CN202297842U - Guide cylinder for czochralski crystal growing furnace - Google Patents

Guide cylinder for czochralski crystal growing furnace Download PDF

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Publication number
CN202297842U
CN202297842U CN2011202602498U CN201120260249U CN202297842U CN 202297842 U CN202297842 U CN 202297842U CN 2011202602498 U CN2011202602498 U CN 2011202602498U CN 201120260249 U CN201120260249 U CN 201120260249U CN 202297842 U CN202297842 U CN 202297842U
Authority
CN
China
Prior art keywords
guide cylinder
flow guiding
draft tube
external flow
guiding cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2011202602498U
Other languages
Chinese (zh)
Inventor
刘宏
林平
张建中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TIANCHANG BAISHENG SEMICONDUCOTR TECHNOLOGY Co Ltd
Original Assignee
TIANCHANG BAISHENG SEMICONDUCOTR TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TIANCHANG BAISHENG SEMICONDUCOTR TECHNOLOGY Co Ltd filed Critical TIANCHANG BAISHENG SEMICONDUCOTR TECHNOLOGY Co Ltd
Priority to CN2011202602498U priority Critical patent/CN202297842U/en
Application granted granted Critical
Publication of CN202297842U publication Critical patent/CN202297842U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The utility model provides a guide cylinder for a czochralski crystal growing furnace, which comprises an outer guide cylinder and an inner guide cylinder, wherein an insulating clearance filled with insulating carbon felt is formed between the outer and the inner guide cylinders; and a check ring for enlarging the volume of the insulating clearance between the outer and the inner guide cylinders is arranged at the contact parts of the outer and the inner guide cylinders. According to the utility model, a graphitic rod structure replaces a molybdenum metal structure, so that even when the guide cylinder is in a high-temperature state for a long time, no impurity can fall down onto molten silicon, which ensures product quality.

Description

A kind of czochralski crystal growing furnace guide shell
Technical field
The utility model relates to a kind of semiconductor material and prepares equipment, relates in particular to a kind of czochralski crystal growing furnace guide shell.
Background technology
Existing guide shell is a single layer structure, and its heat insulation effect is obvious inadequately, be unfavorable for energy-conservation, so need transform perfect.
The utility model content
The purpose of the utility model is to provide a kind of can effectively prevent the drop czochralski crystal growing furnace guide shell of silicon melt of impurity.
For solving the problems of the technologies described above; The utility model proposes a kind of czochralski crystal growing furnace guide shell; Comprise external flow guiding cylinder and inner draft tube; Have the insulation gap of filling heat preservation carbon felt between said external flow guiding cylinder and the said inner draft tube, the contact site of said external flow guiding cylinder and said inner draft tube is provided with the back-up ring that increases insulation clearance volume between external flow guiding cylinder and the inner draft tube.
Through the as above proposition of technical scheme, the utlity model has following beneficial effect:
The utility model is designed to the novel guide shell that external flow guiding cylinder and inner draft tube constitute with the guide shell of individual layer in the prior art, and in the gap of external flow guiding cylinder and inner draft tube filling heat insulating wall, feasible conserve energy to the full extent.
Description of drawings
According to accompanying drawing and embodiment the utility model is done further explain below:
Fig. 1 is a kind of czochralski crystal growing furnace guide shell sectional view that the utility model embodiment 1 proposes;
Among the figure:
1, inner draft tube; 2, insulation gap; 3, external flow guiding cylinder; 4, back-up ring.
Embodiment
Embodiment 1
Present embodiment proposes a kind of czochralski crystal growing furnace guide shell; Comprise external flow guiding cylinder 1 and inner draft tube 2, have the insulation gap 3 of filling heat preservation carbon felt between external flow guiding cylinder 1 and the inner draft tube 2, the contact site of external flow guiding cylinder 2 and inner draft tube 2 is provided with and increases insulation gap 3 volumetrical back-up rings 4 between external flow guiding cylinder 1 and the inner draft tube 2; Through design insulation gap 3; Make its better heat preservation, simultaneously, through design back-up ring 4 between external flow guiding cylinder 2 and inner draft tube 2; Can further enlarge the volume in the insulation gap 3 between external flow guiding cylinder 1 and the inner draft tube 2; Can fill more lagging material, can improve heat insulation effect to greatest extent, make the better heat preservation of the utility model.
The utility model is not limited thereto embodiment, and the related realization assembly that is the basis with the utility model thought is all in the protection domain of the utility model.

Claims (1)

1. czochralski crystal growing furnace guide shell; It is characterized in that; Comprise external flow guiding cylinder (1) and inner draft tube (2); Have the insulation gap (3) of filling heat preservation carbon felt between said external flow guiding cylinder (1) and the said inner draft tube (2), the contact site of said external flow guiding cylinder (2) and said inner draft tube (2) is provided with to increase between external flow guiding cylinder (1) and the inner draft tube (2) and is incubated gap (3) volumetrical back-up ring (4).
CN2011202602498U 2011-07-21 2011-07-21 Guide cylinder for czochralski crystal growing furnace Expired - Fee Related CN202297842U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011202602498U CN202297842U (en) 2011-07-21 2011-07-21 Guide cylinder for czochralski crystal growing furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011202602498U CN202297842U (en) 2011-07-21 2011-07-21 Guide cylinder for czochralski crystal growing furnace

Publications (1)

Publication Number Publication Date
CN202297842U true CN202297842U (en) 2012-07-04

Family

ID=46366776

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011202602498U Expired - Fee Related CN202297842U (en) 2011-07-21 2011-07-21 Guide cylinder for czochralski crystal growing furnace

Country Status (1)

Country Link
CN (1) CN202297842U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110484967A (en) * 2019-09-30 2019-11-22 内蒙古中环光伏材料有限公司 A kind of flat guide shell of straight pulling silicon single crystal furnace
CN113403675A (en) * 2021-06-21 2021-09-17 西安奕斯伟硅片技术有限公司 Guide cylinder and crystal pulling furnace

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110484967A (en) * 2019-09-30 2019-11-22 内蒙古中环光伏材料有限公司 A kind of flat guide shell of straight pulling silicon single crystal furnace
CN113403675A (en) * 2021-06-21 2021-09-17 西安奕斯伟硅片技术有限公司 Guide cylinder and crystal pulling furnace

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120704

Termination date: 20130721