CN202322983U - U-shaped conductive ceramic evaporation boat - Google Patents
U-shaped conductive ceramic evaporation boat Download PDFInfo
- Publication number
- CN202322983U CN202322983U CN2011204434355U CN201120443435U CN202322983U CN 202322983 U CN202322983 U CN 202322983U CN 2011204434355 U CN2011204434355 U CN 2011204434355U CN 201120443435 U CN201120443435 U CN 201120443435U CN 202322983 U CN202322983 U CN 202322983U
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- Prior art keywords
- boat
- conductive ceramic
- evaporation boat
- shaped conductive
- ceramic evaporation
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Abstract
The utility model relates to a conductive ceramic evaporation boat, in particular to a U-shaped conductive ceramic evaporation boat. The U-shaped conductive ceramic evaporation boat comprises a boat body, wherein a material groove is formed in the upper part of the boat body. The U-shaped conductive ceramic evaporation boat is characterized in that clamp grooves are formed in two ends at the lower part of the boat body respectively. The U-shaped conductive ceramic evaporation boat has a simple structure and is convenient to manufacture. Due to unique U-shaped design, the evaporation boat is uniform in heat dissipation and the service life is effectively prolonged.
Description
Technical field
The utility model relates to a kind of conductive ceramic evaporation boat, is specifically related to a kind of U-shaped conductive ceramic evaporation boat.
Background technology
Use metal, the most frequently used method that particularly evenly applies with aluminium is a high vacuum belt vapour deposition method.Method of use is with aluminium wire contact and evaporating boat, and aluminium wire just melts and is sublimed into aluminum vapor, and through evaporation boat top, the layer metal deposition that the aluminum vapor conduct approaches is on substrate surface with base material to be coated.
For the constant steam flow of product needed, will evaporate the direct energising of boat and be heated to about 1500 ℃, connect the input aluminium wire; It is liquefied at ceramic surface; And in vacuum environment, evaporate, a row evaporations boat is set in the equipment of aluminizing, make the uniform aluminium lamination of applied thickness on the whole width of base material.
Existing evaporation boat is in use owing to inhomogeneous some the boat evacuator body that causes of heat radiation stays the hole; Fused aluminium to be evaporated can infiltrate these holes like this; The resistivity of material is reduced, and local heat radiation is uneven, makes material sputter in the evaporative process, loss; Make plated film inhomogeneous, reduce work-ing life.
The utility model content
According to the deficiency of above prior art, the utility model technical problem to be solved is: a kind of U-shaped conductive ceramic evaporation boat is provided, can has heat radiation evenly, the advantage of long service life.
The described a kind of U-shaped conductive ceramic evaporation boat of the utility model comprises the boat body, and boat body top offers the material groove, and two ends, boat body bottom are respectively arranged with the anchor clamps groove.
Wherein, the surface of anchor clamps groove preferably is pasted with graphite paper.This graphite paper can play good shock absorption to heat when anchor clamps contact anchor clamps groove, heat conduction is more even, eliminates " focus " zone.
The utility model is owing to be respectively arranged with the anchor clamps groove at two ends, boat body bottom, thereby increased the area of dissipation of evaporation boat, and the shock absorption of graphite paper in addition can reduce sputter, the loss of aluminium liquid again.
The beneficial effect that the utility model had is: simple in structure, easy to make, unique U-shaped design makes that the heat radiation of evaporation boat is more even, thereby has guaranteed effective prolongation in work-ing life.
Description of drawings
Fig. 1 is the structural representation of the utility model;
Fig. 2 is the vertical view of Fig. 1;
Among the figure: 1, boat body 2, material groove 3, anchor clamps groove 4, graphite paper.
Embodiment
Below in conjunction with accompanying drawing the utility model is done and to be further described.
As depicted in figs. 1 and 2, the described a kind of U-shaped conductive ceramic evaporation boat of the utility model comprises boat body 1, and boat body 1 top offers material groove 2, and two ends, boat body 1 bottom are respectively arranged with anchor clamps groove 3.
Wherein, the surface of anchor clamps groove 3 is pasted with graphite paper 4.This graphite paper 4 can play good shock absorption to heat when anchor clamps contact anchor clamps groove 3, heat conduction is more even, eliminates " focus " zone.
The utility model is owing to be respectively arranged with anchor clamps groove 3 at two ends, boat body 1 bottom, thereby increased the area of dissipation of evaporation boat, and the shock absorption of graphite paper 4 in addition can reduce sputter, the loss of aluminium liquid again.
The utility model is simple in structure, and is easy to make, and unique U-shaped design makes that the heat radiation of evaporation boat is more even, thereby guaranteed effective prolongation in work-ing life.
Claims (2)
1. a U-shaped conductive ceramic evaporation boat comprises the boat body, and boat body top offers the material groove, it is characterized in that two ends, boat body bottom are respectively arranged with the anchor clamps groove.
2. U-shaped conductive ceramic evaporation boat according to claim 1 is characterized in that the surface of anchor clamps groove is pasted with graphite paper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204434355U CN202322983U (en) | 2011-11-10 | 2011-11-10 | U-shaped conductive ceramic evaporation boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204434355U CN202322983U (en) | 2011-11-10 | 2011-11-10 | U-shaped conductive ceramic evaporation boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202322983U true CN202322983U (en) | 2012-07-11 |
Family
ID=46434970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204434355U Expired - Fee Related CN202322983U (en) | 2011-11-10 | 2011-11-10 | U-shaped conductive ceramic evaporation boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202322983U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105525277A (en) * | 2015-12-23 | 2016-04-27 | 西安超码科技有限公司 | Silicon carbide ceramic boat for plasma enhanced chemical vapor deposition and preparation method thereof |
-
2011
- 2011-11-10 CN CN2011204434355U patent/CN202322983U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105525277A (en) * | 2015-12-23 | 2016-04-27 | 西安超码科技有限公司 | Silicon carbide ceramic boat for plasma enhanced chemical vapor deposition and preparation method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120711 Termination date: 20131110 |