KR20070080635A - Organic boat - Google Patents

Organic boat Download PDF

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Publication number
KR20070080635A
KR20070080635A KR1020060011929A KR20060011929A KR20070080635A KR 20070080635 A KR20070080635 A KR 20070080635A KR 1020060011929 A KR1020060011929 A KR 1020060011929A KR 20060011929 A KR20060011929 A KR 20060011929A KR 20070080635 A KR20070080635 A KR 20070080635A
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South Korea
Prior art keywords
organic
organic material
cell
heater
boat
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KR1020060011929A
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Korean (ko)
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반태현
안병철
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주식회사 아바코
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Priority to KR1020060011929A priority Critical patent/KR20070080635A/en
Publication of KR20070080635A publication Critical patent/KR20070080635A/en

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    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02612Formation types
    • H01L21/02617Deposition types
    • H01L21/02631Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
    • H01L21/203Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy using physical deposition, e.g. vacuum deposition, sputtering
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/0001Processes specially adapted for the manufacture or treatment of devices or of parts thereof
    • H01L51/0002Deposition of organic semiconductor materials on a substrate
    • H01L51/0008Deposition of organic semiconductor materials on a substrate using physical deposition, e.g. sublimation, sputtering
    • H01L51/001Vacuum deposition
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/50Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED];
    • H01L51/52Details of devices
    • H01L51/529Arrangements for heating or cooling
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/50Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED];
    • H01L51/56Processes or apparatus specially adapted for the manufacture or treatment of such devices or of parts thereof

Abstract

An organic material evaporating boat is provided to reduce the amount of an unnecessary evaporation of the organic material by evaporating the organic material corresponding to a thickness of a deposition film. An organic material evaporating boat(20) includes a rotatable body(21), a mounting unit(22), and a heater(30). The mounting unit is formed on the rotatable body. At least two organic cells(23,24) with various sizes and weights are mounted on the mounting unit. The heater heats up the organic cells. The heater selectively heats at least one of the organic cells which are mounted on the mounting unit.

Description

유기물증발 보트{Organic boat} Organic material evaporation boat boat Organic {}

도 1은 종래의 기판에 유기물을 증착하는 공정을 개략적으로 나타낸 것이다. Figure 1 schematically shows the step of depositing an organic material on a conventional substrate.

도 2는 종래의 유기물증발 보트의 구조를 나타내는 사시도이다. 2 is a perspective view showing a structure of a conventional organic material evaporation boat.

도 3은 도 2에 도시된 유기물증발 보트의 작동상태를 나타내는 평면도이다. Figure 3 is a plan view showing an operating state of the organic material evaporation boat shown in Fig.

도 4는 본 발명의 유기물증발 보트의 구조를 나타내는 평면도이다. Figure 4 is a plan view showing a structure of the organic material evaporation boat of the present invention.

**도면 주요 부분에 대한 부호의 설명** ** drawings Description of the Related **

20 : 유기물증발보트 21 : 본체 20: organic material evaporation boat 21: main body

22 : 장착부 23 : 호스트셀 22: mounting portion 23: The host cell

24 : 도펀트셀 30 : 히터 24: dopant cell 30: heater

본 발명은 유기물증발 보트에 관한 것으로서, 보다 상세하게는 불필요하게 증발되는 유기물의 소비를 절감할 수 있고 또한 소정의 증착조건에 따라 정확한 증착막의 두께를 얻을 수 있는 유기물증발 보트에 관한 것이다. The present invention relates to organic material evaporation boat, and more particularly, it is possible to reduce the consumption of organic matter is necessary to evaporate also relates to organic material evaporation boat to get the correct thickness of the vapor-deposited film according to a desired deposition conditions.

일반적으로 유기EL은 글래스기판상에 형성된 애노드ITO전극층과 캐소드금속전극층의 사이에 다층 유기물층 구조가 형성되는 바, 그 유기물층 구조는 정공의 주입을 위한 정공주입층과, 전자의 주입을 위한 전자주입층 및, 상기 정공주입층과 전자주입층의 사이에 개재되어 상기 정공과 전자의 결합에 의해 발광이 일어나는 유기발광층을 구비하여 구성된다. In general, the organic EL is an electron injection layer for the hole injection layer, the electron injection to the anode ITO electrode layer and the cathode metal bar, and the organic layer structure in which the multi-layer organic layer structure provided between the electrode layers is a hole injection formed on a glass substrate and, interposed between the hole injection layer and the electron injection layer is formed by an organic light-emitting layer having a light emission occurs by the combination of the holes and electrons. 통상적으로, 상기 유기EL소자의 제조를 위한 장치에는 유기물의 증발을 위한 유기물증발보트가 채용되는데, 상기 유기물증발보트는 열 전도도가 낮으면서도 열용량이 큰 세라믹이라든지 다른 재료의 도가니(Crucible)로 제작해서 온도의 급상승을 방지하면서 안정적으로 가열하도록 구성된다. Typically, there is employed a device, organic material evaporation boats for the evaporation of the organic material for the production of the organic EL device, the organic material evaporation boat is thermal conductivity is lower eumyeonseodo yiradeunji a large thermal capacity ceramic by making a crucible (Crucible) of different material It is configured to heat the stable while preventing the rising of temperature.

