CN203878236U - Energy-saving thermal field of single crystal furnace - Google Patents
Energy-saving thermal field of single crystal furnace Download PDFInfo
- Publication number
- CN203878236U CN203878236U CN201420214058.1U CN201420214058U CN203878236U CN 203878236 U CN203878236 U CN 203878236U CN 201420214058 U CN201420214058 U CN 201420214058U CN 203878236 U CN203878236 U CN 203878236U
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- thermal field
- heater
- lower cover
- antileaking plate
- energy
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Abstract
The utility model discloses an energy-saving thermal field of a single crystal furnace. The energy-saving thermal field comprises a furnace body, wherein an upper cover, a cylinder and a lower cover are arranged on the furnace body from top to bottom, the combination part of the upper cover and the cylinder and the combination part of the cylinder and the lower cover are both in bolted connection, the cylinder is internally provided with a thermal fields arranged along the periphery of the inner wall of the cylinder, a leak-proof plate is arranged in the thermal fields, a heater is arranged above the leak-proof plate, a reflection plate is arranged at the bottom of the heater and graphite insulation cylinders are circularly arranged around the heater and the periphery of the heater among the thermal fields. The energy-saving thermal field is characterized in that soft felts are filled between the leak-proof plate and the lower cover. A leak-proof chassis is removed, the lower cover is directly filled fully by the soft felts, in the case that the volume of the lower cover is unchangeable, the filling amount of the soft felts is increased and thus the heat insulation effect is improved.
Description
Technical field
The utility model relates to a kind of monocrystalline energy-saving heat field, relates in particular to that a kind of calorific loss is little, the monocrystalline energy-saving heat field of save electricity.
Background technology
In semi-conductive crystal silicon chip is produced, crystal silicon chip is grown in thermal field of single crystal furnace, and therefore the performance quality of thermal field device of single-crystal has determined the energy consumption in crystal growth and production process.Current thermal field device of single-crystal is provided with upper cover, cylindrical shell, lower cover from top to bottom, in cylindrical shell, be provided with thermal field and lower thermal field, upper thermal field and lower thermal field are by being fixed on the back up pad interval on cylindrical shell, in lower cover, be provided with leakproof chassis, the junction of lower thermal field and lower cover is provided with Antileaking plate, between leakproof chassis and Antileaking plate, fill felt, owing to having cavity between lower cover and leakproof chassis, thereby there is the problem of partial loss in heat; The size of Antileaking plate is consistent with lower thermal field internal diameter, and is placed in well heater on Antileaking plate and is positioned at the middle and lower part of lower thermal field, adopts this arrangement mode, and existing the heat that well heater produces is not the problem that the very first time is sent to thermal field top, causes heat to lose; In addition, the reflector that is positioned at heater base at present general size is relatively large, is subject to colliding with of cylinder inboard wall thereby exist in the time of installation and maintenance in putting forward process.The experimental data of life-time service thermal field device of single-crystal shows, the design of the heat insulation structural between above-mentioned heating components and parts and cylindrical shell, because Antileaking plate, leakproof chassis etc. are graphite material, exist the feature that heat-conductive characteristic is good, therefore, the heat that well heater produces, wherein sub-fraction heat has just been lost, thereby just increase the needs of generated energy for meeting heat demand, had the problem of power consumption.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of monocrystalline energy-saving heat field, has heat and is difficult for the feature of losing.
For solving the problems of the technologies described above, scheme of the present utility model is: a kind of monocrystalline energy-saving heat field, comprise body of heater, described body of heater is provided with upper cover from top to bottom, cylindrical shell, lower cover, the equal bolt of bound fraction of the bound fraction of described upper cover and described cylindrical shell and described cylindrical shell and described lower cover, in described cylindrical shell, be provided with along cylinder inboard wall surrounding and be provided with thermal field, in described thermal field, be provided with Antileaking plate, described Antileaking plate top is provided with well heater, this heater base is provided with the reflector stretching in well heater, described well heater surrounding is equipped with graphite heat-preservation cylinder, its innovative point is: between described Antileaking plate and described lower cover, be filled with soft felt.
Preferably, described Antileaking plate is positioned at the center of described thermal field, and leaves gap between Antileaking plate surrounding and described thermal field, is filled with soft felt in described gap.
