CN202297842U - Guide cylinder for czochralski crystal growing furnace - Google Patents
Guide cylinder for czochralski crystal growing furnace Download PDFInfo
- Publication number
- CN202297842U CN202297842U CN2011202602498U CN201120260249U CN202297842U CN 202297842 U CN202297842 U CN 202297842U CN 2011202602498 U CN2011202602498 U CN 2011202602498U CN 201120260249 U CN201120260249 U CN 201120260249U CN 202297842 U CN202297842 U CN 202297842U
- Authority
- CN
- China
- Prior art keywords
- guide cylinder
- flow guiding
- draft tube
- external flow
- guiding cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a guide cylinder for a czochralski crystal growing furnace, which comprises an outer guide cylinder and an inner guide cylinder, wherein an insulating clearance filled with insulating carbon felt is formed between the outer and the inner guide cylinders; and a check ring for enlarging the volume of the insulating clearance between the outer and the inner guide cylinders is arranged at the contact parts of the outer and the inner guide cylinders. According to the utility model, a graphitic rod structure replaces a molybdenum metal structure, so that even when the guide cylinder is in a high-temperature state for a long time, no impurity can fall down onto molten silicon, which ensures product quality.
Description
Technical field
The utility model relates to a kind of semiconductor material and prepares equipment, relates in particular to a kind of czochralski crystal growing furnace guide shell.
Background technology
Existing guide shell is a single layer structure, and its heat insulation effect is obvious inadequately, be unfavorable for energy-conservation, so need transform perfect.
The utility model content
The purpose of the utility model is to provide a kind of can effectively prevent the drop czochralski crystal growing furnace guide shell of silicon melt of impurity.
For solving the problems of the technologies described above; The utility model proposes a kind of czochralski crystal growing furnace guide shell; Comprise external flow guiding cylinder and inner draft tube; Have the insulation gap of filling heat preservation carbon felt between said external flow guiding cylinder and the said inner draft tube, the contact site of said external flow guiding cylinder and said inner draft tube is provided with the back-up ring that increases insulation clearance volume between external flow guiding cylinder and the inner draft tube.
Through the as above proposition of technical scheme, the utlity model has following beneficial effect:
The utility model is designed to the novel guide shell that external flow guiding cylinder and inner draft tube constitute with the guide shell of individual layer in the prior art, and in the gap of external flow guiding cylinder and inner draft tube filling heat insulating wall, feasible conserve energy to the full extent.
Description of drawings
According to accompanying drawing and embodiment the utility model is done further explain below:
Fig. 1 is a kind of czochralski crystal growing furnace guide shell sectional view that the utility model embodiment 1 proposes;
Among the figure:
1, inner draft tube; 2, insulation gap; 3, external flow guiding cylinder; 4, back-up ring.
Embodiment
Embodiment 1
Present embodiment proposes a kind of czochralski crystal growing furnace guide shell; Comprise external flow guiding cylinder 1 and inner draft tube 2, have the insulation gap 3 of filling heat preservation carbon felt between external flow guiding cylinder 1 and the inner draft tube 2, the contact site of external flow guiding cylinder 2 and inner draft tube 2 is provided with and increases insulation gap 3 volumetrical back-up rings 4 between external flow guiding cylinder 1 and the inner draft tube 2; Through design insulation gap 3; Make its better heat preservation, simultaneously, through design back-up ring 4 between external flow guiding cylinder 2 and inner draft tube 2; Can further enlarge the volume in the insulation gap 3 between external flow guiding cylinder 1 and the inner draft tube 2; Can fill more lagging material, can improve heat insulation effect to greatest extent, make the better heat preservation of the utility model.
The utility model is not limited thereto embodiment, and the related realization assembly that is the basis with the utility model thought is all in the protection domain of the utility model.
Claims (1)
1. czochralski crystal growing furnace guide shell; It is characterized in that; Comprise external flow guiding cylinder (1) and inner draft tube (2); Have the insulation gap (3) of filling heat preservation carbon felt between said external flow guiding cylinder (1) and the said inner draft tube (2), the contact site of said external flow guiding cylinder (2) and said inner draft tube (2) is provided with to increase between external flow guiding cylinder (1) and the inner draft tube (2) and is incubated gap (3) volumetrical back-up ring (4).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011202602498U CN202297842U (en) | 2011-07-21 | 2011-07-21 | Guide cylinder for czochralski crystal growing furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011202602498U CN202297842U (en) | 2011-07-21 | 2011-07-21 | Guide cylinder for czochralski crystal growing furnace |
Publications (1)
Publication Number | Publication Date |
---|---|
CN202297842U true CN202297842U (en) | 2012-07-04 |
Family
ID=46366776
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2011202602498U Expired - Fee Related CN202297842U (en) | 2011-07-21 | 2011-07-21 | Guide cylinder for czochralski crystal growing furnace |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN202297842U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110484967A (en) * | 2019-09-30 | 2019-11-22 | 内蒙古中环光伏材料有限公司 | A kind of flat guide shell of straight pulling silicon single crystal furnace |
CN113403675A (en) * | 2021-06-21 | 2021-09-17 | 西安奕斯伟硅片技术有限公司 | Guide cylinder and crystal pulling furnace |
-
2011
- 2011-07-21 CN CN2011202602498U patent/CN202297842U/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110484967A (en) * | 2019-09-30 | 2019-11-22 | 内蒙古中环光伏材料有限公司 | A kind of flat guide shell of straight pulling silicon single crystal furnace |
CN113403675A (en) * | 2021-06-21 | 2021-09-17 | 西安奕斯伟硅片技术有限公司 | Guide cylinder and crystal pulling furnace |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120704 Termination date: 20130721 |