CN202260116U - End face pumping ceramic laser - Google Patents
End face pumping ceramic laser Download PDFInfo
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- CN202260116U CN202260116U CN2011203750035U CN201120375003U CN202260116U CN 202260116 U CN202260116 U CN 202260116U CN 2011203750035 U CN2011203750035 U CN 2011203750035U CN 201120375003 U CN201120375003 U CN 201120375003U CN 202260116 U CN202260116 U CN 202260116U
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Abstract
The utility model relates to the field of lasers, in particular to an end face pumping ceramic laser, which comprises a pumping unit, a focusing coupling system, a resonant cavity and a laser crystal placed in the resonant cavity. Pumping light emitted by the pumping unit is focused to the laser crystal through the focusing coupling system. The end face pumping ceramic laser is characterized in that the laser crystal is an Nd: YAG transparent ceramic crystal. The end face pumping ceramic laser is good in heated stability and high in conversion efficiency.
Description
Technical field
The utility model relates to field of lasers, is specially a kind of end pumping ceramic laser.
Background technology
Pumped at end face of semiconductor solid state laser technology reaches its maturity.Current, such laser can divide middle low power and high-power two types.Middle low power laser volume is little, the output of good beam quality, power is stable; Be convenient to frequency inverted; Through to additional nonlinear crystal in the chamber or outside the chamber; Like LBO, KTP, BBO, YLF etc., realize the continuous of multiple wave bands such as green glow, ultraviolet, deep ultraviolet and pulse laser output, and reached higher power.Carve aspects such as film has and uses very widely at the cutting of precise laser mark, Silicon Wafer, pcb board processing, the mark of various plastic products, solar energy, the marking effect that its high power density reaches, and the other types laser is irreplaceable especially.High power laser still is in conceptual phase, and industry is used few, and aspects such as small size, high light beam quality, high conversion efficiency are devoted in research at present, believe in the near future, aspect Metal Cutting, show up prominently.
Yet there is following shortcoming at present in the normally used monocrystalline crystal of end-face pump solid laser: the growth needs of (1), crystal is grown under high pure protective gas, needs precious metal ion to mix; Fabrication cycle is long; Manufacture difficulty is big, and production cost is high, is difficult to obtain to produce in enormous quantities.(2), crystal doping is difficult to reach higher concentration, and is general only between 0.2%-1%, and dopant ion skewness has limited the raising of conversion efficiency and power output.(3), possibly cause the component separation in the crystal by the melt growth crystal.(4), crystalline size is less, utilance is not high.More than some has limited the popularization and the use of end-face pump solid laser greatly.
End-face pump solid laser uses the higher monocrystalline crystal of absorption coefficient usually for improving conversion efficiency, and that commonly used is Nd:YAG monocrystalline crystal and Nd:YVO
4The monocrystalline crystal.Nd:YVO
4Monocrystalline crystal stimulated emission cross section and absorption coefficient are higher, on the conversion efficiency of middle low power laser, occupy very big advantage.It is relatively poor that but this crystallophy characteristic is compared Nd:YAG monocrystalline crystal: hardness is low, and thermal conductivity is low, and thermal coefficient of expansion is big, causes the heat radiation difficulty, makes laser crystal slight crack and bad point under higher pump power, very easily occur.And, because Nd:YVO
4Monocrystalline crystal absorption efficiency is high, and thermal lensing effect is obvious, influences resonant cavity inner light beam characteristic, causes laser to be difficult to obtain linear output, has limited it to more high-output power development.In addition, Nd:YVO
4Monocrystalline crystal upper level lifetime is lower, and the Q peak power is lower transferring.Nd:YAG monocrystalline crystal all obviously is superior to Nd:YVO on mechanical property and thermal characteristics
4The monocrystalline crystal, but absorption coefficient, stimulated emission cross section are all less.Because Nd:YVO
4The monocrystalline crystal is difficult to guarantee the uniformity of its inner dopant ion in growth course, in the end pumping process, the as easy as rolling off a log crystal that causes is heated inequality and cracked, and doping content is high more, and this phenomenon is just serious more, therefore, and common Nd:YVO
4The monocrystalline crystal is difficult in conversion efficiency, dimension volume and three aspects of high-dopant concentration and obtains simultaneously to improve.
