoulos single crystal growing furnace is provided; It is not only simple in structure, easy for installation, can under 2100 ℃ high temperature, work; And the complete process of growth of sapphire single-crystal in can the complete observation single crystal growing furnace, understand operation conditions whole in the stove.
For realizing above-mentioned purpose, the technical scheme that the present invention takes is:
A kind of full angle form of kyropoulos single crystal growing furnace; Contain body of heater, crucible, bell, crucible is set in body of heater, seed rod is set in the centre of crucible; It is characterized in that; The vertical seal channel of water-cooled seed rod comprises tang, be tightly connected body and corrugated tube on the bell that is arranged on bell central authorities, and tang is connecting corrugated tube through the body that is tightly connected on the said bell, has realized that vacuum state connects through the vacuum-sealing of corrugated tube to seed rod down; The upper and lower surfaces of said bell is a two dimensional structure all, and three forms are set on bell, i.e. first form, second form, the 3rd form and three baffle controls buttons; Described three forms are through three form cylindrical shells; Promptly the first form cylindrical shell, the second form cylindrical shell, the 3rd form cylindrical shell are sealedly connected on the bell and are higher than the plane of bell: define a vertical plane; Said vertical plane is perpendicular to bell surface and the diameter through bell; The medullary ray of said form cylindrical shell is positioned on the said vertical plane and favours the bell surface; Said form cylindrical shell heart line and the nearly center of circle of said bell diameter end therein forms the obtuse angle of one 120 °～125 ° of degree; Said form cylindrical shell heart line and the said bell diameter center of circle far away end therein forms the acute angle of one 55 °～60 ° of degree, and the intersection point of the medullary ray of said form cylindrical shell and bell upper surface is the certain distance of maintenance to the bell center, and described three form cylindrical shells become array to be arranged on the bell; Silica glass is installed through sealing-ring in top at described three form cylindrical shells, makes silica glass and body of heater maintain certain distance; Can observe the intravital single crystal growing of single crystal growing furnace stove zone in full angle ground through described three forms; The lower surface of the bell that connects in said three form cylindrical shell lower ends is provided with three fast baffle plates, and the position of described three the form cylindrical shells of said three fast baffle plates correspondences also is connected with described three baffle controls buttons; Described three fast baffle plates receive the control of three baffle controls buttons: when needing to observe; Can observe through form through baffle controls button turn-off baffle plate; In the time of need not observing, heat insulation effect is played in the lower end that baffle plate is covered form, protection silica glass working order at high temperature.
Optional, described three forms, i.e. first form, second form, the 3rd form and said three form cylindrical shells, the i.e. first form cylindrical shell, the second form cylindrical shell, the 3rd form cylindrical shell employing circular configuration.
Further, described silica glass and described three form cylindrical shells, promptly the first form cylindrical shell, the second form cylindrical shell, the 3rd form cylindrical shell seal installation in vertical state in the top and the form cylindrical shell axis of cylindrical shell.
Optional, described baffle plate is long oval structure, and an end is the connecting shaft end, and the other end is open movable end; The angle of rotation of said open movable end is a fixed, can prevent that baffle plate excessively rotates, and influences the sealing effectiveness of form lower end.
Optional, described baffle plate is the baffle plate with the metal molybdenum material.
The positively effect of the full angle form of a kind of kyropoulos single crystal growing furnace of the present invention is:
(1) the full angle form of three inclinations of design on the planar bell; Situation in the clear observation kyropoulos single crystal growing furnace of ability; Helping the technician well holds the operation conditions of single crystal growing furnace; The crystalline growth parameter(s) is made adjustment the most accurately, thereby grow fine sapphire single-crystal body.
(2) lower end of full angle form is blocked with baffle plate at ordinary times, and the effect of heat insulation of baffle plate can guarantee the normal operating conditions of silica glass under 2100 ℃ of high temperature, can prolong the result of use and the work-ing life of silica glass.
(3) be connected with the body that is tightly connected between the upper end of corrugated tube lower end and bell protrusion mouthful, realized under the vacuum state sealing seed rod.
(4) working efficiency of the kyropoulos single crystal growing furnace of full angle form of the present invention being installed can be higher.