도 1을 참조하여 종래의 유기물 증착공정을 설명한다. With reference to Figure 1 will be described in a conventional organic material deposition process.

상기 도가니(200)의 내부에 유기물을 수용하고, 히터(300)로 가열하여 유기물을 증발 또는 승화시킨다. Receiving an organic material to the inside of the furnace 200, it is evaporated or sublimed organic material is heated by the heater 300. 이와 같이 기화된 유기물은 기판(S)에 증착되어 유기물 증착막이 형성되는 것이다. The vaporized organic material as is deposited on the substrate (S) to which the organic material vapor-deposited film formed.

도 2는 종래의 연속증착이 가능한 리볼빙식 도가니 장치(200)이다. Figure 2 is a revolving type crucible device 200 capable of conventional continuous vapor deposition. 이를 참조하면, 회전이 가능한 원통형상의 본체(210)와, 상기 본체(210)의 상면부에 형성되고, 유기물 셀(400)을 장착할 수 있는 장착부(장착홀)(220)이 다수개 형성된다. Referring to this, the rotating body 210 on the available cylindrical shape, is formed on the upper surface portion of the main body 210, the organic cell 400 mounting portion (mounting holes) 220, which can be mounted are formed in a plurality of . 또한 상기 본체(210)의 내부에는 히터(미도시)가 구비되는데, 상기 히터는 히팅존(heating zone)에 위치하는 유기물 셀(400)을 가열하여 증발시키는 구성요소이다. In addition, there is provided the inside of the heater (not shown) of the main body 210, the heater is a component that is evaporated by heating the organic cell 400 which is located in the heating zone (heating zone).

도 3을 참조하여 종래의 리볼빙식 도가니 장치의 작용을 설명한다. Reference to Figure 3 will now be described the operation of a conventional revolving type crucible device. 히터(300)에 의해 히팅존에 위치한 유기물셀(400)을 가열하여 증발 또는 승화시켜 기판에 증착막을 형성한다. Heating the organic cell 400 located in the heating zone by the heater 300 to form a deposited film on the substrate by evaporation or sublimation. 또한 상기 히팅존에 있는 유기물셀(400)이 모두 소모되면, 상기 본체(210)를 회전함으로써 새로운 유기물셀을 히팅존에 위치시킨다. In addition, if all of the organic cell 400 in the heating zone consumption, positions the new organic matter in the cell heating zones by rotating the main body 210. 이로써 연속적으로 증착공정을 수행할 수 있는 것이다. This is capable of continuously performing a deposition process with.

종래의 도가니 장치에 장착되는 유기물셀은 모두 동일한 크기 및 중량을 가지는 것이었다. Organic cell to be mounted on a conventional furnace apparatus was all having the same size and weight. 또한 소정의 증착조건에 따라 증착막의 두께를 얻기 위하여는 센서 및 콘트롤러에 의해 증착율을 제어하는 것이었다. In addition, the deposition rate was controlled by the sensor and controller to obtain a vapor deposition film having a thickness according to a predetermined deposition conditions. 그러나 소정의 증착조건을 수행하기 위하여 불필요한 유기물을 증발시키므로 유기물의 소비가 많다는 문제점이 있었다. However, there was because evaporation of the organic material-wise the unnecessary consumption of organic matter problems in order to perform the desired deposition conditions.

본 발명은 상기와 같은 문제점을 해결하기 위해 안출된 것으로서, 본 발명의 목적은 불필요하게 증발되는 유기물의 소비를 절감할 수 있고 또한 소정의 증착조건에 따라 정확한 증착막의 두께를 얻을 수 있는 유기물증발 보트를 제공함에 있다. The present invention is conceived to solve the above problems, organic evaporation boat in the object of the invention is to reduce the consumption of organic matter is necessary to evaporation can also get a deposition layer having a thickness of correct according to a desired deposition conditions It is to provide a.