Therefore, how to choose suitable material as laser crystal, satisfy many aspects such as absorption, mechanical property, thermal characteristics, the conversion efficiency and the output characteristic that improve laser are technical barriers that needs to be resolved hurrily; The thermal characteristics of laser crystal is the bottleneck of restriction end pumping mode to the high power development.
Summary of the invention
The technical problem underlying that the utility model will solve is, a kind of Heat stability is good, end-face pump solid laser that conversion efficiency is high of receiving is provided.
For solving the problems of the technologies described above; The utility model provides a kind of end pumping ceramic laser; Comprise pump unit, focus on coupled system, resonant cavity, be placed in the laser crystal in the resonant cavity; The pump light line focus coupled system that pump unit is sent focuses to laser crystal, and its difference is that said laser crystal is a Nd:YAG transparent ceramic crystal.
By above scheme, the specific targets of said Nd:YAG transparent ceramic crystal comprise: Nd
3+Doping content is 0.27--1at.%.
By above scheme, the specific targets of said Nd:YAG transparent ceramic crystal comprise: Nd
3+Doping content is 0.7--1at.%.
By above scheme, two end faces of said Nd:YAG transparent ceramic crystal all are coated with the 808nmAR film, AR film reflectivity R＜0.5%.
By above scheme, two end faces of said Nd:YAG transparent ceramic crystal also are coated with the 1064nmHT film, HT film reflectivity R＜0.2%.
By above scheme, the pore volume of said Nd:YAG transparent ceramic crystal is less than 1ppm, and void porosity is less than 150vol.ppm.
By above scheme, the void porosity of said Nd:YAG transparent ceramic crystal is less than 100vol.ppm.
By above scheme, resonant cavity comprises total reflective mirror, speculum, outgoing mirror, and the speculum with resonant optical path deflection is set between total reflective mirror, the outgoing mirror, and resonant optical path is V-shaped, and v-angle is the 15-50 degree, and wherein outgoing mirror is the plano-concave mirror that is arranged on the primary optical axis.
The contrast prior art, the beneficial features of the utility model is following:
Change the laser crystal into Nd:YAG transparent ceramic crystal by Nd:YAG monocrystalline crystal, it has following advantage:
(1) ceramic post sintering need not noble metal, need not under high pure protective gas, to carry out, and preparation time is short, and production cost is low.
(2) pottery is processed arbitrary shape, and large-sized pottery is the ceramic preparation inherent advantages.
(3) the pottery high particle concentration of can mixing is evenly distributed.
(4) ceramic sintering temperature is lower than the fusing point of crystal, and the ceramic composition of preparing departs from little.
(5) pottery can carry out sintering to multilayer material, can develop multifunctional ceramic.
(6) preferred, when the utility model end pumping ceramic laser used V-structure plano-concave resonant cavity, outgoing mirror was the plano-concave mirror; The equivalence resonant cavity is the linear pattern hemi-concentric resonator, and the plated film characteristic will be selected according to needed optical maser wavelength, and laser crystal is at equivalent line chamber center; Be symmetrical structure; This structure can effectively reduce thermal lensing effect, improves the stability of laser output, improves conversion efficiency.The plano-concave resonant cavity has certain modeling ability, can guarantee under high light beam quality, to obtain high power output.This structure space is sufficient in addition, can add multiple modulation or Laser Devices, can under multiple situation, use.
(7) optical characteristics of transparent laser ceramic is very big to laser output influence.The immanent cause that determines its optical characteristics is the scattering of internal porosity and crystal boundary lattice, so the crystal optics quality receives strict restriction such as porosity density, grain boundary structure size and material purity.The existence of pore makes ceramic inner refractive index skewness; Cause phenomenons such as scattering, reflection serious; Unit volume inner air vent number is many more, and scattering is strong more with decay, so the porosity is low as much as possible; According to experimental result, void porosity can obtain to be higher than the optical characteristics of the common crystal of Nd:YAG less than 150vol.ppm.Grain boundary structure is the lattice edge particularly, can cause scattering of light, therefore, its require clean, meagre, do not have a secondary phase deviation.Material purity requires in sintering process, can not have redundant impurities, and avoiding impurity is the scattering and the refraction at center.Utilize preparation methods such as vaccum sintering process and hydrogen atmosphere sintering to obtain the crystal of utmost point low-porosity and scattering loss at present; No matter in optical characteristics still on mechanical property; Nd:YAG transparent ceramic crystal has obtained identical with Nd:YAG even better characteristic, under high-power, has obtained the high power output more than the 67kW, has also obtained quite high conversion efficiency at the middle low power end-face pump solid laser; It is thus clear that the ceramic laser crystal has good development prospect.