Description of drawings
Accompanying drawing 1 is the structural representation of the full angle form of a kind of kyropoulos single crystal growing furnace of the present invention;
Label among the figure is respectively:
1, crucible; 2, seed rod; 3, bell; 4, tang on the bell; 5, the body that is tightly connected;
6, corrugated tube; 71, first form; 72, second form; 73, the 3rd form;
81, the first form cylindrical shell; 82, the second form cylindrical shell; 83, the 3rd form cylindrical shell; 9, baffle controls button.
Accompanying drawing 2 is the schema of the full angle form of a kind of kyropoulos single crystal growing furnace of invention.
Embodiment
Continue to explain the practical implementation situation of the full angle form of a kind of kyropoulos single crystal growing furnace of the present invention below in conjunction with accompanying drawing, still, enforcement of the present invention is not limited to following embodiment.
Referring to accompanying drawing 1, a kind of full angle form of kyropoulos single crystal growing furnace contains body of heater, crucible 1, bell 3, and the substruction of body of heater is with the structure of existing kyropoulos single crystal growing furnace.In the centre of crucible 1 seed rod 2 is set, seed rod 2 tops are connected on the bell of bell 3 central authorities on the tang 4, and tang 4 is connected with corrugated tube 6 through the body 5 that is tightly connected on the said bell, can be implemented in the control of passing through 6 pairs of seed rods 2 of corrugated tube under the vacuum state.
The upper and lower surfaces of said bell 3 all is a two dimensional structure, and three forms are set on bell 3, i.e. first form 71, second form 72, the 3rd form 73 and three baffle controls buttons 9.Described three forms are through three form cylindrical shells, and promptly the first form cylindrical shell 81, the second form cylindrical shell 82 and the 3rd form cylindrical shell 83 are sealedly connected on the bell 3 and are higher than the plane of bell 3.Can define a vertical plane earlier during enforcement: said vertical plane also passes through the diameter of bell 3 perpendicular to bell 3 surfaces; The medullary ray of said form cylindrical shell is positioned on the said vertical plane and favours bell 3 surfaces; Said form cylindrical shell heart line and the nearly center of circle of said bell 3 diameters end therein forms the obtuse angle of one 120 °～125 ° of degree; Said form cylindrical shell heart line and the said bell diameter center of circle far away end therein forms the acute angle of one 55 °～60 ° of degree; The intersection point of the medullary ray of said form cylindrical shell and bell 3 upper surfaces keeps certain distance to bell 3 centers, become array that (three concrete method of calculation that are provided with of form cylindrical shell are described in detail when introducing Fig. 2 below again) on the bell 3 is set described three form cylindrical shells.Described three forms and described three form cylindrical shells can adopt circular configuration.Silica glass is installed through sealing-ring in top at described three form cylindrical shells, makes silica glass keep certain distance through sealing-ring and body of heater.
Silica glass and three form cylindrical shells are sealed installation in vertical state in the top and the form cylindrical shell axis of cylindrical shell.Like this, through the silica glass on three forms, promptly through the silica glass on first form 71, second form 72 and the 3rd form 73 just can full angle ground to observe the intravital single crystal growing of single crystal growing furnace stove regional.
For guaranteeing silica glass works better at high temperature, the present invention is provided with three baffle plate (not shown) on the lower surface of described three form cylindrical shell lower ends connection bell 3.The position that corresponding described three the form cylindrical shells in position are set of said three baffle plates also is connected with described three baffle controls buttons 9.
Said baffle plate should be taked the baffle plate with the metal molybdenum material, and they can resist high temperature effectively.Said baffle plate can design the growth oval structure, and its protruding end is the connecting shaft end, is connected with baffle controls button 9; Its other end should be arranged to fixed with the angle of rotation of said open movable end for open movable end, in case the excessive rotation of baffle plate and influence the sealing effectiveness of form lower end.
Described three baffle plates receive the control of three baffle controls buttons 9: when needing to observe; Can observe through form through baffle controls button 9 turn-off baffle plates: described three baffle plates can separately be opened one by one; Like this, can protect the silica glass on the form of observing better.In the time of need not observing, thermal insulation protection is played in the lower end that baffle plate is covered form, protects the normal operating conditions of silica glass under 2100 ℃ of high temperature, also can prolong the result of use and the work-ing life of silica glass.