위와 같은 기술적 과제를 해결하기 위하여 본 발명에 의한 유기물증발 보트는 회전이 가능한 본체; The main possible organic evaporation boat according to the invention is rotated in order to solve the technical problem above; 상기 본체에 형성되고, 다양한 크기 및 중량을 가지는 적어도 2 이상의 유기물 셀을 장착할 수 있는 장착부; Mounting portion for mounting the at least two organic cell is formed in the main body, having a different size and weight; 및 상기 유기물 셀을 가열하는 히터;를 포함하여 이루어진다. It comprises; and a heater for heating the organic cell.

또한 상기 히터는 상기 장착부에 장착된 유기물 셀들 중 적어도 하나 이상을 선택적으로 가열할 수 있는 것이 바람직하다. In addition, the heater is preferably capable of selectively heating the at least one of the organic cells mounted on the mounting portion.

또한 상기 유기물 셀은 호스트 셀 또는 도펀트 셀 중 어느 하나이다. In addition, the organic cell is any one of a host cell or cell dopant.

또한 상기 유기물 셀의 중량비는 0.1g ~ 0.5g 중량비의 범위인 것이 바람직하다. In addition, the weight ratio of the organic cell is preferably in the range of 0.1g ~ 0.5g weight.

이하, 첨부된 도면을 참조하여 본 발명의 바람직한 실시예를 설명한다. With reference to the accompanying drawings will be described a preferred embodiment of the present invention.

도 4에 도시된 바에 의하면, 유기물증발 보트(20)는 원통형상의 본체(21)가 회전 가능하게 형성된다. The From what shown in FIG. 4, the organic material evaporation boat 20 which includes a main body 21 having a cylindrical shape is formed to be rotatable. 상기 본체(21)의 상면부에는 유기물 셀(23,24)을 장착할 수 있는 홀 형상의 장착부(22)가 다수개 형성되어 있다. An upper surface portion of the main body 21 has a mounting portion 22 of the hole for mounting the organic cell (23, 24) shape is formed more numerous. 특히 상기 장착부(22)는 다양한 크기 및 중량을 가지는 유기물 셀(23,24)을 장착할 수 있도록 다양한 크기(또는 부피)로 형성되어 있음을 알 수 있다. In particular, the mounting portion 22, it can be seen that it is formed of a different size (or volume) so that you can replace the organic cell (23,24) having a different size and weight. 또한 상기 본체(21)의 내부에는 장착된 유기물 셀(23,24)을 가열할 수 있는 히터(30)가 구비된다. In addition, a heater 30 capable of heating the organic material cells (23, 24) inside the mounting of the body 21 is provided. 특히 상기 히터(30)는 상기 본체(21)의 회전에 의해 히팅존(heating zone)에 위치하는 유기물셀(23,24)만을 가열하도록 구성된다. In particular, the heater 30 is configured to heat only the organic material cells (23, 24) which is located in the heating zone (heating zone) by the rotation of the body (21). 물론 이와 달리 각각의 장착부(22)의 가열을 제어할 수 있도록 구성될 수도 있다. Of course, alternatively it may be configured to control the heating of each of the mounting portions 22.

상기 장착부에 장착되는 유기물 셀은 다수개의 호스트셀(23)과 도펀트셀(24)이다. Organic cell to be mounted on the mounting portion is a plurality of host cells (23) and a dopant cell 24.

이하, 본 발명에 의한 유기물증발 보트의 작용을 설명한다. Hereinafter, the action of the organic material evaporation boat according to the present invention.

상기 본체(21)에 다양한 중량을 가지는 호스트 셀(23) 및 도펀트 셀(24)이 장착되기 때문에, 소정의 증착조건에 필요한 중량의 호스트 셀(23) 또는 도펀트 셀(24)을 히팅존에 위치시켜 가열하여 증착한다. Since the body 21, the host cell (23) and a dopant cell 24 having a different weight to be mounted, where the host cell 23 or dopant cell 24 of the weight required for a given deposition conditions in the heating zone It was heated to evaporation. 따라서 필요한 양만큼의 셀만을 선 택적으로 가열하여 증발시키는 것이다. Therefore, by heating only the cells as needed by both optionally to evaporate. 즉, 증착조건에 필요한 양만 증발시키는 것이 가능하다. That is, it is possible to evaporate only the amount needed for the deposition conditions.