Following table is the comparison on Nd:YAG transparent ceramic crystal and the typical monocrystalline crystal property:
Table 1 ceramic crystal and typical monocrystalline crystal property are relatively
In the table 1, doping content can not influence the physical characteristic of crystal, only can influence the absorption coefficient of crystal to pump light, relatively can know that Nd:YAG transparent ceramic crystal possesses Nd:YAG thermal conductivity, mechanical hardness and intensity by this table, and especially thermal conductivity is Nd:YVO
42 times of crystal; Mechanical hardness exceeds 3 magnitudes; Unlisted absorption coefficient in the table, Nd:YAG is than Nd:YVO usually
4Low, this can remedy through high-dopant concentration and large scale; The spontaneous radiation life-span is Nd:YVO
4More than 2 times, be convenient to obtain the more accent Q output of high-peak power.In sum, Nd:YAG transparent ceramic crystal is suitable for generation of Laser very much.
Description of drawings
Fig. 1 is the utility model embodiment end pump ceramic laser structural representation;
Fig. 2 is the utility model embodiment end pump pottery green (light) laser structural representation;
Fig. 3 is the utility model embodiment end pump ceramic laser continuous power output curve chart.
Embodiment
Combine accompanying drawing that the utility model is done further explain through embodiment below.
The end pumping ceramic laser that the utility model is related, its technical scheme combine Fig. 1, Fig. 2 to explain as follows:
Execution mode 1:
Fig. 1 is the structural representation of end pumping ceramic laser; The end pumping ceramic laser; Comprise pump unit, focus on coupled system, laser crystal 8, resonant cavity, the pump light line focus coupled system that pump unit is sent focuses to laser crystal 8, and said resonant cavity comprises total reflective mirror 11, speculum 7, outgoing mirror 10; Speculum 7 with resonant optical path deflection is set between total reflective mirror 11, the outgoing mirror 10; Resonant optical path is V-shaped, and v-angle α is 18 degree, 10 pairs of 1064nm laser transmittances of outgoing mirror T=25%.
Concrete, laser crystal uses Nd:YAG transparent ceramic crystal, Nd
3+Doping content is 0.27--1at.%, size 4 * 4 * 10mm, and two end faces all plate the 808nmAR film, AR film reflectivity R＜0.5%, and 1064nmHT film, HT film reflectivity R＜0.2%, the pore volume is less than 1ppm, and void porosity is less than 150vol.ppm.Preferably, void porosity is less than 100vol.ppm, and the specific targets of Nd:YAG transparent ceramic crystal comprise: Nd
3+Doping content is 0.7--1at.%, and power, the conversion efficiency of the utility model ability can further improve.
Concrete, pump unit is made up of fiber coupled laser diode 1 and optical fiber 2.Semiconductor laser is a 808nm laser 22 ℃ of output wavelengths, the maximum 32W laser of output under input current 38A situation.Semiconductor laser is connected with optical fiber 2, optical fiber 2 core diameter 0.4mm, and numerical aperture 0.22, output is a circular light spot, the angle of divergence is about 24 °.Optical fiber 2 length are 3m, and power loss is less than 0.1%.
Concrete, focus on coupled system 3 and constitute by first planoconvex lens 4, second planoconvex lens 5, the 3rd planoconvex lens 6, prismatic glasses is identical, and focal length is 30mm, center thickness 3mm, two-sided plating 808nmAR film, AR film reflectivity R＜0.2%.First planoconvex lens 4, second planoconvex lens, 5 convex surfaces relatively and be close to, equivalent focal length is 15mm.Optical fiber 2 outputs are positioned at the front focus place, and distance first planoconvex lens 4 planes are about 12mm, and pump light is through first planoconvex lens 4,5 one-tenth directional lights of second planoconvex lens.The distance of first planoconvex lens 4, second planoconvex lens 5 and the 3rd planoconvex lens 6 is adjustable, and distance is about 28mm between second planoconvex lens 5 and the 3rd planoconvex lens 6 planes, and the 3rd planoconvex lens 6 convex surfaces focus on directional light outwardly.Focus point is arranged in the laser crystal 8 about the 3rd planoconvex lens 6 right-hand 36mm-38mm.