Preferably, between described graphite heat-preservation cylinder and described thermal field, be filled with soft felt, and this soft felt is filled to the bound fraction of described upper cover and described thermal field.
Preferably, between described reflector and described Antileaking plate, be filled with the soft felt that makes described well heater be positioned at described thermal field middle part.
Advantage of the present utility model is: compared to legacy equipment, improve the heat-insulating property of thermal field by following manner, 1) remove leakproof chassis and directly adopt soft felt to fill full lower cover, thereby the in the situation that of lower cover constancy of volume, increased the loading level of soft felt, improved effect of heat insulation; 2) Antileaking plate, by reducing size, makes to leave gap between Antileaking plate and thermal field, and in gap, fills soft felt, replaces traditional Antileaking plate and is directly connected on thermal field, thereby avoid heat to be directly transmitted to the external world by Antileaking plate, cylindrical shell; 3) by filling soft felt between the reflector in heater base and Antileaking plate, replace traditional being directly placed on Antileaking plate, thereby the position of well heater improves, the well heater that is now positioned at thermal field middle part approaches work area more, thereby reduces the forfeiture of heat; 4) between graphite heat-preservation cylinder and thermal field, be filled with soft felt, and this soft felt is filled to the bound fraction of upper cover and described thermal field, adopt the design of this comprehensive coated, substitute traditional upper semisection and the design of lower semisection, thereby avoid heat to lose from upper semisection and lower semisection joint portion.
Brief description of the drawings
Below in conjunction with the drawings and specific embodiments, the utility model is described in more detail.
Fig. 1 is the vertical view of a kind of monocrystalline energy-saving heat field of the utility model.
Fig. 2 is the A-A sectional view of a kind of monocrystalline energy-saving heat field of the utility model.
In figure: 1-upper cover, 2-cylindrical shell, 3-lower cover, 4-Antileaking plate, 5-well heater, 6-reflector, 7-graphite heat-preservation cylinder, 8-thermal field.
Embodiment
The main body of heater of a kind of monocrystalline energy-saving heat field of the present utility model, as depicted in figs. 1 and 2, this body of heater is provided with upper cover 1, cylindrical shell 2, lower cover 3 from top to bottom, the wherein equal bolt of bound fraction of the bound fraction of upper cover 1 and cylindrical shell 2 and cylindrical shell 2 and lower cover 3, in cylindrical shell 3, be provided with along cylinder inboard wall surrounding and be provided with thermal field 8, be provided with Antileaking plate 4 in thermal field 8, Antileaking plate 4 is positioned at the center of thermal field 8, between these Antileaking plate 4 surroundings and thermal field 2 inwalls, leave gap, and fill soft felt in this gap.
Well heater 5 is arranged at Antileaking plate 4 tops, well heater 5 bottoms are provided with the reflector 6 stretching in well heater 5, by fill soft felt between reflector 6 and Antileaking plate 4, utilize some stacked soft felts that add to make well heater 5 be positioned at thermal field 8 middle parts, thereby make well heater more approach region to be heated, thereby the heat that well heater 5 produces is relatively concentrated, thus the forfeiture of minimizing heat.
Be equipped with graphite heat-preservation cylinder 7 in well heater 5 surroundings, and be filled with soft felt between graphite heat-preservation cylinder 7 and thermal field 8, and this soft felt is filled to the bound fraction of upper cover 1 and thermal field 2, thereby make the heat that well heater 5 produces reduce the probability of losing from thermal field part.
For reducing the forfeiture of the heat that produces of well heater 5, between the Antileaking plate 4 of well heater 5 belows and lower cover 3, be filled with soft felt, utilize soft felt to fill lower cover cavity completely, thereby well heater 5 form bottom and the soft felt parcel of surrounding, thus the forfeiture of minimizing heat.
