CN108342693A - The method for preventing material degradation in evaporation source crucible - Google Patents
The method for preventing material degradation in evaporation source crucible Download PDFInfo
- Publication number
- CN108342693A CN108342693A CN201710057898.XA CN201710057898A CN108342693A CN 108342693 A CN108342693 A CN 108342693A CN 201710057898 A CN201710057898 A CN 201710057898A CN 108342693 A CN108342693 A CN 108342693A
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- China
- Prior art keywords
- evaporation
- evaporation source
- source crucible
- heat conduction
- conduction object
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to the evaporation technique fields of evaporation material, and in particular to a method of preventing material degradation in evaporation source crucible.Include the following steps：Step 1: being added evaporation material to evaporation source crucible；Step 2: the heat conduction object of stereo structure is added in evaporation material into evaporation source crucible；Wherein, the volume ratio of the heat conduction object and evaporation material in evaporation source crucible is 1：1~5；Evaporation of the fusing point of the heat conduction object higher than the evaporation material or sublimation temperature.The heat conduction object that the present invention passes through addition stereo structure in the evaporation material into evaporation source crucible, effectively increase the thermal conductivity between evaporation material, evaporation material is heated evenly, method is simple, is easily achieved, and efficiently solves the problems, such as material degradation caused by material uneven heating in current evaporation source crucible.
Description
Technical field
The present invention relates to the evaporation technique fields of evaporation material, and in particular to one kind preventing material degradation in evaporation source crucible
Method.
Background technology
Vacuum evaporation equipment evaporation source crucible capacity is gradually promoted at present, the problem of due to evaporation material poor thermal conductivity, is steamed
The evaporating temperature that material is far above material with crucible internal walls contact portion temperature is plated, the evaporation material contacted with crucible internal walls is caused
There are problems that the deterioration such as decomposing, go bad in thermal histories, this influence is more obvious with the increase of crucible capacity.
In the prior art, to prevent evaporation material from being deteriorated in thermal histories, generally use the following two kinds scheme：
Scheme one, as the supplementary material into crucible carries out vapor deposition operation at any time for the reduction of material, this scheme needs
It continually carries out vacuum breaker, feed supplement, the operations such as vacuumize, manipulation is inconvenient, is unfavorable for that the stable operation of operation is deposited, for big
Capacity crucible is more not suitable for；
Scheme two carries out local heating by pressing against granular evaporation material in heating component, make material only by
Local heating is simultaneously evaporated or is distilled, and to prevent the material at other positions from deteriorating, this scheme is needed for making evaporation material shape
The pressue device on heating source is pressed against at granular equipment and by graininess evaporation material, equipment cost can be caused to increase
Add.
To sum up, it is necessary to provide a kind of suitable for large capacity crucible and simple and practicable crucible evaporation technique.
Invention content
In order to solve the above-mentioned technical problem, the purpose of the present invention is to provide one kind can make evaporation material thermally equivalent,
And the method for preventing material degradation in evaporation source crucible that manipulation is conveniently easily achieved.
To realize the above-mentioned technical purpose, the present invention uses technical solution below：
The method for preventing material degradation in evaporation source crucible, includes the following steps：
Step 1: being added evaporation material to evaporation source crucible；
Step 2: the heat conduction object of stereo structure is added in evaporation material into evaporation source crucible；
Wherein, the volume ratio of the heat conduction object and evaporation material in evaporation source crucible is 1：1~5；The heat conduction object melts
Evaporation of the point higher than the evaporation material or sublimation temperature.
Preferably, the heat conduction object is the structure that spherical, column or goalpost combine shape, naturally it is also possible to use other bodies
Shape.
Preferably, the material of the heat conduction object is metal, glass, graphite, ceramics, alundum (Al2O3) or boron nitride etc..
Preferably, in step 2, the shape for the heat conduction object being added into evaporation source crucible is uniform shapes, unified material
Matter, or different shape, unified material or different shape, unlike material, that is to say, that heat conduction object can be unified shape
Shape, size and material can also be above several arbitrary combination.
Due to the adoption of the above technical scheme, the present invention has at least following advantageous effect：By into evaporation source crucible
The heat conduction object of stereo structure is added in evaporation material, effectively increases the thermal conductivity between evaporation material so that evaporation material can be by
Hot uniform, method is simple, is easily achieved, and efficiently solves material degradation caused by material uneven heating in current evaporation source crucible
Problem.
Description of the drawings
The following drawings are only intended to schematically illustrate and explain the present invention, not delimit the scope of the invention.Wherein：
Fig. 1 is the cross-sectional view when embodiment of the present invention one is deposited；
Fig. 2 is the structural schematic diagram of one of embodiment of the present invention two kind heat conduction object；
Fig. 3 is the structural schematic diagram of another heat conduction object of the embodiment of the present invention two.
In figure：1- evaporation materials；2- evaporation source crucibles；3- heat conduction objects；31- balls；32- columns.
Specific implementation mode
With reference to the accompanying drawings and examples, the present invention is further explained.In the following detailed description, only pass through explanation
Mode describes certain exemplary embodiments of the present invention.Undoubtedly, those skilled in the art will recognize,
In the case of without departing from the spirit and scope of the present invention, described embodiment can be repaiied with a variety of different modes
Just.Therefore, attached drawing and description are regarded as illustrative in nature, and are not intended to limit the scope of the claims.
Embodiment one
As shown in Figure 1, the method for preventing material degradation in evaporation source crucible, includes the following steps：
Step 1: being added evaporation material 1 to evaporation source crucible 2；
Step 2: the heat conduction object 3 of stereo structure is added in evaporation material 1 into evaporation source crucible 2；
Wherein, the volume ratio of the heat conduction object 3 and evaporation material 1 in evaporation source crucible 2 is 1：3；The heat conduction object 3 melts
Evaporation of the point higher than the evaporation material 1 or sublimation temperature.