In the present embodiment, though there is not sealed structure between baffle plate and the form,, because body of heater inside has been vacuum condition, so the opening and closing of baffle plate can not influence the variation of stove internal gas pressure.Attention: baffle plate must be closed when not observing! Because 2100 ℃ high temperature is certain to influence the life-span and the sealing effectiveness of silica glass on the full angle form.
Referring to accompanying drawing 2.Accompanying drawing 2 is the schema of the full angle form of a kind of kyropoulos single crystal growing furnace of the present invention, and the label among the figure is respectively: D for the diameter of the crucible 1 that will observe; D is the interior diameter of form passage; H for the height of the crucible 1 that will observe; H1 is that form is apart from bell 3 surface height; H2 is the distance of bell 3 apart from mouth of pot; θ is the angle of inclination of form; L is the distance (confirm the position of form) of the intersection point of form channel center and bell 3 upper surfaces to the bell center.
Described three form cylindrical shells; Promptly the first form cylindrical shell 81, the second form cylindrical shell 82 and the 3rd form cylindrical shell 83 adopt the angle precise design; Can be above bell 3 through the form full angle to observing in the kyropoulos single crystal growing furnace; Help observing the growing state of sapphire single-crystal comprehensively, on a large scale, help operation conditions in the single crystal growing furnace and crystalline growth parameter(s) are made judgement accurately, more favourable to the operation of Sapphire Crystal Growth.
The threshold value of said form channel diameter can be calculated by formula (1),
The critical range of said form channel position can be calculated by formula (2),
The critical angle that said form passage tilts can be calculated by formula (3),
In practical implementation of the present invention, can set:
D >=form channel diameter threshold value,
The critical range of L≤form channel position,
The critical angle that θ >=form passage tilts,
If: H=500mm; D=250mm; H1=80mm; H2=600mm;
Then can calculate: d=29.413mm; L=275mm; θ=55.6
o
Certainly; In the design of concrete kyropoulos single crystal growing furnace full angle form; Can carry out concrete design and adjustment according to particular case angle and positions to form in reasonable range such as the diameter of single crystal growing furnace, height, concrete calculating and design are carried out in the size of the crucible 1 that uses by reality and the position of crucible 1.
The above is merely preferred implementation of the present invention; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from structure of the present invention; Can also make some improvement and retouching, these improvement and retouching also should be regarded as in protection scope of the present invention.
Claims (6)
1. the full angle form of a kyropoulos single crystal growing furnace; Contain body of heater, crucible (1), bell (3); Crucible (1) is set in body of heater; In the centre of crucible (1) seed rod (3) is set, it is characterized in that, the vertical seal channel of water-cooled seed rod (3) comprises tang (4), the body that is tightly connected (5) and corrugated tube (6) on the bell that is arranged on bell (3) central authorities; Tang on the said bell (4) is connecting corrugated tube (6) through the body that is tightly connected (5), has realized that vacuum state connects through the vacuum-sealing of corrugated tube (6) to seed rod (2) down; The upper and lower surfaces of said bell (3) all is a two dimensional structure, and three forms are set on bell (3), i.e. first form (71), second form (72), the 3rd form (73) and three baffle controls buttons (9); Described three forms are through three form cylindrical shells; Promptly the first form cylindrical shell (81), the second form cylindrical shell (82), the 3rd form cylindrical shell (83) are sealedly connected on the plane that bell (3) were gone up and be higher than to bell (3): define a vertical plane; Said vertical plane also passes through the diameter of bell (3) perpendicular to bell (3) surface; The medullary ray of said form cylindrical shell is positioned on the said vertical plane and favours bell (3) surface; Said form cylindrical shell heart line and the nearly center of circle of said bell (3) diameter end therein forms the obtuse angle of one 120 °～125 ° of degree; Said form cylindrical shell heart line and the said bell diameter center of circle far away end therein forms the acute angle of one 55 °～60 ° of degree; The intersection point of the medullary ray of said form cylindrical shell and bell (3) upper surface keeps certain distance to bell (3) center, described three form cylindrical shells become array to be arranged on the bell; Silica glass is installed through sealing-ring in top at described three form cylindrical shells, makes silica glass and body of heater maintain certain distance; Can observe the intravital single crystal growing of single crystal growing furnace stove zone in full angle ground through described three forms; The lower surface of the bell (3) that connects in said three form cylindrical shell lower ends is provided with three fast baffle plates, and the position of described three the form cylindrical shells of said three fast baffle plates correspondences also is connected with described three baffle controls buttons (9); Described three fast baffle plates receive the control of three baffle controls buttons (9): when needing to observe; Can observe through form through baffle controls button (9) turn-off baffle plate; In the time of need not observing; Heat insulation effect is played in the lower end that baffle plate is covered form, protection silica glass working order at high temperature.