Compared to legacy equipment, improve the heat-insulating property of thermal field by following manner, 1) remove leakproof chassis and directly adopts the filling of soft felt to expire lower cover, thus the in the situation that of lower cover constancy of volume, increase the loading level of soft felt, improve effect of heat insulation; 2) Antileaking plate, by reducing size, makes to leave gap between Antileaking plate and thermal field, and in gap, fills soft felt, replaces traditional Antileaking plate and is directly connected on thermal field, thereby avoid heat to be directly transmitted to the external world by Antileaking plate, cylindrical shell; 3) by filling soft felt between the reflector in heater base and Antileaking plate, replace traditional being directly placed on Antileaking plate, thereby the position of well heater improves, the well heater that is now positioned at thermal field middle part approaches work area more, thereby reduces the forfeiture of heat; 4) between graphite heat-preservation cylinder and thermal field, be filled with soft felt, and this soft felt is filled to the bound fraction of upper cover and described thermal field, adopt the design of this comprehensive coated, substitute traditional upper semisection and the design of lower semisection, thereby avoid heat to lose from upper semisection and lower semisection joint portion.
Above the invention embodiment is had been described in detail, but described content is only for the preferred embodiment of the invention, can not be considered to the practical range for limiting the invention.All equalization variation and improvement etc. of doing according to the invention application range, within all belonging to the patent covering scope of the invention.
Claims (4)
1. a monocrystalline energy-saving heat field, comprise body of heater, described body of heater is provided with upper cover from top to bottom, cylindrical shell, lower cover, the equal bolt of bound fraction of the bound fraction of described upper cover and described cylindrical shell and described cylindrical shell and described lower cover, in described cylindrical shell, be provided with along cylinder inboard wall surrounding and be provided with thermal field, in described thermal field, be provided with Antileaking plate, described Antileaking plate top is provided with well heater, this heater base is provided with the reflector stretching in well heater, described well heater surrounding is equipped with graphite heat-preservation cylinder, it is characterized in that: between described Antileaking plate and described lower cover, be filled with soft felt.
2. a kind of monocrystalline energy-saving heat field as claimed in claim 1, is characterized in that: described Antileaking plate is positioned at the center of described thermal field, and leaves gap between Antileaking plate surrounding and described thermal field, is filled with soft felt in described gap.
3. a kind of monocrystalline energy-saving heat field as claimed in claim 1, is characterized in that: between described graphite heat-preservation cylinder and described thermal field, be filled with soft felt, and this soft felt is filled to the bound fraction of described upper cover and described thermal field.
4. a kind of monocrystalline energy-saving heat field as claimed in claim 1, is characterized in that: between described reflector and described Antileaking plate, be filled with the soft felt that makes described well heater be positioned at this thermal field middle part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420214058.1U CN203878236U (en) | 2014-04-29 | 2014-04-29 | Energy-saving thermal field of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420214058.1U CN203878236U (en) | 2014-04-29 | 2014-04-29 | Energy-saving thermal field of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203878236U true CN203878236U (en) | 2014-10-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420214058.1U Expired - Fee Related CN203878236U (en) | 2014-04-29 | 2014-04-29 | Energy-saving thermal field of single crystal furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN203878236U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021031145A1 (en) * | 2019-08-21 | 2021-02-25 | 眉山博雅新材料有限公司 | Growth method and equipment for scintillation crystal with shortened decay time |
| US11827826B2 (en) | 2019-08-21 | 2023-11-28 | Meishan Boya Advanced Materials Co., Ltd. | Methods and devices for growing scintillation crystals |
-
2014
- 2014-04-29 CN CN201420214058.1U patent/CN203878236U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021031145A1 (en) * | 2019-08-21 | 2021-02-25 | 眉山博雅新材料有限公司 | Growth method and equipment for scintillation crystal with shortened decay time |
| US10975300B2 (en) | 2019-08-21 | 2021-04-13 | Meishan Boya Advanced Materials Co., Ltd. | Methods and devices for growing scintillation crystals with short decay time |
| US11242485B2 (en) | 2019-08-21 | 2022-02-08 | Meishan Boya Advanced Materials Co., Ltd. | Methods and devices for growing scintillation crystals with short decay time |
| US11254868B2 (en) | 2019-08-21 | 2022-02-22 | Meishan Boya Advanced Materials Co., Ltd. | Methods and devices for growing scintillation crystals with short decay time |
| US11827826B2 (en) | 2019-08-21 | 2023-11-28 | Meishan Boya Advanced Materials Co., Ltd. | Methods and devices for growing scintillation crystals |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141015 Termination date: 20180429 |
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| CF01 | Termination of patent right due to non-payment of annual fee |