In the present embodiment, the heat conduction object is the chondritic to differ in size, the material of the heat conduction object can be metal,
Glass, graphite, ceramics, alundum (Al2O3) or boron nitride etc..
By the way that the heat conduction object of stereo structure is added in the evaporation material 1 into evaporation source crucible 2, evaporation material is effectively increased
Between thermal conductivity so that evaporation material can be heated evenly, and method is simple, is easily achieved, and efficiently solves current evaporation source earthenware
Material degradation problem caused by material uneven heating in crucible.
Embodiment two
The present embodiment is identical as the Method And Principle of embodiment 1, uniquely difference lies in：The heat conduction object 3 and evaporation source earthenware
The volume ratio of evaporation material 1 is 1 in crucible 2：2；
Referring to figs. 2 and 3, in the present embodiment, the heat conduction object 3 works as earthenware using the combined shaped of 31 shape of ball and 32 shape of column
When the capacity of crucible is larger, spherical heat conduction object is compared, thermal conductivity effect can be more preferable, can effectively avoid evaporation material and crucible internal walls
It is simple that contact such as easily decomposes in thermal histories, goes bad at deteriorations problem, the method, it is easy to accomplish.
The foregoing is merely the schematical specific implementation modes of the present invention, are not limited to the scope of the present invention.It is any
Those skilled in the art, made equivalent variations and modification under the premise of not departing from design and the principle of the present invention,
The scope of protection of the invention should all be belonged to.
Claims (6)
1. the method for preventing material degradation in evaporation source crucible, it is characterised in that：Include the following steps：
Step 1: being added evaporation material (1) to evaporation source crucible (2)；
Step 2: the middle heat conduction object (3) that stereo structure is added of evaporation material (1) into evaporation source crucible (2)；
Wherein, the volume ratio of the heat conduction object (3) and evaporation source crucible (2) interior evaporation material (1) is 1：1~5；The heat conduction object
(3) evaporation of the fusing point higher than the evaporation material (1) or sublimation temperature.
2. the method as described in claim 1 for preventing material degradation in evaporation source crucible, it is characterised in that：The heat conduction object
(3) structure of shape is combined for spherical, column or goalpost.
3. the method as described in claim 1 for preventing material degradation in evaporation source crucible, it is characterised in that：The heat conduction object
(3) material is metal, glass, graphite, ceramics, alundum (Al2O3) or boron nitride.
4. the method as described in claim 1 for preventing material degradation in evaporation source crucible, it is characterised in that：In step 2, to
The shape for the heat conduction object (3) being added in evaporation source crucible (2) is uniform shapes, unified material.
5. the method as described in claim 1 for preventing material degradation in evaporation source crucible, it is characterised in that：In step 2, to
The shape for the heat conduction object (3) being added in evaporation source crucible (2) is different shape, unified material.
6. the method as described in claim 1 for preventing material degradation in evaporation source crucible, it is characterised in that：In step 2, to
The shape for the heat conduction object (3) being added in evaporation source crucible (2) is different shape, unlike material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710057898.XA CN108342693A (en) | 2017-01-23 | 2017-01-23 | The method for preventing material degradation in evaporation source crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710057898.XA CN108342693A (en) | 2017-01-23 | 2017-01-23 | The method for preventing material degradation in evaporation source crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108342693A true CN108342693A (en) | 2018-07-31 |
Family
ID=62963124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710057898.XA Pending CN108342693A (en) | 2017-01-23 | 2017-01-23 | The method for preventing material degradation in evaporation source crucible |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111188013A (en) * | 2018-11-14 | 2020-05-22 | 深圳市融光纳米科技有限公司 | Vacuum evaporation coating method, mixture and method for preparing optical film |
| CN114524424A (en) * | 2021-12-17 | 2022-05-24 | 青海泰丰先行锂能科技有限公司 | Preparation method of high-compaction high-capacity lithium iron phosphate positive electrode material |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1393575A (en) * | 2001-06-26 | 2003-01-29 | 爱美思公司 | Molecular beam source apparatus for film deposition and method for depositing film by molecular beam |
| CN1421542A (en) * | 2001-11-29 | 2003-06-04 | 电子科技大学 | Organic material evaporating source |
| CN103409720A (en) * | 2013-08-23 | 2013-11-27 | 深圳市华星光电技术有限公司 | Crucible for film plating machine |
| CN103556118A (en) * | 2013-10-12 | 2014-02-05 | 深圳市华星光电技术有限公司 | Evaporation apparatus |
-
2017
- 2017-01-23 CN CN201710057898.XA patent/CN108342693A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1393575A (en) * | 2001-06-26 | 2003-01-29 | 爱美思公司 | Molecular beam source apparatus for film deposition and method for depositing film by molecular beam |
| CN1421542A (en) * | 2001-11-29 | 2003-06-04 | 电子科技大学 | Organic material evaporating source |
| CN103409720A (en) * | 2013-08-23 | 2013-11-27 | 深圳市华星光电技术有限公司 | Crucible for film plating machine |
| CN103556118A (en) * | 2013-10-12 | 2014-02-05 | 深圳市华星光电技术有限公司 | Evaporation apparatus |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111188013A (en) * | 2018-11-14 | 2020-05-22 | 深圳市融光纳米科技有限公司 | Vacuum evaporation coating method, mixture and method for preparing optical film |
| CN114524424A (en) * | 2021-12-17 | 2022-05-24 | 青海泰丰先行锂能科技有限公司 | Preparation method of high-compaction high-capacity lithium iron phosphate positive electrode material |
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Application publication date: 20180731 |
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