예컨대 상기 본체의 중심에 인접한 상기 호스트셀(23)과 도펀트셀(24)의 중량을 0.1g으로 하고, 그 다음에 배치되는 상기 호스트셀(23)과 도펀트셀(24)의 중량을 0.15g으로 하며, 마지막으로 가장 외곽부분에 장착되는 상기 호스트셀(23)과 도펀트셀(24)의 중량을 0.2g으로 할 수 있는 것이다. For example the weight of the host cell (23) and a dopant cell 24, which is the weight of the host cell (23) and a dopant cell 24 adjacent to the center of the main body to 0.1g, and placed in, followed by 0.15g and, it is possible to weight the last time the host cell 23 and the dopant cell 24, which is mounted on the outer portions to 0.2g.

또한, 이와 같이 다양한 중량을 가진 상기 호스트셀(23)과 도펀트셀(24)을 장착할 수 있는데, 이는 결국 필요한 두께의 증착막을 형성하기 위하여 필요한 유기물 증발량을 알 수 있다면, 별도의 센서나 콘트롤러에 의한 제어 없이 소정의 증착조건에 맞는 증착막을 형성하는 것이 매우 용이해진다. Also, it can be thus mounted to the host cell (23) and a dopant cell 24 having a different weight, that if the end to find out organic material evaporation quantity necessary to form the vapor-deposited film of the required thickness, the separate sensor and controller without the control of it it is very easy to form a vapor deposition film for the predetermined deposition conditions. 여기서 필요한 증발량은 다수번의 실험을 통해 알 수 있는 것이다. Evaporation needed here is to know through a number of one experiment. 예를 들어 몇 Å의 두께를 얻기 위하여는 유기물 몇 g을 증발시켜야 하는지는 다수번의 실험을 통해 정확한 데이터값을 도출해낼 수 있는 것이다. For example, if the need to evaporate a few g organic matter in order to obtain a thickness of several Å is the ability to derive the correct data values ​​over a plurality single experiment.

이상의 본 발명은 상기에 기술된 실시예들에 의해 한정되지 않고, 당업자들에 의해 다양한 변형 및 변경을 가져올 수 있으며, 이는 첨부된 청구항에서 정의되는 본 고안의 취지와 범위에 포함된다. Above the present invention it is not limited by the embodiments set forth above, can result in various modifications and changes by those skilled in the art, which are included in the spirit and scope of the subject innovation, which is defined in the appended claims.

본 발명에 따르면, 소정의 증착조건에 따라 증착막의 두께에 대응되는 유기물의 필요량만을 증발시키기 때문에 불필요하게 증발되는 유기물의 소비를 절감할 수 있다. According to the present invention, it is possible to reduce the consumption of organic matter is necessary to evaporate due to evaporate only a necessary amount of the organic material corresponding to the thickness of the vapor-deposited film according to a desired deposition conditions.

또한 다수번의 반복실험을 통해 데이터를 취득하면, 그에 따라 소정의 증착조건에 따라 정확한 증착막의 두께를 얻을 수 있다. Additionally, acquiring data through multiple iterations experiment, and thus it is possible to obtain a vapor deposition film having a thickness according to a predetermined exact deposition conditions.

또한, 본 발명은 유기물 증착 조건에 따라 히터의 히팅을 분할하여 가열함으로써 열손실을 최소화하며 공정을 실시할 수 있는 효과가 있다. In addition, the present invention has an effect capable of performing the process and minimize heat loss by heating to split the heating of the heater in accordance with an organic material deposition conditions.

그리고, 본 발명은 히터의 열전도도 제어가 용이하여 장비 수율을 높일 수 있는 효과가 있다. The present invention has an effect that is also controlled by the thermal conductivity of the heater easier to increase the device yield.

Claims (2)

  1. 유기물증발 보트에 있어서, In the organic material evaporation boat,
    회전이 가능한 본체; Body is rotatable;
    상기 본체에 형성되고, 다양한 크기 및 중량을 가지는 적어도 2 이상의 유기물 셀을 장착할 수 있는 장착부; Mounting portion for mounting the at least two organic cell is formed in the main body, having a different size and weight; And
    상기 유기물 셀을 가열하는 히터;를 포함하여 이루어지는 것을 특징으로 하는 유기물증발 보트. Organic material evaporation boat comprising the; heater for heating the organic cell.
  2. 제 1 항에 있어서, According to claim 1,
    상기 히터는 상기 장착부에 장착된 유기물 셀들 중 적어도 하나 이상을 선택적으로 가열할 수 있는 것을 특징으로 하는 유기물증발 보트. The heater is organic material evaporation boat, characterized in that for selectively heating the at least one of the organic cells mounted on the mounting portion.
KR1020060011929A 2006-02-08 2006-02-08 Organic boat KR20070080635A (en)

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