Concrete, resonant cavity is made up of total reflective mirror 11, outgoing mirror 10, speculum 7.Resonant cavity is the V-type flat-concave cavity, and laser is by outgoing mirror 10 outputs, and distance is 155mm between outgoing mirror 10 and the speculum 7, and the distance between total reflective mirror 11 and the speculum 7 is 130mm.Total chamber is long to be 285mm.Total reflective mirror 11 one sides are plated 1064nmAR film, AR film reflectivity R＞99.8%; Outgoing mirror 10 is the plano-concave mirror, plane plating 1064nmAR film, AR film reflectivity R＜0.2%, concave curvature radius R=400mm and to plate 1064nm transmissivity T be 25% film; Speculum 7 one sides are plated the 808nmAR film, AR film reflectivity R＜0.2%, and another side plating incidence angle is 10 ° a 1064nmHR film, HR film reflectivity R＞99.8% and 808nmHT film, HT film reflectivity R＜2%.Crystal 8 is on primary optical axis, and the distance between its center and the speculum 7 has 22mm.
Semiconductor laser 1 is by the refrigeration of two 96W power semiconductor cooling pieces, and crystal 8 is by the refrigeration of a slice 68W power semiconductor cooling piece.Semiconductor laser 1, crystal 8 are all accurately controlled temperature, and domain of walker is at ± 0.1 ℃, and semiconductor laser 1 control temperature is at 22 ℃, and crystal 8 control temperature are at 22 ℃.Laser base board connects fin, by wind-cooling heat dissipating.The laser overall operation is under 10～30 ℃ of ambient temperatures, and humidity is below 85%.
This laser can obtain maximum continuous power output 15W, and is as shown in Figure 3, beam quality M
2The internal power instability was in 1% in≤1.2, four hours.
Execution mode 2:
As shown in Figure 1, placing acousto-optic Q modulation crystal 9 near outgoing mirror 10 positions, between the 100kHz, in addition, adjusting Q crystal 9 also has other positions optional to modulating frequency, can be placed between speculum 7 and the total reflective mirror 11 at 1kHz.
This structure can reach pulse duration 6～35ns, and peak power is up to 152kW, and the single pulse energy maximum reaches 1.52mJ.
Execution mode 3:
As shown in Figure 2,12 is the green glow dichronic mirror, and 13 is frequency-doubling crystal; Use the structure in the execution mode 1 to obtain the green laser output of frequency multiplication.Outgoing mirror 10 is replaced with the green glow outgoing mirror, be similarly the plano-concave mirror, the concave surface in the chamber plates 1064nmHR film, HR film reflectivity R＞99.8%, 532nmHT film, HT film reflectivity R＜0.2%; Another side plating 532nmHT film, HT film reflectivity R＜0.2%.Additional frequency-doubling crystal can use all kinds of frequency-doubling crystals such as LBO, KTP, BBO before the outgoing mirror 10, and this execution mode uses the anti-grey mark crystal of II class GTR-KTP as frequency-doubling crystal; For saving the space, Q-switching device 9 is positioned between speculum 7 and the total reflective mirror 11, if the space is enough, Q-switching device 9 should be placed on the primary optical axis as much as possible; Additional green glow spectroscope 12 between Q-switching device 9 and frequency-doubling crystal, two-sided plating 1064nmAR film, AR film reflectivity R＜0.2% is towards the one side plating 532nmHR film of frequency-doubling crystal, HR film reflectivity R＞99.8%.
This structure output 532nm green laser under modulating frequency 2kHz～30kHz, obtains pulse duration 5ns～30ns, and the maximum 5W of power output, 8h power stability are in 2%, and be identical in beam quality and the execution mode 1.In addition, on this structure, can also further optimize, obtain the laser output of higher frequency it.
The utility model uses novel Nd:YAG transparent ceramic crystal as laser crystal, can obtain thermal conduction characteristic preferably, reduces thermal effect; Particularly reduce the influence of thermal lensing effect; Thermal stability is all very outstanding with imbalance stability, can also obtain higher-wattage output and beam quality, higher power stability; Long useful life; Shorten the system building time, can be under most of conventional environments operate as normal, be widely used in industrial Precision Machining, scientific research, health care, military affairs, daily life, laser technology research and development.