2. the full angle form of a kind of kyropoulos single crystal growing furnace according to claim 1 is characterized in that, the distance that the intersection point of the medullary ray of said form cylindrical shell and bell (3) upper surface keeps to bell (3) center is calculated by following formula:
The calculation formula of said form channel diameter is:
The calculation formula of said form passage critical localisation is:
?；
The calculation formula at said form passage angle of inclination is:
In the formula:
D is the diameter of crucible (1);
D is the interior diameter of form passage;
H is the height of crucible (1);
H1 is that form is apart from bell (3) surface height;
H2 is the distance of bell (3) apart from mouth of pot;
θ is the angle of inclination of form;
L is the distance of the intersection point of form channel center and bell (3) upper surface to the bell center.
3. the full angle form of a kind of kyropoulos single crystal growing furnace according to claim 1; It is characterized in that; Described three forms; I.e. first form (71), second form (72), the 3rd form (73) and said three form cylindrical shells, promptly the first form cylindrical shell (81), the second form cylindrical shell (82), the 3rd form cylindrical shell (83) adopt circular configuration.
4. according to the full angle form of claim 1 or 3 described a kind of kyropoulos single crystal growing furnaces; It is characterized in that; Described silica glass and described three form cylindrical shells, promptly the first form cylindrical shell (81), the second form cylindrical shell (82), the 3rd form cylindrical shell (83) seal installation in vertical state in the top and the form cylindrical shell axis of cylindrical shell.
5. the full angle form of a kind of kyropoulos single crystal growing furnace according to claim 1 is characterized in that described baffle plate is long oval structure, and an end is the connecting shaft end, and the other end is open movable end; The angle of rotation of said open movable end is a fixed, can prevent that baffle plate excessively rotates, and influences the sealing effectiveness of form lower end.
6. the full angle form of a kind of kyropoulos single crystal growing furnace according to claim 5 is characterized in that, described baffle plate is the baffle plate with the metal molybdenum material.
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| CN2012100717655A CN102605420A (en) | 2012-03-19 | 2012-03-19 | Full-angle view window of kyropoulos method mono-crystal furnace |
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| CN2012100717655A CN102605420A (en) | 2012-03-19 | 2012-03-19 | Full-angle view window of kyropoulos method mono-crystal furnace |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102953122A (en) * | 2012-11-14 | 2013-03-06 | 吴江亿泰真空设备科技有限公司 | Novel observation window mechanism of sapphire crystal growth device |
| CN102965725A (en) * | 2012-12-19 | 2013-03-13 | 苏州巍迩光电科技有限公司 | Upper insulating screen for sapphire growth kyropoulos furnace |
| CN103774225A (en) * | 2013-03-28 | 2014-05-07 | 山东紫晶光电新材料有限公司 | Gem furnace body |
| CN104630888A (en) * | 2014-12-18 | 2015-05-20 | 福建鑫晶精密刚玉科技有限公司 | Visual crucible cover for sapphire growth furnace |
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| CN103774225A (en) * | 2013-03-28 | 2014-05-07 | 山东紫晶光电新材料有限公司 | Gem furnace body |
| CN104630888A (en) * | 2014-12-18 | 2015-05-20 | 福建鑫晶精密刚玉科技有限公司 | Visual crucible cover for sapphire growth furnace |
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Application publication date: 20120725 |