Above content is the further explain that combines concrete execution mode that the utility model is done, and can not assert that the practical implementation of the utility model is confined to these explanations.For the those of ordinary skill of technical field under the utility model, under the prerequisite that does not break away from the utility model design, can also make some simple deduction or replace, all should be regarded as belonging to the protection range of the utility model.
Claims (8)
1. end pumping ceramic laser; Comprise pump unit, focus on coupled system, resonant cavity and be placed in the laser crystal in the resonant cavity; The pump light line focus coupled system that pump unit is sent focuses to laser crystal; It is characterized in that said laser crystal is a Nd:YAG transparent ceramic crystal.
2. end pumping ceramic laser as claimed in claim 1 is characterized in that, the specific targets of said Nd:YAG transparent ceramic crystal comprise: Nd
3+Doping content is 0.27--1at.%.
3. end pumping ceramic laser as claimed in claim 1 is characterized in that, the specific targets of said Nd:YAG transparent ceramic crystal comprise: Nd
3+Doping content is 0.7--1at.%.
4. end pumping ceramic laser as claimed in claim 1 is characterized in that, two end faces of said Nd:YAG transparent ceramic crystal all are coated with the 808nmAR film, AR film reflectivity R＜0.5%.
5. end pumping ceramic laser as claimed in claim 4 is characterized in that, two end faces of said Nd:YAG transparent ceramic crystal also are coated with the 1064nmHT film, HT film reflectivity R＜0.2%.
6. like claim 1 or 2 or 3 or 4 or 5 described end pumping ceramic lasers, it is characterized in that the pore volume of said Nd:YAG transparent ceramic crystal is less than 1ppm, void porosity is less than 150vol.ppm.
7. end pumping ceramic laser as claimed in claim 6 is characterized in that, the void porosity of said Nd:YAG transparent ceramic crystal is less than 100vol.ppm.
8. end pumping ceramic laser as claimed in claim 1; It is characterized in that; Said resonant cavity comprises total reflective mirror, speculum, outgoing mirror, and the speculum with resonant optical path deflection is set between total reflective mirror, the outgoing mirror, and resonant optical path is V-shaped; V-angle is the 15-50 degree, and wherein outgoing mirror is the plano-concave mirror that is arranged on the primary optical axis.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203750035U CN202260116U (en) | 2011-09-30 | 2011-09-30 | End face pumping ceramic laser |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011203750035U CN202260116U (en) | 2011-09-30 | 2011-09-30 | End face pumping ceramic laser |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104283092A (en) * | 2014-10-13 | 2015-01-14 | 南京海锐特激光设备有限公司 | Nd: Yag ceramic crystal laser |
| CN116722429A (en) * | 2023-08-10 | 2023-09-08 | 北京卓镭激光技术有限公司 | High-beam-quality long-pulse-width green laser |
-
2011
- 2011-09-30 CN CN2011203750035U patent/CN202260116U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104283092A (en) * | 2014-10-13 | 2015-01-14 | 南京海锐特激光设备有限公司 | Nd: Yag ceramic crystal laser |
| CN116722429A (en) * | 2023-08-10 | 2023-09-08 | 北京卓镭激光技术有限公司 | High-beam-quality long-pulse-width green laser |
| CN116722429B (en) * | 2023-08-10 | 2023-10-13 | 北京卓镭激光技术有限公司 | High-beam-quality long-pulse-width green laser |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: End face pumping ceramic laser Effective date of registration: 20131219 Granted publication date: 20120530 Pledgee: Wuhan rural commercial bank Limited by Share Ltd Optics Valley branch Pledgor: Sintec Optronics Pte Ltd Registration number: 2013990001001 |
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| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20141127 Granted publication date: 20120530 Pledgee: Wuhan rural commercial bank Limited by Share Ltd Optics Valley branch Pledgor: Sintec Optronics Pte Ltd Registration number: 2013990001001 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: End face pumping ceramic laser Effective date of registration: 20141231 Granted publication date: 20120530 Pledgee: Wuhan rural commercial bank Limited by Share Ltd Optics Valley branch Pledgor: Sintec Optronics Pte Ltd Registration number: 2014990001163 |
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| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
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Date of cancellation: 20151223 Granted publication date: 20120530 Pledgee: Wuhan rural commercial bank Limited by Share Ltd Optics Valley branch Pledgor: Sintec Optronics Pte Ltd Registration number: 2014990001163 |
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| CF01 | Termination of patent right due to non-payment of annual fee |
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| CF01 | Termination of patent right due to non-payment of annual fee |